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DESCRIPTION JP2013031040

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DESCRIPTION JP2013031040
Abstract: PROBLEM TO BE SOLVED: To provide a piezoelectric actuator which can obtain large
vibration amplitude and vibration generating force at low cost, and is excellent in drop impact
resistance and long-term reliability. SOLUTION: A piezoelectric bimorph 10 and a support 11
provided at both ends thereof, the piezoelectric bimorph 10 is configured to vibrate in a primary
resonance mode in which a displacement of a central portion becomes maximum at a driving
frequency. The support 11 has a structure in which a part of a band-like portion is sandwiched
from both upper and lower sides in the width direction of both ends of the piezoelectric bimorph
10 and is transmitted to an external vibrating body via the support 11 Is configured as. The
piezoelectric bimorph 10 is configured such that the piezoelectric body 13 is attached to one
surface of the metal shim 12 and a portion where the metal shim 12 protrudes on both sides in
the width direction of the piezoelectric body 13, and the support 11 is a piezoelectric body An air
gap is formed between the upper surface and the upper surface 13 of the metal shim 12, and a
groove is provided so as to fit in a portion of the metal shim 12 that is extended in the width
direction to support the piezoelectric bimorph 10. [Selected figure] Figure 1
Piezoelectric actuator
[0001]
The present invention relates to a piezoelectric actuator using a piezoelectric bimorph having a
laminated structure or a single plate structure.
[0002]
14-04-2019
1
In recent years, electronic devices in which a touch panel function is incorporated in a display
device are increasing, and operation keys are used in input devices of many electronic devices
such as personal computers and PDAs (Personal Digital Assistants).
The touch panel and the operation keys are used to input information when the operator presses
a finger or a pen. However, there is a case where the operator can not know that the input has
been performed because the information that the operation has been performed is not
transmitted to the operator after the operation. In particular, since thin operation keys are
mainstream in recent display devices and input devices, the number of click feeling is shallow or
almost equal to an increase, and it is not easy for the operator to feel that they have operated
reliably. It tended to be clear. For this reason, there has been a case where an erroneous
operation is performed, such as pressing the same operation key twice.
[0003]
Therefore, conventionally, an electromagnetic actuator is provided in the apparatus as a means
for conveying to the operator that an input has been performed, and when the input is
performed, the operation is reliably performed by returning the vibration to the finger of the
operator. There is a method of giving the operator the feeling of having gone. However, such an
electromagnetic actuator takes about 0.3 seconds until the vibration converges, giving the
operator a sense of discomfort or causing the operator to release the operation mode by the
electromagnetic actuator. There was a problem that I did not use.
[0004]
As a solution to this problem, there is a method using a responsive piezoelectric actuator having
vibration convergence of about 1⁄5 of the electromagnetic actuator. Patent Documents 1 and 2
disclose conventional examples of a piezoelectric actuator for transmitting vibration to an
operator's finger in a touch panel or the like. Also, as a piezoelectric actuator, a piezoelectric
bimorph having a laminated structure or a single plate structure that can easily obtain a large
vibration amplitude is used.
[0005]
JP, 2005-303937, A JP, 2010-162508, A
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2
[0006]
The vibration frequency of the piezoelectric actuator when applying vibration to the touch panel
is preferably, for example, about 150 Hz to 250 Hz.
In addition, in order to mount this vibration function in various devices, the vibration amplitude
needs to be 400 μm or more at no load, and a large vibration generating force is required.
Furthermore, it is necessary to have high impact resistance and high reliability when mounted on
a vibrator.
[0007]
When constructing a piezoelectric actuator using a piezoelectric bimorph, generally, a method of
supporting both ends of the piezoelectric bimorph in the longitudinal direction, a method of
supporting one end of the piezoelectric bimorph in the longitudinal direction, and a center of the
piezoelectric bimorph in the longitudinal direction There are three types of methods. In the case
of one end support where the amplitude can be increased, all loads are applied to the root of the
supported one end at the time of drop impact, and it is difficult to achieve both of the vibration
generating force and the drop impact resistance. Also, in the central support, all of the weight of
the piezoelectric bimorph, and in the case of using a weight, all of the weight of the piezoelectric
bimorph and the weight will be supported by the central support portion. Therefore, in order to
obtain sufficient drop impact resistance, it is necessary to firmly fix the support portion, and the
effective length in the longitudinal direction of the piezoelectric bimorph becomes short. As a
result, the resonant frequency is increased, and there is a problem that the dimension in the
longitudinal direction of the piezoelectric bimorph is increased in order to obtain the required
resonant frequency.
[0008]
On the other hand, it is the both-ends support that the balance of vibration generating force,
vibration amplitude and drop impact resistance is relatively good. However, in the case where
both end portions are restrained from moving in the longitudinal direction over 2 mm to 3 mm,
that is, fixed to rigid, the central amplitude becomes 50 μm to 100 μm, and it is difficult to
obtain necessary vibration amplitude or vibration generating force. Further, when both ends are
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3
elastically supported, the decrease in vibration amplitude can be suppressed as compared with
the case of rigid fixation, but it is inherently difficult to obtain sufficient vibration amplitude and
vibration generating force.
[0009]
For example, the piezoelectric actuator disclosed in Patent Document 1 has a structure in which
both ends in the longitudinal direction of the piezoelectric bimorph are attached to a fixing
member with an adhesive tape to be elastically supported, and the vibration of the central
portion of the piezoelectric bimorph is transmitted to the vibrating body through the connecting
member. is there. Further, in order to increase the amplitude at the center of the piezoelectric
bimorph, supporting members and connecting members at both ends of the piezoelectric
bimorph are selected. However, with the piezoelectric actuator of the configuration disclosed in
Patent Document 1, only a vibration amplitude of about several tens of μm can be obtained.
Further, since the resonance frequency of the vibration system of the piezoelectric bimorph is
larger than the drive frequency actually used, the vibration amplitude becomes substantially
constant with respect to the drive frequency, and the device design is easy, but the obtained
vibration amplitude is small. For this reason, when the piezoelectric actuator of the configuration
of Patent Document 1 is used, it is difficult to obtain the above-mentioned required large
vibration amplitude and vibration generating force even if trying to increase the vibration
amplitude by design change. In the case of mounting on the device, there is a problem that the
device side needs a special design.
[0010]
Patent Document 2 is characterized in that two piezoelectric bimorphs are used, each of the
piezoelectric bimorphs is provided with a speaker function and a touch panel vibration function,
and they are integrated into one device. The piezoelectric bimorph for touch panel vibration is
supported at both ends. One end is fixed to the case rigidly, and the other end is fixed to the
vibrator at the other end. In the case of Patent Document 2, two piezoelectric bimorphs are
integrated, one is for a speaker and the other is for vibration, so both of the piezoelectric
bimorphs weaken the vibration generating force, and a sufficient vibration generating force is
obtained for touch panel vibration. It is not done. In addition, since it is necessary to use two
bimorphs, there is also a problem that the shape of the device becomes large.
[0011]
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Generally, in the case of increasing the vibration amplitude of the central portion in both ends of
the piezoelectric bimorph, narrowing the longitudinal width of each member supporting the
piezoelectric bimorphs of both ends as much as possible, ie, supporting the piezoelectric bimorph
It is known that it is effective that the contact state is close to the line. When the piezoelectric
bimorph is resonated at a desired frequency by supporting it linearly as described above, a large
drive voltage is input because all the longitudinal directions of the piezoelectric bimorph become
effective lengths and the fixing width at the support portion is small. This makes it possible to
increase the amplitude to the limit of the bending strength of the piezoelectric bimorph.
[0012]
However, when the piezoelectric actuator is actually assembled as a module, there are the
following two problems in order to support both ends of the piezoelectric bimorph in a nearly
linear state. The first problem is that since the production of the piezoelectric bimorph requires a
sintering heat treatment process at about 1000 ° C., a large shrinkage occurs in the thickness
direction before and after sintering, and the size of the shrinkage further varies between working
lots. Problem that is caused by the occurrence of variation. For example, designing the thickness
of a piezoelectric bimorph in fact causes a certain range of variation in its thickness. In the
production of a general single-plate piezoelectric bimorph, the design value after sintering is
determined in consideration of the shrinkage after sintering and the processing margin at the
time of polishing to cope with the variation in shrinkage. However, when the surface is polished,
it is necessary to print, dry, and bake the electrode material after the polishing, which causes an
increase in manufacturing cost.
[0013]
In addition, when installing a linear support structure sandwiching the upper and lower surfaces
from both the upper and lower sides of the piezoelectric bimorph in which the variation in
thickness dimension as described above exists, the gap of the portion where the piezoelectric
bimorph is inserted and fixed The height needs to be adjusted to the actual thickness of the
piezoelectric bimorph. As such an adjustment method, it is conceivable to move the fixed portion
up and down while measuring the thickness dimension of each piezoelectric bimorph using a
laser length measuring device etc. However, several hundred thousand like portable terminals In
mass production where millions of products are expected to be launched, such adjustments lead
to increased manufacturing costs and are not practical. In addition, although a structure having
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an adjustment mechanism that enables adjustment of the support after the module assembly of
the piezoelectric bimorph can be considered, the cost may be increased and the drop impact
resistance may be reduced.
[0014]
The second problem in supporting both ends of the piezoelectric bimorph in a nearly linear state
is long-term reliability. Since the piezoelectric bimorph has the largest expansion and contraction
of the outermost layer, in principle, the highest voltage is applied to the electrodes of the
outermost layer. In the case of linear support, the support portion is displaced relative to the
piezoelectric bimorph by vibration, so that friction is generated between the outermost electrode
and the support portion to which a large voltage is applied. The friction may damage the
electrode and may deteriorate long-term reliability.
[0015]
As described above, the conventional piezoelectric actuator for touch panel has a small vibration
generating force, and when the small vibration generating force is covered by the device design,
the device side design specialized for the piezoelectric actuator is required. As a result, there is a
problem that the versatility is low and the manufacturing cost is increased.
[0016]
In addition, when it is attempted to obtain a piezoelectric actuator having a large vibration
amplitude and vibration generation force by the prior art, the manufacturing cost is increased,
and there is a possibility that the drop impact resistance and the long-term reliability may be
insufficient.
[0017]
Therefore, an object of the present invention is to provide a piezoelectric actuator which can
obtain large vibration amplitude and vibration generating force at low cost, and is excellent in
drop impact resistance and long-term reliability.
[0018]
In order to solve the above problems, the piezoelectric actuator of the present invention
comprises a rectangular piezoelectric bimorph and supports provided respectively at both ends
in the longitudinal direction of the piezoelectric bimorph, and the piezoelectric bimorph has a
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plate-like shape. And the driving frequency is configured to vibrate in a primary resonance mode
in which the displacement of the central portion in the longitudinal direction with respect to both
ends in the longitudinal direction of the piezoelectric bimorph is maximized, and the support is in
the longitudinal direction of the piezoelectric bimorph. It has a structure in which at least a part
of a strip-like portion is sandwiched and supported from both upper and lower sides in the width
direction of both ends, and the vibration of the piezoelectric bimorph is transmitted to an
external vibrating body contacting the support through the support. It is characterized by
[0019]
Here, the piezoelectric bimorph is a piezoelectric body having a rectangular plate shape having a
length in the width direction smaller than the length in the width direction of the metal shim on
at least one surface of the metal shim having a rectangular plate shape. Affixing, at both ends in
the longitudinal direction, it is configured to have a portion where the metal shims project on
both sides in the width direction of the piezoelectric body, and the support is an air gap between
the upper surface or the lower surface of the piezoelectric body May be formed by resin molding
processing so as to be fitted to a portion of the metal shim that protrudes in the width direction
of the piezoelectric member.
[0020]
Further, the support may be manufactured by resin molding so as to sandwich both ends in the
longitudinal direction of the piezoelectric bimorph in a width direction from both upper and
lower sides in a width direction and fit in the shape of the both ends.
[0021]
In addition, the support may have a structure that supports both ends in the longitudinal
direction of the piezoelectric bimorph also from both sides in the longitudinal direction.
[0022]
Further, at least a portion between the support and the piezoelectric bimorph may be filled with a
silicone resin.
[0023]
Moreover, the said support body may be produced by the molding process of a silicone resin.
[0024]
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7
As described above, in the present invention, driving is performed in the primary resonance
mode in which the displacement of the central portion in the longitudinal direction with respect
to both ends in the longitudinal direction of the piezoelectric bimorph is maximum.
In addition, a structure of both ends support is used in which at least a part of a band-like portion
is sandwiched and supported from both upper and lower sides in the width direction of both
ends of the piezoelectric bimorph.
Further, the vibration of the piezoelectric bimorph is transmitted to an external vibrating body
such as a touch panel through the supports at the both end portions.
As described above, with the configuration in which the support in the form of a strip close to
linear in the width direction is performed at both ends in the longitudinal direction of the
piezoelectric bimorph, a large vibration amplitude and a large vibration generating force can be
obtained.
Further, the supports at both ends are attached to an external vibrator, and the vibration of the
support is transmitted to transmit the vibration of the piezoelectric bimorph.
As described above, when the support is fixed by adopting a configuration in which the support
is vibrated by the inertial force of the vibration of the piezoelectric bimorph without fixing the
support and the vibration is transmitted to the outside, It is possible to prevent the decrease in
reliability caused by the friction between them.
In addition, the required drop impact resistance can also be obtained.
[0025]
As a first structure for supporting both ends, the piezoelectric bimorph is formed by sticking a
piezoelectric body narrower than the metal shim on at least one surface of the metal shim, and
the support is fitted to the protruding portions of the both ends of the metal shim. It
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manufactures by resin molding processing so that it may fit.
Since the thickness of the metal shim does not change during the manufacturing process, only a
portion of the metal shim is supported by the support, and an air gap that does not make contact
with the piezoelectric body that may cause thickness variations during sintering By providing the
same, adjustment processing according to the thickness of the conventional piezoelectric body
becomes unnecessary.
Further, in the case of using a piezoelectric bimorph in which the piezoelectric body is attached
only to the upper surface of the metal shim, the supports at both ends may be in linear or strip
contact with the lower surface of the metal shim.
In addition, since the outer dimensions such as the height dimension of the support can be made
constant at all times, the support can be easily incorporated into an outer case or the like that
accommodates the piezoelectric actuator.
[0026]
As a second structure for supporting both ends, the support is manufactured by resin molding so
that the both ends in the longitudinal direction of the piezoelectric bimorph are sandwiched in
the width direction from both upper and lower sides and fitted in the shape of the both ends.
Since this resin molding is molded and processed according to the shape of the piezoelectric
bimorph, it is possible to absorb the variation in thickness dimension at the time of sintering. In
addition, since the outer dimensions such as the height dimension of the support can be made
constant at all times, the support can be easily incorporated into an outer case or the like that
accommodates the piezoelectric actuator.
[0027]
As a third structure of both end support, a support is supported by sandwiching both ends in the
longitudinal direction of the piezoelectric bimorph from both upper and lower sides, and at the
same time supporting both ends in the longitudinal direction of the piezoelectric bimorph also
from both sides in the longitudinal direction Do. For example, both ends in the longitudinal
direction of the piezoelectric bimorph may be inserted into and supported by the grooves of the
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support. In this case, since the support can be produced by resin molding and there is no need to
fix both ends of the piezoelectric bimorph to the support, the shape of the groove of the support
should be the variation in the thickness of the piezoelectric bimorph during sintering. It can be
set to the size that can be inserted even if there is. With this structure, variations in the thickness
dimension of the piezoelectric element can be absorbed, and the external dimensions such as the
height dimension of the support can be made constant at all times, so that it can be easily
incorporated into an exterior case or the like housing the piezoelectric actuator. It becomes
possible. In addition, silicone resin can be filled between the groove of the support and both ends
of the piezoelectric bimorph, and since the silicone resin has a constant Young's modulus with
respect to temperature, environmental performance can be improved by filling the silicone resin.
It becomes possible to obtain a piezoelectric actuator stable in temperature resistance
characteristics.
[0028]
As described above, according to the present invention, it is possible to obtain a large vibration
amplitude and vibration generating force at low cost, and it is possible to obtain a piezoelectric
actuator excellent in drop impact resistance and long-term reliability.
[0029]
FIG. 1 is a perspective view showing a first embodiment of a piezoelectric actuator according to
the present invention.
It is a figure which shows the support body used for 1st Embodiment of the piezoelectric
actuator by this invention, FIG. 2 (a) is a front view, FIG.2 (b) is a side view. FIG. 7 is a perspective
view showing a second embodiment of a piezoelectric actuator according to the present
invention. It is a figure which shows the support body used for 2nd Embodiment of the
piezoelectric actuator by this invention, FIG. 4 (a) is a front view, FIG.4 (b) is a side view. FIG. 7 is
a perspective view showing a third embodiment of a piezoelectric actuator according to the
present invention. The figure which shows the vibration amplitude with respect to the drive
frequency of the piezoelectric actuator of the Example of this invention. The figure which shows
the vibration generation force with respect to the drive frequency of the piezoelectric actuator of
the Example of this invention.
[0030]
Hereinafter, embodiments of a piezoelectric actuator according to the present invention will be
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described with reference to the drawings.
[0031]
FIG. 1 is a perspective view showing a first embodiment of a piezoelectric actuator according to
the present invention.
FIG. 2 is a view showing a support used in the first embodiment of the piezoelectric actuator
according to the present invention, FIG. 2 (a) is a front view, and FIG. 2 (b) is a side view. As
shown in FIG. 1, the piezoelectric actuator of the present embodiment includes a piezoelectric
bimorph 10 and supports 11 provided on both ends of the piezoelectric bimorph 10 respectively.
The piezoelectric bimorph 10 has a substantially rectangular plate shape having a longitudinal
direction and a width direction, and at the drive frequency, primary resonance in which
displacement of a central portion in the longitudinal direction with respect to both longitudinal
ends of the piezoelectric bimorph 10 is maximum. It is configured to vibrate in mode. The
support 11 has a structure in which a part of a band-like portion is sandwiched and supported
from both upper and lower sides in the width direction of both end portions in the longitudinal
direction of the piezoelectric bimorph 10 and a touch panel which contacts the support 11 via
the support 11 And so on to transmit the vibration of the piezoelectric bimorph 10 to an external
vibrating body.
[0032]
The piezoelectric bimorph 10 of the piezoelectric actuator of the present embodiment has a
width in the width direction of the metal shim 12 in one surface of the metal shim 12 having a
substantially rectangular plate shape having the longitudinal direction and the width direction.
The piezoelectric body 13 having a substantially rectangular plate shape smaller than the length
in the direction is attached, and the metal shims 12 are provided with projecting portions on
both sides in the width direction of the piezoelectric body 13 at both end portions in the
longitudinal direction. ing.
[0033]
As shown in FIG. 2, the support 11 is formed with a recess 15 for forming an air gap between it
and the upper surface of the piezoelectric body 13, and is fitted to a portion of the metal shim 12
extending in the width direction of the piezoelectric body 13. A groove 14 is provided so as to fit,
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11
and the entire support 11 is manufactured by resin molding processing.
The support 11 is in contact with the lower surface of the metal shim 12 in a strip shape.
[0034]
FIG. 3 is a perspective view showing a second embodiment of a piezoelectric actuator according
to the present invention. FIG. 4 is a view showing a support used in the second embodiment of
the piezoelectric actuator according to the present invention, FIG. 4 (a) is a front view, and FIG. 4
(b) is a side view. As shown in FIG. 3, the piezoelectric actuator of the present embodiment
includes a piezoelectric bimorph 20 and supports 21 provided on both ends of the piezoelectric
bimorph 20. The piezoelectric bimorph 20 has a substantially rectangular plate shape having a
longitudinal direction and a width direction, and at the drive frequency, primary resonance in
which displacement of a central portion in the longitudinal direction with respect to both
longitudinal ends of the piezoelectric bimorph 20 is maximum It is configured to vibrate in mode.
The support 21 has a structure in which a band-shaped portion is sandwiched from both upper
and lower sides in the width direction of both end portions in the longitudinal direction of the
piezoelectric bimorph 20 and supported, and an external vibrator which contacts the support 21
via the support 21. The vibration of the piezoelectric bimorph 20 is transmitted.
[0035]
As shown in FIG. 4, the support 21 is manufactured by resin molding so as to fit the shape of
both ends of the piezoelectric bimorph 20, and one of the ends of the piezoelectric bimorph 20
can be inserted from the width direction. A groove 22 in the form of a notch from the direction is
provided.
[0036]
FIG. 5 is a perspective view showing a third embodiment of the piezoelectric actuator according
to the present invention.
As shown in FIG. 5, the piezoelectric actuator of the present embodiment includes a piezoelectric
bimorph 30 and supports 31 provided on both ends of the piezoelectric bimorph 30. The
piezoelectric bimorph 30 has a substantially rectangular plate shape having a longitudinal
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12
direction and a width direction, and at the drive frequency, primary resonance in which
displacement of a central portion in the longitudinal direction with respect to both ends in the
longitudinal direction of the piezoelectric bimorph 30 is maximum. It is configured to vibrate in
mode. The support 31 has a structure in which both end portions in the longitudinal direction of
the piezoelectric bimorph 30 are supported by being sandwiched from both upper and lower
sides, and the vibration of the piezoelectric bimorph 30 is applied to the external vibrator
contacting the support 31 via the support 31. It is configured to communicate.
[0037]
As shown in FIG. 5, the support 31 is supported by sandwiching a band-like portion from both
upper and lower sides in the width direction of both ends of the piezoelectric bimorph 30 at the
same time, and at the same time, both ends of the piezoelectric bimorph 30 in the longitudinal
direction The structure also supports from both sides. Both ends of the piezoelectric bimorph 30
in the longitudinal direction are inserted into and supported by the grooves 32 of the support 31.
The support 31 is manufactured by resin molding processing, and the shape of the groove 32 of
the support 31 is set to a size that allows insertion even if the thickness of the piezoelectric
bimorph 30 varies during sintering. In addition, the space between the support 31 and the
piezoelectric bimorph 30 is filled with silicone resin.
[0038]
Incidentally, the filling of the silicone resin into the gap between the support and the
piezoelectric bimorph can be applied also in the first embodiment and the second embodiment
described above, and the silicone resin filling makes it possible to resist Environmental
performance, improvement of temperature resistance characteristics, and possibility of reliability
deterioration due to friction between the support and the piezoelectric bimorph at the time of
impact can also be eliminated. Moreover, the same effect as the above can be expected by using a
silicone resin as a material for resin molding of the support.
[0039]
Next, a specific example of the piezoelectric actuator according to the second embodiment shown
in FIG. 3 will be described.
[0040]
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13
First, a piezoelectric bimorph 20 is prepared by adding a binder material to a powder material of
PZT (lead zirconate titanate) -based piezoelectric ceramic manufactured by NEC TOKIN
Corporation and performing a kneading operation called mud film. , A 31 μm thick green sheet
was made.
On this, an internal electrode pattern was printed using a conductive material obtained by mixing
silver, palladium and a piezoelectric ceramic material as a co-material. At this point, since the
green sheet is in the form of a roll, it is punched out to a size of A4, ie, trimmed, and the trimmed
sheet is placed in a press die and laminated into 40 layers. Then, sintering was performed by
pressing at a temperature of about 100 ° C. and a pressure of about 11.8 MPa. Thereafter, the
laminate was cut by dicing to obtain a rectangular plate-like laminated piezoelectric material
having a length of 43 mm, a width of 3.1 mm and a thickness of 0.75 mm. Thereafter,
polarization was performed so that the polarities of the piezoelectric bodies of the stacked layers
were alternately reversed. As a result, this laminated piezoelectric material functions as a
piezoelectric bimorph. The manufactured piezoelectric bimorph was attached to the support 21
and a weight was further added to adjust the resonance frequency, and these were incorporated
into an outer case to complete a piezoelectric actuator.
[0041]
FIG. 6 is a diagram showing the vibration amplitude with respect to the drive frequency of the
piezoelectric actuator of this embodiment. As shown in FIG. 6, a vibration amplitude of about 800
μm is obtained at a frequency of 180 to 190 Hz suitable for mounting on a touch panel. FIG. 7 is
a diagram showing the vibration generating force with respect to the drive frequency of the
piezoelectric actuator of this embodiment. As shown in FIG. 7, at a frequency of 180 to 190 Hz
suitable for mounting on a touch panel, a force of 0.15 N or more is obtained. Moreover, in the
piezoelectric actuator of the present example, it was confirmed that sufficient drop impact
resistance and long-term reliability can be obtained.
[0042]
As described above, it has been confirmed that it is possible to obtain a piezoelectric actuator
which is low in cost and capable of obtaining a large vibration amplitude and vibration
generating force, and which is excellent in drop impact resistance and long-term reliability.
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[0043]
The piezoelectric actuator according to the present invention can be effectively applied to various
input devices other than the display device with the touch panel function.
[0044]
In addition, it goes without saying that the present invention is not limited to the above
embodiment and examples, and for example, the structure, outer shape, material, structure and
shape of support, material, etc. of piezoelectric bimorph And design change is possible according
to the use.
[0045]
10, 20, 30 Piezoelectric Bimorph 11, 21, 31 Support 12 Metal Shim 13 Piezoelectric 14, 22, 32
Groove 15 Indentation
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