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DESCRIPTION JPH0320094

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DESCRIPTION JPH0320094
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a
method of manufacturing a unimorph piezoelectric actuator used for electromechanical
conversion in sensors, relays and the like. 2. Description of the Related Art In a conventional
unimorph piezoelectric actuator, electrodes are formed on both sides of a ceramic plate mainly
composed of lead zirconate titanate (hereinafter referred to as "PZT plate"), polarized, and then
reinforced for mechanical strength. In order to do this, a thin metal plate was used as a
reinforcing plate, and the PZT plate and the adhesive were bonded. However, in the prior art,
when used in an environment which receives heat and vibration from the outside, or used for a
long time, the adhesive layer bonding the PZT plate and the reinforcing plate is deteriorated, so
the adhesive strength is reduced. , Il mechanical loss occurs, so it has a problem that it does not
operate as an actuator. [Problem to be solved by the invention J The present invention is to solve
the above-mentioned problems, and its object is to provide a unimorph-type piezoelectric
actuator excellent in environmental resistance and long-term reliability. According to a method of
manufacturing a unimorph piezoelectric actuator of the present invention, electrodes are formed
on both sides of a PZT plate containing lead zirconate titanate as a main component, and
polarization treatment is performed in the thickness direction, In a method of manufacturing a
unimorph type piezoelectric actuator provided with a reinforcing plate, the reinforcing plate is
formed by plating on an electrode. Example 1 FIG. 1 is a perspective view showing a unimorph
piezoelectric actuator of the present invention. FIG. 2 is a perspective view showing a
conventional unimorph piezoelectric actuator. In the conventional unimorph piezoelectric
actuator, electrodes 2 are formed on both sides of PZT lfiil processed into a predetermined shape,
and after polarization processing, it is bonded to the reinforcing plate 5 with an adhesive. The
thickness of the normal adhesive layer 4 is about 20 μm, and an epoxy adhesive is used. On the
other hand, the unimorph piezoelectric actuator of the present invention does not bond the PZT
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plate 1 and the reinforcing plate 5 but directly forms a metal or alloy on the electrode 2 by a
plating method to form the plating layer 3 as a reinforcing plate And the adhesive layer 4 does
not exist as in the prior art. For example, PZT plate l is PbTiO-: 47% mo! 2: PbZrOz: 53% moI2
and plate thickness is 150 um, electrode 2 is formed 500 pieces of Cr by vacuum evaporation,
and after polarization processing, it has a wattage of Ni whose thermal expansion coefficient is
close to that of PZT plate l A 150 μm thick PZT plate on which 150 μm of electroplating was
formed and an electrode was formed as above as a comparative sample was subjected to
polarization treatment and then bonded with a 150 μm thick Ni plate and an epoxy resin. The
following items were evaluated.
■ Initial adhesion strength between PZT plate and reinforcing plate ■ 150 ° C. The adhesion
strength after standing for 1000 hours and the evaluation results are shown in Table 1. It is
apparent from Table 1 that according to the present invention, the initial adhesion strength and
the adhesion strength after heating and leaving are superior to those of the conventional ones. As
electrodes, not only Au, but also Cr, Ni. Ag or the like may be formed by vacuum evaporation,
sputtering, plating, baking or the like. Also, the plated layer to function as a reinforcing plate is
not limited to Ni. Cu. Cr. Zn. The effects of the present invention can also be obtained by Sn or
alloy plating. In addition, heat treatment to remove distortion caused by plating is preferable
because it improves adhesion strength and long-term reliability is first. [Effects of the Invention]
As described above, according to the method of manufacturing a unimorph piezoelectric actuator
of the present invention, the adhesive layer between the PZT plate and the reinforcing plate,
which has been most susceptible to deterioration in the prior art, does not exist. Since a plated
layer is formed and this plated layer functions as a reinforcing plate, it has the effect of being
able to ensure a sufficient adhesion strength over a long period of time and to obtain a unimorph
piezoelectric actuator with no electromechanical loss.
[0002]
Brief description of the drawings
[0003]
FIG. 1 is a perspective view showing a unimorph piezoelectric actuator of the present invention.
FIG. 2 is a perspective view showing a conventional unimorph piezoelectric actuator. ・ PZT plate
・ Electrode ・ Plated layer ・ Adhesive layer ・ Reinforcement plate and more
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