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JPS5647200

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DESCRIPTION JPS5647200
Description 1, title of the invention
Resonant frequency adjustment method of piezoelectric vibrator
3 、 Detailed Description of the Invention The present invention uses a laser beam on a
rectangular plate piezoelectric vibrator to make grooves or holes in the center of the side of the
rectangular short side of the vibrator to lower the natural resonance frequency, or rectangular
long side The present invention relates to a method of finely adjusting the resonance frequency
of a piezoelectric vibrator in which the natural resonance frequency is increased by processing
grooves or holes in the end face. In a piezoelectric vibrator used for a ceramic filter or the like, an
electrode is formed on the opposing main surface of a piezoelectric ceramic element, and
polarized in a direction perpendicular to the electrode surface. The resonant frequency of this
piezoelectric vibrator is determined by the constant of the ceramic material and the processing
dimensions of the piezoelectric vibrator. Also, a piezoelectric vibrator vibrating at a resonant
frequency mainly acts as stiffness near the node of vibration, displacement of vibration is zero, it
mainly acts as mass near the antinode of vibration, and vibration displacement is growing.
Therefore, a hole or a groove is made near the vibration node of the vibrator to lower the
resonance frequency, and the resonance frequency is increased by removing a part of the mass
near the antinode of the vibration of the vibrator. There is. As shown in FIG. 1, in the vibrator 1 in
which the electrodes 6 are provided on two opposing main surfaces, the central portion in the
longitudinal direction is the node of vibration and the opposite end portions are antinodes.
Therefore, as shown in FIG. 1 (a), the resonance frequency is lowered by making the groove 2
near the center of EndPage: 1, and by making the groove 2 near the end as shown in FIG. 1 (b).
Can be adjusted high. In order to adjust the resonance frequency based on the reasons for the
past, polishing or grooving has been performed using a grindstone or a diamond cutting wheel or
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the like. For example, the accuracy of the resonance frequency required for a ceramic filter with
a frequency of 455 KHz used for a general radio intermediate frequency amplifier is about ±
150 Hz, and in the case of increasing the resonance frequency by longitudinal polishing, the
length of the vibrator The required processing accuracy for about 4 is ± 0.0 DI 5 m + n. In order
to satisfy this requirement, the processing accuracy for adjusting the level of the resonance
frequency is severe, the fine adjustment is difficult, and there is a drawback in that the
adjustment yield is poor. また。 The use of a pure machine is not easy to fix and support when
machining the vibrator, and has a drawback of poor workability. The present invention is to
adjust the resonance frequency by forming grooves or holes in one of the central side faces or
one of the end faces of the vibrator using a laser beam processing machine except for the abovementioned drawbacks. According to the method of the present invention, 50 of the 2 types of
oscillators are adjusted to the average value and standard deviation of the frequency about which
the frequency shift was adjusted by about 600 Hz, and the average value and standard deviation
of the frequency when adjusted by the conventional method It shows in the table.
In the Nn1 sample according to the method of the present invention, a groove of about 0.05 mm
in width and about 0.05 wn in width is formed on one side central portion of the vibrator, and in
the Na2 sample, the width is 0.1 mm + deep The grooved blade is about 0.05 m + n. As apparent
from this table, it can be seen that the method of the present invention 5 significantly improves
the standard deviation associated with the adjustment of the resonance frequency as compared
with the conventional method. In the present invention, setting the adjustment amount of the
resonance frequency is easy if the relationship between the laser power, the number of
processing grooves, and the change amount of the resonance frequency is obtained in advance
during laser processing. Also, the adjustment amount of the resonator's resonant frequency
changes depending on the position where the groove processing is performed even if the laser
power is constant and the same processing amount, so the resonance frequency can be adjusted
simply by changing the processing position with the laser power constant. . As described above,
according to the present invention, even if only one of the side surface and one of the end
surfaces of the resonator is processed using a laser beam processing machine, a resonator having
high resonance frequency accuracy can be obtained. Since no external force is applied, it is easy
to support and fix the vibrator, and it is possible to obtain a vibrator with high operability and
high accuracy. Following margin = 4-
4. Brief description of the drawings. FIG. 1 (a) is a perspective view of a rectangular plate
piezoelectric vibrator provided with one groove on the side in the longitudinal direction, and FIG.
1 (b) shows one groove on the short side. The perspective view of the provided rectangular plate
piezoelectric vibrator. In the figure. 1: Vibrator 2: Groove 3: Electrode EndPage: 2
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