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DESCRIPTION JP2006287405

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DESCRIPTION JP2006287405
An object of the present invention is to provide an acoustic matching member which stabilizes
transmission and reception sensitivity when it is an ultrasonic transducer. In an acoustic
matching member comprising hollow spheres 1 provided with a surface covering layer 2, the
hollow spheres 1 are joined at adjacent portions by the surface covering layer 2. The adjacent
hollow spheres 1 are joined to the hollow spheres 1 by the surface coating layer 2 in advance to
reduce unjoined parts generated at the time of forming the acoustic matching member, and
stabilize transmission / reception sensitivity in the ultrasonic transducer. can do. [Selected figure]
Figure 1
Acoustic matching member and ultrasonic transducer and ultrasonic flow meter using the same
[0001]
The present invention relates to an ultrasonic transducer and an acoustic matching member used
for the ultrasonic transducer.
[0002]
Conventionally, an acoustic matching member used for this type of ultrasonic transducer
arranges a hollow glass sphere in a mold and heats the glass to a temperature that softens the
glass, thereby bonding adjacent glasses to form an acoustic matching member (for example, ,
Patent Document 1).
[0003]
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1
FIG. 7 shows an ultrasonic transducer using the conventional acoustic matching member
described in the above-mentioned publication.
As shown in FIG. 7, the PZT cylindrical body 23, the electrical connection surface 24, and the
matching layer 25 are formed.
Unexamined-Japanese-Patent No. 2-177799
[0004]
However, in the acoustic matching layer used in the conventional configuration, when adjacent
hollow glass spheres are joined, they are not joined at the uncontacted portions between the
glass spheres, and the strength of the formed acoustic matching member is weak. There is a
problem that the transmission and reception sensitivity when used as a component of an
ultrasonic transducer is sometimes broken.
[0005]
The present invention solves the above-mentioned conventional problems, in which adjacent
hollow spheres are joined together by a surface covering layer provided in advance in hollow
spheres, thereby reducing unjoined portions generated at the time of forming an acoustic
matching member. It is an object of the present invention to provide an acoustic matching
member that stabilizes transmission and reception sensitivity.
[0006]
In order to solve the above-mentioned conventional problems, the acoustic matching member of
the present invention is an acoustic matching member consisting of hollow spheres provided
with a surface covering layer, wherein the hollow spheres are joined at adjacent portions by the
surface covering layer. As an acoustic matching member.
[0007]
As a result, the adjacent hollow spheres are joined at the adjacent site by the surface covering
layer provided in advance in the hollow sphere, and a stable strength is obtained by reducing the
unjoined site between the hollow spheres, and the ultrasonic transducer Also, the transmission
and reception sensitivity at the time of
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[0008]
In the acoustic matching member of the present invention, stable strength is obtained by bonding
adjacent hollow spheres to the hollow sphere by the surface covering layer provided in advance
in the hollow sphere and reducing the unjoined portion generated at the time of forming the
acoustic matching member. The transmission / reception sensitivity when used as a vibrator can
be stabilized.
[0009]
According to a first aspect of the present invention, there is provided an acoustic matching
member comprising hollow spheres having a surface covering layer, wherein the hollow spheres
are joined at adjacent portions by the surface covering layer. Adjacent hollow spheres are joined
to each other by a surface coating layer provided in advance in the hollow spheres, and the
unjoined portion generated at the time of forming the acoustic matching member can be
reduced, and the transmission and reception sensitivity in the ultrasonic transducer can be
stabilized.
[0010]
A second invention is characterized in that, in the acoustic matching member consisting of
hollow spheres provided with a surface covering layer, adjacent portions of the hollow spheres
are joined by joining means after the hollow spheres are disposed adjacent to each other. By
using the acoustic matching member as described above, adjacent hollow spheres are joined to
each other by the surface covering layer provided in advance in the hollow sphere, and the
unjoined portion generated at the time of formation of the acoustic matching member is reduced.
Transmission and reception sensitivity can be stabilized.
[0011]
According to a third aspect of the present invention, the joining means adds an additive that
causes a curing reaction with the surface coating layer, thereby forming adjacent hollow spheres
into hollow spheres in advance by using the acoustic matching member according to claim 2. It
can be firmly bonded by the provided surface coating layer.
[0012]
In the fourth invention, the additive is pre-existing in the surface coating layer, and by using the
acoustic matching member according to claim 3, immediately after the hollow spheres are
arranged adjacent to each other, the curing reaction is immediately performed. By doing this, the
acoustic matching member can be easily manufactured.
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[0013]
The fifth invention is the acoustic matching member according to claim 3, wherein the additive is
added to the surface coating layer from the outside, whereby the storage state of the surface
coating layer provided on the hollow sphere, the storage period There is no need to consider and
management can be facilitated.
[0014]
A sixth aspect of the present invention is the acoustic matching member according to the second
aspect, wherein the bonding means solidifies and bonds by melting the surface coating layer by
heating and cooling. After being placed adjacent to each other, the alignment member can be
easily formed by immediately applying heat and then cooling.
[0015]
In a seventh aspect of the present invention, the joining means is solidified and joined by heating
the surface coating layer in a semi-cured state, and the hollow spheres are adjacent to each other
by using the acoustic matching member according to claim 2. After placement, the alignment
member can be easily formed by performing a curing reaction.
[0016]
The eighth invention is characterized in that a water repellent layer is provided on at least a part
of the non-surface coating layer joint portion of the hollow sphere, and condensation is achieved
by using the acoustic matching member according to the first and second aspects. The acoustic
matching member can be prevented from absorbing moisture, and the acoustic matching layer
can be made excellent in moisture resistance.
[0017]
According to a ninth aspect of the present invention, a closed space is formed by a hollow
cylindrical metal case having a top portion, a side wall portion, and a support portion provided
outside the side wall portion, and a terminal plate having an external electrode terminal. The
acoustic matching member according to claims 1 and 2 is fixed to the outer wall surface of the
upper open space, and one electrode of a piezoelectric body having a pair of electrode surfaces is
fixed to the inner wall surface of the closed space, and the other electrode surface By using an
ultrasonic transducer in which the terminal plate and the terminal plate are electrically
connected by the conductive means, the handling stability is excellent, and the transmission /
reception sensitivity can be stabilized.
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[0018]
In a tenth aspect of the present invention, a pair of ultrasonic transducers according to claim 9,
provided in a flow rate measuring unit through which a fluid to be measured flows and the flow
rate measuring unit, transmit and receive ultrasonic waves, and propagation between the
ultrasonic transducers By using an ultrasonic flow meter including a measurement circuit that
measures time and a flow rate calculation unit that calculates a flow rate based on a signal from
the measurement circuit, stable transmission and reception of ultrasonic waves can be
performed.
[0019]
Hereinafter, embodiments of the present invention will be described with reference to the
drawings.
The present invention is not limited by the present embodiment.
[0020]
Embodiment 1 FIG. 1 is a cross-sectional view of a hollow sphere provided with a surface
covering layer which is a constituent material of an acoustic matching member according to an
embodiment of the present invention.
[0021]
In FIG. 1, the surface coating layer 2 is formed to cover the surface of the hollow sphere 1.
The surface coating layer 2 uses a one-component epoxy resin in which a solid curing agent is
added to bisphenol A which is an epoxy resin main agent.
As a curing agent, an aromatic amine such as meta-phenylene diamine, methylene dianiline or
dicyandiamide was used.
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The solution of the bisphenol and the curing agent is coated while stirring on hollow glass
(average particle diameter 60 μm) which is hollow sphere 1 while being sprayed.
The thickness of the coating was 1 to 100 μm.
The hollow spheres 1 are not limited to the glass composition, and may have a resin composition.
[0022]
The hollow spheres 1 provided with the surface coating layer 2 shown in FIG. 1 are placed in a
container coated with Teflon (registered trademark).
Thereafter, the hollow sphere 1 is vibrated and filled while the entire container is attached to a
vibrating device and the entire jig is vibrated.
FIG. 2 shows a filling state sectional view of the hollow sphere 1 after vibration filling.
[0023]
The filled hollow spheres 1 are placed in a curing furnace and heated at 120 ° C. for 1 h.
The epoxy resin on the surface of the heated hollow sphere 1 is heated to dissolve the curing
agent, react with bisphenol A, and cure.
FIG. 3 shows a cross-sectional view of the acoustic matching member in a state where the surface
coating layer 2 of the hollow spheres 1 is cured and the hollow spheres 1 are joined.
In the adjacent part 3 shown in FIG. 2, the surface covering layer 2 is dissolved and joined, and as
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shown in FIG.
The cured acoustic matching member is taken out from the Teflon (registered trademark) coated
jig and sliced by dicing to adjust the thickness.
[0024]
FIG. 5 is a cross-sectional view of an ultrasonic transducer using the acoustic matching member
of the present invention, and FIG. 6 shows an ultrasonic flowmeter using the ultrasonic
transducer of the present embodiment.
[0025]
In the figure, the cylindrical cylindrical metal case 11 is made of an alloy containing Fe as a main
component and containing a material consisting of Cr and Ni, and containing any additive such as
Cu, Mo, Ti, Si, Nb, etc. It has a top portion 8, a side wall portion 9 and a support portion 10 by
deep drawing.
The piezoelectric body 6 is provided with an electrode surface 7 opposed thereto, and an epoxy
adhesive is printed on the electrode surface 7 by a screen printing method, and is bonded to the
inner wall surface of the top portion 8 of the hollow cylindrical metal case 11.
[0026]
The acoustic matching member 5 is bonded to the top wall 8 outer wall surface of the hollow
cylindrical metal case 11 with an epoxy adhesive.
The pressure is applied to the acoustic matching member 5, the hollow cylindrical metal case 11,
and the piezoelectric body 6, and then charged into a heat curing furnace, and the adhesive is
cured. And are joined.
The thickness of the adhesive is adjusted to a thickness of 5 to 50 μm, and the cylindrical metal
case 11 with a top and the piezoelectric body 6 are electrically joined.
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[0027]
Thereafter, the support portion 10 of the hollow cylindrical metal case 11 and the terminal plate
13 having the electrode terminal 12 are joined by welding to form a closed space.
The terminal plate 13 and the electrode surface of the piezoelectric body 6 are electrically
connected by the conductive means 16.
The conductive means 16 is composed of a conductive part 14 and an insulating part 15, the
conductive part 14 is plated with gold on the nickel spherical particles, and the insulating part
15 is made of silicon rubber.
[0028]
The operation and action of the ultrasonic flowmeter configured as described above will be
described.
[0029]
A distance connecting the centers of the pair of ultrasonic transducers 18 and 19 is L, and an
angle between the straight line and the longitudinal direction of the flow path 21 which is the
flow direction is θ.
Further, the velocity of sound in the windless state of the fluid is denoted by C, and the flow
velocity of the fluid in the flow passage 21 is denoted by V. The ultrasonic waves transmitted
from the ultrasonic transducer 18 disposed on the upstream side of the flowing fluid obliquely
cross the flow path 21 and are received by the ultrasonic transducer 19 disposed on the
downstream side. The propagation time t1 at this time is
[0030]
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[0031]
It is indicated by.
Next, an ultrasonic wave is transmitted from the ultrasonic transducer 19 disposed downstream,
and received by the ultrasonic transducer 18 disposed upstream. The propagation time t2 at this
time is
[0032]
[0033]
It is indicated by.
And if the sound velocity C of the fluid is eliminated from the equations of propagation times t1
and t2,
[0034]
[0035]
The equation of is obtained.
If the distance L and the angle θ are known, the flow velocity V can be obtained by measuring
the propagation times t1 and t2 with the measurement circuit. From the flow velocity V,
assuming that the cross-sectional area of the flow passage 21 is S and the correction coefficient
is K, the flow rate calculating means can calculate Q = KSV to obtain the flow rate.
[0036]
As described above, in the present embodiment, in the acoustic matching member 5 consisting of
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the hollow spheres 1 provided with the surface covering layer 2, the hollow spheres 1 are
adjacent to each other by being joined at the adjacent portions by the surface covering layer 2.
The hollow spheres 1 are joined to the hollow sphere 1 by the surface coating layer 2 provided in
advance, and the non-contacting part generated at the time of formation of the acoustic matching
member 5 is reduced, and the transmission and reception sensitivity in the ultrasonic transducer
17 is stabilized. be able to.
[0037]
Further, in the present embodiment, the ultrasonic transducer 17 provided with the acoustic
matching member 5 of the present invention is immersed in a water repellent solution having,
for example, a sodium methyl siliconate solution and oxalic acid as a basic composition to form a
water repellent layer. Do.
FIG. 4 shows a cross-sectional view when the water repellent layer 4 is formed on the acoustic
matching member 5. The formation portion of the water repellent layer 4 is provided on at least
a part of the non-joined portion of the surface coating layer 2 of the hollow sphere 1 as shown in
FIG. 4 to prevent condensation of the acoustic matching member 5 by moisture absorption. Thus,
the acoustic matching member 5 excellent in moisture resistance can be obtained.
[0038]
Second Embodiment FIG. 1 is a cross-sectional view of a hollow sphere provided with a surface
covering layer which is a constituent material of an acoustic matching member according to an
embodiment of the present invention.
[0039]
In FIG. 1, the surface coating layer 22 is formed to cover the surface of the hollow sphere 1.
The surface coating layer 2 is bisphenol A, which is an epoxy resin main agent, and is dipped in a
glass bubble filler, which is a hollow sphere 1, in a bisphenol A solution diluted with acetone, and
then dried and coated. The hollow spheres 1 are not limited to the glass composition, and may
have a resin composition.
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[0040]
The hollow spheres 1 provided with the surface coating layer 2 shown in FIG. 1 are placed in a
container coated with Teflon (registered trademark). Thereafter, the hollow sphere 1 is vibrated
and filled while the entire container is attached to a vibrating device and the entire jig is vibrated.
[0041]
FIG. 2 shows a filling state sectional view of the hollow sphere 1 after vibration filling. The filled
hollow spheres 1 are impregnated with the curing agent phthalic anhydride and left over for 10
minutes to remove the excess curing agent. For removal of the excess curing agent, centrifugal
force may be used. The hollow spheres 1 to which the curing agent has been added are placed in
a curing furnace and heated at 120 ° C. for 1 h. The epoxy resin on the surface of the heated
hollow sphere 1 and the curing agent react and cure.
[0042]
FIG. 3 shows a cross-sectional view of the acoustic matching member in a state where the surface
coating layer 2 of the hollow spheres 1 is cured and the hollow spheres 1 are joined. The
adjacent portions 3 shown in FIG. 2 are dissolved and joined and joined as shown in FIG. The
cured acoustic matching member is taken out from the Teflon (registered trademark) coated jig
and sliced by dicing to adjust the thickness.
[0043]
Hereinafter, the same method as described in Embodiment 1 is used.
[0044]
Third Embodiment FIG. 1 is a cross-sectional view of a hollow sphere provided with a surface
covering layer which is a constituent material of an acoustic matching member according to an
embodiment of the present invention.
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[0045]
In FIG. 1, the surface coating layer 22 is formed to cover the surface of the hollow sphere 1.
The surface coating layer 2 is prepared by mixing 4,4'-diphenyl ether with pyromellitic acid to
adjust it to 50 ° C. to form a semi-cured polyamic acid, and immersing it in the glass bubbles
filler which is a hollow sphere 1. To coat.
In some cases, it can also be coated using a spray. The hollow spheres 1 are not limited to the
glass composition, and may have a resin composition.
[0046]
The hollow spheres 1 provided with the surface coating layer 2 shown in FIG. 1 are placed in a
container coated with Teflon (registered trademark). Thereafter, the hollow sphere 1 is vibrated
and filled while the entire container is attached to a vibrating device and the entire jig is vibrated.
FIG. 2 shows a cross-sectional view of the filling state of the hollow sphere 1 after vibration
filling. The filled hollow spheres 1 are placed in a curing furnace and heated at 120 ° C. for 1 h.
The heated polyamic acid on the surface of the hollow sphere 1 is converted by heating to form
an insoluble and infusible polyimide. FIG. 3 shows a cross-sectional view of the acoustic matching
member 5 in a state where the surface coating layer 2 of the hollow sphere 1 is cured and the
hollow sphere 1 is bonded. The adjacent portions 3 shown in FIG. 2 are joined and joined as
shown in FIG. The hardened acoustic matching member 5 is taken out from the Teflon (registered
trademark) coated jig and sliced by dicing to adjust the thickness.
[0047]
Hereinafter, the same method as described in Embodiment 1 is used.
[0048]
As described above, the acoustic matching member according to the present invention and the
ultrasonic transducer using the same are joined by the surface coating layer in which adjacent
hollow spheres are provided on the hollow sphere in advance, and unjoined occurs when forming
the acoustic matching member. By reducing the portion, a stable intensity can be obtained, and it
becomes possible to stabilize the transmission / reception sensitivity when it is used as an
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ultrasonic transducer, so by the ultrasonic transducer and the ultrasonic wave generated using it,
The present invention is also applicable to applications such as ultrasonic flowmeters that
measure the flow rate or flow rate of gas or liquid, and distance sensors.
[0049]
Sectional view of a hollow sphere having a surface covering layer which is a constituent material
of the acoustic matching member in the embodiment of the present invention Sectional view in
the process of forming the acoustic matching member of the same embodiment Cross section of
the acoustic matching member of the same embodiment Cross-sectional view of an acoustic
matching member according to the same embodiment Cross-sectional view of an ultrasonic
transducer using the acoustic matching member according to the same embodiment Crosssectional view of an ultrasonic flowmeter using an ultrasonic transducer according to an
embodiment Sectional view of an ultrasonic transducer using the acoustic matching member of
Explanation of sign
[0050]
Reference Signs List 1 hollow sphere 2 surface covering layer 3 adjacent portion 4 water
repellent layer 5 acoustic matching member 6 piezoelectric 7 electrode 8 case top portion 9 case
side wall portion 10 case support portion 11 case 12 electrode terminal 13 terminal plate 14
conductive portion 15 insulating portion 16 Electrically conductive means 17 ultrasonic
vibration 20 vibrator mounting hole 21 flow path 22 seal material 23 PZT cylindrical body 24
electrical connection surface 25 matching layer
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