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DESCRIPTION JP2012019326

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DESCRIPTION JP2012019326
The present invention provides an ultrasonic probe having a laminated transducer for a matrix
array in which acoustic crosstalk between elements is reduced by a simple manufacturing
method, and deterioration of S / N is prevented. A laminated body in which a plurality of
dielectric layers are laminated, a plurality of internal electrodes alternately laminated with each
of a plurality of dielectric layers in an intermediate portion of the laminated body, an uppermost
surface of the laminated body, and an outermost surface The external electrode provided on the
lower surface, and the side electrodes connected to the odd-numbered internal electrodes and the
even-numbered internal electrodes along both side surfaces of the laminated body, and the
laminated body is the internal or external electrode An electrode structure is provided with a gap
for preventing electrical contact between the electrode and the side electrode, and the laminate is
two-dimensionally arrayed to constitute a transducer element, and ultrasonic waves are applied
to each of the transducer elements. Ultrasonic probe designed to transmit and receive. [Selected
figure] Figure 1
Ultrasonic probe, ultrasonic diagnostic apparatus using ultrasonic probe, and method of
manufacturing ultrasonic probe
[0001]
The present invention relates to an ultrasonic probe, an ultrasonic diagnostic apparatus using the
ultrasonic probe, and a method of manufacturing the ultrasonic probe, and in particular, a matrix
array type probe that provides a three-dimensional image in real time. The present invention
relates to a vibrator structure used for a child.
[0002]
14-04-2019
1
An ultrasonic diagnostic apparatus used for medical image diagnosis is widely used in the
medical field because it can display and observe a tomographic image of soft tissue of a living
body, a blood flow image flowing in the living body, etc. on a monitor in substantially real time. .
In the ultrasonic diagnostic apparatus having such characteristics, when transmitting ultrasonic
waves from an ultrasonic probe in which transducer elements represented by piezoelectric
materials are arrayed to an inspection object, ultrasonic waves are transmitted from each
element of the array. By controlling the timing of transmission, the position at which the
ultrasound from each transducer element of the array is focused within the inspection object is
controlled. Then, when receiving the ultrasonic wave reflected from the inspection object by the
ultrasonic probe, the signals received by each element of the array are shifted by the time
according to the difference between the desired position and each element position. The
ultrasound beam is formed by so-called electronic focusing which is additive. Two-dimensional
scanning (two-dimensional data acquisition area) or three-dimensional scanning (threedimensional data acquisition area) is performed by electronically scanning the ultrasonic beam
by changing the elements of the array used to transmit and receive the ultrasonic waves. The
data of these scans are formed to form an ultrasound image. Furthermore, matrix array type
probes are used to construct three-dimensional data in real time.
[0003]
In the matrix array type ultrasonic probe, electrodes are formed on the upper and lower surfaces
of a transducer made of a piezoelectric material, and the transducer and electrodes on the upper
and lower surfaces are in the major axis direction so that ultrasonic waves are electronically
scanned. Are divided into strips and arranged in a line.
[0004]
Patent Document 1 discloses an ultrasonic probe capable of suppressing an increase in
impedance due to division of the vibrator in the minor axis direction by laminating the vibrator.
[0005]
Unexamined-Japanese-Patent No. 11-299779
[0006]
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2
However, the method described above is difficult to manufacture because the insulating film and
the conductive film have to be formed on the minute element side surface and both surfaces.
Furthermore, since the GND electrode must be wired from the acoustic radiation surface, there is
a restriction that a conductor is used for the acoustic matching layer.
In addition, it is necessary to provide a film coupled to a plurality of elements for the GND wiring.
As a result, there is a problem that the acoustic crosstalk level between elements is increased and
the S / N is deteriorated.
[0007]
Therefore, an object of the present invention is to provide an ultrasonic probe having a laminated
transducer for matrix array which can be easily manufactured and prevents the deterioration of S
/ N, an ultrasonic diagnostic apparatus using an ultrasonic probe, and an ultrasonic diagnostic
apparatus An object of the present invention is to provide a method of manufacturing an acoustic
probe.
[0008]
In order to solve the above problems, the ultrasonic probe according to the present invention is
alternately laminated with a laminate formed by laminating a plurality of dielectric layers and
each of a plurality of dielectric layers in the middle part of the laminate. A plurality of internal
electrodes, external electrodes provided on the top and bottom surfaces of the laminate, and a
first side of the plurality of internal electrodes provided along the first side surface of the
laminate; The first side electrode electrically connected to the end, and the second side of the
laminated body provided along the second side, and electrically connected to the second end of
the even-numbered internal electrode among the plurality of internal electrodes And an external
electrode provided on the lowermost surface of the laminate is electrically connected to the first
electrode electrically connected to the first side electrode and to the second side electrode. And a
second electrode, the first electrode and the second electrode are electrically separated via a gap,
and the laminated body is two-dimensionally arrayed. Configure Doko elements, in which to
perform the transmission and reception of ultrasonic waves for each said transducer element.
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3
[0009]
In addition, the laminate includes a second terminal which is the other end of the first end and
between the outermost electrode and the second side electrode, and a first terminal which is the
other end of the second end and the other end. It has an electrode structure provided with a gap
for preventing electrical contact between the external electrode on the lower surface and the first
side electrode.
[0010]
The first electrode is connected to the GND potential, and the second electrode is connected to
the signal potential.
[0011]
In addition, the external electrode provided on the top surface of the laminate is electrically
connected to the first side electrode, and electrically separated from the second side electrode via
a gap.
[0012]
In addition, a substrate provided with a GND pattern is provided, and a plurality of laminates are
two-dimensionally arranged at positions mirror-symmetrical with respect to the GND pattern
while maintaining a predetermined distance along the GND pattern.
[0013]
Further, the first side electrodes and the second side electrodes of adjacent laminates are
arranged to face each other along the first direction, and the laminate group arranged along the
first direction is the first direction. Are arranged in a second direction orthogonal to the above,
and are arranged in a two-dimensional manner so that the electrodes of adjacent laminates have
substantially the same potential.
[0014]
Further, the side electrodes of the laminate are arranged in the first direction, in the order of
GND-signal-signal-GND, and are stacked in the second direction orthogonal to the first direction.
All of the bodies are arranged to be GND or a signal.
[0015]
In addition, it has a backing material for mounting the transducer element, and the backing
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4
material includes signal vias penetrating from the main surface to the back surface of the
backing material, and a grounding conductor provided on the side surface of the backing
material, One electrode is connected to the ground conductor, the second electrode is connected
to the signal via, and the second electrode receives a signal from the back surface of the backing
via the signal via, and the signal conductor is connected by the ground conductor.
Electromagnetically shield passing signals.
[0016]
Furthermore, in the method of manufacturing an ultrasonic probe described above, a process of
preparing a substrate provided with a dielectric material, a mask having an opening pattern for
forming a gap, an electrode portion forming pattern, and an insulating region forming pattern
The formation of the internal or external electrode is repeated on the dielectric material, and a
plurality of electrodes are arranged transversely at predetermined intervals within the thickness
of the dielectric material to form the internal electrode, and the uppermost layer of the electrode
And a step of forming a laminated substrate having an external electrode formed in the
lowermost layer, a first side surface dummy electrode electrically connected to the oddnumbered internal electrode among the plurality of internal electrodes, and among the plurality
of internal electrodes A step of forming second side dummy electrodes electrically connected to
even-numbered internal electrodes on the side surfaces of the laminated substrate, and applying
electric fields of different polarities to the first side dummy electrodes and the second side
dummy electrodes And dielectric materials And a first cutting step of forming a cutting element
in which the laminated substrate subjected to the polarization processing is cut into strips at a
predetermined width and stretched in the longitudinal direction, and a length of the cutting
element A step of forming side electrodes on opposite side surfaces along the direction, and
arranging and fixing each of the cutting elements at predetermined intervals and cutting at
predetermined intervals in a direction orthogonal to the longitudinal direction of the cutting
elements And, in the first and second cutting steps, a gap for preventing electrical contact
between the internal electrode and the side electrode of each layer by cutting so as to pass
through the opening pattern. In the second cutting step, two-dimensionally arranged transducer
elements are formed in a plane on the substrate.
[0017]
Furthermore, an ultrasonic diagnostic apparatus as a related invention includes an ultrasonic
probe for transmitting and receiving ultrasonic waves to an inspection object, and a transmission
circuit for transmitting ultrasonic waves of a predetermined beam waveform from the ultrasonic
probe. A reception circuit that forms a predetermined reception waveform from the reception
signal received by the ultrasonic probe and further processes the reception signal; and a control
unit that controls the transmission timing and the display timing from the reception signal An
ultrasonic diagnostic apparatus having a display unit for displaying an ultrasonic image, wherein
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5
the ultrasonic probe in each of the above means is used as an ultrasonic probe.
[0018]
That is, the feature of the present invention is a laminate including two or more layers of
laminated vibrators, wherein the electrodes are provided on the side surfaces of the laminate,
and the electrodes are provided on the upper surface and the lower surface of the laminate. The
internal electrodes provided inside the body are alternately arranged in the height direction.
This feature allows the electrodes to be easily formed.
[0019]
Further, on the lower surface of the laminate, electrode patterns for signal and GND are provided.
Due to this feature, the signal potential and the GND potential can be commonly taken out from
the lower surface of the element.
[0020]
Furthermore, the electrode patterns of the two-dimensionally arranged laminates have a mirror
symmetric structure with elements adjacent to each other.
With this feature, since the adjacent side electrodes and the upper and lower electrodes are at
the same potential, it is possible to reduce the possibility of electrical breakdown even if the
laminated vibrator is in mechanical contact during vibration.
[0021]
According to the present invention, it is possible to easily manufacture a multilayer vibrator for a
matrix array in which the deterioration of S / N is prevented.
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[0022]
BRIEF DESCRIPTION OF THE DRAWINGS The schematic block diagram of the ultrasound probe
shown in 1st embodiment.
FIG. 1 is an overhead view showing a laminated vibrator of the present invention.
The figure which looked at the laminated vibrator shown in FIG. 2 from the back surface.
FIG. 2 is a view showing an example of mounting the laminated vibrator shown in the first
embodiment on a printed circuit board.
FIG. 8 is a view showing another example of mounting the laminated vibrator shown in the
second embodiment on a printed circuit board.
It is a manufacturing method of a lamination vibrator of the present invention, and a figure
showing polarization formation.
FIG. 7 is a view showing a pattern layout of each electrode layer in the manufacturing method of
the laminated vibrator of the present invention.
It is a manufacturing method of the lamination | stacking vibrator of this invention, Comprising:
The figure which shows outer frame cutting.
It is a manufacturing method of a lamination vibrator of the present invention, and a figure
showing Y-axis direction cutting out.
It is a manufacturing method of a lamination vibrator of the present invention, and is a figure
showing side electrode formation. It is a manufacturing method of a lamination vibrator of the
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7
present invention, and a figure showing logging to the direction of the X-axis. The schematic
block diagram of the ultrasound probe shown in 3rd embodiment. The block diagram of the
image-diagnosis apparatus which applied the ultrasound probe shown in 4th embodiment.
[0023]
Hereinafter, embodiments of the present invention will be described in detail based on the
drawings. FIG. 1 is a schematic block diagram showing an embodiment of an ultrasound probe
100 according to the present invention. The ultrasonic probe 100 is an ultrasonic diagnostic
apparatus that examines a diagnostic region of a subject using ultrasonic waves, and actually
transmits ultrasonic waves into the subject and receives a reflected wave. As shown in FIG. 1, the
ultrasonic probe 100 includes a laminated vibrator 1, an acoustic matching layer 2, a printed
board 3, and a backing 4. A flexible printed board or the like can be used as the printed board 3.
First Embodiment The first embodiment will be described below with reference to FIGS. First, FIG.
2 shows a laminated vibrator 1 which is a feature of the present invention. This figure shows as
an example the case where the laminated vibrator 1 is arranged in four. The laminated vibrator 1
has a structure in which a dielectric layer 5 made of a piezoelectric material such as lead
zirconate titanate magnetism (PZT) is laminated in the Z-axis direction, and is externally provided
on the lower surface and the upper surface in the Z-axis direction. Electrodes 6 and 7 are
provided. Plural layers of internal electrodes are alternately arranged at predetermined intervals
in the laminated film of the dielectric layer 5. FIG. 2 shows the case where the dielectric layers
are stacked in three layers, and the two electrodes of the internal electrodes 8 and 9 are
alternately arranged with the dielectric layers. Further, side electrodes 14 and 15 are disposed
on the upper and lower surfaces on two different side surfaces of the laminated vibrator 1. The
side electrodes 14 are provided such that the external electrodes 6 and the internal electrodes 8
are wired, while the side electrodes 15 are provided such that the external electrodes 7 and the
internal electrodes 9 are wired, and the respective side electrodes 14, It is connected so that 15
may become wiring of another system.
[0024]
Gaps 10, 13 and 11, 12 are provided in the external electrodes 6, 7 and the internal electrodes 8,
9, respectively, to ensure insulation with other electrodes. For example, by using the external
electrode 6, the side electrode 14, and the internal electrode 8 as GND, and the external electrode
7, the side electrode 15, and the internal electrode 9 as signals, each dielectric layer is
sandwiched between the signal potential and the GND potential. The laminated vibrator 1
functions as a vibrator by applying the voltage.
14-04-2019
8
[0025]
In FIG. 3, the external electrode 7, the gap 13, and the external electrode 16 are formed on the
back surface of the laminated vibrator 1 shown in FIG. 2 (when the laminated vibrator 1 is
viewed from the arrow A direction). It is connected to the side electrode 14 and becomes GND. As
a result, since the signal and GND can be wired from the back, the acoustic matching layer 2
shown in FIG. 1 does not have to be a conductor, and the restriction of the material of the
acoustic matching layer 2 is relaxed. Furthermore, since the acoustic matching layer 2 can be
formed of a plurality of layers, a broadband probe can be realized. In addition, since the acoustic
matching layers 2 can be formed independently of the adjacent elements, isolation with the
adjacent elements is possible, and acoustic crosstalk can be reduced.
[0026]
As shown in FIG. 1, in the ultrasonic probe 100, the laminated transducers 1 are arranged so as
to be mirror symmetrical with respect to a GND pattern 17a extending in the X-axis direction,
and the mirror symmetrical laminated vibrators are arranged. It has a structure in which
laminated vibrators which are moved in parallel in the Y-axis direction and which are arranged
mirror-symmetrically with respect to the GND pattern 17b are also arranged. Here, to arrange in
mirror symmetry with respect to the X-axis direction means that a laminated vibrator disposed in
the Y-axis direction orthogonal to the plane, with a plane determined by the Z-axis and the X-axis
shown in FIG. It is assumed that 1 indicates a state in which the laminated vibrators 1
corresponding to the position corresponding to the image reflected on the mirror surface are
arranged. As shown in FIG. 1, the GND patterns 17a and 17b extend in the X-axis direction.
[0027]
Furthermore, a plurality of these laminated vibrators 1 are arranged in the X-axis direction which
is an orthogonal direction, and a two-dimensional arranged vibrator is configured. Although the
figure shows the case where three pairs of laminated vibrators 1 are arranged in the X-axis
direction and two pairs in the Y-axis direction, the present invention is not limited thereto. The
laminated vibrators 1 can be arranged.
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9
[0028]
FIG. 4 is a view showing an example in which the laminated vibrator 1 is arranged on the printed
circuit board 3. On the printed circuit board 3, GND patterns 17 are arranged extending in the Xaxis direction as shown in FIG. The laminated vibrators 1 are arranged via the GND pattern 17 so
as to be mirror symmetric with respect to the X-axis direction. For example, the laminated
vibrators 1a and 1b are selected as representative from the laminated vibrator 1, and the feature
of the arrangement will be described. The side electrodes 15 of the laminated vibrator 1a and the
side electrodes 15 of the laminated vibrator 1b are disposed to face each other, and the external
electrodes 16 of the laminated vibrators 1a and 1b share the GND pattern. It is fixed to That is, as
in the definition of FIG. 1, the mirror symmetry here is arranged such that an image generated
when the laminated vibrator 1a is reflected on the mirror surface placed on the GND pattern 17
becomes the laminated vibrator 1b. Shall refer to
[0029]
The laminated vibrator 1 (not shown) facing the laminated vibrator 1c is arranged by the same
arrangement method for the GND pattern 17 arranged on the right side of FIG. 4, and the
arrangement in the Y-axis direction is determined. Be done.
[0030]
Further, the alignment in the X-axis direction is performed by parallel movement in the X-axis
direction while maintaining the above-described alignment in the Y-axis direction.
At that time, the respective external electrodes 16 of the facing laminated vibrators 1 are
arranged to share the GND pattern 17.
[0031]
Here, according to the above arrangement method, it is possible to arrange the wide GND
patterns 17 on the printed circuit board 3 every other element. Since the distance between the
GND patterns 17 is determined by the distance between the two laminated vibrators 1, the width
of the GND pattern 17 can be made wide. Therefore, bonding such as alignment and soldering
when mounting the laminated vibrator 1 on the printed circuit board 3 is facilitated. The external
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10
electrodes 7 and the printed circuit board 3 are bonded by lands 18 provided on the printed
circuit board.
[0032]
Furthermore, as shown in FIG. 4, the GND pattern 17 can be patterned uniformly in the Y-axis
direction by having a structure in which the array of laminated vibrators 1 is moved in parallel in
the X-axis direction. An effect can be expected.
[0033]
Further, in the present embodiment, as can be seen from FIG. 1, the laminated vibrators 1 are
arranged in mirror symmetry with respect to the GND pattern 17a or 17b.
In this arrangement, the electrodes of adjacent laminated vibrators face each other at the same
polar potential. That is, GND and GND face each other, and the signal potential and the signal
potential face each other. Therefore, when the laminated vibrator is mechanically vibrated, even
if it is in contact, even if it is in contact, there is little adverse effect such as short circuit and
failure.
[0034]
Next, a manufacturing method for realizing the structure of the present laminated vibrator 1 will
be described with reference to FIGS.
[0035]
FIG. 6 shows a laminated piezoelectric body 200 in which a plurality of electrodes and dielectric
layers are laminated.
First, the first layer electrode 21a is screen-printed on the dielectric layer using a mask having a
desired pattern. Furthermore, a dielectric layer 21e is stacked on the first layer electrode 21a,
and the second layer electrode 21b is screen-printed on the dielectric layer 21e by the same
method as the first layer. This method is sequentially repeated to stack up to the fourth layer
electrode 21d. Next, in this state, the laminated body is crimped and then integrally sintered.
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11
Thereby, the laminated piezoelectric body 200 including the three dielectric layers 21e, 21f, and
21g is formed. For example, PZT ceramic can be used as a piezoelectric material constituting the
dielectric layer, and Pt, Ag, Pd, Ni can be used as an internal electrode.
[0036]
Here, the mask used for the screen printing will be described with reference to FIG. The electrode
patterns of the first to fourth layers are sequentially shown in FIG. In each drawing, the electrode
material is not screen-printed in a portion shown by white, for example, the opening pattern 22
or the insulating region 23, and the electrode is screen-printed only in the region shown as the
electrode 25 to form the electrode pattern. . The opening pattern 22 is a portion that contributes
to the formation of the gap 13 of the internal electrode or the external electrode of the laminated
piezoelectric body 200 shown in FIG. 2 and the like when the laminated vibrator 1 is cut out
individually from the laminated piezoelectric body 200. The details of this gap formation will be
described later. The insulating region 23 is a region where the dielectric layer is exposed, the
arrangement of the insulating region 23 is formed by a pair of opposing patterns, and the first
layer and the third layer are the same arrangement. The second and fourth layers are designed to
be in the same arrangement. The first layer and the fourth layer correspond to the external
electrode shown in FIG. 2, and the second electrode and the third electrode correspond to the
internal electrode. With this arrangement, as described later, a desired electric field can be
applied to each of the dielectric layers constituting the laminated piezoelectric body, and
polarization processing of each of the dielectric layers can be performed.
[0037]
The polarization process will be described with reference to FIG. As illustrated, side dummy
electrodes 20 a and 20 b are provided on the side surfaces of the laminated piezoelectric element
200 that is integrally sintered. The side surface dummy electrodes 20a and 20b are formed
using, for example, a conductive paste. Alternatively, it can be formed by plating using a mask.
An electric field can be applied to each electrode formed in the laminated piezoelectric body 200
by the side surface dummy electrodes. For example, the first and third layers are negatively
charged by applying a negative electric field to the side surface dummy electrode 20a using the
voltage source 30, and the second layer is applied by applying a positive electric field to the side
surface dummy electrode 20b, The fourth layer is positively charged. The dielectric layers 21e,
21f, 21g sandwiched between them are polarized.
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[0038]
After the polarization is completed, the laminated vibrator 1 having a desired shape is cut out in
the procedure shown in FIGS. First, the laminated piezoelectric body 200 is cut along cutting
lines (dot and dash lines) 24a and 24b in the Y axis direction shown in FIG. 7, and then along
cutting lines (dot and dash lines) 24c and 24d in the X axis direction. When the laminated
piezoelectric body 200 is cut, the shape shown in FIG. 8 is obtained.
[0039]
Next, FIG. 9 shows dicing of the laminated piezoelectric body 200 using the cutter 26 in the Xaxis direction, and cutting of the laminated vibrator 1a elongated in the X-axis direction. Here,
the laminated vibrator 1a that has been cut out corresponds to the region indicated by the
symbol B in FIG. 7, and the width in the Y-axis direction of the laminated vibrator 1a corresponds
to the “element width” shown in FIG.
[0040]
Next, formation of the gaps 13a to 13d shown in FIG. 9 will be described. First, when the
electrode pattern 21a of the first layer shown in FIG. 7 is cut out in the cutout region B, a part of
the opening pattern 22 is cut out to form the gap 13d shown in FIG. Furthermore, in the second
electrode pattern 21b, the opening pattern 22 is cut out in the area surrounded by the cutting
lines 24a, b and e, and the gap 13b shown in FIG. 9 is obtained. Similarly, the opening pattern 22
provided in the third electrode pattern 21c corresponds to the gap 13c shown in FIG. 9, and the
opening pattern 22 provided in the fourth electrode pattern 21d is shown in FIG. It can be seen
that it corresponds to the gap 13d.
[0041]
In FIG. 10, side electrodes are formed on the side surfaces of the laminated vibrators 1b cut out
in FIG. 9 at a temperature lower than the Curie temperature by using plating, sputtering or the
like. The Curie temperature is determined according to the type of piezoelectric material, and is,
for example, about 200 to 300 ° C. for PZT piezoelectric ceramics and about 175 ° C. for PZNT
piezoelectric single crystals. Since it is necessary to provide a gap 13d between the side electrode
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13
15 and the external electrode, selective film formation needs to be performed for plating and the
like. Alternatively, after forming the electrode, the gap 13d is formed by dicing or the like.
Therefore, plating etc. are performed while masking. As a result, as shown in FIG. 10, since the
processing is performed at a temperature lower than the Curie temperature, the side electrodes
15 can be formed while maintaining the polarization, and further, electrical connection with each
electrode can be realized. .
[0042]
FIG. 11 shows a state in which the laminated vibrator 1b elongated in the X-axis direction in
which the side surface electrodes 15 are formed is diced in the Y-axis direction using a cutter 26
and divided into a plurality of laminated vibrators 1 of final shape.
[0043]
The cut laminated vibrators 1 are arranged on the backing material 4 and the acoustic matching
layer 2 is laminated on the respective laminated vibrators 1 to obtain the ultrasonic probe 100
shown in FIG.
At this time, the laminated vibrators are arranged in mirror symmetry with respect to the GND
pattern 17a or 17b shown in FIG.
[0044]
The external electrode at the bottom of the laminated vibrator 1 is electrically connected to the
GND pattern 17a or 17b. The other electrode is connected to the land 5 and a signal is input
here.
[0045]
According to the present embodiment, after being subjected to the polarization treatment, it is
cut into a predetermined shape, and the processing in the middle of the process is also
performed at a temperature lower than the Curie temperature. The effect is obtained that the
completely polarized state to the end, that is, the state in which the polarization direction is
aligned in all in the plane can be obtained.
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[0046]
In the present embodiment, the number of laminated layers of the laminated vibrator 1 is three.
However, the present invention is not limited to this, and may be another laminated number as
long as it is an odd layer.
In the above description, only the portion of the laminated vibrator 1 is cut in the X-axis direction
and the Y-axis direction, but layers necessary for the configuration of the acoustic matching layer
2 shown in FIG. , And may be divided into two dimensions. An example of the latter will be
described in the third embodiment. Second Embodiment FIG. 5 is a schematic configuration view
showing a second embodiment of the ultrasonic probe according to the present invention. FIG. 5
is a modification of the GND pattern 17 shown in FIG.
[0047]
The structure or arrangement method of the laminated vibrator 1 is as described in the first
embodiment. A difference from the first embodiment is that a GND conductor 19 is used instead
of the GND pattern 17, and the wiring method of the GND electrode is different. It is not
necessary to form the GND pattern 17 shown in the first embodiment on the lower surface
electrode by pulling out the GND electrode from the side as shown in FIG. 5, so the area where
the dielectric layer in the lower part of the laminated vibrator 1 is surrounded by the electrode
Will increase. Thereby, the effective area of the element can be improved, and the sensitivity can
be improved and the impedance can be reduced. A thin metal plate such as a soft copper wire
can also be used. Third Embodiment FIG. 12 is a schematic configuration view showing a third
embodiment of the ultrasonic probe according to the present invention. In the first embodiment,
the printed circuit board shown in FIG. 1 is provided on the backing material 40, and the
laminated vibrator is formed on the printed circuit board. On the other hand, in the present
embodiment, the laminated vibrator is directly provided on the backing material 40 without
using the printed circuit board. This point is different from the first embodiment.
[0048]
The GND pattern 17 and the lands 18 are provided on the backing material 40. The GND pattern
17 is electrically connected to the GND 28 provided to surround the side surface of the backing
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15
material 40. The lands 18 are connected to signal vias made of conductors provided through the
backing 40 and are electrically connected to the connector or the printed circuit board on the
back of the backing 40. The GND 28 is formed of a conductor material such as metal.
[0049]
Further, the GND pattern 17 is connected to the external electrode 16 provided at the bottom of
the laminated vibrator 1 and plays a role of giving the laminated vibrator 1 a GND potential. The
lands 18 are electrically connected to the side electrodes 15 through the external electrodes 7 of
the laminated vibrator 1 and play a role of providing a signal potential.
[0050]
The GND 28 is disposed so as to surround the entire periphery of the side surface of the backing
material 40, which can be expected to provide an electromagnetic shielding effect on the signal
passing through the signal via. In the present embodiment, the GND 28 surrounds the entire side
surface of the backing material 40, but may partially surround the side surface according to the
desired shielding effect.
[0051]
When this backing material 40 is used, the laminated vibrator before being cut out shown in FIG.
6 can be mounted, and then dicing can be performed to form the individual laminated vibrator 1
on the backing material 40. In the case of using the backing material 40, the signal lines are
embedded in the interior of the backing material 40, so even if some damage is caused by the
cutter during dicing, the influence on the electrical characteristics is negligible. It is.
[0052]
Alternatively, the laminated vibrator 1 cut out individually may be mounted on the backing
material 40. In any of the methods, the acoustic matching layer 2 is laminated on the cut out
laminated vibrators 1 as shown in FIG. Therefore, as described above, when the backing material
40 is used, a degree of freedom is given to the processing method. Fourth Embodiment FIG. 13 is
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a block diagram showing an ultrasonic diagnostic apparatus using an ultrasonic probe 100
according to a fourth embodiment of the present invention. The ultrasonic diagnostic apparatus
uses ultrasonic waves to obtain an ultrasonic image of a diagnosis region of the test object 50
and is useful for diagnosis. The probe (probe) 51 together with a probe (probe) 51 for
transmitting and receiving ultrasonic waves to the inspection target 50 and a transmission circuit
52 for transmitting an ultrasonic wave of a predetermined beam waveform from the probe
(probe) 51 A reception circuit 53 for forming a predetermined reception waveform from the
reception signal received in step S2 and processing the reception signal, and a control unit 55 for
controlling the transmission timing of the reception circuit 53 and the display timing from the
reception signal. , And a display unit 54 for displaying an ultrasonic image.
[0053]
As the probe (probe) 51, the ultrasound probe 100 according to the present invention is used. By
using the laminated vibrator 1 of the present invention, the acoustic matching layer 2 can be
formed independently of the adjacent element, so that isolation with the adjacent element is
possible, and acoustic crosstalk can be reduced. Thereby, a clear diagnostic image is obtained by
improving the S / N ratio.
[0054]
Further, as described in the first embodiment and the like, the GND and the GND of the multilayer
vibrator 1 face each other, and the signal potential and the signal potential face each other.
Therefore, when the laminated vibrator is mechanically vibrated, even if it is in contact, even if it
is in contact, there is little adverse effect such as short circuit and failure. As a result, the S / N
ratio is improved, the failure rate of the ultrasonic diagnostic apparatus can be reduced, and the
reliability can be improved.
[0055]
1, 1a, 1b, 1c: laminated vibrators, 2: acoustic matching layer, 3: printed circuit board, 4, 40:
backing material, 5: dielectric layer, 6, 7: external electrode, 8, 9: internal electrode, 10, 11, 12,
13, 13a, 13b, 13c, 13d: gap, 14, 15: side electrode, 16: external electrode, 17, 17a, 17b: GND
pattern, 18: land, 19: conductor for GND, 20a , 20b ... side electrode dummy, 21a ... 1st layer
electrode, 21b ... 2nd layer electrode, 21c ... 3rd layer electrode, 21d ... 4th layer electrode, 21e ...
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1st layer dielectric layer, 21f ... 2nd layer dielectric Body layer, 21 g: third dielectric layer, 22:
opening pattern, 23: insulating region, 24a, 24b, 24c, 24d, 24e: cut portion, 25: electrode, 26:
cutter, 27: signal via, 28 ... GND, 30 ... voltage source, 50 ... inspection object, 5 ... probe (probe),
52 ... transmission circuit, 53 ... receiving circuit, 54 ... display unit, 55 ... control unit, 100 ...
ultrasonic probe, 200 ... laminate dielectric. A: observation direction, B: laminated vibrator cutout
range.
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