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DESCRIPTION JPS61212999

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DESCRIPTION JPS61212999
[0001]
The present invention relates to an ultrasonic probe in which a plurality of piezoelectric vibrators
are arranged in a curved surface, and is used, for example, as an ultrasonic wave transceiver in
an electronic scanning diagnostic apparatus such as a medical device. ing. (Background of the
Invention) Generally, in an electronic scanning ultrasonic probe, a single sided type of scanning is
performed by simultaneously applying and scanning drive pulses with different delay amounts to
piezoelectric vibrators arranged in a plurality of rows. There is a linear type in which a drive
pulse is sequentially applied to each piezoelectric piece to scan. Further, for example, in the onesector type, since the transmission / reception direction of the ultrasonic wave can be scanned in
a fan-like manner, it is supposed that the number of elements of the piezoelectric vibrator can be
reduced and a wide range of exploration can be performed. FIG. 2 is a cross-sectional view of this
type of arrayed probe for electronic scanning. That is, this arrayed probe is a backing material for
absorbing unnecessary ultrasonic waves by forming the electrodes 2 on a plurality of
piezoelectric pieces indicated by reference numeral 1 in the figure, for example, lead zirconate
titanate commonly known as PZT. It is fixed to 3 and the acoustic matching layer 4 is applied to
the ultrasonic wave transmitting and receiving side of each piezoelectric piece 1. Then, for
example, a filler 5 is provided between the piezoelectric pieces 1, and the piezoelectric vibrators
6 of a saw are regarded as independent piezoelectric vibrators 6 as a block by driving a plurality
of the piezoelectric pieces 1 as a block, and the resolution etc. The quality of is to get good
information. (Prior art of the invention) By the way, recently, in this type of arrayed probe, as
shown in the front sectional view of FIG. 3A, a flat backing material in which a plurality of
piezoelectric pieces 7 are arrayed 8 (a), for example, fixed to a holding table 9 having a convex
surface, or b), forming an acoustic matching layer 10 continuous to the transmission / reception
wavefront of each piezoelectric piece 7 arranged on a curved surface; There is a method in which
a region in the transmission / reception wavefront direction of ultrasonic waves is expanded to
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enable a wide area search (Reference: Japanese Patent Application Laid-Open No. 59-229999,
"Method of manufacturing ultrasonic probe"). However, in this arrayed probe, since the acoustic
matching layer 10 is continuously formed on the ultrasonic wave transmitting / receiving side of
the plurality of piezoelectric pieces 7 arranged on the curved surface, There is a defect that
adjacent piezoelectric pieces 7 interfere with each other at the time of transmission and
reception of sound waves to damage the sound field characteristics. Also, in general, when the
ultrasonic wave propagates between the detection target and the piezoelectric piece, the acoustic
matching layer prevents the propagation loss of the acoustic energy of the ultrasonic wave, and
in order to efficiently transmit and receive, each piezoelectric piece-L It is said that it is necessary
to apply with a thickness which ensures λ / 4. However, according to the above example, since
the acoustic matching layer 10 is applied after the piezoelectric pieces 7 are arranged on the
curved surface, the transmission / reception wavefronts of the respective piezoelectric pieces 7
arranged on the curved surface are uniformly thicknessed and λ It will be extremely difficult to
form on / 4.
For this reason, for example, when the thicknesses of the acoustic matching layers 10 of the
respective piezoelectric pieces are different, the propagation path lengths of the ultrasonic waves
are also made different, which may make it impossible to obtain good sound field characteristics.
(Object of the Invention) The present invention extends the ultrasonic wave transmission /
reception region to enable a wide range of exploration, and prevents mutual interference of the
piezoelectric vibrators by the acoustic matching layer, and makes the ultrasonic wave
propagation path length of the acoustic matching layer constant. It is an object of the present
invention to provide an array type ultrasonic probe excellent in sound field characteristics and a
method of manufacturing the same. (Features of the Invention) According to the first feature of
the present invention, a plurality of piezoelectric vibrators are arranged on a curved surface −,
an acoustic matching layer is provided independently for each of the piezoelectric vibrators, and
an ultrasonic wave transmitting / receiving surface is a parallel plane. The second feature of the
present invention is that the surface of the backing material is parallel to the reference surface,
and after applying an independent acoustic matching layer to the piezoelectric vibrator adhered
to the surface, the backing material is It is in the manufacturing method fixed on the curved
surface of a holding stand. (First Embodiment of the Invention) An embodiment of the present
invention will be described below with reference to the drawings. 1a is a front sectional view of
the ultrasonic probe according to the present invention, and FIG. 1a is a plan view of plane AA 'of
FIG. 1a, and FIG. 1c is a side sectional view of BB' of FIG. FIG. In the figure, reference numeral 11
denotes a piezoelectric vibrator L1. This piezoelectric vibrator 11 is a backing material, for
example, with four piezoelectric pieces 13a, 13b, 13c, 1.3d having electrodes 12 formed on both
main surfaces. Four blocks are arranged on the outer peripheral surface of the fourteen. The
banking material 14 is made of, for example, a flat elastic flexible material mixed with vinyl
chloride Q ferrite powder, for example, as described in the manufacturing method described
later, the surface of the flexible material is an arc. It adheres to the holding stand 15 which
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protruded "-", and is formed in curved shape. And this grooved material 16 is provided with
predetermined intervals on the outer peripheral surface side at predetermined intervals, and the
gaps between the grooved grooves 16 are formed in a straight line (hereinafter, this part is
referred to as a straight part 17). )されている。 Each of the piezoelectric vibrators 11 is
arranged at each linear portion of the backing material 14. In the figure, reference numeral 18
denotes a grounding lead wire connected in common on both sides of the surface side electrode
12 to obtain symmetrical sound field characteristics, and 19 denotes the back side electrode 12
from both sides of each piezoelectric vibrating body 11 It is a metal foil derived | led-out
alternately. The ultrasonic wave transmitting and receiving surface of each piezoelectric vibrating
member 11 has a surface and a second layer 20b except for both side portions where the first
layer 20a is filled between the piezoelectric pieces 13 and the grounding lead wire 18 is
attached. A three-layer acoustic matching layer 20 is applied to the entire surface of the first
layer.
The filling material 21 having an acoustic impedance value different from that of the acoustic
matching layer 20 is provided between the piezoelectric vibrator 1 and the cut groove 16.
Therefore, in the ultrasonic probe of this configuration, since the ultrasonic wave transmitting
and receiving wavefronts are arranged approximately in a curved surface, the transmitting and
receiving direction of the ultrasonic wave can be expanded. Also, since the acoustic matching
layer 20 is independently applied to each block vibrator and the filling material 21 having
different impedance is applied therebetween, mutual interference through the acoustic matching
layer can be prevented. Further, since the acoustic matching layer 20 is formed in a plane
parallel to the ultrasonic wave transmission / reception wavefront of each piezoelectric vibrator
11, the thickness thereof is uniform, and the ultrasonic path length can be made constant.
Accordingly, this ultrasonic probe can improve the sound field characteristics in addition to the
spread of the transmission / reception direction of the ultrasonic wave. Further, in this
embodiment, the acoustic matching layer 20a of the first layer is embedded between the
piezoelectric pieces 1.3a, 13b, 13c and 13d which form the piezoelectric vibrator 11, and the
ultrasonic transmission and reception of each piezoelectric piece 3] Since the acoustic matching
layer 20 is continuously formed on the wave front side, the vibration in the thickness direction is
easily coupled between the piezoelectric pieces 13a, 1.3b, 13c, 13d, and the piezoelectric
vibrators 1] The direction of the transmission and reception sensitivity of ultrasonic waves can be
expected. (Embodiment of the Invention) The manufacturing method of the present invention will
be described below with reference to steps a to j of FIG. In the description of this embodiment,
the same parts as the parts described above (this will be described by assigning the same
reference numerals). First, the processing table 22 (the banking material 14 is attached (Fig. 4g))
with the bottom surface as the reference surface, the surface of the backing material 14 is
maintained parallel to the reference surface by, for example, polishing or the like. A rectangular
piezoelectric plate 23 made of, for example, PZT having electrodes 12 on both raw surfaces and a
metal foil 19 drawn from both sides in the longitudinal direction on the back surface of the
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backing moon 14). Wear (part of the figure C). The parallelism of the surface of the backing
material 14 with respect to the reference surface is measured, for example, by measuring each
distance from the reference surface. Next, the piezoelectric plate 23 is provided with a first
groove 24 in the width direction to reach the backing material 14 and divided into a plurality of
piezoelectric pieces 13 (partially positive cross section in FIG. 4 d). Next, mask both sides of the
surface of each piezoelectric piece 13 with, for example, an adhesive tape 25 (plan view of FIG. 4
e), apply an epoxy resin, for example, to the surface of each piezoelectric piece and between each
piezoelectric piece. The first acoustic matching layer 20a is formed by polishing to λ / 4 of the
acoustic wavelength, and the adhesive tape 25 is removed (a side cross sectional view of the
same figure f).
Next, a second acoustic matching layer 20b is similarly formed on the first acoustic matching
layer 20a11 by newly masking both sides of each piezoelectric piece 13 (cross-sectional view of
FIG. 4g). Next, a plurality of piezoelectric pieces 13 a, “1.3 b + 13 c, 1.3 d are used as a block,
and the backing material 14 is reached from the surface of the second acoustic matching layer
20 b for each block, and metal foil 19 The second groove 26 deeper than the first groove 24 for
cutting is also provided and divided into blocks to obtain each piezoelectric vibrator 11 (a
partially positive sectional view of a fourth plan). Next, the backing material 14 to which the
acoustic matching layer 20 and the respective piezoelectric pieces 13 are integrally fixed is
removed from the processing table 22, and the bottom surface of the backing material 14 is fixed
on the curved surface of the holding table 15. The transmission / reception wavefront formed by
the piezoelectric vibrating body 11 is substantially curved (FIG. 4). At this time, due to the
elasticity of the banking material 14, the outer peripheral surface of the banking material 14 on
which the piezoelectric vibrators 11 are attached becomes straight in the tangential direction
against the curved surfaces O before bending. Then, as described with reference to FIG. 1Q, (the
lead wire 14 for grounding is connected to both sides of the surface of each piezoelectric piece
13 / Q), the surface electrodes of each piezoelectric piece 11 are connected in common, and 1
each piezoelectric vibrator A filling crucible 21 made of, for example, epoxy resin having an
acoustic impedance value different from that of the acoustic matching layer 16 is completely
applied to the space between 11 and the second groove 23 and the surface both sides of each
piezoelectric piece 13. Therefore, according to this manufacturing method, the surface of the
backing material 14 is parallel to the 22 reference surface of the processing table, and the
piezoelectric pieces 111: J and the acoustic matching layer 20 are formed. The thickness 20b can
be reliably set to λ / 4. Then, after the second groove 26 for reaching the banking material 14 is
provided and cut between the piezoelectric vibrators 11 filled with the acoustic matching layer
20 and the acoustic matching layer 20 is made independent for each piezoelectric vibrator. Since
the backing material 14 is fixed on the curved surface of the holder 15, the thickness can be
made uniform and maintained at λ / 4 without loss of parallelism of the acoustic matching layer
20. Therefore, according to this manufacturing method, the propagation distance of the
ultrasonic waves in the acoustic matching layer 20 can be made constant to prevent mutual
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interference of the respective piezoelectric vibrators by the acoustic matching layer and provide
an ultrasonic probe capable of a wide range of exploration. . Further, according to this
embodiment, since the external force at the time of bending of the backing material 14 is
concentrated and absorbed in the kerf 26 by the elasticity of the backing material 14, the
piezoelectric vibrating body 11 is made of the flat backing material 14. It is easy to adhere on the
curved surface of the holding table 15, and the linearity of the surface of the backing material 14
is not lost.
Accordingly, the ultrasonic wave transmitting and receiving direction of each piezoelectric
vibrating member H does not scatter due to the external force at the time of bending, and
becomes perpendicular to the tangent of each curved surface, so that directivity holding property
as specified can be obtained. (Other matters) In the detailed description of the present invention,
although the piezoelectric vibrating body is described as four piezoelectric pieces as one block,
the present invention is not limited to this. For example, one piezoelectric piece is piezoelectric.
Needless to say, it may be a vibrator. Further, in this manufacturing method, the groove 26 is
provided between the piezoelectric vibrators on the surface side of the backing material 14 and
the holding table 22G is curved. For example, the groove 26 is shown in FIG. As shown in the
figure, they are provided on both sides of the raw material of the backing material 14 on both
sides between the piezoelectric vibrators 11 or as shown in FIG. 5 (provided at a plurality of
locations on the bottom side of the backing material 14 as shown) The external force during
bending is appropriately dispersed and absorbed in consideration of the balance with the
material of the backing material 14 such as elasticity, and the linearity of the surface of the
backing month 14 to which the piezoelectric vibrator 11 is attached is You may not lose it.
According to the second aspect of the present invention, the present invention can expand the
transmission and reception region of ultrasonic waves to search a wide range, prevent mutual
interference of block vibrators by the acoustic matching layer, and provide an array with
excellent sound field characteristics. And a method of manufacturing the same.
[0002]
Brief description of the drawings
[0003]
FIG. 1 is a view of an ultrasonic probe according to the present invention, wherein FIG. 1A is a
front sectional view, FIG. 1A is an AA 'flat sectional view, and FIG. C1 is a BB' of FIG. FIG.
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FIG. 2 is a front sectional view for explaining the general configuration of the arrayed probe, and
FIG. 3 is a sectional view showing a conventional ultrasonic probe and its outline steps. Fig. 4
aXbX Cze x fXgz h, j is each process drawing explaining the method of manufacturing the
ultrasonic probe of the present invention, Fig. 5a, other than the backing material used in the
present invention 12) Is a cross-sectional view of an example of 11: piezoelectric vibrator, 13:
piezoelectric piece, 14: backing material 15: holding base, 16: cut groove. Fig. 4 (h) Fig. 5 (0) Fig.
5 (b)
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