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DESCRIPTION JP2012050051

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DESCRIPTION JP2012050051
PROBLEM TO BE SOLVED: To provide an ultrasonic transducer capable of making the vibration
distribution of a wide ultrasonic radiation surface substantially uniform with a simple
configuration, and a driving method thereof. SOLUTION: Six piezoelectric elements 6 made of
piezoelectric ceramic are bonded to both surfaces of an aluminum ultrasonic wave propagating
body 2 with an epoxy resin, thereby forming an ultrasonic transducer 1. In the ultrasonic wave
propagation body 2 made of aluminum, thirteen orthogonal slits 6 are provided in the direction
orthogonal to the ultrasonic vibration direction indicated by the arrow. There are six orthogonal
slits in the front row and seven orthogonal slits in the rear row. The ultrasonic wave propagation
body 2 is divided into the vibrating portion 3 and the insulating portion 4 by the orthogonal slits
6. A piezoelectric element is disposed in the vibration unit 3. The insulating portion 4 is provided
with female screws 7a, 7b, 7c, 7d, 7e, 7f for fixing to the support fixing portion. [Selected figure]
Figure 5
Ultrasonic transducer
[0001]
The present invention relates to an ultrasonic transducer suitably used as an ultrasonic vibration
source in ultrasonic bonding of a wide range of objects, etc., and preferably driven near the
resonance frequency.
[0002]
A conventional ultrasonic transducer used for ultrasonic bonding or the like of a wide range of
objects, as shown in FIG. 10, has a vibrating portion 20 for generating ultrasonic vibration and
the vibration of the vibrating portion 20 amplified and transmitted. The horn carries vibration
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energy.
[0003]
The vibrating portion 20 is formed in a cylindrical shape using as a drive source a vibrator 21
formed of a piezoelectric element or a magnetostrictive element having a conductive metal plate
interposed therebetween, and the vibrator 21 causes a drive circuit (not shown) to It converts
electrical vibration into mechanical ultrasonic vibration.
[0004]
The horn 22 has a substantially rectangular shape in a front view and a substantially plate shape
formed to be longer in the left-right direction than in the front-rear direction in a plan view.
The horn 22 has a lower end surface serving as an incident surface 23 to which the vibration of
the vibrating portion 20 is incident.
The horn 22 is formed with one or more slits.
The slits 24 are long in the vertical direction penetrating the front and back of the horn 22, and
the horn 22 is divided into a plurality of vertical vibration paths by the slits 24.
[0005]
However, in the vibration path created by the slits, the central vibration path is connected to the
vibration part. The other paths do not have a vibrating part. Therefore, it is difficult for the
central vibration path and the other vibration paths to have the same vibration displacement, and
there is a problem that the vibration distribution on the ultrasonic radiation surface can not be
made uniform.
[0006]
In addition, since the vibrating part and the horn are joined by the mechanical force by the screw,
it is difficult to always join by the same mechanical force, and when there are a plurality of
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vibrating parts, the mechanical parts of the respective vibrating part and the horn There is a
problem that the vibration distribution on the ultrasonic radiation surface can not be made
uniform because the coupling is different.
[0007]
In addition, since the vibration part mechanically tightens and integrates a plurality of
piezoelectric elements and metal plates with a bolt, a plurality of vibration parts having the same
vibration characteristics may be caused due to variations in the shape of parts and the
characteristics of the piezoelectric elements. It is difficult to obtain, so there is a problem that the
ultrasonic transducer having two or more vibrating parts can not make the vibration distribution
of the ultrasonic radiation surface uniform.
[0008]
Further, the support structure is to fix only the periphery of the thin metal plate, and when a
large stress acts on the ultrasonic radiation surface, there is a problem that the posture of the
ultrasonic transducer can not be maintained.
[0009]
Since the vibrating portion is a Langevin type ultrasonic transducer, there is a problem that the
thickness is large and it can not cope with thinning.
[0010]
JP, 2007-90184, A
[0011]
The present invention has been invented in view of the above-mentioned conventional problems,
and the object of the present invention is to simplify the structure of the ultrasonic transducer
and to make the vibration distribution on a wide ultrasonic radiation surface uniform. It is an
object of the present invention to provide an ultrasonic transducer capable of
[0012]
The present invention provides an ultrasonic wave propagation body having an orthogonal slit
orthogonal to the vibration direction in a rectangular parallelepiped ultrasonic transducer, one of
which is divided by the orthogonal slit is used as an insulating portion, and the insulating portion
is supported and fixed, orthogonal slit The other divided by the above is a vibrating portion, and
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a piezoelectric element is bonded to the vibrating portion, and a voltage of 15 KHz or more is
applied to the piezoelectric element.
[0013]
The present invention also provides an ultrasonic transducer having a rectangular parallelepiped
shape and provided with one or more orthogonal slits orthogonal to the vibration direction in a
width W orthogonal to the vibration direction.
[0014]
The present invention is also directed to an ultrasonic transducer having a rectangular
parallelepiped shape, in which at least one parallel slit parallel to the vibration direction is
provided in the vibrating portion divided by the orthogonal slits.
[0015]
The present invention also provides two or more parallel slits parallel to the vibration direction in
the vibrating portion divided by the orthogonal slits when the width W of the vibrating portion is
larger than the length L of the vibrating portion of the ultrasonic wave propagation body It is an
ultrasonic transducer.
[0016]
According to the present invention, the outer shape of the ultrasonic wave propagation body of
the ultrasonic transducer is a polygonal column, and the ultrasonic wave propagation body has
orthogonal slits or parallel slits.
[0017]
The ultrasonic transducer of the present invention can excite substantially uniform ultrasonic
vibration over a wide area.
[0018]
It is a perspective view explaining the ultrasonic transducer | vibrator of 1st implementation of
this invention.
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It is a top view of the ultrasonic transducer | vibrator of FIG.
It is the perspective view which fixed the ultrasonic transducer | vibrator of FIG. 1 to the support
fixing | fixed part.
It is a perspective view explaining the ultrasonic transducer | vibrator of the 2nd implementation
of this invention.
It is a perspective view explaining the ultrasonic transducer | vibrator of the 3rd implementation
of this invention.
It is a perspective view explaining the other ultrasonic transducer compared with the ultrasonic
transducer shown in FIG.
It is a top view explaining the ultrasonic transducer | vibrator of the 4th implementation of this
invention.
It is sectional drawing in the AA of FIG.
It is a perspective view explaining the ultrasonic transducer | vibrator of 5th implementation of
this invention.
It is a perspective view explaining the conventional ultrasonic transducer | vibrator.
[0019]
Hereinafter, a first embodiment of an ultrasonic transducer according to the present invention
will be described using the perspective view of FIG.
The piezoelectric element 5 made of piezoelectric ceramic is bonded to both surfaces of the
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ultrasonic wave propagation body 2 made of aluminum with an epoxy resin to form the
ultrasonic vibrator 1.
The ultrasonic wave propagation body made of aluminum is provided in a direction orthogonal to
the ultrasonic vibration direction indicated by the arrows, with the longitudinal direction of the
orthogonal slits 6a, 6b and 6c penetrating in the thickness direction of the ultrasonic wave
propagation body.
The piezoelectric element 5 is bonded to the vibrating portion 3 to be ultrasonically vibrated with
epoxy resin. Then, ultrasonic vibrations are reflected by the orthogonal slits 6a, 6b and 6c,
whereby female screws 7a, 7b and 7c provided in the insulating unit 4 where transmission of the
ultrasonic vibrations is substantially eliminated and male screws on the support fixing unit 8
shown in FIG. Join and fix with 9a, 9b, 9c.
[0020]
The shape of the ultrasonic wave propagation body 2 will be described in detail. Let L be the
shortest distance between the tip of the ultrasonic vibration and the orthogonal slit 6a. Then, the
width of the ultrasonic wave propagation body 2 is W. Also, let T be the thickness of the
ultrasonic wave propagation body 2. Here, L is larger than W, and in particular, in order to excite
only the vibration in the L direction, it is desirable to make L twice or more than W. T is smaller
than W. Desirably, W is made twice or more of T. With such a shape, the basic vibration mode
(the vibration mode with the lowest resonance frequency) of the vibration unit 3 can be made in
the arrow direction in the figure.
[0021]
As for the shape of the drive source, it is desirable that the length in the vibration direction of the
shape of the piezoelectric element 5 made of piezoelectric ceramic is larger than the length in the
width direction in order to make the fundamental vibration mode in the length direction.
[0022]
FIG. 2 shows the plane of FIG.
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The arrow direction indicates the direction of ultrasonic vibration. The lines a, b and c in the
figure are lines parallel to the ultrasonic vibration direction, and the line of any part is always
orthogonal to any of the orthogonal slits 6a, 6b and 6c. The ultrasonic vibration is reflected by
the space surrounded by the orthogonal slits 6a, 6b and 6c, and is hardly propagated to the
insulating portion 4 on the other side of the vibrating portion 3.
[0023]
Even if the insulating portion 4 of the ultrasonic transducer 1 is supported and fixed, the
vibrating portion 3 can vibrate substantially without restraint due to the effects of the orthogonal
slits 6a, 6b and 6c.
[0024]
Next, a method of operating the above-described ultrasonic transducer 1 will be described with
reference to FIG.
The ultrasonic transducer 1 is fixed to the support fixing portion 8 by bolts 9a, 9b, 9c. Then, a
voltage of the resonance frequency of the longitudinal vibration mode in which the length L of
the vibrating portion 3 is a half wavelength is applied to the piezoelectric element 5 from the
ultrasonic drive device 10 through the lead wires 11a and 11b. The ultrasonic drive apparatus
10 has a tracking circuit that tracks the resonance frequency.
[0025]
The ultrasonic wave propagation body 2 is divided into the vibrating portion 3 and the insulating
portion 4 by providing the plurality of orthogonal slits 6 a, 6 b and 6 c orthogonal to the
vibration direction of the ultrasonic transducer 1 as described above. Due to the orthogonal slits
6a, 6b and 6c, the insulator 4 is a so-called node of vibration because vibration hardly
propagates. Therefore, since it can be supported and fixed anywhere in the insulating part 4, it is
easy to attach to other members.
[0026]
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A second embodiment of the ultrasonic transducer according to the present invention will be
described with reference to the perspective view of FIG. The four piezoelectric elements 5 made
of piezoelectric ceramic are bonded to both surfaces of the aluminum ultrasonic wave
propagation body 2 with an epoxy resin to form the ultrasonic vibrator 1. In the ultrasonic wave
propagation body 2 made of aluminum, orthogonal slits 6a, 6b, 6c, 6d, 6e penetrating in the
thickness direction of the ultrasonic wave propagation body are provided in a direction
orthogonal to the ultrasonic vibration direction indicated by the arrow. The shape of the
vibrating portion 3 is such that the length in the vibration direction is L and the length in the
width direction orthogonal to the vibration direction is W. When L is less than twice W, it is
difficult to excite the vibration only in the L direction. Therefore, the parallel slit 12 is provided,
and L is twice or more of the width Ws divided by the parallel slit 12. By doing this, it is possible
to excite ultrasonic vibration in the direction of the substantially uniform arrow in the entire
width W direction.
[0027]
The ultrasonic wave propagation body 2 made of aluminum is divided into the vibrating portion
3 and the insulating portion 4 by the orthogonal slits 6a, 6b, 6c, 6d and 6e. The orthogonal slits
6a, 6b, 6c, 6d, and 6e are disposed so as to be orthogonal to a line orthogonal to the entire width
W of the vibrating portion. Also, the shape and arrangement of the slits 6 are designed by
simulation by the finite element method or the like so that breakage or partial failure does not
occur due to external mechanical load.
[0028]
The shape of the ultrasonic wave propagation body 2 will be described in detail. The shortest
distance between the tip of the ultrasonic vibration and the orthogonal slit 6b is L. Then, the
width of the ultrasonic wave propagation body 2 is W. Also, let T be the thickness of the
ultrasonic wave propagation body 2. Here, L is larger than W, and in particular, in order to excite
only the vibration in the L direction, it is desirable to make L twice or more than W. T is smaller
than W. Desirably, W is made twice or more of T. With such a shape, the basic vibration mode
(the vibration mode with the lowest resonance frequency) of the vibration unit 3 can be made in
the arrow direction in the figure. When L is less than twice W, the ultrasonic wave propagation
body 2 made of aluminum is divided into two vibrating parts 3 by the parallel slit 12. As a result,
if L is larger than W, the shape of the divided vibrating portion 3 is L in length and Ws in width,
so L is at least twice Ws and the vibrating portion 3 has the length of the basic mode It can excite
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vibration in the direction.
[0029]
Female screws 7a, 7b, 7c, 7d, 7e and 7f are provided in the insulating portion 4 and are
supported and fixed by bolts to a support fixing portion (not shown). As described above, since
the entire length of the width of the insulating portion 4 can be fixed and held, it is resistant to
external mechanical load.
[0030]
Further, as for the shape of the drive source, it is desirable that the length in the vibration
direction of the piezoelectric element made of piezoelectric ceramic is larger than the length in
the width direction in order to make the fundamental vibration mode in the length direction.
[0031]
A third embodiment of the ultrasonic transducer according to the present invention will be
described with reference to the perspective view of FIG.
Six piezoelectric elements 6 made of piezoelectric ceramic are bonded to both surfaces of the
aluminum ultrasonic wave propagation body 2 with an epoxy resin to form the ultrasonic
vibrator 1. The aluminum ultrasonic wave propagating body 2 is provided with 13 orthogonal
slits 6 penetrating in the thickness direction of the ultrasonic wave propagating body in a
direction orthogonal to the ultrasonic vibration direction indicated by the arrow. There are six
orthogonal slits in the front row and seven orthogonal slits in the rear row. The ultrasonic wave
propagation body 2 is divided into the vibrating portion 3 and the insulating portion 4 by the
orthogonal slits 6. A piezoelectric element is disposed in the vibration unit 3. The insulating
portion 4 is provided with female screws 7a, 7b, 7c, 7d, 7e, 7f for fixing to the support fixing
portion (not shown).
[0032]
Since the length W of the width direction orthogonal to the vibration direction is larger than the
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length L of the vibration direction, the vibration in the W direction becomes the basic vibration
mode and the vibration in the W direction is preferentially excited. Therefore, five parallel slits
12 are provided, and L is doubled or more of the width Ws divided by the parallel slits 12. By
doing this, the width W becomes the width Ws, and L can be made twice or more than Ws, so the
vibration in the direction of the arrow of the shape of the length L and the width Ws becomes the
basic vibration mode. As a result, it is possible to excite ultrasonic vibration in the direction of the
substantially uniform arrow in the full width W. T is smaller than W. Desirably, W is made twice
or more of T.
[0033]
As described above, even when the width W of the vibrating portion is larger than the length L,
by providing a plurality of parallel slits, vibrations in the substantially uniform direction of the
arrow are excited over the entire length W of the vibrating portion. be able to. Further, by
adjusting the voltage applied to each piezoelectric element, the distribution of the vibration in the
arrow direction can be improved.
[0034]
Furthermore, by dividing the ultrasonic wave propagation body 2 into the vibrating portion 3
and the insulating portion 4 by the plurality of orthogonal slits 6, the vibrating portion 3 is an
arrow in which the tip in the vibration direction of the orthogonal slit 6 and the vibrating portion
3 becomes a free end. It can excite vibration in the direction. Then, since the vibration of the
vibrating portion 3 is reflected by the orthogonal slit 6 and the vibration can be confined within
the vibrating portion 3, the insulating portion 4 is a place where almost all of the vibration nodes
are vibration, that is, there is almost no vibration. By providing a plurality of orthogonal slits 6 in
the ultrasonic wave propagation body 2 as described above, a place without vibration can be
easily provided. Therefore, the fixation of the ultrasonic transducer 1 can be made simply and
revolutionaryly in comparison with the prior art. Become.
[0035]
As described above, by simultaneously providing the orthogonal slits 6 and the parallel slits 12 in
the ultrasonic wave propagation body 2, a desired vibration mode can be excited regardless of
the shape of the rectangular ultrasonic wave propagation body 2.
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[0036]
The configuration in which the above-described third embodiment and the supporting method
are different will be described using the perspective view of FIG.
Although the shape of the vibrating portion 3 is substantially the same as that of FIG. 5, the
support arm 12 is formed at the center of the shape of the insulating portion 4 and an
orthogonal slit 6 for insulating vibration is provided at the boundary with the vibrating portion 3.
The orthogonal slit 6 is made to be orthogonal to the vibration direction, and the length of the
orthogonal slit 6 is made larger than the width of the support arm 13 provided in the insulating
portion 4. By doing this, the vibration is not transmitted to the support fixing portion (not
shown). However, since only support and fixation is performed at the central portion of the
ultrasonic transducer 1, mechanical stability of the support and fixation is lost.
[0037]
A fourth embodiment of the ultrasonic transducer according to the present invention will be
described with reference to a plan view of FIG. 7 and FIG. 8 showing a cross section taken along
line A-A of FIG. The ultrasonic transducer 1 enlarges the ultrasonic vibration by raising the
vibration velocity by reducing the cross-sectional area toward the tip of the ultrasonic wave
propagation body 2 to the tip. Six piezoelectric elements 5 made of piezoelectric ceramic are
respectively bonded to both surfaces of the aluminum ultrasonic wave propagation body 2 with
epoxy resin to make the ultrasonic vibrator 1. The aluminum ultrasonic wave propagating body 2
is provided with thirteen orthogonal slits 6 penetrating in the thickness direction of the
ultrasonic wave propagating body 2 in the direction orthogonal to the ultrasonic vibration
direction indicated by the arrow. There are six orthogonal slits in the front row and seven
orthogonal slits in the rear row. The ultrasonic wave propagation body 2 is divided into the
vibrating portion 3 and the insulating portion 4 by the orthogonal slits 6. The piezoelectric
element 5 is disposed in the vibrating portion 3. The insulating portion 4 is provided with a
female screw for fixing to a support fixing portion (not shown).
[0038]
The shape of the vibrating portion 3 is such that the length L in the vibration direction is one
wavelength at the driving frequency. The piezoelectric element 5 is joined to the half wavelength
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L / 2 part at the drive frequency on the orthogonal slit 6 side, and the length of the half
wavelength L / 2 at the drive frequency on the tip side decreases in thickness toward the tip .
The vibration mode in the arrow direction is indicated by a broken line in FIG. In the half cycle at
the drive frequency, the right side of the center line indicates elongation, and the left side
indicates contraction. Naturally, in the latter half half cycle at the drive frequency, it is opposite
to the vibration displacement in the first half half cycle.
[0039]
The ultrasonic wave propagation body 2 will be described. What is the shape of the vibrating
part 3? When the length L in the vibration direction is four or more times the length W in the
width direction orthogonal to the vibration direction and two or more times Ws, vibration of one
wavelength in the L direction can be excited. The vibration in the direction of the arrow of the
shape of the length L and the width Ws is the basic vibration mode. By setting L to four or more
times Ws, it is possible to preferentially excite vibration of one wavelength in the longitudinal
direction over vibration in the width direction. As a result, it is possible to excite ultrasonic
vibration of one wavelength length in the direction of the substantially uniform arrow in the full
width W. T is smaller than W. Desirably, W is made twice or more of T.
[0040]
The thickness of the half-wavelength portion at the drive frequency on the tip side of the
vibrating portion 3 is made thinner toward the tip. As a result, as shown by the broken line in
FIG. 8, the amount of vibration displacement of the tip of the vibrating portion 3 becomes large.
By changing the shape of the vibrating portion 3 in this manner, the amount of vibration of the
tip can be adjusted.
[0041]
A fifth embodiment of the ultrasonic transducer according to the present invention will be
described with reference to the perspective view of FIG. The ultrasonic transducer 1 is formed by
bonding a total of twenty-four piezoelectric elements 5 made of piezoelectric ceramic to the outer
and inner sides of the rectangular aluminum cylindrical ultrasonic wave propagation body 2 on
the outer and inner sides by an epoxy resin. In the ultrasonic wave propagation body 2 made of
aluminum, an orthogonal slit 6 penetrating in the thickness direction of the ultrasonic wave
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propagation body is provided in a direction orthogonal to the ultrasonic vibration direction
indicated by the arrow. There are a total of 12 pieces in total of 4 pieces in 4 planes and 4 pieces
in total in 16 pieces in 4 corners.
[0042]
A total of eight parallel slits 12 are provided on each surface of the ultrasonic wave propagation
body 2 made of positive quadrangular prismatic cylindrical aluminum. L is doubled or more with
respect to the width Ws divided by the parallel slit 12. By doing this, the width W becomes the
width Ws, and L can be made twice or more than Ws, so the vibration in the direction of the
arrow of the shape of the length L and the width Ws becomes the basic vibration mode. As a
result, it is possible to excite ultrasonic vibration in the direction of the substantially uniform
arrow in the full width W.
[0043]
Eight female screws 7 are provided in the insulating portion 4 divided by the orthogonal slits 6
provided in the ultrasonic wave propagation body 2 made of positive quadrangular column
cylindrical aluminum, and the entire surface of the end face of the positive quadrangular column
is provided on a support fixing portion not shown. Can be fixed. Therefore, mechanically stable
fixation can be performed. Moreover, since the insulating part 4 can be comprised only by
providing the orthogonal slit 6 in the ultrasonic wave propagation body 2 made from a regular
tetragonal-pillar cylinder-shaped aluminum, the structure of an ultrasonic transducer becomes
epoch-making simple.
[0044]
In the present invention, a through slit is used to divide the ultrasonic wave propagation body
into a vibrating part and an insulating part, but a through hole may be used. The shape of the
hole is, for example, a polygon, a circle, or an ellipse.
[0045]
In the above description, the ultrasonic transducer 1 is a piezoelectric ceramic, but a single
crystal piezoelectric material or the like may be used.
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[0046]
The ultrasonic transducer of the present invention can be suitably used for a wide range of
objects, and is used as an ultrasonic transducer for ultrasonic cleaning devices, ultrasonic
welding devices, ultrasonic abrasive processing devices, ultrasonic cutter devices, etc. be able to.
[0047]
Reference Signs List 1 ultrasonic transducer 2 ultrasonic wave propagating body 3 vibrating
portion 4 insulating portion 5 piezoelectric element 6 orthogonal slit 7 female screw 8 support
fixing portion 9 bolt 10 ultrasonic driving device 11 lead wire 12 parallel slit 13 supporting arm
20 vibrating portion 21 vibrator 22 horn 23 incident surface 24 slit
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