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DESCRIPTION JP2002359897

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DESCRIPTION JP2002359897
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an
array type ultrasonic probe (array type probe) as an industrial technical field, and in particular to
an array type probe having good sound field characteristics.
[0002]
2. Description of the Related Art An array-type probe is used as an ultrasonic wave transmitting /
receiving unit in an ultrasonic diagnostic apparatus such as a medical device, and is tomogram of
an object to be detected (a living body) driven linearly or sectorally. Get In recent years, an arraytype probe having good sound field characteristics and productivity has been desired.
[0003]
(An example of the prior art) FIGS. 7 and 8 are views of an array type probe for explaining an
example of the prior art, FIG. 7 is a sectional view, and FIG. 8 is a plan view. The arrayed probe is
formed by arranging a plurality of piezoelectric elements 2 having upper and lower surface
electrodes 1 (ab) on a backing material 3. An acoustic matching layer 4 is formed in the central
region of the piezoelectric element 2 to match the acoustic impedance with the living body.
Further, an acoustic lens (not shown) is formed on the acoustic matching layer. Then, lead wires
5 (ab) are connected to the surfaces of both end portions by solder, and the upper surface
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electrodes 1 a are connected in common to make a ground potential. To each lower surface
electrode 1b, metal foils 6 for leading out the electrodes are connected in a staggered manner at
both ends, and a drive voltage is applied.
[0004]
[Problems to be Solved by the Invention] (Problems of the Prior Art) However, in such a device,
ultrasonic waves are also emitted from both ends of the piezoelectric element 2 provided with
the lead wires, and There is a problem that it interferes with sound waves and adversely affects
sound field characteristics. From this, for example, as shown in FIG. 9, the upper and lower
surface electrodes are folded back to the other main surface side at both ends of the piezoelectric
plate, and both main surfaces at both ends are set to the same potential. There is also a
piezoelectric element in which a metal foil for grounding is connected to one end side of the
piezoelectric element and a signal metal foil is connected to the other end side to prevent
generation of ultrasonic waves from both ends.
[0005]
However, in this case, since the turnback portion 1c of the upper surface electrode 1a and the
lower surface electrode 1b are on the same surface, it is necessary to provide a certain distance
or more, usually more than the thickness of the piezoelectric plate, at the time of polarization of
the piezoelectric plate. . For this reason, there existed a problem which shortens the effective
length of the center area | region except a turning part. Further, since the upper and lower
surface electrodes having the turnback portion are formed, the effective length of the ultrasonic
wave is set in advance, and there is a problem that the degree of freedom in design is narrowed.
[0006]
SUMMARY OF THE INVENTION It is an object of the present invention to provide an arrayed
probe in which the radiation of ultrasonic waves from the end of a piezoelectric element is
prevented and the effective length of the piezoelectric element is increased to increase the
freedom of design. To aim.
[0007]
SUMMARY OF THE INVENTION According to the present invention, as described in the claims, a
plurality of piezoelectric elements having upper and lower surface electrodes arranged and fixed
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on a backing material, and a lower surface electrode of the piezoelectric element A first slit
obtained by dividing one end side of the first electrode, a second slit obtained by dividing the
other end side of the upper surface side of the piezoelectric element, and a conductive material
connecting upper and lower electrodes of both ends of the piezoelectric element It is a basic
solution.
[0008]
In the present invention, the upper and lower electrodes of the piezoelectric plate are divided by
the first and second slits provided at both ends.
Then, both ends of the upper and lower surface electrodes are joined with a conductive material.
Therefore, the same potential is obtained at both ends. In addition, since the polarization is
performed only between the two main surfaces, the width of the slit is minimized. And since the
first and second slits can be formed arbitrarily, the effective length can be determined according
to the specification. Hereinafter, one embodiment of the present invention will be described.
[0009]
1 and 2 are views of an array-type probe for explaining a first embodiment of the present
invention, FIG. 1 is a cross-sectional view, and FIG. 2 is a plan view of a developed metal foil. is
there. The description of the same parts as those of the prior art will be simplified or omitted,
and will be described based on the manufacturing procedure. The ultrasonic probe first fixes the
piezoelectric plate 2A having the electrodes 1 (ab) on both principal surfaces on the backing
material 3 by the first conductive adhesive 7. The metal foil 6 (ab) is provided at both ends of the
backing material 3, and both ends of the lower surface electrode 1 b in the piezoelectric plate 2 A
are electrically connected by the first conductive adhesive 7. Next, on one end side in the width
direction of the piezoelectric plate 2A, the first slit 8 reaching the backing material 3 from the
upper surface electrode 1a is provided to divide the lower electrode 1b together with the
piezoelectric plate 2A.
[0010]
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Next, the second conductive adhesive 9 is applied on the upper surface electrode 1a and the side
surface of the piezoelectric plate 2A to fix the acoustic matching layer 4 and includes the first
conductive adhesive 7 or the metal foil 6 (ab). Electrically connected to the first conductive
adhesive 7. Then, on the other end side in the width direction of the piezoelectric plate 2A, the
second slit 10 that reaches the piezoelectric plate 2A from above the acoustic matching layer 4 is
provided to divide the upper surface electrode 1a.
[0011]
Finally, a cut reaching the backing material 3 and the metal foil 6 (ab) in the longitudinal
direction of the piezoelectric plate 2A from above the acoustic matching layer 4 is provided, and
divided into a plurality of piezoelectric elements 2 (FIG. 2). The metal foil 6b on one end side is
grounded continuously to the ground potential only by providing a cut. Further, the metal foil 6a
on the other end side is cut for each piezoelectric element 2 and becomes a signal line to which a
drive voltage is applied.
[0012]
In the ultrasonic probe configured according to such a manufacturing procedure, the upper and
lower surface electrodes 1 (ab) of the piezoelectric plate are divided by the first and second slits
8 and 10 provided at both ends. Then, both end sides of the upper and lower surface electrodes
1 (ab) are joined by the first and second conductive adhesives 7 and 9. Accordingly, since the
same potential is applied at both ends, the ultrasonic wave is not emitted but is emitted only from
the central region provided with the acoustic matching layer 4. Thereby, the interference by the
radiation of the ultrasonic wave from both ends is prevented, and a sound field characteristic is
improved. Further, since the above-described lead wire 5 (ab) for grounding is not used, there is
no adverse effect due to scattering of the received signal or the like.
[0013]
Further, since the polarization of the piezoelectric plate 2A is already performed only between
the main surfaces, the widths of the first and second slits 8 and 10 are minimized. Accordingly,
the effective length of the piezoelectric plate 2A, which is the length of the facing portion of the
upper and lower surface electrodes 1 (ab) between the first and second slits 8 and 10, can be
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increased. Furthermore, since the first and second slits 8 and 12 can be formed arbitrarily to
determine the effective length, the degree of freedom in design is increased. Then, the
piezoelectric plate 2A can be made common, and the assortment of parts can be reduced.
[0014]
[Second Embodiment] FIGS. 3 and 4 are views for explaining a second embodiment of the present
invention, FIG. 3 is a sectional view of a piezoelectric plate, and FIG. 4 is a sectional view of an
array type probe. is there. The description of the same parts as those of the first embodiment will
be omitted. In this embodiment, slits 11 and 12 are provided at both ends of the upper and lower
surface electrodes 1 (ab) of the piezoelectric plate 2A which is polarized in advance to divide the
electrodes. Then, the first insulating adhesive 13 is applied to the central region on the backing
material 3 having the metal foil 6 (ab) on both ends, and the piezoelectric plate 2A is fixed.
[0015]
Next, the second insulating adhesive 14 is applied to the central region of the piezoelectric plate
2A, and the conductive adhesive 15 is applied to both end sides and side surfaces to fix the
acoustic matching layer 4. At the same time, the upper and lower surface electrodes 1 (ab) and
the metal foil 6 (ab) are electrically connected by the conductive adhesive 15. Finally, as
described above, a cut is provided to reach the backing material 3 and the metal foil 6 (ab) in the
longitudinal direction of the piezoelectric plate 2A from the acoustic matching layer 4 and
divided into a plurality of piezoelectric elements 2A.
[0016]
In the array type probe in such a procedure, the upper and lower surface electrodes 1 (ab) of the
piezoelectric plate are divided in advance by the first and second slits 11 and 12 provided at both
ends. Then, both end sides of the upper and lower surface electrodes 1 (ab) are fixed to the
backing material 3 and then joined with the conductive adhesive 15. Therefore, even in this case,
as in the first embodiment, the same potential is applied at both ends, and the ultrasonic waves
are not emitted, but are emitted only from the central region provided with the acoustic matching
layer 4. Thereby, the interference by the radiation of the ultrasonic wave from both ends is
prevented, and a sound field characteristic is improved. Further, since the above-described lead
wire 5 (ab) for grounding is not used, there is no adverse effect due to scattering of the received
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signal or the like.
[0017]
Further, since the polarization of the piezoelectric plate 2A is already performed only between
the main surfaces, the widths of the first and second slits 8 and 10 are minimized as in the first
embodiment. Therefore, the effective length of the piezoelectric plate 2A, which is the length of
the facing portion of the upper and lower surface electrodes 1 (ab) between the first and second
slits 11 and 12, can be increased. Furthermore, since the first and second slits 11 and 12 can be
formed arbitrarily to determine the effective length, the degree of freedom in design is increased.
Then, the piezoelectric plate 2A can be made common, and the number of parts can be reduced.
[0018]
[Other Matters] In each of the above-described embodiments, although the example in which the
metal foil 6 (ab) is provided on the backing material 3 has been shown, for example, it may be as
shown in FIG. That is, metal foils 6 (ab) are connected in advance to both ends of the
piezoelectric plate 2A by solder or the like, and then fixed to the backing material 3 by the
insulating adhesive 16 or the insulating double-sided tape. Then, after the first slit 8 is provided
to bury the filler, the acoustic matching layer 4 may be fixed by the conductive adhesive 9 and
the upper and lower surface electrodes 1 (ab) may be connected.
[0019]
Also, as shown in FIG. 6, even when the slits 11 and 12 are provided in advance in the
piezoelectric plate 2A, similarly, the metal foil 6 (ab) is connected in advance to both ends of the
piezoelectric plate 2A to make the insulating adhesive 16 The upper and lower surface electrodes
1 (ab) may be connected to each other by the conductive adhesive 15.
[0020]
In the second embodiment, the first and second slits 11 and 12 are provided on the upper and
lower surfaces of the piezoelectric plate 2A, for example, the first slit 11 is provided only on the
lower surface electrode 1b and fixed to the backing material 3 for acoustic matching After the
layer 4 is formed, a second slit may be provided to reach the piezoelectric plate from above the
acoustic matching layer 4 as in the first embodiment to divide the upper electrode 1a (not
shown).
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[0021]
In each embodiment, both end portions of the upper and lower surface electrodes 1 (ab) are
electrically connected by a conductive adhesive, but it is also possible to use, for example, metal
plating, using a conductive material for electrically connecting both end portions. I hope there is.
Furthermore, although the matching layer is illustrated as a single layer, it may be two or more
layers.
The piezoelectric element may be concave.
[0022]
Further, although the embodiment of the present invention has been described according to the
manufacturing procedure, as a result, as indicated in the claims, a plurality of piezoelectric
elements having upper and lower surface electrodes arranged and fixed on a backing material, A
conductive material connecting a first slit obtained by dividing one end side of the lower surface
electrode of the piezoelectric element, a second slit obtained by dividing the other end side of the
upper surface of the piezoelectric element, and upper and lower surface electrodes of both ends
of the piezoelectric element An array type probe comprising the present invention is within the
technical scope of the present invention.
[0023]
In the present invention, a plurality of piezoelectric elements having upper and lower surface
electrodes arranged and fixed on a backing material, a first slit obtained by dividing one end side
of the lower surface electrode of the piezoelectric element, and the other upper surface side of
the piezoelectric element Since the second slit in which the end side is divided and the conductive
material connecting the upper and lower surface electrodes of both ends of the piezoelectric
element are used, the radiation of the ultrasonic wave from the end of the piezoelectric element
is prevented, and the piezoelectric element is effective. It is possible to provide an array-type
probe with a long length to increase design freedom.
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