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DESCRIPTION JPH1056690

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DESCRIPTION JPH1056690
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an
ultrasonic transducer connected to an ultrasonic diagnostic apparatus, and more particularly to a
medical ultrasonic transducer used for an object to be inspected having a low acoustic
impedance, an ultrasonic wave for underwater exploration. It relates to a transducer etc.
[0002]
2. Description of the Related Art In an ultrasonic diagnostic apparatus, a tomogram of soft tissue
of a subject is obtained by transmitting and receiving an ultrasonic wave to the subject using an
ultrasonic probe.
[0003]
This type of ultrasonic probe transmits the ultrasonic wave corresponding to the applied electric
signal to the subject using the piezoelectric effect of the piezoelectric ceramic or the polymer
piezoelectric body, and also generates an ultrasonic wave from the subject. Generate a
corresponding electrical signal.
[0004]
A side view of this type of ultrasound probe is shown in FIG.
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The ultrasonic probe includes a backing material 11, a piezoelectric body 12, two acoustic
matching layers 101a and 101b, and an acoustic lens 17.
[0005]
The backing material 11 absorbs unwanted vibrations in order to generate short ultrasonic
pulses.
The piezoelectric body 12 is a piezoelectric vibrator made of a piezoelectric ceramic or the like,
and is stacked on the top surface of the backing material 11 to convert an electrical signal into
mechanical vibration (ultrasonic wave) and to convert mechanical vibration (ultrasonic wave) into
an electrical signal. Convert.
[0006]
The two acoustic matching layers 101 a and 101 b perform matching between the acoustic
impedance of the subject and the acoustic impedance dance of the piezoelectric body 12. The
acoustic matching layer 101a is stacked on the top surface of the piezoelectric body 12, and the
acoustic matching layer 101b is stacked on the top surface of the acoustic matching layer 101a.
The acoustic lens 17 is made of silicon rubber or the like and is laminated on the acoustic
matching layer 101 b to improve the sound field.
[0007]
Electrodes 19a and 19b are provided under the piezoelectric body 12, voltage is applied to the
electrodes 19a and 19b, and the piezoelectric body 12 is mechanically vibrated. The piezoelectric
body 12 is cut at predetermined intervals, and although not shown, a plurality of vibrator pieces
are formed.
[0008]
Further, a pulsar (not shown) and a receiver circuit are connected to the ultrasonic probe.
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[0009]
Such an ultrasonic probe generates an ultrasonic wave by the voltage applied to the electrodes
19a and 19b, receives the reflected ultrasonic wave, converts it into an electric signal, and
generates an ultrasonic diagnostic apparatus main body (not shown). Supply.
Then, in the ultrasonic diagnostic apparatus main body, a tomographic image is obtained based
on the electric signal supplied from the ultrasonic probe.
[0010]
An ultrasonic transducer consisting of the piezoelectric body 12 is provided in such an ultrasonic
probe. Examples of this type of ultrasonic transducer include medical and underwater sounding
ultrasonic transducers. The object to be inspected is a substance (for example, a living body) or
water in water, and the acoustic impedance is low.
[0011]
On the other hand, the piezoelectric body constituting the ultrasonic transducer is made of PZT
(lead titanium zirconate) or the like having high electroacoustic conversion efficiency, but its
acoustic impedance is high. For this reason, the acoustic matching between the piezoelectric
portion and the object to be inspected was poor.
[0012]
In order to solve this problem, a composite transducer is considered, which comprises an
ultrasonic transducer composed of a composite piezoelectric material in which a piezoelectric
material and a resin are combined and lowers the acoustic impedance to improve acoustic
matching.
[0013]
As this ultrasonic transducer, for example, as shown in FIG. 13, a cutting groove 27 is formed in
the vertical direction (for example, a direction (slice direction) orthogonal to the transducer
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arrangement direction (array direction) and the transducer arrangement direction) A 1-3 type
composite transducer in which the cutting groove 27 is filled with resin is typical.
[0014]
FIG. 14 shows a composite transducer as viewed from the slice direction.
As shown in FIG. 14, the composite transducer is composed of a composite piezoelectric body of
a piezoelectric body 13a and a resin 13b, and electrodes 21a and 21b provided on the upper and
lower surfaces of the composite piezoelectric body.
[0015]
In this composite transducer, an effective vibration unit that mechanically vibrates by the pulser
matches an electrically effective unit that is connected to the pulser and the receiver circuit and
contributes to the electrical impedance.
[0016]
Further, as the filler such as the resin 13b, a member having a low acoustic impedance such as
silicon is preferable.
[0017]
However, a member having a low acoustic impedance also has a low relative dielectric constant,
and the electrical impedance of the ultrasonic transducer becomes high when it is combined with
the piezoelectric body 13a.
[0018]
That is, if the volume fraction of the member with low acoustic impedance is increased to
decrease the volume fraction of the piezoelectric body, the relative permittivity decreases and the
electrical impedance is proportional to the reciprocal of the relative permittivity. The electrical
impedance of the
[0019]
For example, although the relative dielectric constant of PZT is about 2000, the relative dielectric
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constant of silicon is about 2 and the relative dielectric constant is as small as about 1000 for
30% and about 1000 for a volume fraction of 50% of the piezoelectric body. Become.
[0020]
Here, since the transmission efficiency of the reception signal is determined by the partial
pressure between the electrical impedance of the ultrasonic transducer and the electrical
impedance of the receiving system, the sensitivity becomes higher as the electrical impedance of
the ultrasonic transducer becomes smaller.
[0021]
For this reason, if the piezoelectric body and the subject are matched by reducing the volume
fraction of the piezoelectric body, the electrical alignment between the piezoelectric body and the
receiving circuit system is degraded, and the receiving sensitivity is lowered. was there.
[0022]
An object of the present invention is to provide an ultrasonic transducer capable of reducing the
acoustic impedance of the composite piezoelectric body and also reducing the electrical
impedance.
[0023]
SUMMARY OF THE INVENTION The present invention adopts the following means in order to
solve the above-mentioned problems.
The invention according to claim 1 includes a composite piezoelectric body made of a plurality of
materials different in acoustic impedance, and electrodes provided on the upper surface and the
lower surface of the composite piezoelectric body, and is input to the composite piezoelectric
body via the electrode. An ultrasonic transducer for converting an electrical signal to a
mechanical vibration and converting a mechanical vibration to an electrical signal, wherein the
composite piezoelectric body is polarized corresponding to a part of the electrode to perform the
mechanical vibration. And an impedance adjusting unit configured to adjust the electrical
impedance of the piezoelectric portion corresponding to the entire electrode including the
electrical impedance of the vibrating portion.
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[0024]
According to the present invention, the vibration unit is polarized corresponding to a part of the
electrode to perform the mechanical vibration, and the impedance adjustment unit is a
piezoelectric portion corresponding to the entire electrode including the electric impedance of
the vibration unit. By adjusting the electrical impedance, the electrical impedance can be reduced.
Further, only the vibration part contributes to the acoustic impedance, so that the acoustic
impedance can be reduced by the volume fraction of the composite piezoelectric body as in the
prior art.
[0025]
According to a second aspect of the present invention, the impedance adjusting section adjusts
the electrical impedance by the electrical impedance of the non-oscillating section which does
not perform the mechanical vibration other than the part of the electrode and the electrical
impedance of the vibrating section. .
[0026]
According to the present invention, the impedance adjustment section adjusts the electrical
impedance by the electrical impedance of the non-oscillating section which does not perform the
mechanical vibration other than a part of the electrode and the electrical impedance of the
vibrating section, thereby reducing the electrical impedance. be able to.
[0027]
For example, if the vibrating portion and the non-vibrating portion are connected in parallel to
the electrode, the electrical impedance is the inverse of the sum of the relative permittivity of the
vibrating portion and the relative permittivity of the non-vibrating portion. Is smaller than the
electrical impedance constituted only by the vibrating portion.
[0028]
According to the invention of claim 3, the vibrating portion is polarized by a voltage from a
power supply, and each of the polarized vibrating portion and the non-vibrating portion is cut
into a plurality of vibrators and a plurality of vibrators. The gist is to form and fill the cutting
groove with the material.
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[0029]
According to the present invention, the vibrating portion is polarized by the voltage from the
power source, and each of the polarized vibrating portion and the non-vibrating portion is cut
into a plurality to form a plurality of vibrators and a plurality of non-vibrator The composite
piezoelectric body can be formed by filling the material in the cutting groove.
[0030]
In the invention of claim 4, the size in one direction of each non-vibrator is larger than the size in
one direction of each transducer, and a plurality of each non-vibrator are juxtaposed along the
direction orthogonal to the one direction. As the abstract.
[0031]
According to the present invention, the size in one direction of each non-oscillator is larger than
the size in one direction of each oscillator, and a plurality of each non-oscillator are arranged in
the direction orthogonal to the one direction, Each non-oscillator reduces the electrical
impedance.
[0032]
In the invention of claim 5, the gist is that the size in one direction of each non-vibrator is a
multiple of the size in one direction of each transducer.
[0033]
According to the present invention, if the size in one direction of each non-vibrator is a multiple
of the size in one direction of each transducer, the volume fraction of the non-vibrator increases,
so that the electrical impedance is further reduced. be able to.
[0034]
According to the invention of claim 6, the non-vibration portion is disposed so as to surround the
vibration portion consisting of a plurality of columnar piezoelectric members and the groove
portion between the columnar piezoelectric members, and the groove portion is filled with the
material. The gist of the present invention is to polarize the vibrating portion.
[0035]
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According to the present invention, the non-oscillating portion is disposed so as to surround the
oscillating portion consisting of a plurality of columnar piezoelectric members and the groove
portion between the columnar piezoelectric members, and the groove portion is filled with the
material. By polarizing the vibrating portion, the composite piezoelectric body is formed, and the
volume fraction of the non-vibrating portion is increased, so that the electrical impedance can be
further reduced.
[0036]
BEST MODE FOR CARRYING OUT THE INVENTION An ultrasonic transducer according to an
embodiment of the present invention will be described below with reference to the drawings.
[0037]
First Preferred Embodiment FIG. 1 is an external view of a composite piezoelectric body
according to a first preferred embodiment of the present invention.
The figure which looked at the ultrasonic probe of Embodiment 1 from the slice direction in FIG.
2 is shown.
The figure which looked at the ultrasonic transducer from the slice direction in FIG. 3 is shown.
[0038]
The ultrasonic probe shown in FIG. 2 is configured to include a backing material 11 as a base
material, a composite piezoelectric body 13, two acoustic matching layers 15a and 15b, and an
acoustic lens 17.
[0039]
The backing material 11 absorbs unwanted vibrations in order to generate short ultrasonic
pulses.
The composite piezoelectric body 13 is laminated on the upper surface of the backing material
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11, and converts electrical signals into mechanical vibration (ultrasonic waves) and converts
mechanical vibrations (ultrasonic waves) into electrical signals, and is made of piezoelectric
ceramic or the like. It includes a piezoelectric vibrator.
[0040]
The two acoustic matching layers 15 a and 15 b perform matching between the acoustic
impedance of the subject and the acoustic impedance dance of the composite piezoelectric body
13.
The acoustic matching layer 15a is laminated on the top surface of the composite piezoelectric
body 13, and the acoustic matching layer 15b is laminated on the top surface of the acoustic
matching layer 15a.
The acoustic lens 17 is laminated on the acoustic matching layer 15 b and is made of silicon
rubber or the like to improve the sound field.
[0041]
The ultrasonic transducer shown in FIG. 3 comprises the composite piezoelectric body 13 shown
in FIG. 1 and electrodes 21 a and 21 b provided on the upper and lower surfaces of the
composite piezoelectric body 13.
[0042]
In the vicinity of the central portion of the composite piezoelectric body 13, a vibrating portion
14 in which the piezoelectric body 13a and the resin 13b are alternately arranged is provided,
and in the vicinity of both end portions of the composite piezoelectric body 13, a non-oscillating
portion 13c is provided. .
The resin 13 b is made of, for example, silicon resin.
[0043]
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That is, an effective vibrating portion 14 of 1-3 type structure is disposed near the central
portion of the electric 1 element in the slice direction, and a non-oscillating portion 13 c of 2-2
type structure is provided outside the electric 1 element in the slice direction. It is arranged.
[0044]
Here, the 1-3 type structure is obtained by dividing the vibrating portion 14 in the array
direction and the slice direction.
The 2-2 type structure is obtained by dividing the non-oscillating portion 13 c only in the array
direction.
[0045]
The vibrating portion 14 is provided in contact with the electrodes 21a and 21b on the upper
surface and the lower surface, is polarized, and is a portion that performs the mechanical
vibration.
The non-oscillating portion 13c is provided in contact with the electrodes 21a and 21b on the
upper surface and the lower surface, is non-polarized, and is a portion which does not perform
the mechanical vibration.
[0046]
The electrically effective portion 18 composed of the vibrating portion 14 and the non-oscillating
portion 13c constitutes an impedance adjusting portion for adjusting the electrical impedance of
the electrically effective portion including the electrodes 21a and 21b.
[0047]
Further, a pulser 23 for supplying an electrical signal to the composite piezoelectric body 13 is
electrically connected to the electrodes 21a and 21b, and the electrical signal from the composite
piezoelectric body 13 is amplified at the electrodes 21a and 21b. The signal amplifier 25 of the
receiving system for the signal is electrically connected.
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[0048]
Next, a method of manufacturing the ultrasonic transducer according to the first embodiment
will be described with reference to FIG.
[0049]
First, as shown in FIG. 4A, a voltage is applied from a power source 22 to an effective vibrating
portion 14 of a piezoelectric body such as PZT, and only the vibrating portion 14 is polarized.
[0050]
Next, as shown in FIG. 4B, only the effective vibration unit 14 is cut into a plurality by the dice-fill
method using a cutting machine (not shown) along the slice direction.
Further, along the array direction, the effective vibrating portion 14 and the non-oscillating
portion 13c are cut into a plurality by a dice-fill method using a cutting machine (not shown),
thereby forming a plurality of vibrators (piezoelectric members 13a) The non-oscillators of the
[0051]
Then, when the cutting groove 27 shown in FIG. 4 (b) is filled with the resin 13b, as shown in
FIG. 1, the effective vibrating part 14 of the 1-3 type composite and the non-vibration part of the
2-2 type composite 13c are formed.
[0052]
In this case, the size in the slice direction of each non-vibrator is about three times the size in the
slice direction of each transducer, and a plurality of each non-vibrator are juxtaposed along the
array direction.
[0053]
Thereafter, as shown in FIG. 4B, the signal electrodes 21a and 21b are added to the entire
surface of the vibrating portion 14 and the non-vibrating portion 13c.
[0054]
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In the ultrasonic transducer of Embodiment 1 configured as described above, the composite
piezoelectric body 13 is connected to the pulser 23 and the signal amplifier 25 via the electrodes
21a and 21b.
[0055]
Since the vibrating portion 14 and the non-vibrating portion 13c are provided in contact with the
electrodes 21a and 21b on the upper and lower surfaces, the electrically effective portion 18 is
configured by paralleling the vibrating portion 14 and the non-vibrating portion 13c. Therefore,
the electrical impedance of the electrically effective portion 18 is the inverse of the sum of the
relative permittivity of the vibrating portion 14 and the relative permittivity of the non-oscillating
portion 13c.
[0056]
That is, the electrical impedance at this time becomes smaller than the electrical impedance
comprised only by the vibration part 14.
[0057]
Further, since only the vibrating portion 14 which is polarized and performs mechanical
vibration contributes to the acoustic impedance, the acoustic impedance can be reduced by the
volume fraction of the composite piezoelectric body as in the prior art.
[0058]
For example, it is considered that the piezoelectric 13a is PZT and the dielectric constant ε is
2000, the resin 13b as the filler is silicon resin and the dielectric constant ε is 2, and the volume
fraction of the piezoelectric is 30%.
Conventionally, the relative permittivity is about 600 and the electrical impedance is high.
[0059]
In Embodiment 1 of the present invention, when the effective vibrating portion 14 is 10 mm and
the non-oscillating portion 13 c is 4 mm, the relative dielectric constant is about 1000.
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12
Therefore, the electrical impedance can be improved by about 70% because the electrical
impedance is reduced.
[0060]
<Embodiment 2> Next, Embodiment 2 of the ultrasonic transducer of the present invention will
be described.
FIG. 5 is an external view of a composite piezoelectric body according to a second embodiment of
the present invention.
The figure which looked at the ultrasonic transducer of Embodiment 2 from the array direction
in FIG. 6 is shown.
[0061]
The ultrasonic transducer shown in FIG. 6 is viewed from the array direction, and the
configuration is the same as that of the ultrasonic transducer in the first embodiment shown in
FIG. 3 viewed from the slice direction. Do.
[0062]
That is, the effective vibrating portion 14 of 1-3 type structure is disposed near the central
portion of the array direction of one electrical element, and the non-oscillating portion 13 c of 22 type structure is disposed outside the array direction of the electrical 1 element. It is arranged.
[0063]
Next, a method of manufacturing the ultrasonic transducer according to the second embodiment
will be described with reference to FIG.
[0064]
First, a voltage is applied from a power source 22 to an effective vibrating portion 14 of a
piezoelectric body such as PZT, and only the vibrating portion 14 is polarized.
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[0065]
Next, as shown in FIG. 7, along the array direction, only the effective vibration unit 14 is cut into
a plurality by the dice-fill method using a cutting machine (not shown).
Further, along the slice direction, the effective vibrating portion 14 and the non-oscillating
portion 13c are cut into a plurality by the dice-fill method using a cutting machine (not shown),
thereby forming a plurality of vibrators and a plurality of non-vibrator Is formed.
[0066]
Then, when the cutting groove 27 shown in FIG. 7 is filled with the resin 13b, as shown in FIG. 5,
the effective vibrating portion 14 of the 1-3 type composite and the non-oscillating portion 13c
of the 2-2 type composite are It is formed.
[0067]
In this case, the size in the array direction of each non-vibrator is a multiple of the size in the
array direction of each transducer, and a plurality of each non-vibrator is juxtaposed along the
slice direction.
[0068]
Thereafter, as shown in FIG. 7, signal electrodes 21a and 21b are added to the entire surface of
the vibrating portion 14 and the non-vibrating portion 13c.
[0069]
Also in the ultrasonic transducer of the second embodiment configured as described above, the
electrical impedance and the acoustic impedance become smaller as in the ultrasonic transducer
of the first embodiment.
[0070]
Third Preferred Embodiment Next, a third preferred embodiment of the ultrasonic transducer
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according to the present invention will be described.
FIG. 8 is an external view of a composite piezoelectric body according to a third embodiment of
the present invention.
FIG. 9 illustrates a method of manufacturing the ultrasonic transducer according to the third
embodiment.
[0071]
In the ultrasonic transducer shown in FIG. 9, the effective vibrating portion 14 of 1-3 type
structure is disposed near the central portion of one electrical element, and the non-oscillating
portions 13c and 13d of 2-2 type structure are disposed outside. It is
[0072]
A plurality of non-oscillating portions 13c are juxtaposed along the array direction and a
plurality juxtaposed along the slice direction.
The non-oscillating portion 13d is provided at the end of the ultrasonic transducer, and the size
in the array direction and the slice direction of the non-oscillating portion 13d is the same as the
size in the longitudinal direction of the non-oscillating portion 13c.
[0073]
Next, a method of manufacturing the ultrasonic transducer according to the third embodiment
will be described with reference to FIG.
[0074]
First, a voltage is applied from a power source 22 to an effective vibrating portion 14 of a
piezoelectric body such as PZT, and only the vibrating portion 14 is polarized.
[0075]
Next, as shown in FIG. 9, leaving the non-oscillating portions at both ends in the slice direction,
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along the slicing direction, the vibrating portion 14 and the non-oscillating portions 13c are cut
using a cutting machine (not shown) by the dice-fill method. Cut into multiple pieces.
[0076]
Further, by leaving the non-oscillating portions at both ends in the array direction, the effective
oscillating portion 14 and the non-oscillating portions 13c are cut into a plurality by the dice-fill
method using a cutting machine (not shown) along the array direction. , And a plurality of nonoscillators.
[0077]
Then, when the cutting groove 27 shown in FIG. 9 is filled with the resin 13b, as shown in FIG. 8,
the effective vibrating portion 14 of the 1-3 type composite and the non-oscillating portions 13c
and 13d of the 2-2 type composite Is formed.
[0078]
Thereafter, as shown in FIG. 9, signal electrodes 21a and 21b are added to the entire surface of
the vibrating portion 14 and the non-vibrating portions 13c and 13d.
[0079]
Also in the ultrasonic transducer of the third embodiment configured as described above, the
electrical impedance and the acoustic impedance become smaller as in the ultrasonic transducer
of the first embodiment.
In this case, since the volume fraction of the non-oscillating portions 13c and 13d is increased,
the electrical impedance can be further reduced.
[0080]
Fourth Preferred Embodiment Next, a fourth preferred embodiment of the ultrasonic transducer
according to the present invention will be described.
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FIG. 10 is an external view of a composite piezoelectric body according to a fourth embodiment
of the present invention.
FIG. 11 illustrates a method of manufacturing the ultrasonic transducer according to the fourth
embodiment.
[0081]
As in the third embodiment, the ultrasonic transducer shown in FIG. 11 has an effective vibrating
portion 14 of 1-3 type structure disposed in the vicinity of the central portion of one electrical
element, and has 2-2 type structure outside. The non-oscillating portion 13e is disposed.
[0082]
In addition, the non-vibration part 13e is arrange | positioned surrounding the vibration part 14,
is not divided | segmented, and is a plate-shaped piezoelectric material.
[0083]
Next, a method of manufacturing the ultrasonic transducer of the fourth embodiment will be
described with reference to FIG.
[0084]
First, by the injection method, only the effective vibrating portion 14 is used as a columnar
piezoelectric rod, and the groove portion 27 is separated to form the non-oscillating portion 13 e.
Thereafter, the groove portion 27 is filled with the resin 13b, and only the effective vibration
portion 14 is polarized.
Thereafter, signal electrodes 21a and 21b are added to the entire surface of the vibrating portion
14 and the non-vibrating portion 13e.
[0085]
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Also in the ultrasonic transducer of the fourth embodiment configured as described above, the
electric impedance and the acoustic impedance become smaller as in the ultrasonic transducer of
the third embodiment.
In this case, since the volume fraction of the non-oscillating portion 13e is larger than that of the
third embodiment, the electrical impedance can be further reduced.
[0086]
According to the present invention, the vibration unit is polarized corresponding to a part of the
electrode to perform mechanical vibration, and the impedance adjustment unit is a piezoelectric
body corresponding to the entire electrode including the electric impedance of the vibration unit.
Since the electrical impedance of the part is adjusted, the electrical impedance can be reduced.
Further, only the vibration part contributes to the acoustic impedance, so that the acoustic
impedance can be reduced by the volume fraction of the composite piezoelectric body as in the
prior art.
[0087]
Further, since the impedance adjustment unit adjusts the electrical impedance by the electrical
impedance of the non-oscillating portion that does not perform the mechanical vibration other
than a part of the electrode and the electrical impedance of the vibrating portion, the electrical
impedance can be reduced.
[0088]
For example, if the vibrating portion and the non-vibrating portion are connected in parallel to
the electrode, the electrical impedance is the inverse of the sum of the relative permittivity of the
vibrating portion and the relative permittivity of the non-vibrating portion. Is smaller than the
electrical impedance constituted only by the vibrating portion.
[0089]
Further, the vibrating portion is polarized by the voltage from the power supply, and each of the
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polarized vibrating portion and the non-vibrating portion is cut into a plurality to form a plurality
of vibrators and a plurality of non-vibrator. Can be formed into a composite piezoelectric body.
[0090]
In addition, the size of one non-oscillator in one direction is larger than the size in one direction
of each oscillator, and a plurality of non-oscillators are arranged along a direction orthogonal to
one direction, so that each non-oscillator Electrical impedance is reduced.
[0091]
In addition, if the size in one direction of each non-vibrator is a multiple of the size in one
direction of each transducer, the volume fraction of the non-vibrator increases, so that the
electrical impedance can be further reduced.
[0092]
Further, by arranging the non-vibration portion surrounding the vibration portion consisting of a
plurality of columnar piezoelectric members and the groove portion between the respective
columnar piezoelectric members, filling the material into the groove portion and polarizing the
vibration portion by a voltage from a power supply. Since the composite piezoelectric body is
formed and the volume fraction of the non-oscillating portion is increased, the electrical
impedance can be further reduced.
[0093]
Brief description of the drawings
[0094]
1 is an external view of a composite piezoelectric body according to Embodiment 1 of the present
invention.
[0095]
2 is a view of the ultrasound probe of the first embodiment as viewed from the slice direction.
[0096]
3 is a view of the ultrasonic transducer of the embodiment 1 seen from the slice direction.
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[0097]
4 is a diagram for explaining a method of manufacturing the ultrasonic transducer of the first
embodiment.
[0098]
5 is an external view of a composite piezoelectric body of Embodiment 2 of the present invention.
[0099]
6 is a view of the ultrasonic transducer of the second embodiment viewed from the array
direction.
[0100]
7 is a diagram for explaining a method of manufacturing the ultrasonic transducer of the second
embodiment.
[0101]
8 is an external view of a composite piezoelectric body according to a third embodiment of the
present invention.
[0102]
9 is a diagram for explaining a method of manufacturing an ultrasonic transducer according to
the third embodiment.
[0103]
10 is an external view of a composite piezoelectric body according to a fourth embodiment of the
present invention.
[0104]
11 is a diagram for explaining a method of manufacturing the ultrasonic transducer of the fourth
embodiment.
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[0105]
12 is a view of the conventional ultrasonic probe as seen from the slice direction.
[0106]
FIG. 13 is an external view of a conventional 1-3 type ultrasonic transducer.
[0107]
14 is a view seen from the slice direction of the ultrasonic transducer shown in FIG.
[0108]
Explanation of sign
[0109]
11 backing material 13 composite piezoelectric body 12, 13a piezoelectric body 13b resin 13c,
13d, 13e non-vibration portion 14 vibration portion 15a to 15d acoustic matching layer 17
acoustic lens 18 electrically effective portion 19a, 19b electrode 21a, 21b electrode 22 power
source 23 Pulser 25 Signal amplifier 27 Cut groove
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