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DESCRIPTION JPH04111598

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DESCRIPTION JPH04111598
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an
ultrasonic probe, and more particularly to an ultrasonic probe formed by combining piezoelectric
plates. BACKGROUND OF THE INVENTION An ultrasound probe is useful, for example, as a
ultrasound transceiver in a medical-related ultrasound diagnostic apparatus. In recent years, the
piezoelectric plate has been compounded and, for example, concentric electrodes have been
formed to form an anilula type. (Prior Art) FIG. M3 is a view of an ultrasonic probe for explaining
one such conventional example. The ultrasonic probe secures a piezoelectric plate such as PZT,
for example, on the working plate 1 and cuts it in the two-dimensional x and y directions to
divide it into a plurality of piezoelectric pieces 2. And after embedding the filler 3 between each
groove and integrating (combining). 0 To remove this from work Eil 0 Next, on one main surface
of the compounded piezoelectric piece 2, concentric 1 with a circle in the center and an annular
ring on the outside in common with the pole 4 (ab) on the other main surface ! Form @ 5. Then,
for example, a delay signal is applied to, for example, the concentric electrodes 4 to mechanically
drive the sector. (Intermediate point of the prior art) However, in the ultrasound probe of the
above configuration. After compounding each piezoelectric piece 2, when removing it from the
working plate 1, it is heated to use a solvent or apply 1 mechanical external force. In addition,
since the vibrating portion in which the concentric electrodes 4 (ab) are formed and the nonoscillating portion between the two have the same acoustic impedance, the signal characteristic
(cross talk) is generated, so that the acoustic characteristics There is a problem that the
productivity is deteriorated due to the increase of work processes as well as the damage. (Object
of the Invention) The object of the present invention is to provide an ultrasonic probe excellent in
acoustic characteristics with good workability. According to the present invention, a thick platelike conductor to be an electrode for signal input / output is formed on one main surface of a
piezoelectric plate, and a cutting groove extending from above the piezoelectric plate to above
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the thick plate conductor is provided. A plate is divided into a plurality of parts, and a filler is
embedded in the cutting groove to form a composite, and a common electrode is formed on the
other main surface to provide a solution. Hereinafter, an embodiment of the present invention
will be described with reference to a manufacturing process. (Embodiments) FIG. 1 to FIG. 1 are
views of an ultrasonic probe during a ll-making process to explain one embodiment of the
present invention. The piezoelectric plate 6 is made of PZT in the same manner as described
above, and is polarized by forming an electrode (not shown) on its both surfaces. Then, in this
embodiment, first, the thick plate conductor 7 (ab) made of a copper plate or the like is fixed to
one main surface of the piezoelectric plate 6 by a conductive adhesive or the like, as shown in
FIG. Filler 8 such as epoxy resin is embedded in the space between conductors 7 (ab).
Further, lead wire 9 (ab) is derived from each J'X plate conductor 7 (ab) [lff 2 figure] 0 Next, one
principal surface side (concentric electrode side) of the piezoelectric plate 6 is placed on the
backing material 10 Stick. そして。 A cutting groove 11 is provided in two dimensions to reach
the thick plate conductor 7 (ab) from the other main surface of the piezoelectric plate 6. At this
time, the piezoelectric plate 6 is divided into twelve piezoelectric pieces. Then, the same filling
material 8 as described above is embedded in the cutting groove 11 [FIG. 3] 0 Next, the other
main surface of the piezoelectric plate 6 (piezoelectric piece 12) is formed by low temperature
evaporation, for example. And a lead wire is connected to a common metal film (not shown) etc.,
and an ultrasonic probe is comprised. In such a case, since the cutting groove 11 which reaches
the thick plate conductor 7 (ab) is provided and divided into the piezoelectric pieces 12, the thick
plate conductor 7 (ab) can be electrically connected in a concentric state without being
separated. maintain. Therefore, the thick plate conductor can be used as a concentric electrode as
it is. As described above, since it is not necessary to form a new concentric electrode after
compounding in which the filler 8 is embedded, it is not necessary to remove it from the work
plate as in the conventional example. Along with this, the use of heating and solvents and the
addition of one mechanical external force are also eliminated. また。 Because the acoustic
impedance is different between the vibrating portion and the non-vibrating portion, the crosstalk
is improved. Therefore, in such a case, the vibration characteristic is maintained to improve the
manipulability (other embodiments) In the above embodiment, the piezoelectric plate is
described as a flat plate, but for example, as shown in FIG. The thick plate conductor or the like
may have a curvature, and may be arranged in a curved surface such as a concave surface. The
piezoelectric plate has a square shape, and the electrode has a concentric shape, but the
piezoelectric plate may have a circular shape. The ring may not be annular but may be simply
annular, or the filler may be embedded in the cutting groove 11 or the like, but may simply be
left as a void. Even if it exists, it is applicable similarly. According to the present invention, a thick
plate-like conductor to be an electrode for signal input / output is formed on one main surface of
a piezoelectric plate, and a cutting groove extending from above the piezoelectric plate to above
the thick plate conductor is provided. The piezoelectric plate is divided into a plurality of parts,
and a filler is embedded in the cutting groove to form a composite, and a common electrode is
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formed on the other main surface, so that 1) good backing property and ultrasonic probe with
excellent acoustic characteristics Can provide children.
[0002]
Brief description of the drawings
[0003]
1 to 4 are process diagrams for explaining an embodiment of the present invention, and FIG. 1
(a) is a plan view of a piezoelectric plate having concentric concentric poles formed, and FIG. 1
(b) is a plan view thereof. FIG. 2 is a cross-sectional view in which a filler is embedded between
concentric electrodes, and FIG. 2 is a new view of the ultrasonic probe.
FIG. 4 is a cross-sectional view of an ultrasonic probe to be explained in another embodiment of
the present invention. FIG. 5 is a view of a composite piezoelectric plate for explaining a
conventional example, and FIG. 6 (a) is a top view of the piezoelectric plate-(b) is a rear view.
Figure 1 Figure 6
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