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DESCRIPTION JPH1074721

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DESCRIPTION JPH1074721
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an
ultrasonic oscillation element for applying ultrasonic vibration to a cleaning solution for cleaning
an object to be cleaned, and an ultrasonic cleaning apparatus using the same.
[0002]
2. Description of the Related Art For example, in the process of manufacturing a liquid crystal
display device or a semiconductor device, there is a process in which it is required to clean a
liquid crystal glass substrate or a semiconductor wafer as an object to be cleaned with high
cleanliness. As methods for cleaning such objects to be cleaned, there are a dip method in which
a plurality of substrates to be cleaned are immersed in the cleaning liquid, and a sheet-fed
method in which the cleaning liquid is sprayed toward the objects to be cleaned to clean them
one by one. In recent years, a high degree of cleanliness can be obtained, and a cost-effective
single wafer system is often adopted.
[0003]
As one of the single-wafer systems, a cleaning system has been put to practical use in which
vibration is applied to the cleaning liquid jetted to the object to be cleaned, and fine particles are
efficiently removed from the object to be cleaned by the oscillating action.
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[0004]
Conventionally, ultrasonic waves of about 20 to 50 kHz have been used as a cleaning method for
applying vibration to a cleaning solution, but recently, ultrasonic cleaning devices using
ultrasonic waves of about 600 to 2000 kHz have been developed. .
[0005]
When the cleaning liquid to which the vibration is applied is sprayed to the object to be cleaned,
the bonding force of the fine particles attached to the object to be cleaned is reduced by the
action of the vibration, so the cleaning effect can be improved compared to the case where no
vibration is applied. .
[0006]
Generally, the conventional ultrasonic cleaning apparatus has an elongated apparatus body 1 as
shown in FIG.
A space 2 penetrates in the thickness direction of the main body 1 and is formed along the
longitudinal direction.
The space portion 2 is formed in a tapered shape which narrows as it goes from the upper end
side to the lower end side, and the lower end is a nozzle port 3 opened in the lower surface of the
apparatus main body 1.
[0007]
The upper end opening of the space 2 is closed by a diaphragm 5 via a seal material 4.
On the upper surface of the diaphragm 5, a plurality of rectangular ultrasonic transducer
elements 6 elongated along the portion corresponding to the upper end opening of the space 2
are shown as insulating gaps G (shown in FIG. 7A) at predetermined intervals. It is attached
through. A direct current voltage is applied to the ultrasonic oscillation element 6. As a result, the
ultrasonic oscillation element 6 is ultrasonically vibrated, and the diaphragm 5 is also vibrated by
the ultrasonic vibration.
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[0008]
Supply paths 8 are formed in the longitudinal direction on both sides of the space 2 of the
apparatus body 1. The pair of supply paths 8 is connected to a cleaning liquid supply pipe (not
shown) at both ends thereof, and the cleaning liquid is supplied by these supply pipes.
[0009]
Furthermore, in the device body 1, a plurality of jet passages 9 having one end communicated
with the supply passage 8 and the other end communicated with the space portion 2 are formed
at predetermined intervals along the longitudinal direction of the device body 1. There is. That is,
the other end of the jet passage 9 is opened opposite to the diaphragm 5. The inside diameter
size of the jet passage 9 is set sufficiently smaller than that of the supply passage 8.
[0010]
The cleaning solution supplied to the supply passage 8 is distributed almost equally to the
plurality of ejection passages 9 and ejected toward the lower surface of the diaphragm 5 from
the other end opening, and ultrasonic vibration is applied by the diaphragm 5 . The cleaning
liquid to which the ultrasonic vibration has been applied is jetted from the nozzle port 3 of the
space 2 toward the object to be cleaned (not shown). Thus, the object to be cleaned can be
cleaned with a cleaning solution to which ultrasonic vibration has been applied.
[0011]
By the way, as shown in FIG. 7 (b), the conventional ultrasonic oscillation element 6 is provided
with electrodes 6b made of metal films such as Ag and Au on a pair of plate surfaces of the platelike piezoelectric material 6a. The piezoelectric material 6a is ultrasonically vibrated by applying
a voltage thereto.
[0012]
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However, according to such a configuration, in the peripheral portion of the piezoelectric
material 6a, as shown by the arrow in the figure, there is a case where a spark is generated
between the pair of electrodes 6b.
Therefore, the piezoelectric material 6a may be broken or the electrode 6b may be melted by the
spat.
[0013]
Further, as shown in FIG. 7A, a plurality of ultrasonic oscillation elements 6 are provided on the
diaphragm 5. In that case, a predetermined insulation gap G is provided so that dielectric
breakdown does not occur between the side surfaces of adjacent ultrasonic oscillation elements
6.
[0014]
However, since the plurality of ultrasonic oscillation elements 6 become discontinuous in the
longitudinal direction of the diaphragm 5 due to the insulation gap G, when a voltage is applied
to each oscillation element 6, the sound pressure in the diaphragm 5 is as shown in FIG. As
shown, the portion of the insulation gap G is lower than the other portions. As a result, in the
portion of the insulation gap G, it has been found that ultrasonic vibration of a predetermined
strength can not be applied to the cleaning liquid, that is, ultrasonic vibration can not be applied
uniformly to the cleaning liquid.
[0015]
In order to prevent the reduction of the sound wave due to the insulation gap G and make the
strength of the vibration generated by the diaphragm 5 uniform, the ultrasonic oscillation
element 6 may be elongated without being divided into a plurality. However, since the
piezoelectric material 6a of the ultrasonic oscillation element 6 is made of a fragile ceramic,
when it is elongated, it may be broken during handling or broken by the vibration of the
diaphragm 5. In addition, if it is long, it may be difficult to equalize the characteristics during
manufacturing, which is not practical.
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[0016]
As described above, since a conventional ultrasonic oscillator is likely to generate a spark
between a pair of electrodes provided on the opposing plate surface at the peripheral portion of
the piezoelectric material, The spall could damage the piezoelectric material or melt the
electrode.
[0017]
In addition, in the case of providing a plurality of ultrasonic oscillation elements on the
diaphragm, it has to be provided via a gap in order to ensure insulation of the adjacent oscillation
elements. There was a thing that vibration became weak compared with other parts.
[0018]
An object of the present invention is to provide an ultrasonic oscillation element which prevents
generation of sparks between electrodes provided on a pair of plate surfaces.
An object of the present invention is to provide an ultrasonic cleaning apparatus in which a
plurality of ultrasonic oscillation elements can be provided on a diaphragm without forming a
gap.
[0019]
According to the present invention, electrodes are provided on a pair of plate surfaces of a
piezoelectric material formed in a plate shape, and the outer peripheral surface of the
piezoelectric material and the periphery of the pair of plate surfaces. The ultrasonic oscillation
element is characterized in that the portion and the portion are covered with an insulating film.
[0020]
The invention according to claim 2 is an ultrasonic cleaning apparatus for applying ultrasonic
vibration to a cleaning liquid for cleaning an object to be cleaned, the apparatus main body, and
the apparatus main body for applying ultrasonic vibration to the cleaning liquid. An electrode is
provided on each of a strip-shaped vibrating plate and a pair of plate surfaces of a piezoelectric
material formed in a plate shape, and the outer peripheral surface of the piezoelectric material
and the peripheral portion of the pair of plate surfaces are covered with an insulating film. And
an ultrasonic oscillation element provided by bonding and fixing one plate surface to the above-
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mentioned diaphragm.
[0021]
The invention according to claim 3 is characterized in that, in the invention according to claim 2,
a plurality of the ultrasonic wave oscillation elements are disposed on the vibrating plate by
bonding side faces adjacent to each other.
According to the first aspect of the invention, since the outer peripheral surface of the
piezoelectric material and the peripheral portion of the pair of plate surfaces are covered with
the insulating film, a spark is generated between the electrodes provided on the pair of plate
surfaces. Is prevented.
[0022]
According to the invention of claim 2, by using the ultrasonic oscillation element in which the
outer peripheral surface of the piezoelectric material and the peripheral portion of the pair of
plate surfaces are covered with the insulating film, the spa is made between the pair of electrodes
of the ultrasonic oscillation element The ability to apply ultrasonic vibration to the cleaning
solution can be maintained over a long period of time, because
[0023]
According to the invention of claim 3, when a plurality of ultrasonic oscillation elements are
provided on the diaphragm, adjacent ultrasonic waves are isolated by insulating the outer
peripheral surface and the peripheral portion of each ultrasonic oscillation element by the
insulating film. Since the side surfaces of the oscillation element can be joined and arranged,
ultrasonic vibration can be generated almost uniformly in the diaphragm.
[0024]
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present
invention will be described below with reference to FIGS.
The ultrasonic cleaning apparatus of the present invention shown in FIG.
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The apparatus main body 11 is joined and fixed to the upper member 13 in which the recess 12
whose upper surface is open is formed along the longitudinal direction and the lower surface of
the upper member 13 through the first seal member 14 in a liquid tight manner. It is formed in
an elongated prismatic shape by the lower member 15.
[0025]
A fitting hole 16 is bored in the lower wall of the upper member 13 along the longitudinal
direction, and a convex portion 17 to be fitted to the fitting hole 16 is formed in the center of the
upper surface of the lower member 15 in the width direction It is done.
[0026]
A space 18 having one end opened at the upper surface and the other end opened at the lower
surface is formed along the longitudinal direction at the center in the width direction where the
convex portion 17 of the lower member 15 is formed.
The cross-sectional shape of the space 18 is in the shape of a taper whose width dimension
decreases from one end (upper end) to the other end (lower end), and the lower end opening is a
narrow nozzle opening 19 .
[0027]
The open upper end of the space 18 is closed in a fluid-tight manner by a diaphragm 21 made of
a rectangular thin metal plate.
That is, the diaphragm 21 is joined to the inner bottom surface of the recess 12 of the upper
member 13 via a frame-shaped second seal member 22 having a lower surface peripheral
portion having a predetermined thickness.
[0028]
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A frame-like holding plate 23 is joined to the upper surface of the diaphragm 21 and fixed to the
upper member 13.
Thereby, the upper end opening of the space 18 is airtightly closed.
[0029]
In the widthwise center portion of the upper surface of the diaphragm 21, that is, at the portion
corresponding to the space portion 18, the side surfaces adjacent to each other with a plurality
of ultrasonic oscillation elements 24 whose length dimension is divided into 20 to 120 mm In
close proximity.
[0030]
That is, as shown in FIG. 1B, the ultrasonic oscillation element 24 has a piezoelectric material 24a
formed of ceramic in a thin rectangular plate shape such as a rectangle or a square, which is
rectangular in this embodiment, and this piezoelectric material 24a Thin film-like electrodes 24b
made of a metal material such as Au or Ag are respectively formed on the entire upper and lower
pair of plate surfaces.
An outer peripheral surface of the piezoelectric material 24a and a peripheral portion of the
electrode 24b which is a peripheral portion of a pair of plate surfaces are covered with an
insulating film 24c, and one electrode 24b is formed on the upper surface of the diaphragm 21
through an adhesive 24d. It is adhesively fixed.
[0031]
Therefore, even if the ultrasonic oscillation elements 24 provided on the diaphragm 21 are
arranged with adjacent side faces joined (or joined in this embodiment) by bonding (or bonding
in this embodiment), the adjacent ultrasonic waves can be separated by the insulating film 24c.
The insulation of the sound wave oscillation element 24 can be maintained.
[0032]
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By making the ultrasonic oscillation element 24 sufficiently shorter than the length dimension of
the diaphragm 21, the following advantages can be obtained.
1. Vibrations other than in the thickness direction are less likely to get on the vibration mode.
2. Adhesive bonding to the diaphragm 21 is facilitated. 3. The voltage and current values
flowing to the respective ultrasonic wave oscillation elements 24 can be reduced. 4. The
capacitance of each ultrasonic wave oscillation element 24 becomes small, and oscillation
becomes easy.
[0033]
A feed plate 25 is attached to the pressing plate 23 via a holding member 26 above the vibrating
plate 21. The feed plate 25 is provided with a contact 27 resiliently in contact with the electrode
24 b on the upper surface side of the ultrasonic oscillation element 24.
[0034]
A coil 28 is provided on the feed plate 25, and power is supplied from the coil 28 to one
electrode 24 b of the ultrasonic oscillation element 24 through the feed plate 25 and the contact
27. The other electrode 24 b is grounded via the diaphragm 21.
[0035]
As a result, the ultrasonic oscillation element 24 ultrasonically vibrates, and the diaphragm 21
interlocks with the ultrasonic vibration. In the lower member 15 of the apparatus main body 11,
a pair of supply paths 31 positioned on both sides in the width direction of the space portion 18
are formed penetrating in the longitudinal direction. A supply source (not shown) is connected to
both ends of the supply path 31 through a tube (not shown) as well to supply a cleaning liquid
such as pure water or a chemical solution.
[0036]
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A plurality of ejection channels 32 are provided in communication with one end of each of the
pair of supply channels 31. That is, the ejection path 32 is formed at the joining portion between
the upper member 13 and the lower member 15 of the device main body 11, and the other end
is covered by the diaphragm 21 on the inner bottom surface of the recess 12 of the upper
member 13. It is opened so as to communicate with the other part, that is, the upper end side of
the space 18.
[0037]
A plurality of the ejection passages 32 are formed at predetermined intervals along the
longitudinal direction of the apparatus main body 1 on one side and the other side in the width
direction of the space portion 18. The other end of the jet passage 32 at one side and the other
side in the width direction of the space 18 is shifted in the longitudinal direction of the apparatus
main body 11 as shown in FIG.
[0038]
Below, the effect | action of the ultrasonic cleaning apparatus of the said structure is
demonstrated. The cleaning liquid is supplied to the pair of supply paths 31, and a
predetermined voltage is applied to the ultrasonic oscillation element 24 to ultrasonically vibrate
the diaphragm 21. The cleaning liquid supplied to the supply path 31 is divided into a plurality
of ejection paths 32 and ejected from the other end opening of the ejection path 32 toward the
diaphragm 21.
[0039]
When the cleaning liquid ejected from each ejection channel 32 collides with the lower surface of
the vibrating plate 21 that is subjected to ultrasonic vibration, ultrasonic vibration is propagated
to the cleaning liquid. The cleaning liquid to which the ultrasonic vibration is propagated, that is,
the cleaning liquid that ultrasonically vibrates flows in the space 18 as shown by the arrow in
FIG. 2 and spouts from the nozzle port 19 at the lower end thereof. Therefore, when the object to
be cleaned is disposed opposite to the lower side of the nozzle port 19, the object to be cleaned
can be cleaned by the cleaning liquid to which the ultrasonic vibration is applied.
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[0040]
By the way, in the plurality of ultrasonic oscillation elements 24 provided on the diaphragm 21,
the outer peripheral surface and the peripheral portion of the pair of plate surfaces are covered
with the insulating film 24c. Therefore, even if the side surfaces of the ultrasonic oscillation
elements 24 adjacent to each other are joined and arranged, insulation between the side surfaces
can be maintained.
[0041]
As described above, since the plurality of ultrasonic wave oscillation elements 24 can be
arranged in a state in which the respective side surfaces are joined to the vibration plate 21, even
if the ultrasonic wave oscillation elements 24 are divided into a plurality of pieces, The sound
pressure generated by the ultrasonic oscillation element 24 does not become discontinuous.
[0042]
That is, the sound pressure distribution in the longitudinal direction of the diaphragm 21 when
the diaphragm 21 is ultrasonically vibrated by applying a voltage to each ultrasonic oscillation
element 24 becomes substantially uniform as shown in FIG. Since the diaphragm 21 does not
decrease at the portion of the insulation gap G between the side surfaces of the ultrasonic
oscillation elements 24 as in the above, the diaphragm 21 ultrasonically vibrates uniformly
according to the sound pressure distribution.
[0043]
Thus, ultrasonic vibration can be uniformly applied to the cleaning liquid by the vibrating plate
21. Therefore, the cleaning effect of the cleaning liquid can be made uniform.
Further, the ultrasonic oscillation element 24 insulates the outer peripheral surface from the
peripheral portion of the pair of upper and lower plate surfaces by the insulating film 24c,
thereby forming a spat Can be prevented from being fired.
[0044]
As a result, the piezoelectric material 24a is not damaged by the impact when the spark is ignited
as in the prior art, and the electrode 24b is not melted, so that the performance of the ultrasonic
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oscillator 24 is maintained for a long time. Can be maintained over
[0045]
The present invention is not limited to the above embodiment, and various modifications can be
made without departing from the scope of the invention.
For example, the ultrasonic oscillation element 24 is not limited to a rectangular shape or a
square shape, and may have a parallelogram shape.
[0046]
5 (a) and 5 (b) show another embodiment of the present invention.
In this embodiment, as shown in FIG. 5A, adjacent side surfaces of each of the divided ultrasonic
wave oscillation elements 24 provided on the diaphragm 21 are slopes 24e, and the slopes 24e
are joined to make a plurality of ultrasonic oscillations. The element 24 is provided on the
diaphragm 21.
[0047]
If the side surfaces of the ultrasonic oscillation elements 24 are joined to be inclined surfaces
24e, the ultrasonic oscillation elements 24 do not become discontinuous in the width direction
intersecting the longitudinal direction of the diaphragm 21 at the joint portions, that is, Since a
portion without the sound wave oscillation element 24 does not occur, as shown in FIG. 5B, the
sound pressure distribution in the longitudinal direction of the diaphragm 21 can be made
substantially uniform.
[0048]
According to the invention of claim 1, since the outer peripheral surface of the piezoelectric
material and the peripheral portion of the pair of plate surfaces are covered with the insulating
film, the piezoelectric material is provided on each of the plate surfaces. The peripheral portions
of the pair of electrodes are electrically isolated.
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[0049]
Therefore, when a voltage is applied to the pair of electrodes, generation of sparks between the
peripheral portions of these electrodes is prevented, so that the piezoelectric material is damaged
by the impact of the sparks as in the prior art. It is possible to prevent the electrode from melting
and the like.
[0050]
According to the invention of claim 2, the outer peripheral surface of the piezoelectric material
forming the ultrasonic oscillation element attached to the diaphragm of the ultrasonic cleaning
apparatus and the peripheral portion of the pair of plate surfaces are covered with the insulating
film I made it.
[0051]
Therefore, it is possible to prevent the generation of a spat between the pair of electrodes of the
ultrasonic oscillation element, thereby preventing the ultrasonic oscillation element from being
damaged prematurely. The performance of the sonic cleaning device can be maintained over a
long period of time.
[0052]
According to the invention of claim 3, it is possible to use an ultrasonic oscillation element in
which the electrodes are provided on a pair of plate surfaces of the plate-like piezoelectric
material and the outer peripheral surface and the peripheral portion are covered with the
insulating film. Thus, a plurality of ultrasonic oscillation elements can be arranged by bonding
the adjacent side surfaces to the diaphragm.
[0053]
As a result, even if the ultrasonic oscillation element is divided into a plurality of pieces,
ultrasonic vibration can be generated substantially uniformly on the diaphragm because the
insulation gap is not provided between the ultrasonic oscillation elements as in the prior art.
That is, since the vibration plate can apply ultrasonic vibration substantially uniformly to the
cleaning solution in the longitudinal direction, the cleaning effect can be uniformed.
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[0054]
Brief description of the drawings
[0055]
1 (a) is a plan view of a diaphragm showing an embodiment of the present invention, and FIG. 1
(b) is an enlarged sectional view taken along the line A-A of FIG. 1 (a).
[0056]
2 is a longitudinal sectional view of the ultrasonic cleaning device as well.
[0057]
3 is a cross-sectional view taken along the line B-B of FIG.
[0058]
Fig. 4 is a graph showing the sound pressure generated by the diaphragm.
[0059]
5 (a) is a plan view of a diaphragm showing another embodiment of the present invention, and
FIG. 5 (b) is a graph showing the sound pressure.
[0060]
6 is a longitudinal sectional view of a conventional ultrasonic cleaning apparatus.
[0061]
7 (a) is a plan view of the diaphragm similarly, and FIG. 7 (b) is an enlarged cross-sectional view
taken along the line C-C of FIG. 6 (a).
[0062]
Similarly FIG. 8 is a graph showing the sound pressure generated by the diaphragm.
[0063]
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Explanation of sign
[0064]
11: Device main body 21: Vibration plate 24: Oscillation element 24a: Piezoelectric material 24b:
Electrode 24c: Insulating film
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