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DESCRIPTION JPH04120384

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DESCRIPTION JPH04120384
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an
ultrasonic ceramic sensor used for transmitting and receiving ultrasonic waves.
[0002]
2. Description of the Related Art FIG. 4 shows a conventional ultrasonic ceramic sensor. In FIG. 4,
reference numeral 2 denotes a metal diaphragm, and a piezoelectric ceramic vibrator 1 is bonded
to form a unimorph vibrator 3. The coupling shaft 5 is fixed to the central portion of the
unimorph oscillator 3 by the liquid thermosetting adhesive 4, and the conical resonator 6 is fixed
by the liquid thermosetting adhesive 4 via the coupling shaft 5. . The unimorph oscillators 3 are
bonded to the terminal plate 8 with an elastic adhesive 7, and they are accommodated in a
cylindrical case 9. Reference numeral 10 is a metal base for blocking external noise, and 11a and
11b are input / output terminals. Reference numeral 12 denotes a protection net for protecting
the vibrator, which is provided at the top opening of the case 12. 9 is a cylindrical case as
described above, and has a role of internal protection and a function of improving acoustic
characteristics. Reference numerals 13a and 13b denote lead wires for transmitting and
receiving electric signals, one of which is connected to the input / output terminals 11a and 11b
connected to the terminal plate 8 and the other one is connected to the metal diaphragm 2 and
the piezoelectric ceramic vibrator 1 Each is connected by soldering. From the above
configuration, a high sensitivity, high power ultrasonic ceramic sensor of resonant type is
provided.
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[0003]
Problems to be Solved by the Invention In such a conventional configuration, there are the
following problems.
[0004]
(1) The complex resonance of the unimorph oscillator is vibrationally transmitted through the
adhesive, so vibration transmission loss due to the buffer of the adhesive is likely to occur, and
high sensitivity and high output can not be obtained.
[0005]
(2) Since the adhesive is used to fix the joint shaft, the characteristic variation has become large
due to the variation of the amount of the adhesive.
In addition, the use of an adhesive was unreliable.
[0006]
(3) Since all the piezoelectric ceramic vibrators and metal diaphragms are drilled, the cost of
parts is high and the overall cost is also high.
[0007]
The present invention is intended to solve the above-mentioned conventional problems, and it is
an object of the present invention to provide an ultrasonic ceramic sensor having high
performance, high reliability, high operability, and low cost.
[0008]
SUMMARY OF THE INVENTION In order to achieve the above object, the present invention
provides an integral connecting shaft perpendicular to the surface of the metal diaphragm at the
center of one surface of the metal diaphragm. Further, the connecting shaft portion of the metal
shaft integrated with the connecting shaft is provided with a taper, and a conical resonator is
press-fitted to the tapered connecting shaft portion and fixed with an adhesive.
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[0009]
[Function] With this construction, by integrating the connecting shaft with the metal diaphragm,
there is no loss of vibration transmission due to the adhesive, and the bending vibration by the
metal diaphragm and the piezoelectric ceramic vibrator can be efficiently connected. Can be
transmitted to
Furthermore, since the conical resonator is press-fit into the tapered portion of the joint shaft,
there is no gap between the joint shaft and the joint of the conical resonator, and the inflow of
the adhesive can be prevented. As a result, the flexural vibration of the metal diaphragm and the
piezoelectric ceramic vibrator can be transmitted to the conical resonator most efficiently.
[0010]
DESCRIPTION OF THE PREFERRED EMBODIMENT An embodiment of the present invention will
be described below with reference to the drawings.
FIG. 2 is a cross-sectional view showing a metal shaft integrated with a coupling shaft used in an
ultrasonic ceramic sensor according to an embodiment of the present invention.
In FIG. 2, the metal diaphragm 14 integrated with the coupling shaft is tapered at the center of
one surface so that the diameter of the coupling shaft 15 becomes smaller from the root to the
tip perpendicular to the surface. Are integrally formed in the form provided.
Examples of the processing method of the metal diaphragm 14 include a header method and a
cutting method.
[0011]
FIG. 1 is a cross-sectional view showing an embodiment of the ultrasonic ceramic sensor
according to the present invention. In FIG. 1, reference numeral 14 denotes the above-described
metal shaft integrated with the coupling shaft, and a piezoelectric ceramic vibrator 16 is bonded
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to the other surface to constitute a unimorph vibrator. Further, as described above, the
connecting shaft portion 15 of the metal diaphragm 14 integrated with the connecting shaft is
tapered, and the conical resonator 17 is press-fit into the tapered connecting shaft portion 15
and adhesively fixed with the adhesive 18. To form a composite resonator. Then, the whole of
them is fixed to the terminal plate 20 by the elastic adhesive 19 and stored in the cylindrical case
22 having the protective net 21. Further, 23 is a metal base, 24a and 24b are lead wires, and 25a
and 25b are terminals.
[0012]
FIGS. 3 and 4 show examples of changes in acoustic characteristics (sensitivity characteristics,
sound pressure characteristics) of the ultrasonic ceramic sensor thus configured, wherein A is a
characteristic of the embodiment and B is a comparison. Of the prior art for
[0013]
As described above, according to the present invention, the connecting shaft and the metal
diaphragm are integrated by using, for example, a method such as header and cutting without
using a bonding means such as adhesion and welding. As a result, it is possible to realize an
excellent combined shaft integral type metal diaphragm which can transmit the flexural vibration
of the piezoelectric ceramic vibrator and the metal diaphragm most efficiently.
Furthermore, by providing a taper on the connecting shaft portion of the metal diaphragm
integrated with the connecting shaft, the conical resonator can be press-fitted and fixed, and the
flexible vibration of the metal diaphragm and the piezoelectric ceramic vibrator can be connected
to the metal vibration of the integrated shaft. By transmitting to the tapered portion of the child,
it is possible to convert the ultrasonic wave most efficiently, which leads to the improvement of
the acoustic characteristics. From this, the following effects can be obtained.
[0014]
(1) Since the connecting shaft and the metal diaphragm are integrated, no adhesive is used when
fixing the connecting shaft as in the prior art, and the vibration transmission loss due to the
buffer effect is significantly reduced, and the acoustic characteristics Also improve.
[0015]
(2) As described above, since the connecting shaft and the metal diaphragm are integrated, no
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adhesive is used to fix the connecting shaft as in the prior art. There is no problem and there is
no loss of reliability due to the deterioration of the adhesive.
[0016]
(3) Since the bonding shaft is not fixed by bonding, there is no need to make a hole in the
piezoelectric ceramic vibrator or the metal diaphragm, and inexpensive parts without holes can
be used to reduce the overall cost. it can.
[0017]
Brief description of the drawings
[0018]
1 is a cross-sectional view showing an ultrasonic ceramic sensor using a metal diaphragm
integrated with a coupling shaft in an embodiment of the present invention.
[0019]
2 is a cross-sectional view showing a metal shaft integrated with the coupling shaft in the
embodiment of FIG.
[0020]
Fig. 3 illustrates the change in acoustic characteristics according to an embodiment of the
present invention
[0021]
Figure 4 illustrates the change in acoustic characteristics according to an embodiment of the
present invention
[0022]
Fig. 5 A cross-sectional view showing a conventional ultrasonic ceramic sensor
[0023]
Explanation of sign
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[0024]
14 Coupling shaft integral type metal diaphragm 15 Coupling shaft 16 Piezoelectric ceramic
vibrator 17 Conical resonator 18 Adhesive 19 Elastic adhesive 20 Terminal plate 21 Protective
net 22 Cylindrical case 23 Metal base 24a, 24b Lead wire 25a, 25b terminal
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