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DESCRIPTION JP2004236119

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DESCRIPTION JP2004236119
An ultrasonic vibrator manufacturing jig and ultrasonic vibration capable of manufacturing an
ultrasonic vibrator with stable shape and eliminating stress corrosion cracking under long-term
heat treatment and long-term reliability and excellent productivity. Provide a method of
manufacturing a child. A pressure can be maintained between a lower jig 23 and an upper jig
24A by pressing a piezoelectric body on one surface of a case 2 through an adhesive. As a result,
the piezoelectric body and the case are pressure-bonded with an adhesive and stress is relaxed
by low-temperature heat treatment. [Selected figure] Figure 5
Jig for manufacturing ultrasonic transducer and method for manufacturing ultrasonic transducer
TECHNICAL FIELD The present invention relates to a jig (jig, jig) for manufacturing an ultrasonic
transducer of an ultrasonic transducer using a bottomed cylindrical case, and a method of
manufacturing an ultrasonic transducer. . 2. Description of the Related Art A case for an
ultrasonic transducer is a case for accommodating a piezoelectric transducer or the like, which is
usually replaced by vacuum or an inert gas and sealed. Since the case material for the ultrasonic
transducer is mainly used for measuring the velocity of fluid such as gas and liquid, the case
surface is exposed to the gas and liquid to be measured. For example, when used for a gas meter
such as city gas, long-term reliability over current electronic components is required because of
safety against accidents such as gas leak and continuous use for over 10 years. In particular,
recently, the industry is moving for continuous use period from 10 years to 20 years, and further
long-term reliability is required. Also, in Article 49 (Leakage test) of Chapter 10 "Gas meter" of
"Specified Meter Verification Inspection Regulations", inspections and regulations regarding
leakage of gas and entry of water are strictly described. Also, in the specifications of gas
manufacturers, regarding pressure switches etc., the main materials of parts in contact with gas
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are the gas business laws and regulations “gas It is defined as "a metal material having gas
resistance and corrosion resistance that conforms to the standard of Article 84 of the notification
that defines the details of technical standards." Therefore, the case member in contact with the
gas can not be similarly damaged by mechanical damage due to processing, impact or the like
and corrosion due to environmental factors such as air temperature and acid rain. Therefore, it is
required to be excellent in strength, workability, gas resistance, corrosion resistance, stress
corrosion cracking resistance, and weldability. On the other hand, with regard to conventional
sensors, integrally molded resin, a sintered case, a cutting case cut out by cutting, a case
processed by welding joints, etc. are generally used, and the above-mentioned safety aspect and
long-term reliability are taken into consideration. It was not the material or structure that was
Patent Document 1 mentions an ultrasonic transducer using a hollow cylindrical case, but since
the hollow cylindrical case uses the top surface of the case as a diaphragm, processing accuracy
is required, and press molding However, although it is manufactured by cutting etc., since the
internal stress was included, there existed a subject that generation | occurrence | production of
stress corrosion cracking and processing precision were hard to be acquired. As means for
preventing stress corrosion cracking, the stress relaxation method by heat treatment shown in
Patent Document 2 is in shape correction, and Patent Document 3 etc. are available, but both are
effective at a low temperature of about 200 ° C. It was not something that could be done.
In addition, stress relaxation was the main purpose, and it could not be realized in the process
including shape correction and stress relaxation or bonding. [Patent Document 1] Japanese
Utility Model Application Laid-Open Publication No. Hei 4-94898 Patent Document 2: JP-A 5317983 Patent Document 3: JP-A 2000-212642 Problem to be Solved by the Invention A
bottomed cylindrical case has a piezoelectric body or an acoustic matching layer bonded to the
top surface of the case, and is used for the purpose of both the bonding surface and the
diaphragm. For example, as the adhesive surface, it is necessary to adhere the adhesive layer as
uniformly as possible by the adhesive and to stabilize the adhesive strength. In addition, as the
acoustic diaphragm, the case top surface needs to be processed as uniformly as possible in
shape, thickness and the like. Although high-speed pressing is often used in consideration of
mass productivity for processing, when the above processing accuracy is required for the case
top surface, processing stress is accumulated from the uniform processing of the case top surface
to the whole. It is easy to cause stress corrosion cracking particularly in the vicinity of the bend.
On the other hand, the resin case is low in moisture resistance and lacks in durability, and the
sintering case is weak against impact and has poor processing accuracy. In addition, the resin
case and the sintered case are disadvantageous in that they have low confidentiality and it is
difficult to guarantee safety and long-term reliability. The cutting case is made of brass or the
like, which is a material excellent in processability because it is accompanied by precision
processing. However, many materials having excellent processability such as brass are poor in
corrosion resistance, and it is necessary to apply a plating treatment to the surface after
processing in order to enhance the corrosion resistance. Therefore, there is a disadvantage that
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the number of processes increases and the processing fee becomes very high. In addition, even
when corrosion resistant stainless steel is used for cutting, the thickness of the top surface is
required to be made as thin as possible acoustically, so it is often distorted by processing, which
also tends to cause stress corrosion cracking. . In the case where there is a joint to the fluid
flowing through the flow path in which the diaphragm and the cylindrical portion of the case are
independent, the cylindrical portion is formed by welding, but the welded portion is stainless
steel. Even in the welded part, chromium (Cr) tends to be deficient and therefore, corrosion
cracking tends to occur. From the above, it is suspicious in the long-term reliability of welds.
Therefore, an object of the present invention is to use a case material excellent in low cost,
strength, processability, gas resistance, corrosion resistance and stress corrosion cracking
resistance, and use a seam material for the fluid flowing in the flow path. The bottomed
cylindrical case produced by, for example, press molding or cutting using a case created by nonprocessing is stable in shape and no stress corrosion cracking under low temperature heat
treatment, and long-term reliability and excellent productivity It is possible to provide an
ultrasonic transducer manufacturing jig capable of manufacturing an ultrasonic transducer, and a
manufacturing method of an ultrasonic transducer capable of manufacturing an ultrasonic
transducer using the jig. is there.
In order to achieve the above object, the present invention is configured as follows. According to
one aspect of the present invention, there is provided an ultrasonic transducer comprising at
least a bottomed cylindrical metal case, and a piezoelectric body provided with an adhesive on
one surface of the case, or a piezoelectric body An ultrasonic transducer manufacturing jig for
manufacturing an ultrasonic transducer, wherein an acoustic matching layer is provided by an
adhesive on a surface opposite to one surface of the case provided with an agent, at least holding
the piezoelectric body The piezoelectric holding recess, the piezoelectric holding recess, and the
piezoelectric held in the piezoelectric holding recess are bonded to the inner surface of the one
surface of the case via the adhesive. A lower jig having a case holding portion capable of holding
the held state, and an upper jig disposed opposite to the lower jig and capable of holding the case
between the lower jig; Between the above and the upper jig above The pressurized state in which
the piezoelectric body is pressurized via the adhesive to the one side of the case, or the
piezoelectric body is pressurized to the one side of the case via the adhesive and vice versa It is
possible to maintain the pressure applied to the acoustic matching layer via the adhesive on the
side surface, and by performing a low-temperature heat treatment under this pressure, the
piezoelectric and the case may be subjected to the adhesive The function of pressure bonding by
pressure or the function of pressure bonding of the piezoelectric body and the case by the
adhesive and the pressure bonding of the acoustic matching layer and the case by the adhesive,
and the low temperature heat treatment Disclosed is a jig for manufacturing an ultrasonic
transducer, which exhibits a function of relieving stress. According to another aspect of the
present invention, there is provided an ultrasonic transducer or a piezoelectric body comprising
at least a bottomed cylindrical metal case, and a piezoelectric body provided with an adhesive on
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one surface of the case. An ultrasonic transducer manufacturing jig for manufacturing an
ultrasonic transducer, wherein an acoustic matching layer is provided by an adhesive on a
surface opposite to one surface of the case provided with an adhesive, comprising: a lower jig for
supporting at least the case; Applying pressure so as to sandwich the upper jig and the lower jig
from both sides of one surface of the case with respect to the upper jig provided opposite to the
lower jig and the thickness direction of the case A pressing member for applying a possible
pressing force to the upper jig and the lower jig, and the pressing member performs the pressing
on the one surface of the case between the lower jig and the upper jig. Above through adhesive
The piezoelectric body is pressed to the one surface of the case via the adhesive under pressure,
or the pressure is applied to the electrical conductor, and the acoustic matching layer is applied
to the opposite surface via the adhesive. A function of pressure bonding the piezoelectric body
and the case with the adhesive or performing pressure bonding of the piezoelectric body and the
case with the adhesive by performing low-temperature heat treatment in a pressurized state.
Together with the function of pressure bonding the acoustic matching layer and the case with the
adhesive, the function of correcting the shape of the case, and the function of relieving stress by
the low temperature heat treatment Provided is a jig for manufacturing a vibrator.
According to still another aspect of the present invention, at least a cylindrical metal case with a
bottom is provided between a lower jig of an ultrasonic transducer manufacturing jig and an
upper jig provided opposite to the lower jig. The lower jig and the upper jig are disposed to be
supported by the lower jig, and then the piezoelectric body is pressurized with an adhesive to one
surface of the case between the lower jig and the upper jig and low-temperature heat treatment
is performed in the pressurized state. Simultaneously apply pressure bonding of the piezoelectric
body and the case with the adhesive, and relieve stress by the low temperature heat treatment, or
piezoelectric on one surface of the case via the adhesive. The piezoelectric body and the case are
pressure bonded with the adhesive by pressurizing the body and pressurizing the acoustic
matching layer to the opposite surface via the adhesive and performing low temperature heat
treatment in the pressurized state. The acoustic matching layer and the case An ultrasonic
transducer or the like, in which the piezoelectric body is provided by the adhesive on the one
surface of the case by relieving stress by the low-temperature heat treatment simultaneously
with pressure bonding with the adhesive. Ultrasonic vibration for manufacturing an ultrasonic
transducer, wherein the piezoelectric body is provided by the adhesive on the one surface of the
case and the acoustic matching layer is provided by the adhesive on the surface opposite to the
one surface Provide a method of manufacturing a child. According to still another aspect of the
present invention, at least a cylindrical metal case with a bottom is provided between a lower jig
of an ultrasonic transducer manufacturing jig and an upper jig provided opposite to the lower jig.
The lower jig and the upper jig are arranged to be supported by the lower jig. Then, the upper jig
and the lower jig are disposed from both sides of one surface of the case with respect to the
thickness direction of the case between the lower jig and the upper jig. The pressure is applied by
a pressure member so as to sandwich the piezoelectric body, and the piezoelectric body is
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pressurized with an adhesive on one surface of the case, and low-temperature heat treatment is
performed in the pressurized state to perform the piezoelectric body and the case Simultaneously
with pressure bonding with the adhesive, stress is relieved by the low temperature heat
treatment or pressure is applied to one surface of the case through the adhesive and the opposite
surface is applied. Press the acoustic matching layer through the adhesive and The piezoelectric
body and the case are pressure bonded with the adhesive while the low temperature heat
treatment is performed under pressure, and simultaneously the acoustic matching layer and the
case are pressure bonded with the adhesive. An ultrasonic transducer in which the piezoelectric
body is provided by the adhesive on the one surface of the case by relieving stress by the lowtemperature heat treatment; There is provided a method of manufacturing an ultrasonic
transducer, the ultrasonic transducer being provided on one side and the acoustic matching layer
being provided by the adhesive on the side opposite to the one side.
BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present
invention will be described in detail with reference to the drawings. FIG. 1 is an external view of
an ultrasonic transducer manufactured using an ultrasonic transducer manufacturing jig used in
a method of manufacturing an ultrasonic transducer according to an embodiment of the present
invention, and FIG. The cross-sectional view of the flow path is shown in FIG. 3, FIG. 3 and FIG. In
FIG. 1, the ultrasonic transducer 1 has a bottomed cylindrical metal case 2 having a case top
surface 3 and a support portion 5 as a case flange portion, and an adhesive on the inner wall
surface of the case top surface 3. 31 is roughly composed of a piezoelectric body 6 disposed via
31 and an acoustic matching layer 4 disposed on the outer wall surface of the case top 3 via an
adhesive 32 (provided that the acoustic matching layer 4 is present). ing. In FIG. 2, the ultrasonic
transducer 1 further includes an insulating material which insulates the terminal plate 7 fixed to
the support portion 5, the terminals 8 a and 8 b provided on the terminal plate 7, and the
terminals 8 a and 8 b. 9 and a conductive rubber 10 for electrically connecting the piezoelectric
body 6 and the terminal 8a. The piezoelectric body 6 is disposed in a space sealed by the case 2
and the terminal plate 7, and the sealed space enclosed by the case 2 and the terminal plate 7 is
sealed in a state in which air is replaced with an inert gas. There is. The acoustic matching layer
4 is disposed on the top surface 3 of the case 2 as needed. For example, the acoustic matching
layer 4 is provided when used for gas, but the acoustic matching layer 4 is not required when
used for liquid. The same applies to the following embodiments and the like. The bottomed
cylindrical metal case is integrally formed with a bottom surface closing the opening of the
cylinder at one end of the cylinder, and is integrally molded to form the bottom surface by
cutting or precision pressing. After processing, the processing oil is completely removed, and
then low temperature heat treatment is performed to prevent stress corrosion cracking. When
the precision pressing method is used as the processing method rather than the cutting
processing, a large number of cases of the same quality can be created, and cost reduction can be
realized. FIG. 3 shows a cross-sectional view of the flow path of the fluid whose flow rate is to be
measured, in which the ultrasonic flowmeter 100 provided with the ultrasonic transducer 1 is
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disposed. A schematic configuration of the ultrasonic flowmeter 100 includes a flow rate
measuring unit 11 for measuring the flow rate of the fluid to be measured introduced from an
inlet passage 100a connected to a supply pipe to which the fluid to be measured such as gas is
supplied. An outlet passage 100b communicating with the flow rate measuring unit 11 and
guiding the fluid to be measured to the outside, and a pair of ultrasonic transducers 17 and 18
provided in the flow rate measuring unit 11 for transmitting and receiving ultrasonic waves
(each is ultrasonic vibration Corresponds to child 1.
And a measuring circuit (not shown) for measuring the propagation time between the ultrasonic
transducers 17 and 18, and a flow calculating means (not shown) for calculating the flow based
on the signal from the measuring circuit. There is. Therefore, an ultrasonic wave is transmitted
from one ultrasonic transducer 17 toward the other ultrasonic transducer 18, and an ultrasonic
wave that has passed through a fluid to be measured such as gas is received by the other
ultrasonic transducer 18. Thereby, the propagation time between the ultrasonic transducers 17
and 18 is measured by the measurement circuit. Then, conversely, ultrasonic waves are
transmitted from the other ultrasonic transducer 17 toward the one ultrasonic transducer 18,
and ultrasonic waves that have passed through the fluid to be measured such as gas are the one
ultrasonic transducer. By receiving at 18, the propagation time between the ultrasonic
transducers 17 and 18 is measured by the measurement circuit. Thus, the propagation time of
the ultrasonic wave is measured between the pair of ultrasonic transducers 17 and 18 a
predetermined number of times, and the flow rate of the fluid to be measured such as gas is
calculated based on the average value by the flow rate calculating means. It is like that.
Therefore, the ultrasonic transducers 17 and 18 can transmit and receive. As a practical example,
the material constituting the flow rate measurement unit 11 is an aluminum alloy die-cast
assuming a household gas meter for measuring the flow rate of LP gas or natural gas. The upper
plate portion 15 is screwed to the end surfaces of the side wall portions 12 and 13 via a sealing
material 14 made of, for example, a cork material, and the flow rate measuring portion 11 having
a rectangular flow path cross section 16 is configured. Further, the ultrasonic transducers 17 and
18 are provided obliquely on the side wall portions 12 and 13 so that transmission / reception
wavefronts for transmitting and receiving ultrasonic waves face each other. Specifically, the
transducer mounting holes 19 and 20 of the ultrasonic transducers 17 and 18 provided in the
side wall portions 12 and 13 are fixed via the sealing members 21 and 22 made of, for example,
an O-ring. This is one example, and the present invention is not limited thereto. The jig for
manufacturing an ultrasonic transducer used in the method of manufacturing an ultrasonic
transducer according to the first embodiment of the present invention comprises at least a
concave portion 23c for holding a piezoelectric member, which holds the piezoelectric member 6;
The piezoelectric body 6 having the piezoelectric body holding concave portion 23c and held in
the piezoelectric body holding concave portion 23c, and the inner surface of the one surface (for
example, the top surface 3) of the bottomed case 2 are the above A lower jig 23 having a case
holding portion 23a capable of holding a state of adhesion through an adhesive 31 and a lower
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jig 23 so as to be opposed to the lower jig 23 and holding the case 2 between the lower jig 23
and the lower jig 23 And a possible upper jig 24A.
In this embodiment, a spring 25 is also provided as an example of a pressing member capable of
applying pressure so as to sandwich it from both sides with respect to the thickness direction of
the top surface 3 of the bottomed metal case 2. In such a configuration, a low temperature heat
treatment is performed on the case 2 together with the ultrasonic transducer manufacturing jig
in a state where the case 2 is pressed between the upper jig 24A and the lower jig 23 by the
spring 25 (acoustic The function of pressure bonding the piezoelectric body 6 and the case 2
with the adhesive 31 if there is no matching layer 4 or (if there is the acoustic matching layer 4)
the adhesive of the piezoelectric body 6 and the case 2 31 has a function of pressure-adhering by
31 and a function of pressure-adhering acoustic matching layer 4 and case 2 by adhesive 32, and
a function of relieving stress by the low temperature heat treatment (with or without acoustic
matching layer 4) Make it work. FIG. 5A shows a state in which the case 2 is not pressed in the
jig for manufacturing an ultrasonic transducer according to the first embodiment, and FIG. 5B
shows a state in which the case 2 is pressed. Show. The lower jig 23 mainly supports the
piezoelectric body 6 and the case 2, and the upper jig 24 A bonds the piezoelectric body 6 and
the case 2 with an adhesive 31. In order to bond the case 2 and the acoustic matching layer 4
together with the adhesive 32, pressure is applied to the lower jig 23 and the pressing force of
the upper jig 24A directed to the lower jig 23 is generated by the spring 25. ing. The slide shaft
26 supporting the upper jig 24A and the spring 25 is suspended and supported at the central
portion of the upper base 27, and the upper base 27 is movably supported by two columns 29
fixed to the lower base 28. ing. That is, the lower jig 23 which is a metal flanged cylindrical body
is placed on the lower base 28 which is a metal plate-like member, and the lower jig 23 is
interposed between the lower jigs 23 on the outside of both sides. Two metal columns 29 are
erected so as to sandwich the metal base plate 29 and movably penetrate the upper base 27
which is a metal plate member. The upper base 27 is disposed substantially parallel to the lower
base 28. A metal slide shaft 26 penetrates downward at the central portion of the upper base 27,
and the upper base 27 is held by the C ring (not shown) and the nut 26A in an upward direction
by means of a C ring (not shown). The upper base 27 is movable while being guided downward
by two columns 29 along the line 26. A spring 25 is fitted to the outer peripheral surface at a
portion protruding downward from the upper base 27 of the slide shaft 26, and at the lower end
of the downward protruding portion, a cylindrical metallic upper jig 24A with an upper lid is
installed. It is fixed.
The cylindrical case holding portion 23 a of the lower jig 23 is formed with a concave portion 23
c for holding the piezoelectric body 6 at the center of the upper surface thereof, and the concave
portion 23 c for holding the piezoelectric body 6 The upper surface of the case 2 can come in
contact with or face the inner surface of the top surface 3 of the case 2 by entering into the case
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2. Around the lower end of the cylindrical case holding portion 23a, a flat metal flange 23b on
which the lower surface of the support portion 5 as the case flange portion of the case 2 of the
ultrasonic transducer 1 is placed in contact Have. Therefore, when the piezoelectric body 6 is
held in the piezoelectric body holding recess 23c, the upper surface of the piezoelectric body 6
and the upper surface of the cylindrical case holding portion 23a around the opening of the
piezoelectric body holding recess 23c are substantially the same plane. When the adhesive 31 is
applied or placed on the upper surface of the piezoelectric body 6, the upper surface of the
adhesive 31 protrudes from the upper surface of the cylindrical case holding portion 23a, and
contacts the inner surface of the top surface 3 of the case 2. The piezoelectric body holding
recess 23c and the cylindrical case holding portion 23a are dimensioned so as to be possible. On
the other hand, the upper jig 24 A is a cylinder large enough to cover the case top 3 of the case 2
of the ultrasonic transducer 1, and the flat inner surface of the upper lid of the cylinder is the
case It can be in contact with the top surface 3 itself (without the acoustic matching layer 4) or
the top surface of the acoustic matching layer 4 with the case top surface 3 (with the acoustic
matching layer 4). When the length of the upper jig 24A in the axial direction is shorter than the
length of the case 2 in the axial direction and the upper jig 24A is put on the case 2 placed on the
lower jig 23 and pressed downward, the upper jig 24A The upper jig 24A is prevented from
contacting the flange 5 of the case 2 before the flat inner surface of the upper lid contacts the
top surface 3 of the case 2 or the acoustic matching layer 4 (in the absence of the acoustic
matching layer 4) Between the flat inner surface of the upper lid of the jig 24A and the upper
surface of the cylindrical case holding portion 23a of the lower jig 23, a pressing force is exerted
such that the piezoelectric body 6 is pressed against the case 2 via the adhesive 31. Or (if there is
an acoustic matching layer 4) such that a pressing force is exerted such that the acoustic
matching layer 4 and the piezoelectric body 6 are pressed against the case 2 via the adhesives 31
and 32, respectively. I have to. Specifically, in the unpressurized state shown in FIG. 5A, the space
between the upper jig 24A and the lower jig 23 on the lower base 28 is adhered on the lower jig
23 in the inside. The case 2 on which the piezoelectric body 6 is attached via the adhesive 31 is
placed, and the acoustic matching layer 4 disposed via the adhesive 32 on the top surface 3 of
the case 2 is positioned below the upper jig 24A. .
Next, when pressing, as shown in FIG. 5B, the upper base 27 is slid downward along the two
columns 29 to press the upper base 27 downward to press the upper base 27. By shrinking the
gap between the lower base 28 and the lower base 28, the spring 25 is simultaneously
compressed to apply a pressure from the upper base 27 side to the lower base 28. At the same
time as the spring 25 contracts, it generates a pressure (spring force) that is the product of the
spring constant of the spring 25 attached to the upper jig 24A and the reduced length from the
principle of action and reaction. When the upper base 27 is lowered, the upper base 27 engages
the spring 25 by fitting the pressure separate 30 between the upper base 27 of the slide shaft 26
and the nut 26A which project upward from the upper base 27. It can be fixed in a compressed
state. The pressure separate 30 is a roughly cylindrical member, and a notch for inserting and
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removing the slide shaft 26 is formed in a radial direction, and the slide shaft 26 between the
upper base 27 and the nut 26A is cut away in the notch. , Restricting the upward movement of
the upper base 27 against the spring force of the spring 25 to fix the upper base 27 in a
pressurized state, while between the upper base 27 and the nut 26A. By moving the slide shaft
26 out of the notch, the upper base 27 can be moved upward by the spring force of the spring
25. The pressure can be determined substantially by the spring constant of the spring 25 to be
used and the length to be compressed. Therefore, the pressure can be freely selected by adjusting
the type of the spring 25 to be used and the length of the pressure separate 30. it can. As shown
in FIG. 6A, the concave portion 23c for holding a piezoelectric body having a rectangular
opening, which is a piezoelectric body holding portion of the lower jig 23, has substantially the
same shape as the piezoelectric body 6 so that the piezoelectric body 6 having a substantially
rectangular parallelepiped can be set. Also, tolerances are added to each of the outer diameter
dimension and the axial length dimension of the piezoelectric body 6 to form a slightly larger
size. Therefore, the piezoelectric body 6 can be inserted into the piezoelectric body holding
concave portion 23c of the lower jig 23 with a slight margin, and the piezoelectric body 6 can be
easily detached from the piezoelectric body holding concave portion 23c after pressing. I am able
to do it. When using for the purpose of bonding piezoelectric body 6 and case 2 with adhesive
31, or for the purpose of bonding piezoelectric body 6 and case 2 with adhesive 32, and case 2
and acoustic matching layer 4 with adhesive When using for the purpose of bonding, as shown in
FIG. 6B, the difference between the inner diameter of the case 2 and the outer diameter which is
the alignment portion of the lower jig 23 is within about 20 to 100 μm. Configure to
In that case, the dimensions of the upper jig 24A, as shown in FIG. 6C, include the portion to
which the piezoelectric body 6 and the case top 3 are bonded, that is, the end of the case top 3 It
is constructed so that 80% or more of can be pressurized. When the piezoelectric body 6 and the
case 2 are used only for bonding with the adhesive 31, the acoustic matching layer 4 is not
provided on the top surface 3 of the case 2, so the case 2 of the upper jig 24A is correspondingly
It is necessary to thicken the portion in contact with the top surface 3. After bonding and fixing
by pressure, low-temperature heat treatment is performed on the case 2 in a pressurized state by
the above-described ultrasonic vibrator manufacturing jig, which performs adhesion and stress
relaxation at an appropriate temperature and time as described later. . According to the
ultrasonic vibrator manufacturing jig configured as described above, the upper base 27 is
lowered while being guided by the two columns 29, and the upper jig 24 A is put on the upper
part of the ultrasonic vibrator 1, A pressing force is exerted in the axial direction of the ultrasonic
transducer 1 between the upper jig 24A and the lower jig 23 (in the case where the acoustic
matching layer 4 is not present), and the inner wall surface of the piezoelectric body 6 and the
case top 3 Are bonded and fixed with an adhesive 31, or (if there is an acoustic matching layer
4), the acoustic matching layer 4 and the outer wall surface of the case top surface 3 are bonded
and fixed with an adhesive 32. The inner wall surface of the case top 3 can be adhesively fixed
with an adhesive 31. That is, by applying a low temperature heat treatment to the case 2
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together with the jig for manufacturing the ultrasonic transducer in a pressurized state, the
piezoelectric body 6 and the case 2 are bonded (when the acoustic matching layer 4 is not
present) The function of pressure bonding with the agent 31 or (when the acoustic matching
layer 4 is present) pressure bonding of the piezoelectric body 6 and the case 2 with the adhesive
31 and bonding of the acoustic matching layer 4 and the case 2 The function of pressure
bonding with the agent 32 and the function of relieving stress by the low temperature heat
treatment (with or without the acoustic matching layer 4) can be exhibited. Therefore, by using
the above-mentioned manufacturing jig for ultrasonic transducers, a case material excellent in
low cost, strength, processability, gas resistance, corrosion resistance and stress corrosion
cracking resistance, for example, aluminum alloy die casting Using case 2 made by press molding
or cutting and created by seamless processing for fluid flowing in the channel, shape is stabilized
under low temperature heat treatment, stress corrosion cracking is eliminated, long-term
reliability and The ultrasonic transducers 17 and 18 can be manufactured with excellent
productivity. Also, in order to elastically press the case 2 between the upper jig 24A and the
lower jig 23 by the biasing force of the spring 25, the bonding operation is performed by
pressing the case 2 unreasonably while relieving stress gradually. Can.
In addition, by making the adhesive surfaces substantially uniform, the adhesive interfaces
become uniform, and high adhesive accuracy can be achieved. In addition, as a function of the jig
for manufacturing an ultrasonic transducer, the jig for manufacturing an ultrasonic transducer
for bonding, stress relaxation and shape correction is shared, and productivity improvement and
performance improvement are achieved by simultaneously performing a heat treatment process.
It can be realized. The present invention is not limited to the above embodiment, and can be
implemented in other various aspects. For example, the shape of the lower jig and the upper jig
can be changed depending on the purpose of use. Specifically, the manufacturing jig for the
ultrasonic transducer according to the first embodiment is used to bond the piezoelectric body 6
and the case 2, or the piezoelectric body 6 and the case 2, and the case 2 and the acoustic
matching layer 4. Assuming that the case top surface 3 can be pressurized, the lower jig 23 and
the upper jig 24A can be configured to be capable of pressing the thickness direction of the case
top surface 3. However, the present invention is not limited to this, and in the case of correcting
the shape of the case 2, the portion to be corrected is configured to be able to be pressurized by
the lower jig 23 and the upper jig 24B. For example, as an example in which the flange 5 of the
case 2 can be pressurized, a jig for manufacturing an ultrasonic transducer used in a method of
manufacturing an ultrasonic transducer according to a second embodiment of the present
invention will be described. The ultrasonic transducer manufacturing jig differs from the
ultrasonic transducer manufacturing jig according to the first embodiment in the shape of the
upper jig, and the other shapes, structures and the like in the ultrasonic vibration according to
the first embodiment. Since this is the same as the jig for manufacturing a child, basically the
description of the same part is omitted, and only different points will be described. The upper jig
24B of the ultrasonic transducer manufacturing jig according to the second embodiment is, as
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shown in FIGS. 7 and 8, a cylindrical portion 24a provided opposite to the lower jig 23 and a
cylindrical portion 24a. And a flange 24b which can project to the outer periphery of the lower
end of the case 2 and can be in contact with the flange 5 of the case 2. On the other hand, the
lower jig 23 supporting at least the bottomed case 2 is the same as the lower jig 23 of the jig for
manufacturing an ultrasonic transducer according to the first embodiment. FIG. 7A shows a state
in which the case 2 is not pressed in the jig for manufacturing an ultrasonic transducer according
to the second embodiment, and FIG. 7B shows a state in which the case 2 is pressed. In such a
configuration, the flange 5 of the case 2 can be pressurized between the flange 24 b of the upper
jig 24 B and the flange 23 b of the lower jig 23 so that the shape of the flange 5 can be
corrected.
That is, in the upper jig 24 B, first, as in the upper jig 24 A, as shown in FIG. 8B, the case where
the flat inner surface of the upper lid of the cylindrical portion 24 a is the bonding surface of the
case 2. The upper surface of the case 3 is processed so as to face or contact the upper surface of
the cylindrical case holding portion 23 a which is a pressure correction portion of the lower jig
23 with the upper surface 3 interposed therebetween with the required tolerance. The upper jig
24 </ b> B and the lower jig 23 can apply pressure. When used for bonding the piezoelectric
body 6 and the case 2 (without the acoustic matching layer 4), or bonding the piezoelectric body
6 and the case 2 together with the case 2 and the acoustic matching layer 4 When using for the
purpose of bonding (when there is the acoustic matching layer 4), as shown in FIG. 6 (b), the
cylindrical case holding portion 23a which is the alignment portion of the inner diameter of the
case 2 and the lower jig 23 The outer diameter is configured to be located within about 20 to
100 μm. In that case, the upper jig 24B is configured to be able to press 80% or more including
the end to be adhered as shown in FIG. 6C as in the upper jig 24A, that is, the end of the case top
3. ing. Thus, by making the pressure surface 80% or more, the load applied at the time of the
case correction can be small (the load per unit area may be small), and the heat distribution can
be made uniform and the whole surface can be corrected uniformly. Can be Further, with regard
to the upper jig 24 B, the pressed portion of the case top 3 used for bonding remains in contact
with the flange 23 b of the lower jig 23 described later via the flange 5 in the portion for
pressing the flange 5. Then, the flange 5 is stepped to form a flange 24b. Therefore, when the
length in the axial direction of the upper jig 24B is slightly longer than the length in the axial
direction of the case 2 and the upper jig 24B is placed on the case 2 placed on the lower jig 23
and pressed downward, The flange 24 b of the upper jig 24 B is prevented from contacting the
flange 5 of the case 2 before the flat inner surface of the upper lid of the jig 24 B contacts the
top surface 3 or the acoustic matching layer 4 of the case 2. When the acoustic matching layer 4
and the adhesive 32 do not exist, the axial length of the upper jig 24A is shortened by that
amount. The lower jig 23 is a portion to be corrected as shown in FIG. 8 (b), for example, in the
case of correcting the flange 5 of the case 2, as shown in FIG. In order to be able to press the
flange 5 of the case 2, a step process is performed so as to have a flat flange 23 b having at least
an area enough to abut the entire lower surface of the flange 5 of the case 2.
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Further, when it is desired to correct the side surface of the case 2 as well, as shown in FIG. 8 (b),
including the curved portion of the case top 3 where the stress is particularly likely to be
generated from the curved portion Lower jig 23 so that the inner peripheral surface and outer
peripheral surface of the case side surface can be held between the outer peripheral surface of
the side surface of lower jig 23 and the inner peripheral surface of the side surface of upper jig
24B so that 20% or more can be pressurized. And form the upper jig 24B. In this way, when
correcting the case shape, the shape can be efficiently corrected by correcting the shape
particularly near the curved portion. Therefore, the jig for manufacturing an ultrasonic
transducer according to the second embodiment includes the flat inner surface of the upper lid of
the upper jig 24 B and the cylindrical case holding portion of the lower jig 23 (when the acoustic
matching layer 4 is not provided). A pressing force acts on the case 2 so that the piezoelectric
body 6 is pressed against the case 2 through the adhesive 31 between the upper surface of the
housing 23a and the acoustic matching layer (when the acoustic matching layer 4 is present).
When a pressing force is exerted on the case 2 so that the piezoelectric body 6 and the
piezoelectric body 6 are pressed against the case 2 via the adhesives 31, 32, simultaneously, the
lower surface of the flange 24b of the upper jig 24B and the flange 23b of the lower jig 23B. The
pressing force acts to correct the shape of the flange 5 of the case 2 between the upper surface
and the upper surface. Further, as necessary, a pressing force is applied between the inner
peripheral surface of the side surface of the upper jig 24B and the outer peripheral surface of the
side surface of the lower jig 23 so as to correct the shape of the case side surface. That is, a
function of causing the piezoelectric body 6 and the case 2 to be pressure-bonded with the
adhesive 31 or performing the low-temperature heat treatment on the case 2 together with the
jig for manufacturing an ultrasonic transducer in the pressurized state A function of pressureadhering the piezoelectric body 6 and the case 2 with the adhesive 31 and pressure-adhering the
acoustic matching layer 4 and the case 2 with the adhesive 32, and a shape of the flange 5
(further side surface) of the case 2 And the function of relieving stress by low temperature heat
treatment. Therefore, in addition to the effects of the first embodiment, in order to elastically
press the case 2 between the upper jig 24 B and the lower jig 23 by the biasing force of the
spring 25, the stress is gradually increased. While relieving, the case 2 can be pressured
reasonably and the bonding operation can be performed simultaneously with the shape
correction operation. In addition, by making the adhesive surfaces substantially uniform, the
adhesive interfaces become uniform, and high adhesive accuracy can be achieved. After heat
treatment is performed in the jig for manufacturing an ultrasonic transducer according to the
first embodiment and the second embodiment, when heat treatment is performed, the heat
treatment is performed by putting it in a thermostatic chamber 61 as shown in FIG. It is
preferable to perform low temperature heat treatment for a time.
The constant temperature bath 61 includes a heater 62 disposed near the bottom, a jig mounting
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plate 33 made of stainless steel or the like on which a plurality of jigs 35 for manufacturing the
ultrasonic transducer can be mounted on the heater 62, and It is comprised so that it may be
equipped with the fan 34 arrange | positioned at the back surface on the opposite side to the
thermostat chamber front which takes in and out the jig for sound wave oscillators. In such a
configuration, the warm air warmed by the heater 62 is circulated by the fan 34 into the constant
temperature bath. Here, the warm air circulating constant temperature bath 61 is used, but any
method can be used without any problem as long as it can perform a predetermined heat
treatment. Regarding the low temperature heat treatment in the method of manufacturing an
ultrasonic transducer in the first embodiment and the second embodiment of the present
invention, the temperature profile of the low temperature heat treatment is the same as the heat
curing temperature profile of the adhesive 31, 32. It is preferable to do. Furthermore, by
simultaneously performing the low temperature heat treatment step and the heat curing step,
adhesion, shape correction, and stress relaxation can be simultaneously performed, and
productivity can be improved. As shown in FIG. 10, the temperature profile of the heat treatment
is constituted by a step 41 of raising the temperature to the heat treatment temperature T, a step
42 of holding the temperature at the heat treatment temperature T at a constant temperature,
and a step 43 of lowering the heat treatment temperature T Do. In the temperature raising step
41, it is desirable that the speed of temperature increase be greater than 0 ° C./min and not
more than 5 ° C./min. If the temperature is raised too quickly by exceeding 5 ° C./min, the
adhesive surface tends to be porous when the adhesive having high self-heating is used, and the
adhesive strength is lowered. Since the overall temperature does not rise constantly, heat
distribution may partially occur, distortion and warpage may occur, and the shape may differ
from the original. Also, in severe cases, cracking may occur. . The temperature holding step 42
for the low temperature heat treatment holds the heat treatment temperature T in the range of
150 to 300 ° C. When the heat treatment temperature T is less than 150 ° C., the effect of
flattening the amount of warpage of the case top surface is small, and when the heat treatment
temperature T exceeds 300 ° C., the effect of flattening the amount of warpage of the case top
surface also decreases. Cracks also occur in the stress corrosion cracking test. In addition, when
the heat treatment temperature T is 300 ° C. or less, it is not necessary to use special steel or
the like for the jig for manufacturing an ultrasonic transducer, and it is possible to cope with
ordinary stainless steel (for example, SUS304). Further, with regard to productivity, if the
temperature is as low as 300 ° C. or lower, which is as low as possible, the tact time is also
shortened, and a thermostatic chamber for heat treatment can be used, which is advantageous.
From the above, the heat treatment temperature is preferably in the range of 150 to 300 ° C.
Therefore, as the heat resistance of the jig for manufacturing an ultrasonic transducer, since the
temperature of the low temperature heat treatment is in the range of 150 to 300 ° C., it is
necessary to exceed 300 ° C. The heat treatment temperature may be constant within a range of
150 to 300 ° C., for example, 170 ° C., or may be varied within a range of 150 to 300 ° C. As
shown in FIG. 10, the temperature range required for the curing reaction of the adhesive is in the
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range of 150 to 200 ° C., and the temperature required for stress relaxation is 150 to 300 ° C.,
which is necessary for shape correction. The temperature is 150 to 300.degree. Therefore, the
heat-resistant temperature of the jig for manufacturing an ultrasonic transducer is 150 ° C. or
more. As described above, the heat treatment temperature required for shape correction and
stress relaxation is 150 ° C. or more. At temperatures below 150 ° C., almost no effect is seen.
As the heat-resistant temperature of the jig, more preferably, a temperature exceeding 300 ° C.
is required. The temperature holding time for holding the heat treatment temperature T in the
range of 150 to 300 ° C. in the above-mentioned step 42 for holding at a constant temperature
should be greater than 0 minutes and within 60 minutes. The effect of preventing stress
corrosion cracking even after 60 minutes of heat treatment is almost the same as within 60
minutes of heat treatment, and in some cases, stress corrosion cracking starts to occur when the
heat treatment time exceeds 60 minutes It is because there are times. In the step 43 for lowering
the temperature shown by the temperature profile in FIG. 10, the cooling rate for lowering the
temperature needs to be gradually cooled at a rate of more than 0 ° C./min and at most 1.0 °
C./min or less is there. This is because rapid cooling or cooling at a speed exceeding 1.0 °
C./min causes stress to be stored in case 2, causing warpage or deformation, or internal stress to
be stored, causing cracking in the stress corrosion cracking test. . Therefore, it is necessary to
gradually cool the cooling rate at 0 ° C./min or more and 1.0 ° C./min or less. In the heat
treatment steps according to the first and second embodiments of the present invention, the heat
treatment atmosphere is performed in an inert gas. As the material of case 2, stainless steel,
aluminum, aluminum alloy, titanium etc. has no passivation film in the inert gas atmosphere
because there is a passivation film formed on the surface, but like copper and brass In the case of
a metal which is easily oxidized, it is desirable to carry out the heat treatment in an inert gas.
Materials of the bottomed cylindrical metal case 2 capable of flattening the case top 3 according
to the first and second embodiments of the present invention include stainless steel, aluminum,
aluminum alloy, iron, iron Alloy, copper, brass or titanium is preferred. In particular, if these
materials are subjected to cutting or press integral molding (for example, integral molding using
deep drawing method with precision press), the processing oil is completely removed and heat
treated at low temperature, stress corrosion cracking It is possible to prevent. The thickness of
the case top 3 of the bottomed cylindrical metal case 2 according to the first and second
embodiments of the present invention is desirably greater than 0 mm and less than or equal to 1
mm. When the thickness of the case top 3 exceeds 1 mm, the low temperature heat treatment
reduces the effect of preventing stress corrosion cracking, and the ultrasonic sensitivity of the
ultrasonic transducer decreases. Therefore, the thickness of the case top 3 is preferably 1 mm or
less. As a jig for manufacturing an ultrasonic transducer used in a method of manufacturing an
ultrasonic transducer according to the first embodiment and the second embodiment of the
present invention, the lower jig 23 is an adhesive for the piezoelectric body 6 It can also serve as
a piezoelectric material holding jig for adhesive printing application for holding the piezoelectric
material 6 when applying 31. Also, the positioning part of the piezoelectric material 6 and the
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case 2 or the positioning part of the case 2 and the acoustic matching layer 4 May be included.
That is, as shown in FIG. 11, after the piezoelectric body 6 is set in the piezoelectric body holding
recess 23c of the lower jig 23, the adhesive is applied to the exposed upper surface of the
piezoelectric body 6 set in the piezoelectric body holding recess 23c. 31 is applied, and the case
2 in a state of being temporarily fixed to the case 2 by the adhesive 32 to which the acoustic
matching layer 4 is applied is set so as to cover the lower jig 23. The cylindrical case holder 23a
of the lower jig 23 has a specified negative tolerance (for example, a tolerance of 20 to 100 μm)
with respect to the inner diameter of the case 2, and the inner diameter of the case 2 is the
cylindrical case holder of the lower jig 23. It is set so as to be positioned with respect to 23a via a
gap of a dimension tolerance. That is, the bonding position of the piezoelectric body 6 to the top
surface 3 of the case 2 is the machining dimensional tolerance of the piezoelectric body holding
concave portion 23c of the lower jig 23 and the cylindrical case holding portion 23a and the
outer diameter dimensional tolerance of the piezoelectric body 6, The tolerance obtained by
adding the inner diameter dimensional tolerances is the maximum tolerance, which can be coped
with by changing the accuracy of each dimensional tolerance according to the required bonding
position accuracy. The upper jig 24 B includes the acoustic matching layer 4 and the positioning
portion 45 of the case 2.
The positioning portion 45 of the acoustic matching layer 4 is formed of an annular convex
portion 45 surrounding a circular concave portion provided on the inner side of the upper jig
24B opposite to the lower jig 23 provided with the piezoelectric body holding concave portion
23c for holding the piezoelectric body 6 The outer shape of the acoustic matching layer 4 is
arranged on the basis of the outer shape of the case top 3 so that the center of the acoustic
matching layer 4 substantially coincides with the outer shape of the case top 3. Since the
positional accuracy of the acoustic matching layer 4 and the case is determined by the
processing accuracy of the positioning section 45, the case outer shape and the acoustic
matching layer outer shape, the respective dimensional tolerances may be determined according
to the required position accuracy. Furthermore, in the ultrasonic transducer manufacturing jig
used in the method of manufacturing an ultrasonic transducer according to the first embodiment
and the second embodiment, the upper jigs 24 A and 24 B, for example, the upper jig 24 B or the
lower jig 23. Has a structure that does not completely cover the case surface with a jig for
manufacturing an ultrasonic transducer so that heat is uniformly transmitted during adhesion,
shape correction, and heat treatment for stress relaxation so that heat non-uniformity due to
place does not occur. Is preferred. That is, it is preferable that the lower jig 23 or the upper jigs
24A and 24B have a structure in which at least the piezoelectric body 6, the case 2, and the
acoustic matching layer 4 are not completely covered. When the adhesive 31 32 is heated and
cured, the adhesive surface with the adhesive 31 32 is configured so as not to completely cover
the adhesive surface so that the temperature becomes as uniform as possible. In particular, in the
case of using a constant temperature bath 61 such as a warm air circulation system or a radiant
heat system, heat completely adheres to the adhesives 31, 32 when the adhesives 31, 32 are
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completely covered with a jig for manufacturing an ultrasonic transducer. It is difficult to
transmit evenly and easily causes adhesion failure. In addition, from the viewpoint of stress
relaxation and shape correction, when cooling the case 2 together with the ultrasonic transducer
manufacturing jig, the heat capacity of the entire case is for ultrasonic transducer manufacturing
by slowly cooling the ultrasonic transducer manufacturing jig. Since the heat capacity of the jig is
close to that of the jig for manufacturing the ultrasonic transducer, the whole case is cooled
slowly and uniformly. On the other hand, when a part of the case 2 is rapidly cooled, the thermal
expansion coefficient of that part is different from that of the other parts, so that stress is
generated and cracks or cracks occur in the case 2. From the above point of view, as a jig for
manufacturing an ultrasonic transducer satisfying the functions of adhesion, stress relaxation,
and shape correction, as shown in FIG. 12, the entire case is not covered completely. Specifically,
as shown in FIG. 12, a plurality of through openings 24d of a predetermined width penetrating in
the thickness direction and extending in the axial direction are provided at predetermined
intervals on the side surface of the upper jig 24B corresponding to the case side surface. You
may do so.
The position of the through opening 24d is not limited to this, and may be appropriately
determined from the viewpoint of the rigidity of the case side surface and the uniformity of heat
conduction. It is preferable that the axial length of the through opening 24d be at least a length
such that the case side surface portion facing the adhesive 31 in the case 2 is exposed and the
adhesive 32 is exposed. The total area of the through openings 24d is such that the rigidity of
the side surface of the upper jig 24B is not impaired. The rectangular shape of the through
opening 24d facilitates processing. In the above embodiment, the springs 25 as an example of
the pressing member are provided in the upper jigs 24A and 24B, but may be provided in the
lower jig 23. As described above, by using a spring as the pressing member, the required
pressing force can be freely selected by changing the spring. In addition, as a jig for
manufacturing an ultrasonic transducer in the method of manufacturing an ultrasonic transducer
according to the above embodiment, the load resistance is 500 kgf / cm <2> or more. Since the
load required to correct the shape is at least 500 kgf / cm <2> or more, the load capacity of the
jig is also required 500 kgf / cm <2> or more. Further, as a jig for manufacturing an ultrasonic
transducer in the method of manufacturing an ultrasonic transducer according to the above
embodiment of the present invention, the thermal expansion coefficient of the base material used
for the jig is the heat of the base material of case 2 It is preferable to make it less than the
expansion coefficient. When the thermal expansion coefficient of the jig itself is larger than the
thermal expansion coefficient of the case base material, the lower jig 23 and the upper jig are
used when bonding or shape correction of the case 2 or stress relaxation is performed by the
expansion and contraction of the jig due to heat. In some cases, the tools 24A and 24B can not
pressurize the case 2 with an equal force as designed, or the heat can not be transmitted
uniformly, and the required effect may not be obtained. Therefore, the thermal expansion
coefficient of the base material used for the jig needs to be equal to or less than the thermal
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expansion coefficient of the case base material. The jig for manufacturing an ultrasonic
transducer in the method of manufacturing an ultrasonic transducer according to the above
embodiment of the present invention is preferably made of metal. In general, metal is excellent in
thermal conductivity, processability, and rigidity, so it is very easy to handle even when
producing a complicated shape as a jig for manufacturing an ultrasonic transducer. Further,
physical property values such as the thermal expansion coefficient and the thermal conductivity
can be appropriately selected according to the purpose of processing correction of the ultrasonic
transducer manufacturing jig and the like.
From the above, it is preferable to use a metal as a jig. Furthermore, as a jig for manufacturing an
ultrasonic transducer in the method of manufacturing an ultrasonic transducer according to the
above embodiment of the present invention, the hardness of the pressed portion needs to be
equal to or higher than the hardness of the case base material is there. It is necessary that
quenching be performed to increase the hardness or that a portion corresponding to the pressing
surface or the pressing portion of the jig for manufacturing an ultrasonic transducer have
hardness or hardness higher than that of the case material by using a material harder than the
case material. On the other hand, when the hardness of the pressed portion of the jig for
manufacturing the ultrasonic transducer is lower than the hardness of the case base material, the
jig for manufacturing the ultrasonic transducer itself conforms to the shape of the case, and the
case shape It is impossible to fix Therefore, the hardness of the pressing portion of the jig for
manufacturing an ultrasonic transducer is required to be equal to or higher than the hardness of
the case base material. Further, as a jig for manufacturing an ultrasonic transducer in the method
of manufacturing an ultrasonic transducer according to the above embodiment of the present
invention, the lower jig 23 constituting the jig for manufacturing an ultrasonic transducer, the
upper jig 24A or It is preferable from the viewpoint of improving the production efficiency to
have a structure in which at least two or more sets of 24 B and the spring 25 are combined. As
the configuration of the ultrasonic transducer manufacturing jig, as shown in FIGS. 13A and 13B,
an ultrasonic transducer manufacturing jig composed of the lower jig 23 and the upper jigs 24A
and 24B, For example, nine are arranged in a matrix of 3 rows × 3 columns, or, for example,
three in a row of 3 columns as shown in FIG. 14A and FIG. 14B. By arranging a plurality of lower
jigs 23 and upper jigs 24A and 24B, heat treatment and pressurization can be performed under
the same conditions at one time. As a specific method of pressing, the spring 25 can be fixed in a
compressed state by fitting the pressure separate 30 between the upper base 27 of each slide
shaft 26 and the nut 26A, and By inserting the pressure separates 30 between the upper end
locking ring 29A and the upper base 27, respectively, the pressure applied to the case 2 by each
ultrasonic transducer manufacturing jig may be maintained (see FIG. 22). In addition, the jig for
manufacturing the ultrasonic transducer can be compactly arranged, and the equipment such as
a thermostatic bath necessary for the heat treatment can be reduced according to the size
thereof, so that the equipment cost can also be reduced. . From the above viewpoints,
productivity can be improved by using a combination of many structures. In addition, as a jig for
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manufacturing an ultrasonic transducer in a method of manufacturing an ultrasonic transducer
according to a modification of the first and second embodiments of the present invention, an
upper jig and a support 26 are fixed. Instead, the upper jig 24E may be freely rockable with
respect to the support column 26, and the inclination angle with respect to the lower jig 23 may
be freely adjustable.
That is, first, as shown in FIG. 15 as a modification of the first embodiment, the upper jig 24E is
suspended and supported by the cylindrical case-like pressing portion 24f and the case pressing
portion 24f by the engagement projection 24h. And a cylindrical fixing portion 24 e fixed to the
support column 26. A steel ball 99 as an example of a ball member functioning as a rocking
fulcrum is disposed between the hemispherical recess 24g at the center of the upper surface of
the case pressing portion 24f and the spherical recess 26a at the lower end of the support 26.
The case pressing portion 24f can be freely inclined with respect to the above. Therefore, when
the column 26 is pressed toward the lower jig 23 through the upper jig 24E, the case pressing
portion 24f of the upper jig 24E swings around the steel ball 99 and is freely inclined with
respect to the column 26. The case top surface 3 and the lower surface of the case pressing
portion 24f are substantially parallel, and the pressing operation can be performed in this
parallel state. Therefore, the acoustic matching layer 4 and the case top 3 can be adhered and
fixed more accurately. Next, in FIG. 16 as a modification of the second embodiment, the side
surface of the case 2 and the flange 5 of the fixed portion 24e of the upper jig 24E are the
cylindrical case holding portion 23a of the lower jig 23 and the flange 23b. And a side pressing
portion 24j for pressing between them. Therefore, when the column 26 is pressed toward the
lower jig 23 through the upper jig 24E, the case pressing portion 24f of the upper jig 24E swings
around the steel ball 99 and is freely inclined with respect to the column 26. The case top
surface 3 and the lower surface of the case pressing portion 24f are substantially parallel, the
case side surface and the inner surface of the side surface pressing portion 24j are substantially
parallel, and the upper surface of the flange 5 and the lower surface of the side surface pressing
portion 24j are It becomes substantially parallel, and the pressing operation can be performed in
these parallel states. Therefore, the acoustic matching layer 4 and the case top surface 3 can be
adhered and fixed more accurately, and the shape of the side surface of the case 2 and the flange
5 can be corrected. Further, in FIGS. 17 and 18 as another modification of the second
embodiment, a plurality of through openings 24 d similar to the through opening 24 d are
provided in the side pressing portion 24 j of the fixing portion 24 e of the upper jig 24 E. Is
provided. 18 shows a state in which the hot air passes through the plurality of through openings
24d when the jig for manufacturing the ultrasonic transducer of FIG. 17 is disposed in the
thermostatic chamber 61, and the jig for manufacturing the ultrasonic transducer and the case 2
are heated by the hot air. This is described by the arrows. Therefore, when the hot air passes
through the plurality of through openings 24d, the temperature of the bonding surface with the
adhesive 31, 32 becomes as uniform as possible, and heat is uniformly transmitted at the time of
heat treatment for bonding, shape correction, and stress relaxation Uneven heat due to the
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location can be prevented.
That is, the plurality of through openings 24d are arranged along the direction of the hot air so
that the hot air can easily enter the jig for manufacturing the ultrasonic transducer from the
plurality of through openings 24d. , Case 2, adhesive 31, 32, piezoelectric 6, and acoustic
matching layer 4 (if there is acoustic matching layer 4) are easily heated uniformly, and the
ultrasonic transducer is manufactured by uniform heating. Can. Further, in the jig for
manufacturing an ultrasonic transducer according to the above another modification of the
second embodiment, the same slide as that shown in FIG. 5 (a), (b) or FIG. 7 (a), (b). The condition
before pressure application and the pressure condition are shown in FIGS. 19 and 20 using the
shaft 26, the support column 29, the upper base 27, the lower base 28, the nut 26A, the pressure
separate 30, and the like. In addition, in the jig for manufacturing an ultrasonic transducer
according to the other modified example of the second embodiment, the jig for manufacturing an
ultrasonic transducer including the lower jig 23 and the upper jig 24 E has, for example, three
rows × 3. FIGS. 21 and 22 show a state before pressing the case and a pressing state, which are
arranged in a matrix of nine rows. The basic configuration other than the upper jig 24E is the
same as that shown in FIG. In the pressurized state shown in FIG. 22, each ultrasonic vibration is
engaged by inserting a pressure separator 30 between the locking ring 29A at the upper end of
each support column 29 and the upper base 27 and fixing the spring 25 in a compressed state.
Pressure is simultaneously applied to the case 2 by the child manufacturing jig so as to maintain
the pressure state. Further, in the jig for manufacturing an ultrasonic transducer according to the
other modified example of the second embodiment, a jig for manufacturing an ultrasonic
transducer comprising the lower jig 23 and the upper jig 24 E is shown in FIGS. 23 and 24. For
example, three rows of three are arranged side by side as shown in FIG. The basic configuration
other than the upper jig 24E is the same as that of FIGS. 14 (a) and 14 (b). In the pressurized
state of FIG. 24, each ultrasonic transducer is manufactured by inserting the pressure separate
30 between the upper base 27 of each slide shaft 26 and the nut 26A and fixing the spring 25 in
a compressed state. The application of pressure to the case 2 with the jig is simultaneously
performed and the application of pressure is maintained. Further, as a jig for manufacturing an
ultrasonic transducer in a method of manufacturing an ultrasonic transducer according to a third
embodiment of the present invention, as shown in FIGS. 25 to 27, a jig for manufacturing each
ultrasonic transducer Can be subjected to pressure treatment one by one. That is, in the
ultrasonic transducer manufacturing jig according to the third embodiment, the upper jig 24A is
suspended and supported inside by the slide shaft 26, and the cylindrical outer cylinder member
50 having a large number of circular through openings 50d; A support base 51 on which the
lower jig 23 is mounted and the outer cylinder member 50 is mounted, and an outer cylinder
member provided opposite to the support base 51 with respect to the central axis of the outer
cylinder member 50 And 50 an engagement hook 52 engageable in the engagement recess 50c.
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The inner diameter of the outer cylindrical member 50 is formed to be slightly larger than the
outer diameter of the lower jig 23 so that the lower jig 23 is fitted by the outer cylindrical
member 50. FIG. 26 shows a state before the outer cylinder member 50 is engaged with and held
by the support base 51 by the engagement hooks 52 and 52 in the ultrasonic transducer
manufacturing jig according to the third embodiment. FIG. 27 shows the jig for manufacturing an
ultrasonic transducer according to the third embodiment, wherein the engagement hooks 52, 52
are rotated with respect to the support table 51, and their tips are engaged with the engagement
recess 50c of the outer cylinder member 50. A state in which the outer cylinder member 50 is
engaged with and held by the support base 51 is shown by being engaged inside. The jig for
manufacturing an ultrasonic transducer according to the third embodiment is, as shown in FIGS.
28 and 29, the outer cylinder member by being put in the thermostatic bath 61 as described
above in the engaged and held state of FIG. Hot air can pass through the plurality of 50 through
openings 50d in the arrow direction. As a result, by individually arranging the ultrasonic
transducer manufacturing jig containing the individual cases 2 in the constant temperature bath
61, the heat capacity of each ultrasonic transducer manufacturing jig can be equalized. The
temperature of the bonding surface of each case 2 with the adhesives 31 and 32 becomes as
uniform as possible, and heat is uniformly transmitted at the time of heat treatment for adhesion,
shape correction, and stress relaxation. Non-uniform heating during heat treatment due to
differences can be prevented. Further, by drilling a plurality of holes, it is possible to confirm the
state of the pressure (adhesion) portion. Further, as a jig for manufacturing an ultrasonic
transducer in a method of manufacturing an ultrasonic transducer according to a fourth
embodiment of the present invention, as shown in FIG. The lower jig 23C may be coupled with a
screw to press the case 2. According to this embodiment, not by the engagement hook as in the
previous embodiment, but by the screw connection by relatively rotating the upper jig 24C and
the lower jig 23C, the pressing operation and the reverse rotation are applied. There is an effect
that the release operation can be performed, and the connection and the release of the
connection between the upper jig 24C and the lower jig 23C can be easily automated. Further,
since no spring is used, the number of parts of the jig can be reduced, which is effective for cost
reduction. Furthermore, since no spring is used, the overall compactness of the jig is possible,
and the heat capacity of the jig is also reduced, leading to a reduction in process costs such as
shortening of temperature rise and temperature drop time and reduction in size of thermostatic
bath. . EXAMPLES The effects of the present invention will be described by way of specific
examples.
(Example 1) A low-temperature heat treatment is performed in a state in which the bonding
surface is pressurized, and the pressure bonding of the piezoelectric body and the case is
performed. In order to confirm the effect of stress relaxation of the case, a study was conducted
using the jig structure shown in FIG. 5 (a). After the piezoelectric body was placed on the lower
jig, it was set on a screen printing machine and an adhesive was applied to about 20 μm on the
upper surface of the piezoelectric body. The lower jig holding the piezoelectric body to which the
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adhesive was applied was removed from the printing machine, the case was placed on the lower
jig, and placed on the lower base. After that, the upper base of the jig was lowered little by little,
and the top surface of the case, which is the adhesive surface, was pressed and fixed by pressure
separation. The case used this time is a hollow cylindrical case with a diameter of 11.8 mm, a
height of 5.5 mm, and a flange made of SUS304 with a thickness of 0.2 mm. It heat-treated by
putting into a thermostat in the state pressurized. The temperature profile of the heat treatment
was maintained at a specific temperature for 30 minutes after the temperature raising rate was
increased at 3 ° C./min. Then, it cooled to normal temperature by 0.5 degreeC / min, and took
out from the thermostat. The holding temperature was changed by 10 ° C. from 100 to 350 °
C. to study. Regarding the adhesive strength, the adhesive strength was measured using a peel
tester, and 300 kgf / cm <2> or more was accepted. For stress relaxation, the above-mentioned
pressurization and heat treatment were similarly applied without applying an adhesive to the
piezoelectric body, and a stress corrosion cracking test was performed. The stress corrosion
cracking test was carried out at 42% magnesium chloride 143 ° C. for 48 hours, then taken out
and observed under a microscope, and those without cracks were regarded as pass. For the case
used this time, it has been confirmed that those which have not been heat-treated will break in
the stress corrosion cracking test. The result examined above is shown in FIG. As for adhesive
strength, 300 kgf / cm <2> or more was obtained in the range of 150 to 200 ° C. using an
epoxy-based adhesive. If the temperature is less than 150 ° C., the chemical reaction of the
adhesive is insufficient. If the temperature exceeds 200 ° C., the adhesive becomes porous and
the adhesive starts to carbonize, so that a decrease in adhesive strength is observed. On the other
hand, about stress relaxation, stress corrosion cracking was suppressed in the range of 150-300
° C, and it turned out that it is effective. Further, from the results of FIG. 31, the pressure curing
temperature range of the adhesive that can obtain adhesive strength of 300 kgf / cm <2> or
more is 150 to 200 ° C., and the temperature range in which stress corrosion cracking is
suppressed by stress relaxation is 150 to 50 Since the temperature is 300 ° C., the temperature
profile for obtaining both effects simultaneously in the same step is 150 to 200 ° C.
(Example 2) The lower jig and the upper jig provided opposite to the lower jig, and by performing
the low-temperature heat treatment in a state where the adhesive surface is pressurized, the
pressure bonding of the piezoelectric body and the case and In order to confirm the effects of
stress relaxation and shape correction of the case, a study was conducted using the jig structure
shown in FIG. 7 (a). After the piezoelectric body was placed on the lower jig, it was set on a
screen printing machine and an adhesive was applied to about 20 μm on the upper surface of
the piezoelectric body. The lower jig holding the piezoelectric body to which the adhesive was
applied was removed from the printing machine, the case was placed on the lower jig, and placed
on the lower base. After that, the upper base of the jig was lowered little by little, and the top
surface of the case, which is the adhesive surface, was pressed and fixed by pressure separation.
The case used this time is a hollow cylindrical case with a diameter of 11.8 mm, a height of 5.5
mm, and a flange manufactured using 0.2 mm thick SUS304. It heat-treated by putting into a
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thermostat in the state pressurized. The temperature profile of the heat treatment was
maintained at a specific temperature for 30 minutes after the temperature raising rate was
increased at 3 ° C./min. Then, it cooled to normal temperature by 0.5 degreeC / min, and took
out from the thermostat. The holding temperature was changed by 10 ° C. from 100 to 350 °
C. to study. Regarding the adhesive strength, the adhesive strength was measured using a peel
tester, and 300 kgf / cm <2> or more was accepted. For stress relaxation, the above-mentioned
pressurization and heat treatment were similarly applied without applying an adhesive to the
piezoelectric body, and a stress corrosion cracking test was performed. The stress corrosion
cracking test was carried out at 42% magnesium chloride 143 ° C. for 48 hours, then taken out
and observed under a microscope, and those without cracks were regarded as pass. For the case
used this time, it has been confirmed that those without heat treatment will crack in the stress
corrosion cracking test. Moreover, about shape correction, the case top surface and the flange
surface were pressurized using the jig with the case alone, and heat treatment was performed
according to the above-mentioned temperature profile. At this time, the applied pressure was
constant at 500 kgf / cm <2>. The case top surface was 5 μm or less, and the flange surface was
considered acceptable if the flange surface was corrected within the range of 85 to 95 degrees
with respect to the case side surface. The result examined above is shown in FIG. As for adhesive
strength, 300 kgf / cm <2> or more was obtained in the range of 150 to 200 ° C. using an
epoxy-based adhesive. When the temperature is less than 150 ° C., the chemical reaction of the
adhesive is insufficient, and when it is 200 ° C. or more, the adhesive strength decreases
because the adhesive becomes porous and becomes carbonized.
On the other hand, about stress relaxation, stress corrosion cracking was suppressed in the range
of 150-300 ° C, and it turned out that it is effective. Moreover, the effect was seen in the range
of 150-250 degreeC regarding shape correction. From the results of FIG. 32, the pressure curing
temperature range of the adhesive that can obtain adhesive strength of 300 kgf / cm <2> or
more is 150 to 200 ° C., and the temperature range where stress corrosion cracking is
suppressed by stress relaxation is 150 to 300 ° C, because the shape correction effect is 150 to
250 ° C., to obtain the effects of stress relaxation and shape correction, the temperature profile
for obtaining all effects simultaneously in the same process is 150 to 150 ° C. It is 200 ° C.
Example 3 A lower jig and an upper jig provided opposite to the lower jig, and subjected to lowtemperature heat treatment in a state where the adhesive surface is pressurized, pressure
bonding of the piezoelectric body and the case and In order to confirm the effects of stress
relaxation and shape correction of the case, a study was conducted using the jig structure shown
in FIG. 7 (a). After the piezoelectric body was placed on the lower jig, it was set on a screen
printing machine and an adhesive was applied to about 20 μm on the upper surface of the
piezoelectric body. The lower jig holding the piezoelectric body to which the adhesive was
applied was removed from the printing machine, the case was placed on the lower jig, and placed
on the lower base. After that, the upper base of the jig was lowered little by little, and the top
surface of the case, which is the adhesive surface, was pressed and fixed by pressure separation.
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The case used this time is a hollow cylindrical case with a diameter of 11.8 mm, a height of 5.5
mm, and a flange made of SUS304 with a thickness of 0.2 mm. It heat-treated by putting into a
thermostat in the state pressurized. The temperature profile of the heat treatment was
maintained at 150 ° C. for 30 minutes after raising the temperature raising rate at 3 ° C./min.
Thereafter, the cooling rate was changed at 0.1 to 2.0 ° C./min to cool to room temperature,
and the substrate was taken out of the thermostatic chamber. Regarding the adhesive strength,
the adhesive strength was measured using a peel tester, and 300 kgf / cm <2> or more was
accepted. For stress relaxation, the above pressure and heat treatments were similarly applied
without applying an adhesive to the piezoelectric body, and a stress corrosion cracking test was
performed. The stress corrosion cracking test was carried out at 42% magnesium chloride 143 °
C. for 48 hours, then taken out and observed under a microscope, and those without cracks were
regarded as pass. For the case used this time, it has been confirmed that those which have not
been heat-treated will break in the stress corrosion cracking test. Moreover, about shape
correction, the case top surface and the flange surface were pressurized using the jig with the
case alone, and heat treatment was performed according to the above-mentioned temperature
profile.
At this time, the applied pressure was constant at 500 kgf / cm <2>. If the flange surface was
corrected within the range of 85 to 95 degrees with respect to the case side surface with respect
to the case top surface within 5 μm, it was regarded as pass. The above examination results are
shown in FIG. From the results of FIG. 33, the cooling rate of the adhesive that can obtain
adhesive strength of 300 kgf / cm <2> or more is 1.1 ° C./min or less, and the cooling rate at
which stress corrosion cracking is suppressed by stress relaxation is 1.0 °. C / min or less, the
shape correction effect is 1.2 ° C./min or less. Therefore, in order to obtain the effects of stress
relaxation and shape correction, the cooling rate is 1.0 ° C./min or less, and the cooling rate to
obtain all the effects simultaneously in the same step is 1.0 ° C./min or less . Example 4 A lower
jig and an upper jig provided opposite to the lower jig, and effecting stress relaxation and shape
correction of the case by performing low-temperature heat treatment while the adhesive surface
is pressurized In order to confirm, it examined using the jig structure shown to Fig.7 (a). The case
used this time is a hollow cylindrical case with a diameter of 11.8 mm, a height of 5.5 mm, and a
flange made of SUS304 with a thickness of 0.2 mm. It heat-treated by putting into a thermostat
in the state pressurized. The temperature profile of the heat treatment was maintained at 150 °
C. for 30 minutes after raising the temperature raising rate at 3 ° C./min. Then, it cooled to
normal temperature with the cooling rate of 0.5 degree-C / min, and took out from the
thermostat. For stress relaxation, the above-mentioned pressurization and heat treatment were
performed, and a stress corrosion cracking test was performed. The stress corrosion cracking
test was carried out at 42% magnesium chloride 143 ° C. for 48 hours, then taken out and
observed under a microscope, and those without cracks were regarded as pass. For the case used
this time, it has been confirmed that those which have not been heat-treated will break in the
stress corrosion cracking test. Moreover, about shape correction, the case top surface and the
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flange surface were pressurized using the jig with the case alone, and heat treatment was
performed according to the above-mentioned temperature profile. If the flange surface was
corrected within the range of 85 to 95 degrees with respect to the case side surface with respect
to the case top surface within 5 μm, it was regarded as pass. At this time, the applied pressure
was changed to 300 to 800 kgf / cm <2> to examine the applied pressure required for the shape
correction. The above examination results are shown in FIG. From the results of FIG. 34, with
regard to stress corrosion cracking, there is no dependency on applied pressure in the range of
300 to 800 kgf / cm <2>, and stress relaxation is performed.
Moreover, in shape correction, it turned out that shape correction of a case top | upper surface
and a flange surface can be performed by applying the applied pressure 500 kgf / cm <2> or
more. As described above in detail, in order to achieve the above object, the present invention is
configured as follows. According to the first aspect of the present invention, there is provided an
ultrasonic transducer or a piezoelectric body comprising at least a bottomed cylindrical metal
case, and a piezoelectric body provided with an adhesive on one surface of the case. An
ultrasonic transducer manufacturing jig for manufacturing an ultrasonic transducer, wherein an
acoustic matching layer is provided by an adhesive on a surface opposite to one surface of the
case provided with an agent, at least holding the piezoelectric body The piezoelectric holding
recess, the piezoelectric holding recess, and the piezoelectric held in the piezoelectric holding
recess are bonded to the inner surface of the one surface of the case via the adhesive. A lower jig
having a case holding portion capable of holding the held state, and an upper jig disposed
opposite to the lower jig and capable of holding the case between the lower jig; Between the
above and the upper jig, The pressurized state in which the piezoelectric body is pressurized via
the adhesive on the one side of the case, or the piezoelectric body is pressurized on the one side
of the case via the adhesive and opposite side thereof It is possible to maintain the pressure
applied to the acoustic matching layer through the adhesive on the surface thereof, and perform
the low-temperature heat treatment in this pressurized state, so that the piezoelectric and the
case are adhered by the adhesive. The function of pressure bonding, or the function of pressure
bonding the piezoelectric body and the case with the adhesive and the pressure bonding of the
acoustic matching layer with the case with the adhesive, and stress by the low temperature heat
treatment To provide a jig for manufacturing an ultrasonic transducer characterized by
exhibiting a function of relieving stress. According to the second aspect of the present invention,
there is provided an ultrasonic transducer or a piezoelectric body comprising at least a bottomed
cylindrical metal case and a piezoelectric body provided with an adhesive on one surface of the
case. An ultrasonic transducer manufacturing jig for manufacturing an ultrasonic transducer,
wherein an acoustic matching layer is provided by an adhesive on a surface opposite to one
surface of the case provided with an adhesive, comprising: a lower jig for supporting at least the
case; Applying pressure so as to sandwich the upper jig and the lower jig from both sides of one
surface of the case with respect to the upper jig provided opposite to the lower jig and the
thickness direction of the case A pressing member for applying a possible pressing force to the
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upper jig and the lower jig, and the pressing member performs the pressing on the one surface of
the case between the lower jig and the upper jig. Above through adhesive The piezoelectric body
is pressed to the one surface of the case via the adhesive under pressure, or the pressure is
applied to the electrical conductor, and the acoustic matching layer is applied to the opposite
surface via the adhesive. A function of pressure bonding the piezoelectric body and the case with
the adhesive or performing pressure bonding of the piezoelectric body and the case with the
adhesive by performing low-temperature heat treatment in a pressurized state. Together with the
function of pressure bonding the acoustic matching layer and the case with the adhesive, the
function of correcting the shape of the case, and the function of relieving stress by the low
temperature heat treatment Provided is a jig for manufacturing a vibrator.
According to the third aspect of the present invention, the jig for producing an ultrasonic
transducer according to the first or second aspect, wherein the temperature profile of the lowtemperature heat treatment is the same as the heat curing temperature profile of the adhesive
provide. According to a fourth aspect of the present invention, the ultrasonic wave according to
any one of the first to third aspects, the lower jig has a positioning portion for positioning and
holding at least the piezoelectric body with respect to the case. Provided is a jig for
manufacturing a vibrator. According to the fifth aspect of the present invention, the lower jig has
a positioning portion for positioning and holding at least the piezoelectric body with respect to
the case, and applies the adhesive to at least the piezoelectric body. The jig for manufacturing an
ultrasonic transducer according to any one of the first to fourth aspects, which functions as a
piezoelectric material holding jig for adhesive application. According to a sixth aspect of the
present invention, the upper jig includes the positioning portion for positioning and holding at
least the acoustic matching layer with respect to the case. Provided is a jig for manufacturing an
acoustic transducer. According to a seventh aspect of the present invention, the ultrasonic wave
according to the first or second aspect has a plurality of through openings through which the
upper jig penetrates at least in the thickness direction and through which hot air can be passed
during heat treatment. Provided is a jig for manufacturing a vibrator. According to the eighth
aspect of the present invention, the lower jig or the upper jig is provided with a pressing member
for pressing the lower jig and the upper jig with the case interposed therebetween. The jig for
manufacturing an ultrasonic transducer according to any one aspect of 7 is provided. According
to a ninth aspect of the present invention, there is provided the jig for producing an ultrasonic
transducer according to the eighth aspect, wherein the pressing member is a spring. According to
the tenth aspect of the present invention, the inner surface of the upper surface of the upper jig
and the outer surface of the upper surface of the lower jig include the curved portion of the case
on the upper surface of the case. The jig for manufacturing an ultrasonic transducer according to
any one of the first to ninth aspects, which is dimensioned so as to apply a pressing load in an
area of 20% or more from the part. According to an eleventh aspect of the present invention, the
jig for manufacturing an ultrasonic transducer used for the heat treatment has the load
resistance of 500 kgf / cm <2> or more according to any one of the first to tenth aspects. The
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present invention provides a jig for manufacturing an ultrasonic transducer. [0090] According to
a twelfth aspect of the present invention, the jig used for the heat treatment has a heat resistant
temperature exceeding 300 ° C., according to any one of the first to eleventh aspects. Provide a
jig.
According to a thirteenth aspect of the present invention, the jig for manufacturing an ultrasonic
transducer used for the heat treatment has any one of the first to eleventh aspects in which the
thermal expansion coefficient is equal to or less than the thermal expansion coefficient of the
material of the case. A jig for manufacturing an ultrasonic transducer according to one aspect is
provided. According to a fourteenth aspect of the present invention, there is provided the jig for
manufacturing an ultrasonic transducer according to any one of the first to eleventh aspects,
wherein the upper jig and the lower jig are made of metal. . According to a fifteenth aspect of the
present invention, the jig for manufacturing an ultrasonic transducer according to any one of the
first to eleventh aspects, wherein the hardness of the pressed portion is equal to or higher than
the hardness of the material of the case. provide. According to a sixteenth aspect of the present
invention, there is provided the jig for manufacturing an ultrasonic transducer according to any
one of the first to fifteenth aspects, comprising at least a plurality of sets of the lower jig and the
upper jig. According to a seventeenth aspect of the present invention, at least a bottomed
cylindrical metal case is provided between the lower jig of the jig for manufacturing an ultrasonic
transducer and the upper jig provided opposite to the lower jig. Arranged to be supported by the
lower jig, and then press the piezoelectric body between the lower jig and the upper jig with an
adhesive on one surface of the case and perform low-temperature heat treatment in the
pressurized state. When applied, pressure bonding of the piezoelectric body and the case is
performed with the adhesive, stress is relaxed by the low temperature heat treatment, or a
piezoelectric body is formed on one surface of the case via the adhesive. The piezoelectric body
and the case are pressure bonded with the adhesive by pressurizing the acoustic matching layer
through the adhesive on the opposite side and performing a low temperature heat treatment in
the pressurized state. Together with the acoustic matching layer and the An ultrasonic transducer
in which the piezoelectric body is provided by the adhesive on the one surface of the case by
relieving stress by the low-temperature heat treatment simultaneously with pressure bonding
with the adhesive. An ultrasonic transducer for manufacturing an ultrasonic transducer, wherein
a piezoelectric body is provided by the adhesive on the one surface of the case and the acoustic
matching layer is provided by the adhesive on the opposite surface of the one surface Provide a
manufacturing method of According to an eighteenth aspect of the present invention, at least a
cylindrical metal case with a bottom is provided between a lower jig of an ultrasonic transducer
manufacturing jig and an upper jig provided opposite to the lower jig. The lower jig and the
upper jig are arranged to be supported by the lower jig, and then the upper jig and the lower jig
are placed from both sides of one surface of the case with respect to the thickness direction of
the case. The pressure is applied by a pressure member so that the piezoelectric body is pressed
with an adhesive on one surface of the case and low-temperature heat treatment is performed in
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the pressure state to press the piezoelectric body and the case. Simultaneously with pressure
bonding with the adhesive, stress is relieved by the low temperature heat treatment, or the
piezoelectric is pressed to one surface of the case through the adhesive and bonded to the
opposite surface thereof Pressure the acoustic matching layer through the agent and By
performing a low temperature heat treatment in a pressurized state, the pressure bonding of the
piezoelectric body and the case with the adhesive and the pressure bonding of the acoustic
matching layer and the case with the adhesive are simultaneously performed. An ultrasonic
transducer in which the piezoelectric body is provided by the adhesive on the one surface of the
case by relieving stress by low temperature heat treatment, or the piezoelectric body is the one
surface of the case using the adhesive. The present invention provides a method of
manufacturing an ultrasonic transducer, which is provided on the surface of the substrate and
the acoustic matching layer is provided by the adhesive on the surface opposite to the one
surface thereof.
According to a nineteenth aspect of the present invention, in the method of producing an
ultrasonic transducer according to the seventeenth or eighteenth aspect, the temperature profile
of the low temperature heat treatment is the same as the heat curing temperature profile of the
adhesive. provide. According to the twentieth aspect of the present invention, when at least the
bottomed cylindrical metal case is arranged to be supported by the lower jig between the lower
jig and the upper jig, the lower jig is: The manufacturing method of the ultrasonic transducer
according to any one of the seventeenth to nineteenth aspects for positioning and holding at
least the piezoelectric body is provided. According to a twenty-first aspect of the present
invention, the lower jig is arranged between the lower jig and the upper jig before at least the
bottomed cylindrical metal case is supported by the lower jig. The method of manufacturing an
ultrasonic transducer according to any one of the seventeenth to twenty-third aspects, wherein
the adhesive is applied to the piezoelectric body supported by the lower jig, using the
piezoelectric body holding jig for adhesive application. I will provide a. According to a twentysecond aspect of the present invention, the upper jig is disposed between the lower jig and the
upper jig such that at least the bottomed cylindrical metal case is supported by the lower jig. The
method of manufacturing an ultrasonic transducer according to any one of the seventeenth and
twenty-first aspects for positioning and holding at least the acoustic matching layer is provided.
According to the twenty-third aspect of the present invention, when the low-temperature heat
treatment is performed, hot air passes through the plurality of through openings penetrating in
the thickness direction of the upper jig, and the jig for manufacturing the ultrasonic transducer
and the case The manufacturing method of the ultrasonic transducer | vibrator as described in
any one aspect | mode of 17-22 which heats is provided. According to the twenty-fourth aspect
of the present invention, the piezoelectric member is pressed by the pressing member to the one
surface of the case via the adhesive between the lower jig and the upper jig. The method of
manufacturing an ultrasonic transducer according to any one of the seventeenth to twenty-third
aspects is provided. According to a twenty-fifth aspect of the present invention, the pressing
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member is a spring, and the biasing force of the spring causes the one surface of the case to be
spaced between the lower jig and the upper jig. A method of manufacturing an ultrasonic
transducer according to a twenty-fourth aspect, wherein the piezoelectric body is pressed
through an adhesive. It is to be noted that the effects possessed by the embodiments can be
exhibited by appropriately combining any of the above-described various embodiments.
According to the ultrasonic vibrator manufacturing jig and the ultrasonic vibrator manufacturing
method according to the present invention, the pressing force between the upper jig and the
lower jig is the axis of the ultrasonic vibrator. Or (in the absence of an acoustic matching layer)
adhesively fix the piezoelectric body and one surface of the case, for example, the inner wall
surface of the top surface, with an adhesive (or The acoustic matching layer and the outer wall
surface of the case top surface can be bonded and fixed with an adhesive, and the piezoelectric
body and the inner wall surface of the case top surface can be bonded and fixed with an
adhesive.
That is, by subjecting the case to a low temperature heat treatment with the jig for
manufacturing an ultrasonic transducer in a pressurized state, the piezoelectric body and the
case are pressurized with an adhesive (when there is no acoustic matching layer) Function of
bonding, or (when an acoustic matching layer is present) pressure bonding of the piezoelectric
body and the case with an adhesive and pressure bonding of the acoustic matching layer and the
case with an adhesive; The low temperature heat treatment can exert the function of relieving
stress by the presence or absence of the matching layer. Therefore, by using the abovementioned manufacturing jig for ultrasonic transducers, a case material excellent in low cost,
strength, workability, gas resistance, corrosion resistance and stress corrosion cracking
resistance, for example, aluminum alloy die casting Shape is stabilized under low temperature
heat treatment using a case made by press forming or cutting process and created by seamless
process to fluid flowing in the channel, and the shape is stable and stress corrosion cracking is
eliminated, long-term reliability and excellent An ultrasonic transducer can be manufactured with
high productivity. In addition, as a function of the jig for manufacturing an ultrasonic transducer,
by sharing the jig for manufacturing an ultrasonic transducer for performing adhesion, stress
relaxation and shape correction, and simultaneously performing a heat treatment process,
productivity improvement and performance improvement can be achieved. Can be realized.
When the case is elastically pressed between the upper jig and the lower jig by the biasing force
of a pressure member, for example, a spring, the case is pressured without appreciable stress
while being relaxed gradually. The bonding operation can be performed. In addition, by making
the adhesive surfaces substantially uniform, the adhesive interfaces become uniform, and high
adhesive accuracy can be achieved. Further, suppression of stress corrosion cracking and shape
correction effect by pressurization and heat treatment can be obtained by the stress relaxation
effect by heat treatment. In addition, when the adhesion curing profile and the temperature
profile of heat treatment are adjusted to be the same, the production efficiency can be further
improved. Furthermore, if the lower jig and the upper jig constituting the jig and, if necessary,
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the pressing member are combined as one set, at least two or more sets are simultaneously
pressurized and heat-treated, the production is performed. It is possible to further improve the
quality and uniformity. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an external perspective
view of an ultrasonic transducer manufactured by the jig for manufacturing an ultrasonic
transducer according to a first embodiment of the present invention. FIG. 2 is a cross-sectional
view of an ultrasonic transducer manufactured by the jig for manufacturing an ultrasonic
transducer according to the first embodiment of the present invention.
FIG. 3 is a cross-sectional view of an ultrasonic flowmeter using the ultrasonic transducer of FIGS.
1 and 2; 4 is a longitudinal sectional view of the ultrasonic flowmeter of FIG. 3; FIGS. 5 (a) and 5
(b) are perspective views showing a state before pressing and a pressing state, respectively, in
the jig for manufacturing an ultrasonic transducer according to the first embodiment of the
present invention. FIGS. 6 (a), (b) and (c) are perspective views of the state in which the
piezoelectric body is inserted into the lower jig which is the jig for manufacturing an ultrasonic
transducer according to the first embodiment of the present invention; It is a perspective view of
the state which covered the case to the lower jig, and a perspective view of only a case. FIGS. 7
(a) and 7 (b) are perspective views showing a state before pressing and a pressing state,
respectively, in the jig for manufacturing an ultrasonic transducer according to the second
embodiment of the present invention. FIGS. 8A and 8B are an exploded perspective view and a
partial sectional perspective view showing a lower jig and an upper jig, respectively, of the
ultrasonic transducer manufacturing jig according to the second embodiment of the present
invention. . FIG. 9 is a view showing a thermostatic bath used in the method of manufacturing an
ultrasonic transducer according to the embodiment of the present invention. FIG. 10 is a view
showing a temperature profile of heat treatment in the method of manufacturing an ultrasonic
transducer according to the embodiment of the present invention. 11 is a partial cross-sectional
perspective view showing a disassembled state of the ultrasonic transducer manufacturing jig
and the ultrasonic transducer according to the embodiment of the present invention and showing
a positioning portion of an upper jig of the ultrasonic transducer manufacturing jig, etc. is there.
FIG. 12 is a view showing a jig for manufacturing an ultrasonic transducer according to a
modification of the embodiment of the present invention. FIGS. 13 (a) and 13 (b) are diagrams
showing a state in which a large number of the ultrasonic transducer manufacturing jigs
according to the first and second embodiments of the present invention are placed in a
thermostatic chamber. . FIGS. 14 (a) and 14 (b) are views showing a state in which a large
number of the ultrasonic vibrator manufacturing jigs according to the first and second
embodiments of the present invention are placed in a thermostatic chamber. . FIG. 15 is a crosssectional view showing a jig for manufacturing an ultrasonic transducer in accordance with a
modified example of the first embodiment of the present invention (illustration of adhesive is
omitted). FIG. 16 is a cross-sectional view showing a jig for manufacturing an ultrasonic
transducer in accordance with a modified example of the second embodiment of the present
invention (illustration of adhesive is omitted). FIG. 17 is a cross-sectional view showing a jig for
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manufacturing an ultrasonic transducer in accordance with another modified example of the
second embodiment of the present invention (illustration of adhesive is omitted). 18 is a crosssectional view showing a jig for manufacturing an ultrasonic transducer according to the
modified example of FIG. 17 (illustration of an adhesive is omitted). FIG. 19 is a cross-sectional
view showing a jig for manufacturing an ultrasonic transducer according to a modification of the
embodiment of the present invention. FIG. 20 is a cross-sectional view showing a jig for
manufacturing an ultrasonic transducer according to a modification of the embodiment of the
present invention.
FIG. 21 is a cross-sectional view showing a jig for manufacturing an ultrasonic transducer
according to a modification of the embodiment of the present invention. FIG. 22 is a crosssectional view showing a jig for manufacturing an ultrasonic transducer according to a
modification of the embodiment of the present invention. FIG. 23 is a cross-sectional view
showing a jig for manufacturing an ultrasonic transducer according to a modification of the
embodiment of the present invention. FIG. 24 is a cross-sectional view showing a jig for
manufacturing an ultrasonic transducer according to a modification of the embodiment of the
present invention. FIG. 25 is a perspective view showing a jig for manufacturing an ultrasonic
transducer according to a third embodiment of the present invention. FIG. 26 is a partial crosssectional view showing a state before the outer cylinder member is engaged with and held by the
support base by the engagement hook in the jig for manufacturing an ultrasonic transducer
according to the third embodiment of the present invention. FIG. 27 is a partial cross-sectional
view showing a state in which the outer cylinder member is engaged with and held by the
support base by the engagement hook in the jig for manufacturing an ultrasonic transducer
according to the third embodiment of the present invention. FIG. 28 is a perspective view
showing a low-temperature pressurized state of the ultrasonic transducer manufacturing jig
according to the third embodiment of the present invention. FIG. 29 is a cross-sectional view
showing a low-temperature pressurized state of the jig for manufacturing an ultrasonic
transducer according to the third embodiment of the present invention. FIGS. 30 (a) and 30 (b)
are perspective views showing a jig for manufacturing an ultrasonic transducer according to a
fourth embodiment of the present invention, respectively. FIG. 31 is a diagram showing
examination results of a method of manufacturing an ultrasonic transducer according to an
example of the embodiment of the present invention. FIG. 32 is a view showing examination
results of a method of manufacturing an ultrasonic transducer according to an example of the
embodiment of the present invention. FIG. 33 is a diagram showing examination results of the
method of manufacturing an ultrasonic transducer according to an example of the embodiment
of the present invention. FIG. 34 is a diagram showing examination results of the method of
manufacturing an ultrasonic transducer according to an example of the embodiment of the
present invention. Explanation of the code 1 ... ultrasonic transducer, 2 ... case, 3 ... case top
surface, 4 ... acoustic matching layer, 5 ... flange, 6 ... piezoelectric body, 7 ... terminal board, 8a,
8b ... terminal, 9 ... Insulator, 10: conductive rubber, 11: flow rate measuring portion, 12: side
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wall portion, 13: side wall portion, 14: sealing material, 15: upper plate portion, 16: flow path
cross section, 17: ultrasonic transducer, 18 ... Ultrasonic transducer, 19 ... Transducer mounting
hole, 20 ... Transducer mounting hole, 21 ... Sealing material, 22 ... Sealing material, 23, 23C ...
Lower jig, 23a ... Cylindrical case holding part, 23b ... Flange, 23c Recesses for holding
piezoelectric members 24A, 24B, 24C, 24E Upper jigs 24a Cylindrical portions 24b Flanges 24d
Through openings 24e Tubular fixing portions 24f Case pressing portions 24g hemispherical
recessed portions , 24 h ... engaging projection, 24 j ... side pressing portion, 25 ... Spring 26 shaft
for slide 26a spherical recess 27 upper base 28 lower base 29 post 30 separates for pressure 33
stainless steel jig mounting plate 34 fan 35 ultrasonic wave Jig for manufacturing the vibrator,
36: a case where the acoustic matching layer is temporarily fixed with an adhesive, 41: a
temperature raising step 42: a temperature holding step 43: a temperature lowering step 45: a
positioning portion 50: Outer cylinder member, 50a: through opening, 50c: engaging recess, 50d:
through opening, 51: support base, 52: engaging hook, 61: constant temperature bath, 62:
heater, 99: steel ball.
13-04-2019
31
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