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DESCRIPTION JP2002238094

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DESCRIPTION JP2002238094
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a
piezoelectric acoustic component such as a piezoelectric buzzer or a piezoelectric receiver and a
method of manufacturing the same.
[0002]
2. Description of the Related Art Heretofore, in electronic devices, home appliances, portable
telephones, etc., piezoelectric acoustic components are widely used as piezoelectric buzzers or
piezoelectric receivers for generating alarm sounds and operation sounds. In this type of
piezoelectric acoustic component, a circular piezoelectric plate is attached to one side of a
circular metal plate to form a unimorph diaphragm, and the peripheral portion of the metal plate
is supported using silicone rubber in a circular case. In addition, the case where the opening of
the case is closed by a cover (not shown) is generally used. However, when a circular diaphragm
is used, there is a problem that the production efficiency is low, the acoustic conversion
efficiency is low, and it is difficult to be compact.
[0003]
Therefore, there has been proposed a piezoelectric acoustic component capable of improving
production efficiency, improving acoustic conversion efficiency, and downsizing by using a
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rectangular diaphragm (Japanese Patent Laid-Open No. 2000-310990). FIG. 13 shows an
example of a conventional piezoelectric acoustic component, which has a diaphragm 60 in which
a square piezoelectric plate 62 is attached to one side of a square metal plate 61, a bottom wall
71 and four side walls 72. An insulating case 70 having supporting portions 73 and 74 on the
inside of two opposing side walls 72 and a cover plate 80 for closing the opening of the case 70
are provided. The diaphragm 60 is housed in the case 70 with the metal plate 61 facing the
bottom wall 71 of the case 70, and the two opposing sides of the diaphragm 60 and the
supporting portions 73 and 74 are adhesively or elastically sealed. It is fixed by the material 90,
and the gap between the remaining two sides of the diaphragm 60 and the case 70 is sealed by
an elastic sealing material (not shown).
[0004]
In the piezoelectric acoustic component, the piezoelectric plate 62 having electrodes on the front
and back surfaces on at least one side of the metal plate 61 constituting the diaphragm 60 is one
side of two sides fixed to the support portion of the case 70 (FIG. 13 Then, the metal plate 61 is
adhered to the right side, and a part 61a of the metal plate 61 is exposed on the other side of the
surface of the metal plate 61 to which the piezoelectric plate 62 is adhered. The support portions
73 and 74 of the case 70 are formed with first and second conductive portions 75 and 76 drawn
to the outside from the upper surface thereof. The exposed portion 61 a of the metal plate 61
and the first conductive portion 75 are formed. Are connected by the conductive adhesive 91,
and the other surface electrode of the piezoelectric plate 62 and the second conductive portion
76 are connected by the conductive adhesive 92 to constitute a piezoelectric acoustic
component.
[0005]
However, since the other surface electrode of the piezoelectric plate 62 connected to the second
conductive portion 76 is in close proximity to the metal plate 61, the connection is made with the
conductive adhesive 92. There is a problem of being easily short-circuited with the metal plate
61. Therefore, in the piezoelectric acoustic component described above, the metal plate 61 of the
diaphragm 60 is fixed to the bottom wall 71 side of the case 70, and the metal plate 61 is
insulated from the conductive adhesive 92. The second conductive portion 76 and the other
surface electrode of the piezoelectric plate 62 are connected by covering the conductive adhesive
92 with an insulating adhesive or sealing material 90 and applying a conductive adhesive 92 so
as to straddle the upper surface. There is.
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2
[0006]
However, in the connection method as described above, the conductive adhesive 92 needs to
electrically connect the second conductive portion 76 and the other surface electrode of the
piezoelectric plate 62 across the insulating adhesive or sealing material 90. Therefore, there is a
problem that it becomes an indirect connection and leaves unreliability on junction reliability. In
particular, when the conductive adhesive 92 is applied on the sealing material 90 such as silicone
rubber, the bonding strength between the sealing material 90 and the conductive adhesive 92 is
low, so the reliability is low.
[0007]
Therefore, an object of the present invention is to provide a piezoelectric acoustic component
capable of enhancing the bonding reliability by directly connecting the conductive portion of the
case and the diaphragm without the conductive adhesive straddling the insulating material. .
Another object is to provide a method of manufacturing a piezoelectric acoustic component in
which the conductive portion of the case and the diaphragm can be connected simply and
reliably.
[0008]
The above object is achieved by the invention described in claim 1 or 5. The invention according
to claim 1 has a bottom wall portion and four side wall portions, and has a support portion on
the inside of two opposing side wall portions, and the first, the fourth, and the like drawn out
from the upper surface of the support portion. An insulating case having two conductive
portions, and a rectangular diaphragm which is accommodated in the case, the opposing two
sides are fixed to the supporting portion, and the gap between the other two sides and the case is
sealed. And the cover plate for closing the opening of the case, wherein the diaphragm is biased
to one side of the two sides of the metal plate on which the single-sided electrode of the
piezoelectric plate is fixed to the support of the case. And an exposed portion to which a part of
the metal plate is exposed is provided on the other side of the surface of the metal plate to which
the piezoelectric plate is adhered. The exposed portion and the first conductive portion are the
first conductive portion. Pressure connected between the other electrode of the piezoelectric
plate and the second conductive portion by the second conductive adhesive. In the acoustic
component, the diaphragm is housed in the case so that the piezoelectric plate faces the bottom
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wall portion of the case, and the exposed portion of the metal plate and the first conductive
portion are the first conductive adhesive According to another aspect of the present invention,
there is provided a piezoelectric acoustic component in which the other surface electrode of the
piezoelectric plate and the second conductive portion are connected facing each other by the
second conductive adhesive.
[0009]
The invention according to claim 5 has a bottom wall portion and four side wall portions, and a
support portion is provided inside of two opposing side wall portions, and the first portion is
drawn to the outside from the upper surface of the support portion. And a step of preparing an
insulating case having a second conductive portion, and the single-sided electrode of the
piezoelectric plate is bonded to one side of the metal plate on one side of the metal plate,
Preparing a rectangular diaphragm provided with an exposed portion to which a part of the
metal plate is exposed on the other side of the surface of the bonded metal plate, preparing a
cover plate, a first conductive portion, and Applying a first and a second conductive adhesive on
the second conductive portion or on the exposed portion of the metal plate and the other surface
electrode of the piezoelectric plate, and the piezoelectric plate serving as the case of the
diaphragm Of the metal plate and the other surface electrode of the piezoelectric plate are
respectively directed to the first conductive portion and the bottom surface side of the The
exposed portion of the metal plate and the first conductive portion are face-to-face connected
with the first conductive adhesive so as to correspond to the second conductive portion, and the
other surface electrode of the piezoelectric plate and the first conductive portion are A step of
facing-connecting the second conductive portion with the second conductive adhesive, a step of
fixing the exposed portion of the metal plate of the diaphragm and the side of the diaphragm
opposite to the support portion to the support portion, and A method of manufacturing a
piezoelectric acoustic component is provided, comprising the steps of: sealing the remaining two
sides of a diaphragm with respect to a case; and fixing a lid plate to the opening of the case.
[0010]
In the invention according to claim 1, as the diaphragm, a unimorph diaphragm in which the
piezoelectric plate is bonded to one side of a metal plate at a position biased to one side is used.
A first conductive portion and a second conductive portion drawn to the outside are formed in
the support portion of the case for fixing the two opposing sides of the diaphragm. The
diaphragm is housed in the case such that the piezoelectric plate faces the bottom wall of the
case. When the diaphragm is housed in the case, the exposed portion of the metal plate and the
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first conductive portion face each other, and the other surface electrode of the piezoelectric plate
and the second conductive portion face each other, so that the conductive adhesive is interposed
therebetween By interposing the agent, the exposed portion of the metal plate and the first
conductive portion can be connected reliably, and the other surface electrode of the piezoelectric
plate and the second conductive portion can be connected reliably. As described above, since the
second conductive portion and the other surface electrode of the piezoelectric plate can be
directly face-to-face connected without straddling the insulating material or the like, bonding
reliability by the conductive adhesive is improved.
[0011]
When a conductive adhesive of a necessary amount or more intervenes between the second
conductive portion and the other surface electrode of the piezoelectric plate, excess conductive
adhesive is generated when the piezoelectric plate is pressed against the second conductive
portion. It may wrap around the end face of the diaphragm and cause a short circuit with the
metal plate. Therefore, in claim 2, in order to prevent wraparound of the conductive adhesive, the
second conductive portion provided on the support portion is positioned inside the end face of
the diaphragm and adjacent to the second conductive portion. And a recess for releasing the
surplus second conductive adhesive. Therefore, when the other surface electrode of the
piezoelectric plate is pressed against the second conductive portion, the surplus second
conductive adhesive flows into the recess, and the conductive adhesive can be prevented from
wrapping around the end face of the diaphragm. As a result, a short circuit between the other
surface electrode of the piezoelectric plate and the metal plate can be prevented, and the second
conductive portion and the other surface electrode of the piezoelectric plate can be reliably
connected.
[0012]
Like Claim 3, it is desirable to fix two opposing sides of a diaphragm to a support part with an
elastic sealing material, and to seal the gap between the remaining two sides and a case with an
elastic sealing material. That is, by sealing the entire periphery of the diaphragm with the elastic
sealing material, air leakage is eliminated and the sound pressure characteristic is also improved.
In addition, since the diaphragm can be fixed and sealed by one type of elastic sealing material,
the work of fixing and sealing the diaphragm is simplified.
[0013]
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Like Claim 4, it is desirable to comprise a 1st, 2nd electroconductive part by the metal terminal
insert-molded to the case. In this case, the conductive portion which doubles as the external
electrode can be easily formed.
[0014]
In the invention according to claim 5, the first and second conductive adhesives are respectively
disposed on the first conductive portion and the second conductive portion, or on the exposed
portion of the metal plate and the other surface electrode of the piezoelectric plate. Apply, store
the diaphragm in the case so that the piezoelectric plate faces the bottom wall side of the case,
and press the exposed part of the metal plate against the first conductive part via the first
conductive adhesive At the same time, the other surface electrode of the piezoelectric plate is
pressed against the second conductive portion via the second conductive adhesive. Therefore, the
exposed portion of the metal plate and the first conductive portion, and the other surface
electrode of the piezoelectric plate and the second conductive portion can be easily face-to-face
connected. Thereafter, the two opposing sides of the diaphragm may be fixed to the support
portion, and the other two sides of the diaphragm may be sealed to the case. That is, since
mechanical fixation and sealing are performed after the diaphragm and the conductive part are
electrically connected, the electrical connection between the diaphragm and the first and second
conductive parts is fixed and sealed. It is not affected and reliability improves.
[0015]
As in claim 7, the first and second conductive adhesives are applied on the first conductive
portion and the second conductive portion, respectively, and the exposed portion of the metal
plate and the other surface electrode of the piezoelectric plate And the first conductive portion
and the exposed portion of the metal plate are connected to each other by pressing the first and
second conductive portions to which the conductive adhesive is applied to connect the other
surface electrode of the piezoelectric plate and the second conductive portion. It is preferable to
connect the conductive portion. In this case, since the application position of the conductive
adhesive is constant, stable connection is possible.
[0016]
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The first and second conductive adhesives and the insulating adhesive or elastic sealing material
for fixing or sealing the diaphragm to the case may be simultaneously cured, as in the eighth
aspect. desirable. In this case, fixing or sealing of the diaphragm and the case and electrical
connection between the diaphragm and the conductive portion can be performed in a small
number of steps, and the piezoelectric acoustic component can be manufactured inexpensively.
[0017]
The diaphragm of the present invention can vibrate in either a length bending mode or an area
bending mode. That is, when the two opposing sides of the diaphragm are fixed to the support
portion of the case and the gap between the other two sides and the case is movably sealed, the
diaphragm is a node fixed to the case as a node It bends up and down and vibrates in the length
bending mode so that the central part in the length direction becomes the maximum
displacement point. Further, when all four sides of the diaphragm are fixed to the support
portion of the case, the entire area of the diaphragm is bent and deformed in the thickness
direction so that the intersection of the diagonals of the main surfaces of the diaphragm becomes
the maximum displacement point. It vibrates in the area bending mode.
[0018]
In the present invention, the conductive adhesive is a known adhesive containing a conductive
filler. The adhesive for fixing the diaphragm to the support portion of the case may have a high
Young's modulus in a cured state, such as an epoxy adhesive, and may strongly restrain the end
of the diaphragm, as in silicone rubber, The Young's modulus in a hardened state may be low, the
restraining force of the diaphragm may be weak, and the displacement of the diaphragm may be
permitted. Further, as a sealing material for sealing the gap between the diaphragm and the case,
an elastic sealing material having a low Young's modulus in a cured state and being capable of
allowing displacement of the diaphragm is preferable like silicone rubber.
[0019]
1 to 5 show a surface-mounted piezoelectric acoustic component according to a first embodiment
of the present invention. This piezoelectric acoustic component is suitable for use as a receiver
and is generally constituted by a unimorph type diaphragm 1, a case 10 and a cover plate 30.
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[0020]
As shown in FIG. 4, the diaphragm 1 has thin film or thick film electrodes 2a and 2b on the front
and back, and has the same width dimension as the rectangular piezoelectric plate 2 polarized in
the thickness direction. The metal plate 3 is formed in a rectangular shape having a somewhat
long length dimension, and is bonded to the single-sided electrode 2b of the piezoelectric plate 2
via a conductive adhesive or the like. The single-sided electrode 2 b may be omitted by directly
bonding the metal plate 3 to the back surface of the piezoelectric plate 2 via a conductive
adhesive or the like. In this embodiment, the piezoelectric plate 2 is bonded to the metal plate 3
at a position deviated to one side in the length direction, and the metal plate 3 is exposed on the
other side of the metal plate 3 in the length direction. It has an exposed portion 3a.
[0021]
As the piezoelectric plate 2, for example, a piezoelectric ceramic such as PZT is used. The metal
plate 3 is preferably a material having both good conductivity and spring elasticity, and in
particular, a material having a Young's modulus close to that of the piezoelectric plate 2 is
preferable. Therefore, phosphor bronze, 42Ni, etc. are used, for example. When the metal plate 3
is 42 Ni, the thermal expansion coefficient is close to that of ceramic (PZT or the like), and
therefore, one having higher reliability can be obtained.
[0022]
The diaphragm 1 is housed in a case 10. As shown in FIG. 5, the case 10 is formed of an
insulating material such as ceramic or resin in a box shape having the bottom wall portion 11
and four side wall portions 12 to 15 and vibration is generated inside the side wall portions 12 to
15 Step-like supports 12 a to 15 a for supporting the peripheral portion of the plate 1 are
integrally formed. When the case 10 is made of resin, a heat-resistant resin such as LCP (liquid
crystal polymer), PPS (polyphenylene sulfide), or epoxy is desirable.
[0023]
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The two opposing support portions 12a and 14a are provided with first and second conductive
portions 16 and 17 for external connection, which are drawn out from the upper surfaces of the
support portions 12a and 14a. In this embodiment, the conductive portions 16 and 17 are
formed of metal terminals insert-molded in the case 10. In particular, the conductive portion 17
formed in the support portion 14a is formed with a U-shaped connection portion 17a exposed on
the upper surface of the support portion 14a, and a recess 18 is formed adjacent to the
connection portion 17a. . The recess 18 is for releasing the excess conductive adhesive, and is
drilled not only into the connection portion 17a but also into the support portion 14a. The
central portion of the connection portion 17 a is located inside the end face of the diaphragm 1
when the diaphragm 1 is housed in the case 10. The conductive adhesive 22 is applied to the
central portion of the connection portion 17a as shown by hatching in FIG. 5, but the conductive
adhesive 22 has an application diameter of about 1 mm, and the application position is the
diaphragm 1 The dimension of the recess 18 is about a = 0.85 mm, b = 3 mm, c = 0.2 mm when
it is about 0.6 mm inside from the end face of the. Further, the other conductive portion 16 is
formed with a flat connection portion 16a exposed on the upper surface of the support portion
12a. A damping hole 19 is formed at the boundary between the bottom wall 11 and one side wall
13, and a groove 20 for sound emission is formed at the opening edge of the side wall 15
opposed thereto.
[0024]
Conductive adhesives 21 and 22 are applied in a drip shape or a linear shape on the connection
portions 16a and 17a of the first and first conductive portions 16 and 17 of the case 10, as
indicated by hatching in FIG. . The main components of the conductive adhesives 21 and 22 are
urethane, silicone, polybutadiene, etc., and it is preferable to use one having a dynamic elastic
modulus at room temperature of 1 GPa or less at 1 Hz. The coating method is preferably a
dispensing method. After applying the conductive adhesives 21 and 22, the diaphragm 1 is
housed in the case 10 so that the piezoelectric plate 2 faces the bottom wall portion 11, and the
four sides of the diaphragm 1 are the support portions 12a to It is placed on 15a. At this time, if
the conductive adhesive 22 more than the necessary amount is interposed between the second
conductive portion 17 and the other surface electrode 2 a of the piezoelectric plate 2, the
piezoelectric plate 2 is pressed against the second conductive portion 17. At this time, the excess
conductive adhesive 22 may wrap around the end face of the diaphragm 1 and cause a short
circuit with the metal plate 3. However, the second conductive portion 17a provided on the
support portion 14a is positioned inward of the end face of the diaphragm 1, and the excess
second conductive adhesive is released adjacent to the second conductive portion 17a. Since the
concave portion 18 for the purpose is provided, the surplus second conductive adhesive 22 flows
into the concave portion 18 side or the bottom wall portion 11 side and prevents the conductive
adhesive 22 from wrapping around the end face of the diaphragm 1. it can. As a result, a short
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circuit between the other surface electrode 2a of the piezoelectric plate 2 and the metal plate 3 is
prevented, and the second conductive portion 17 and the other surface electrode 2a of the
piezoelectric plate 2 can be connected reliably. Although the first conductive portion 16 and the
exposed portion 3 a of the metal plate 3 are connected by the conductive adhesive 21, the
conductive adhesive 21 is applied on the first conductive portion 16 in a necessary amount or
more. But there is no problem. This is because there is no risk of short circuit with the other
surface electrode 2a of the piezoelectric plate 2 even if the conductive adhesive 21 gets around
to the end face of the exposed portion 3a.
[0025]
The peripheral four sides of the diaphragm 1 are sealed and fixed by an elastic sealing material
25 (see FIGS. 2 and 3). As the elastic sealing material 25, it is desirable to use a material having
high elasticity such as silicone rubber so as not to inhibit the vibration of the diaphragm 1. The
elastic sealant 25 is used by applying liquid silicone rubber by a dispensing method and then
curing it. Thus, air leakage between the spaces on both sides of the diaphragm 1 is reliably
prevented.
[0026]
The lid plate 30 is adhered and fixed to the opening of the case 10 to which the diaphragm 1 is
attached as described above, using a known adhesive 31 such as epoxy, urethane, silicone, or
acrylic. As the cover plate 30, a heat resistant resin similar to that of the case 10 is desirable.
[0027]
When a predetermined frequency signal (AC signal or rectangular wave signal) is applied
between the first and second conductive parts 16 and 17 exposed to the outside of the case 10,
both ends or the peripheral part in the lengthwise direction of the diaphragm 1 are Since the
diaphragm 1 is supported by the case 10, the diaphragm 1 can vibrate in the length bending
mode or the area bending mode to generate a predetermined sound. The sound is emitted from
the sound emission groove 20 of the case 10 to the outside.
[0028]
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10
In the above embodiment, the entire circumference of the diaphragm 1 is sealed and fixed with
the elastic sealing material 25. However, two sides on the short side of the diaphragm 1 are fixed
to the support portions 12a and 14a with an insulating adhesive, The other two sides may be
sealed with the elastic sealing material 25 to form a gap with the case 10. In this case, the other
two support portions 13a and 15a can be omitted. In addition, when sealing and fixing the entire
circumference of the diaphragm 1 with the elastic sealing material 25, air leakage between the
front side and the back side of the diaphragm 1 can be more reliably prevented, and one type of
material is used. Since it can be sealed and fixed, assembly work is simplified.
[0029]
6 and 7 show a case of a piezoelectric acoustic component according to a second embodiment of
the present invention. In this embodiment, the connection portion 17a and the recess portion 18
are continuously formed by using a terminal bent in the depth direction of the case 10 as the
second conductive portion 17 provided in the support portion 14a of the case 10 It is Also in this
case, since the connecting portion 17a is positioned inside the end face of the diaphragm 1, when
the conductive adhesive 22 is applied on the connecting portion 17a and the other surface
electrode 2a of the piezoelectric plate 2 is pressed thereon. The excess conductive adhesive 22
flows to the recess 18 or the bottom wall 11 side. Therefore, the conductive adhesive 22 does
not go around to the end face of the diaphragm 1, and a short circuit with the metal plate 3 can
be prevented.
[0030]
8 to 10 show a case of a piezoelectric acoustic component according to a third embodiment of
the present invention. In this embodiment, the support portion 14a of the case 10 is formed into
a continuous wall extending across the opposing side wall portions 13 and 15, and the second
conductive portion 17 is continuously formed on the support portion 14a. , And both end
portions of the conductive portion 17 are extended to the outer surfaces of the side wall portions
13 and 15. Also in this case, the second conductive portion 17 is located inside the end face of
the diaphragm 1, and the groove-like recess 18 for releasing the excess conductive adhesive
between the support portion 14a and the side wall 12 is provided. It is formed. Even if the
conductive adhesive is applied to the second conductive portion 17 in a large area, the excess
conductive adhesive flows to one side or both sides of the wall-like support portion 14a, so that
the conductive adhesive is adhered to the end face of the diaphragm 1 The agent does not stick
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and the connection is more secure.
[0031]
The second conductive portion 17 may be formed by insert-molding a linear terminal as shown
in FIG. 9 and then bending both ends of the terminal toward the back surface side of the case 10
as shown in FIG. Similarly, also for the first conductive portion 16, the flat terminal may be
insert-molded, and the end of the terminal may be bent to the back side of the case 10. In this
case, since the shape of the insert terminal is simple, insert molding is facilitated.
[0032]
11 and 12 show a case of a piezoelectric acoustic component according to a fourth embodiment
of the present invention. In this embodiment, the first and second conductive portions 16 and 17
are formed at four corners of the case 10. That is, the step-like support portion 12a is provided
inside the side wall portion 12 and the first conductive portion 16 is formed at both ends thereof,
and the step-like support portion 14a is provided inside the side wall portion 14 The two
conductive parts 17 are formed. In particular, the connection portion 17a of the second
conductive portion 17 exposed on the upper surface of the support portion 14a is formed in an L
shape, and a recess 18 is formed adjacent to the connection portion 17a to release the excess
conductive adhesive. There is. In this case, although the two conductive parts 16 and the two
conductive parts 17 are electrodes of the same potential, at least one place needs to be
conducted with the diaphragm 1, so that the conduction reliability is improved. There is.
[0033]
The present invention is not limited to the above embodiment. In the above embodiment, the
conductive adhesive is applied to the conductive portion of the case, and the conductive plate
and the vibrating plate are connected by mounting the vibrating plate thereon. However, the
conductive adhesive is connected to a predetermined location of the vibrating plate. You may
connect by apply | coating and pressing this on the electroconductive part of a case. Further,
although the concave portion 18 for escaping the surplus conductive adhesive is formed adjacent
to the second conductive portion 17, the second conductive adhesive 22 is applied in a thin film
form, or a sheet having high viscosity is formed. It is not necessary to form the recess 18 because
it is possible to prevent the wraparound of the conductive adhesive by using the conductive
13-04-2019
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adhesive 22 in the shape of a circle. In this case, it is possible to make the second conductive
portion 17 the same shape as the first conductive portion 16. Further, the metal plate and the
piezoelectric plate constituting the diaphragm may be either rectangular or square. The
piezoelectric acoustic component of the present invention is not limited to the surface mounting
type, and can be configured as a lead terminal type. That is, the first and second conductive
portions may be configured by lead terminals. The piezoelectric acoustic component of the
present invention includes a piezoelectric buzzer, a piezoelectric receiver, a piezoelectric speaker,
a piezoelectric sounder, a ringer, and the like.
[0034]
As is apparent from the above description, according to the first aspect of the present invention,
the diaphragm is housed in the case so that the piezoelectric plate faces the bottom wall portion
of the case. The exposed portion faces the first conductive portion, and the other surface
electrode of the piezoelectric plate faces the second conductive portion. Therefore, by interposing
a conductive adhesive between them, the exposed portion of the metal plate and the first
conductive portion, and the other surface electrode of the piezoelectric plate and the second
conductive portion can be face-connected. As described above, since the second conductive
portion and the other surface electrode of the piezoelectric plate can be directly connected
without straddling the insulating material or the like, bonding reliability by the conductive
adhesive is improved.
[0035]
In the fifth aspect of the present invention, after electrically connecting the exposed portion of
the metal plate and the first conductive portion, and the other surface electrode of the
piezoelectric plate and the second conductive portion, the diaphragm is attached to the case.
Mechanical fixing and sealing, so that the electrical connection between the diaphragm and the
first and second conductive parts is not affected by the fixing and sealing, and a reliable
piezoelectric acoustic component can be obtained. it can.
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