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DESCRIPTION JP2005167746

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DESCRIPTION JP2005167746
The present invention provides a method of manufacturing an ultrasonic transducer in which the
adhesive does not adhere to the side surface of the ultrasonic matching layer or the side surface
of the case for the ultrasonic transducer without finely controlling the amount of the adhesive.
The purpose is An ultrasonic transducer case (2) is provided with a ring-shaped recess (17)
located outside of a portion in contact with an acoustic matching layer (1) and an adhesive (9). As
a result, the adhesive 9 protruding from between the acoustic matching layer 1 and the case 2
for the ultrasonic transducer flows into the ring-shaped recess 17, so the adhesive 9 protruding
from the side surface or the surface of the acoustic matching layer 1 is There is no adhesion.
Therefore, the manufacturing efficiency of the ultrasonic transducer is good, and the
measurement accuracy and reliability of flow rate measurement using this ultrasonic transducer
can be improved. [Selected figure] Figure 1
Method of manufacturing ultrasonic transducer
[0001]
The present invention relates to a method of manufacturing an ultrasonic transducer (ultrasonic
sensor) that transmits and receives ultrasonic pulses.
[0002]
Heretofore, as this type of ultrasonic transducer, there is the following configuration.
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That is, as shown in FIG. 4, the acoustic matching layer 1 is adhered and fixed to the top outer
surface 13 of the ultrasonic transducer case 2 by the adhesive 9, and the piezoelectric is formed
on the top inner surface 14 of the ultrasonic transducer case 2 One electrode surface 12 of the
body 3 is adhesively fixed by an adhesive 10. Then, between the other electrode surface 11 of
the piezoelectric body 3 and the external electrode terminal 7 of the terminal plate 5, an elastic
body (conductor) 4 having conductivity is sandwiched in a pressurized state to achieve electrical
connection. There is.
[0003]
Further, the flange portion 15 at one end of the case 2 for ultrasonic transducer and the terminal
plate 5 are joined by electric welding. A sealed space 16 formed by the ultrasonic transducer
case 2 and the terminal plate 5 is filled with nitrogen gas. The external electrode terminals 7 and
8 provided on the terminal plate 5 are electrically insulated by a glass (insulation portion) 6. As a
result, the other electrode surface 11 and the external electrode terminal 7 are electrically
connected via the elastic body 4, and one electrode surface 12 also serves as the external
electrode. It is electrically connected to the external electrode terminal 8 through the board 5
(see, for example, Patent Document 1). JP-A-2001-50785 (pages 4-6, FIG. 8)
[0004]
However, according to the conventional ultrasonic transducer described above, when bonding
and fixing the case 2 for the ultrasonic transducer and the acoustic matching layer 1 with the
adhesive 9, the adhesive 9 protrudes from the acoustic matching layer 1 at the time of pressure
bonding. (Flowing out) may adhere to the side surface or surface of the acoustic matching layer
1. When the adhesive 9 adheres to the side surface or the surface of the acoustic matching layer
1 as described above, when the ultrasonic wave transmitted from the piezoelectric body 3
propagates to the gas through the ultrasonic transducer case 2 and the acoustic matching layer
1, The directivity of the ultrasonic wave varies, for example, when performing flow measurement
using a pair of other ultrasonic transducers, the transmission and reception sensitivity of the
ultrasonic transducer is lowered, and the measurement becomes unstable. A problem arises.
[0005]
Further, in order to solve the above problem, the amount of the adhesive 9 is reduced and the
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bonding portion between the case 2 for the ultrasonic transducer and the acoustic matching
layer 1 (the case 2 for the ultrasonic transducer and the acoustic matching layer 1 It is
conceivable that the adhesive 9 is not attached except for the above. However, when the amount
of the adhesive 9 is reduced, if the adhesion and fixing between the case 2 for the ultrasonic
transducer and the acoustic matching layer 1 become insufficient, the ultrasonic wave
transmitted from the piezoelectric body 3 is the ultrasonic transducer When propagating to a gas
through the case 2 and the acoustic matching layer 1, variations occur in the directivity of
ultrasonic waves as described above.
[0006]
Therefore, the adhesive 9 is sufficient to bond and fix the case 2 for the ultrasonic transducer
and the acoustic matching layer 1, and it protrudes (flows out) and the case 2 for the ultrasonic
transducer and the acoustic matching layer 1 It is conceivable to apply only an appropriate
amount so as not to adhere to the non-bonded side of the sheet, etc., but to apply such an
appropriate amount, that is, to finely control the amount of adhesive, is its production Above, it
was very difficult.
[0007]
Therefore, the present invention solves the above-mentioned conventional problems, and when
bonding and fixing the case for the ultrasonic transducer and the acoustic matching layer, the
side and the surface of the acoustic matching layer can be formed without managing the amount
of adhesive finely. It is an object of the present invention to provide a method of manufacturing
an ultrasonic transducer capable of preventing adhesion of an adhesive.
[0008]
In order to achieve the above object, the method of manufacturing an ultrasonic transducer
according to claim 1 of the present invention comprises the steps of: bonding the ultrasonic
transducer case and the acoustic matching layer with an adhesive; The case for the acoustic
transducer is provided with means for preventing the adhesive from sticking out, and when the
case for the ultrasonic transducer and the acoustic matching layer are pressure-joined, the
outflow of the adhesive that is sticking out is caused by the means for sticking out. It is
characterized by suppressing.
[0009]
In the method of manufacturing an ultrasonic transducer according to claim 2 of the present
invention, a piezoelectric body having a pair of opposing electrode surfaces, and a case for an
ultrasonic transducer electrically connected to the one electrode surface. A terminal plate having
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two external electrode terminals, one end of the case for the ultrasonic transducer being
electrically connected, and a conductor sandwiched between the other electrode surface of the
piezoelectric body and the one external electrode terminal In order to obtain an ultrasonic
transducer including an acoustic matching layer facing the piezoelectric body and bonded to the
ultrasonic transducer case with an adhesive, the adhesive case is prevented from protruding into
the ultrasonic transducer case. A means is provided, characterized in that when the case for
ultrasonic transducer and the acoustic matching layer are pressure-bonded, the outflow of the
protruding adhesive is suppressed by the protruding prevention means.
[0010]
Therefore, according to the first and second aspects of the present invention, the outflow of the
adhesive applied in excess can be suppressed by the protrusion preventing means provided on
the case plate for the ultrasonic transducer.
In the method of manufacturing an ultrasonic transducer according to claim 3 of the present
invention, in the configuration according to claim 1 or 2, the protrusion preventing means
provided on the case for the ultrasonic transducer is through an adhesive. It is characterized by
being located outside the portion in contact with the acoustic matching layer.
[0011]
Therefore, according to the third aspect of the present invention, the adhesive is suppressed by
the protrusion prevention means and hardened first, and the outflow of the adhesive from the
inside is sealed, so that the protrusion can be prevented.
Further, in the method of manufacturing an ultrasonic transducer according to claim 4 of the
present invention, in the configuration according to any one of claims 1 to 3 described above, the
protrusion preventing means is formed on the case for the ultrasonic transducer. It is
characterized in that it comprises a ring-shaped recess into which the adhesive flows.
[0012]
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Therefore, according to the invention of claim 4, the adhesive agent excessively applied on the
surface of the case for the ultrasonic transducer flows into the recess formed on the case plate
for the ultrasonic transducer.
Moreover, in the method of manufacturing an ultrasonic transducer according to claim 5 of the
present invention, in the configuration according to claim 4 described above, the ring-shaped
concave portion of the case for an ultrasonic transducer is formed by pressing. The
[0013]
Therefore, according to the fifth aspect of the present invention, the case for the ultrasonic
transducer provided with the concave portion into which the excessively applied bonding agent
flows is formed by pressing.
[0014]
According to the first and second aspects of the present invention described above, the provision
of the means for preventing protrusion on the acoustic matching layer side of the case for the
ultrasonic transducer prevents the excess applied adhesive from flowing out. It is possible to
provide an ultrasonic transducer that can be suppressed by means, thereby preventing the
adhesive from adhering to the side surface or the surface of the acoustic matching layer.
As described above, when bonding and fixing the case for ultrasonic transducer and the acoustic
matching layer, the adhesive can be prevented from adhering to the side surface and the surface
of the acoustic matching layer without finely controlling the amount of the adhesive. Can
produce a stable ultrasonic transducer.
[0015]
Therefore, when the ultrasonic wave transmitted from the piezoelectric material propagates to
the gas through the case for the ultrasonic transducer and the acoustic matching layer, no
variation occurs in the directivity of the ultrasonic wave. When the flow rate measurement is
performed using a pair, the measurement can always be stably performed without causing a
decrease in the transmission / reception sensitivity of the ultrasonic transducer.
[0016]
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Further, according to the fifth aspect of the present invention described above, since the ringshaped concave portion can be processed simultaneously with the trimming processing of the
flange portion of the case for the ultrasonic transducer, it can be manufactured at low cost.
[0017]
The ultrasonic transducer according to the first embodiment of the present invention includes a
piezoelectric body having a pair of opposing electrode surfaces, an ultrasonic transducer case
electrically connected to one of the electrode surfaces, and ultrasonic vibration. A terminal plate
having two external electrode terminals electrically connected to one end of the child case, a
conductor held between the other electrode surface of the piezoelectric body and one external
electrode terminal, and the piezoelectric body facing the piezoelectric body In order to obtain an
ultrasonic transducer having an acoustic matching layer bonded to the ultrasonic transducer case
by an adhesive, a ring-shaped concave portion is formed in the ultrasonic transducer case to
prevent adhesive sticking out. When the pressure bonding of the ultrasonic transducer case and
the acoustic matching layer is performed, the outflowing adhesive is suppressed by the outflow
preventing means.
Embodiment 1 Hereinafter, Embodiment 1 of the present invention will be described based on
FIGS. 1 and 2. FIG.
In the first embodiment, the same or substantially the same components as those in the abovedescribed conventional example (FIG. 4) will be assigned the same reference numerals and
detailed explanations thereof will be omitted.
[0018]
1 and 2, 1 is an acoustic matching layer, 2 is a case for an ultrasonic transducer, 3 is a
piezoelectric body, 4 is an elastic body (conductor), 5 is a terminal plate, 6 is a glass, 7 and 8 are
External electrode terminals 9, 10 are adhesives, 11 is the other electrode surface, 12 is one
electrode surface, 13 is the top outer surface, 14 is the top inner surface, 15 is the flange portion,
and 16 is the sealed space.
In the first embodiment, a ring-shaped recess (an example of the protrusion preventing means)
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17 is formed in the top portion of the case 2 for the ultrasonic transducer. At this time, the recess
17 is formed outside the portion in contact with the acoustic matching layer 1 via the adhesive 9.
[0019]
In the ultrasonic transducer configured as in the first embodiment described above, the adhesive
9 is applied to the top outer surface 13 of the case 2 for the ultrasonic transducer, and the
acoustic matching layer 1 is pressure-bonded. A thin film of adhesive 9 is formed between the
top outer surface 13 and the acoustic matching layer 1. During this pressure bonding, the
adhesive 9 protruding from between the case 2 for the ultrasonic transducer and the acoustic
matching layer 1 flows into the recess 17 and suppresses the further outflow, so the adhesive
which has been protruded. 9 does not adhere to the side surface or the surface of the acoustic
matching layer 1.
[0020]
Further, in the first embodiment, the concave portion 17 serving as a fluid reservoir into which
the excess adhesive 9 flows is opened outside the contact portion with the acoustic matching
layer 1 in the top outer surface 13 of the case 2 for the ultrasonic transducer. Since the adhesive
9 flows in and hardens first and seals the outflow from the inside, the adhesive 9 can be
prevented from protruding.
[0021]
According to the first embodiment, the side surface of the acoustic matching layer 1 or the side
surface of the acoustic matching layer 1 is not required to finely manage the amount of the
adhesive 9 when bonding and fixing the case 2 for the ultrasonic transducer and the acoustic
matching layer 1. An adhesive can be prevented from adhering to the surface, and a stable
ultrasonic transducer can be manufactured.
[0022]
Therefore, when the ultrasonic wave transmitted from the piezoelectric body 3 propagates to the
gas through the case 2 for the ultrasonic transducer and the acoustic matching layer 1, no
variation occurs in the directivity of the ultrasonic wave, for example, other ultrasonic wave
transmission / reception When the flow rate measurement is performed using one pair of
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devices, the measurement can always be stably performed without causing a decrease in the
transmission / reception sensitivity of the ultrasonic transducer.
Second Embodiment Next, a second embodiment of the present invention will be described based
on FIG.
[0023]
In the ultrasonic transducer according to the second embodiment of the present invention, the
ring-shaped recess 17 of the case 2 for an ultrasonic transducer is formed by pressing.
That is, the press device 20 includes a die 21 and a punch 22 and processes the ring-shaped
recess 17 simultaneously with trimming of the flange portion 15 of the case 2 for the ultrasonic
transducer.
[0024]
According to the ultrasonic transducer in the second embodiment, the ring-shaped concave
portion 17 of the case 2 for the ultrasonic transducer, which is a means for preventing the
adhesion of the adhesive 9 to the side surface and the surface of the acoustic matching layer 1 It
can be easily processed by molding.
[0025]
In the first and second embodiments described above, the ring-shaped concave portion 17 is
formed by pressing on the top portion of the case 2 for the ultrasonic transducer as the
protrusion preventing means, but this is an ultrasonic vibration. A ring-shaped recess (concave
groove) may be formed in the top portion of the child case 2 by cutting.
[0026]
As described above, according to the method of manufacturing an ultrasonic transducer
according to the present invention, the adhesive does not adhere to the side surface or the
surface of the acoustic matching layer, which greatly contributes to the improvement of the
manufacturing efficiency of the ultrasonic transducer.
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Further, the accuracy of the fluid flow measurement device equipped with the ultrasonic
transducer can be significantly improved, so that the present invention can be applied to
applications such as gas and liquid fluid flow measurement devices.
[0027]
BRIEF DESCRIPTION OF THE DRAWINGS The schematic block diagram which shows
Embodiment 1 of this invention, and shows an ultrasonic transducer.
The schematic block diagram of the principal part. The schematic block diagram which shows
Embodiment 2 of this invention, and shows press processing. The conventional example is shown
and the schematic block diagram which shows an ultrasonic transducer.
Explanation of sign
[0028]
Reference Signs List 1 acoustic matching layer 2 case for ultrasonic transducer 3 piezoelectric
body 4 elastic body (conductor) 5 terminal plate 7 external electrode terminal 8 external
electrode terminal 9 adhesive 10 adhesive 11 other electrode surface 12 one electrode surface
13 Part outer surface 14 Top part inner surface 15 Flange part 17 Ring-shaped recess
(protrusion prevention means) 20 Press device
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