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DESCRIPTION JPH04314000

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DESCRIPTION JPH04314000
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a
linear array of unit probes capable of scanning a wide area of an object at high speed using an
electronic scanning ultrasonic inspection apparatus. The present invention relates to a linear
array ultrasound probe.
[0002]
2. Description of the Related Art By using an ultrasonic probe, it is possible to easily carry out
flaw detection and thickness measurement of steel materials. When an object such as a steel
material has a wide area, it is possible to use a linear array ultrasonic probe and an electronic
scanning ultrasonic inspection apparatus in which a plurality of unit probes are linearly
arranged. It is possible to carry out flaw detection and thickness measurement at high speed on a
wide range of the surface of the object. That is, since only the unit probes to be excited of the
linear array ultrasonic probe are electrically switched in order, the inspection speed is compared
with when the probes are moved mechanically. It can rise significantly.
[0003]
In this linear array ultrasonic probe, the timing at which the transducers of each unit probe are
excited is changed to focus or deflect the ultrasonic waves output from the transducers of each
unit probe. In order to do this, there are a linear array ultrasonic probe in which the length of
each transducer is set short, and a linear array ultrasonic probe in which the length of each
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transducer is set long in order to scan a wide range.
[0004]
A linear array ultrasonic probe in which the length of the transducer of this unit probe is set long
is configured as shown in FIG. 7, for example.
That is, in the linear array ultrasonic probe 1, a plurality of unit probes 2 are linearly arranged,
and the unit probes 2 are connected to each other by an adhesive, for example.
[0005]
In each unit probe 2, the vibrator 8 is held between the matching layer 4 and the back layer 5 in
contact with the subject 3 such as a steel plate, and the both surfaces of the unit probe 2 are
sandwiched by the electrode plates 6 and 7. It intervenes. The ground wire 10 and the signal
wire 11 are connected to the electrode plates 6 and 7 of each unit probe 2 from the electronic
scanning ultrasonic inspection apparatus 9 respectively.
[0006]
At least one or more pulse generator and receiving circuit are incorporated in the electronic
scanning type ultrasonic inspection apparatus 9, and each unit probe 2 of the linear array
ultrasonic probe 1 is constructed. Pulse signals are sequentially transmitted to the electrode
plates 6 and 7 so that ultrasonic waves are made to enter the subject 3 from the transducers 8.
Defects in the subject 3 or each reflected wave of each ultrasonic wave reflected on the bottom
surface is received by the vibrator 8 and converted into an electric signal, and is input to a
receiving circuit in the electronic scanning ultrasonic inspection apparatus 9. Therefore, the
position of each defect and the position of the bottom are confirmed from the echo contained in
each received signal by this receiving circuit.
[0007]
As described above, the position of the linear array ultrasonic probe 1 attached to the subject 3 is
moved by using the linear array ultrasonic probe 1 and the electronic scanning ultrasonic
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inspection apparatus 9. Instead, it becomes possible to measure the presence or absence of a
defect and the distance (plate thickness) from the position to the bottom in a short time over a
wide range of the subject 3.
[0008]
However, the linear array ultrasonic probe 1 as shown in FIG. 7 still has the following problems
to be solved.
[0009]
That is, in the inspection method in which pulse signals are sequentially applied to each unit
probe 2 constituting the linear array ultrasonic probe 1 by the electronic scanning ultrasonic
inspection apparatus 9 to observe an echo, Naturally, each unit probe 2 constituting the linear
array ultrasonic probe 1 needs to have the same detection sensitivity characteristic.
[0010]
However, as shown in the figure, each unit probe 2 is composed of the matching layer 4, the
electrode plate 6, the vibrator 8, the electrode plate 9, and the back layer 5.
And when assembling these into one unit probe 2, in order to fix each electrode 6, 7 to the
matching layer 4 and the back layer 5, the epoxy-type adhesive agent is used.
On the other hand, generally, piezoelectric ceramics are used as the vibrator 8.
The acoustic impedance of this piezoelectric ceramic is, for example, about 30 × 10 6 Kg / m 2
s. On the other hand, the acoustic impedance of the epoxy adhesive is, for example, about 3.0 ×
10 6 Kg / m 2 s, and when the two are compared, there is a difference of about 10 times. As a
result, the ultrasonic wave is reflected by the adhesive layer, and the transmitted or received
ultrasonic waveform is disturbed.
[0011]
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Therefore, it is necessary to adjust the influence of each adhesive layer on each unit probe 2 to
the same condition. Therefore, it is necessary to set the thickness of the adhesive uniformly and
thinly across all unit probes 2. However, it is very difficult in manufacturing technology to make
the thickness of the adhesive layer in each unit probe 2 uniform over all unit probes 2. As a
result, it is difficult to control the detection sensitivity and frequency characteristics of each unit
probe 2 to a constant value.
[0012]
In order to eliminate such a disadvantage, it is effective to produce a linear array ultrasonic
probe of a type in which the unit probe has a short length. That is, it is the linear array ultrasonic
probe 12 of FIG. 8 (a) shown by Unexamined-Japanese-Patent No. 55-74300.
[0013]
In the linear array ultrasonic probe 12, first, the back layer 13 having a shape equal to the entire
shape of the linear array ultrasonic probe 12 and the electrode plate 14 having a shape equal to
the back layer 13. , The piezoelectric ceramic (oscillator) 15, the electrode plate 16, and the
matching layer 17 are assembled using the conventional epoxy adhesive described above. Then,
after the epoxy-based adhesive solidifies, a cut 18 reaching from the matching layer 17 to the
piezoelectric ceramic (oscillator) 15 is made to form a unit probe as shown in the drawing.
[0014]
In the integrated linear array ultrasonic probe 12 configured as described above, since the step
of applying the epoxy adhesive is performed once, it can be judged that the coating is applied to
a uniform thickness. Therefore, the thickness of the epoxy adhesive in each unit probe divided by
the incision 18 can be considered to be uniform across all unit probes. Therefore, the problem of
the linear array ultrasonic probe 1 shown in FIG. 7 can be solved.
[0015]
However, in each of the linear array ultrasonic probes 1 and 12 shown in FIGS. 8A and 7
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described above, since each unit probe has a rectangular shape, each transducer The vibration
directions 8 and 15 vibrate not only in the original thickness direction but also in the horizontal
direction (lateral direction) or in the lateral direction. Therefore, the vibration in the direction
other than the thickness direction adversely affects the vibration in the thickness direction, the
wave number of the ultrasonic pulse increases, the time resolution becomes worse, and the
spatial resolution of the defect in the ultrasonic wave traveling direction decreases.
[0016]
The first method for suppressing such horizontal (lateral) vibration is to set the ratio of the
transducer length in the direction orthogonal to the array direction of the probes, the length in
the array direction, and the thickness. It is to select the optimal value. However, in this case, it is
difficult to manufacture a probe having an arbitrary size at an arbitrary frequency.
[0017]
Then, as a second method of suppressing the vibration, a linear array ultrasonic probe 19 as
shown in FIG. 8 (b) has been proposed (Japanese Patent Application Laid-Open No. 63-209634).
In this linear array ultrasonic probe 19, in addition to the cuts 18 described above in order to
suppress horizontal vibration, a large number of sub-cuts 21 are cut between the cuts 18 each
other. However, as shown in FIG. 8B, if a large number of cuts 18 and 21 are formed, the entire
configuration of the linear array ultrasonic probe 19 becomes complicated and the
manufacturing cost rises, and the degree of freedom in design It is restricted.
[0018]
Further, in the integrated linear array ultrasonic probe described above, the maximum value of
the length of each unit probe currently developed at present is about 3 mm. If the length of each
unit probe is short, it is necessary to increase the number of channels (number of unit probes) in
order to scan a wide range, which complicates the entire configuration of the linear array
ultrasonic probe. Production costs increase significantly.
[0019]
In addition, in the case of newly producing a linear array ultrasonic probe, in addition to the
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dimensional limitations of each unit probe as described above, the design is complicated, and the
development cost and development period There is a concern that the
[0020]
The present invention has been made in view of the above circumstances, and the inspection area
of each unit probe can be expanded with a simple configuration, and a wide area of the object
can be inspected with a small number of unit probes. An object of the present invention is to
provide a linear array ultrasonic probe capable of scanning a wide range of an object at high
speed with a small number of channels in combination with an electronic scanning ultrasonic
inspection apparatus.
[0021]
[Means for Solving the Problems] In order to solve the above problems, a linear array ultrasonic
probe in which a plurality of unit probes according to the present invention are linearly arranged
is a piezoelectric polymer material. And a plurality of electrode plates arranged in a straight line
on the upper surface of the transducer plate and corresponding to each unit probe, and a back
surface commonly covering the upper surface of each electrode plate A layer, a common
electrode plate attached to the lower surface of the vibrator plate, and a matching layer attached
to the lower surface of the common electrode plate.
[0022]
In another invention, in addition to each means in the linear array ultrasonic probe of the
invention described above, an acoustic weir made of a polymer material is attached to the lower
surface of the matching layer.
[0023]
In still another invention, each unit probe constituting the linear array ultrasonic probe is
arranged in a plurality of rows.
Furthermore, each unit probe is arranged at a predetermined distance smaller than the unit
probe interval between each row.
And in order to realize this, a single transducer plate made of a piezoelectric polymer material
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and a predetermined distance which is smaller than the unit probe distance between each row
are shifted linearly for each row A plurality of electrode plates arranged on the upper surface of
the transducer plate, corresponding to each unit probe, a back layer covering the upper surface
of each electrode plate, and a common electrode plate attached to the lower surface of the
transducer plate And a matching layer attached to the lower surface of the common electrode
plate.
[0024]
Further, in another invention, each unit probe constituting the linear array ultrasonic probe is
attached to a transducer plate made of a piezoelectric polymer material, and the upper surface of
the transducer plate First electrode plate, a back layer attached to the upper surface of the first
electrode plate, a second electrode plate attached to the lower surface of the vibrator plate, and a
lower surface of the second electrode plate It consists of the pasted matching layer.
[0025]
In the linear array ultrasonic probe configured as described above, a piezoelectric polymer
material is used as a vibrator.
The acoustic impedance of this piezoelectric polymer material is about 4.51 × 10 6 Kg / m 2 s,
which is substantially the same as the acoustic impedance of the above-mentioned epoxy
adhesive.
Therefore, even if the thickness of the adhesive layer varies somewhat between the unit probes,
the influence on each unit probe is almost the same.
That is, it is possible to absorb fluctuations in the working accuracy among the unit probes due
to the bonding process.
[0026]
Further, since the piezoelectric polymer material has a smaller elastic coefficient than
conventional piezoelectric ceramics, unnecessary vibration such as lateral vibration or sliding
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vibration hardly occurs. Therefore, it is possible to set each unit probe to an arbitrary shape
without requiring a large number of incisions as shown in FIG. 8 (b). Therefore, a unit probe
having a wide inspection area can be easily realized.
[0027]
Further, as described above, the piezoelectric polymer material hardly generates lateral vibration,
sliding vibration, etc. other than the vibration in the original thickness direction. Therefore, since
it has almost no influence on the unit probes adjacent in the lateral direction, the transducer
plate made of this piezoelectric polymer material can be divided into all unit probes without
being divided into unit probes. It is possible to make one common transducer plate over the
whole.
[0028]
As a result, the electrode plate and the matching layer located on the subject side of the vibrator
plate can be formed of a single electrode and the matching layer without division. That is, while
being able to reduce a manufacturing cost, the fluctuation | variation of the detection precision
resulting from the dimensional accuracy etc. between unit probes can be suppressed.
[0029]
Further, each unit probe constituting the linear array ultrasonic probe is arranged in a plurality
of rows, and each unit probe is shifted between the respective rows by a predetermined distance
smaller than a unit probe interval. Are arranged.
[0030]
Since the ultrasonic beams transmitted by each unit probe are thin, the defect detection
sensitivity at positions between the ultrasonic beams is reduced.
Therefore, generally, a plurality of unit probes are simultaneously excited. However, in the
present invention, as described above, the position of each unit probe is shifted in each row and
arranged over a plurality of rows. Therefore, even if an ultrasonic beam transmitted at the same
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timing is formed by only one unit probe, the defect detection sensitivity reduction between the
ultrasonic beams is compensated by the unit probes arranged in another row. be able to.
Therefore, it is possible to detect a wider range with a smaller number of unit probes.
[0031]
Embodiments of the present invention will be described below with reference to the drawings.
[0032]
FIG. 1 is a schematic view showing a schematic configuration of the linear array ultrasonic probe
of the embodiment.
The linear array ultrasonic probe 22 of this embodiment is composed of 32 unit probes linearly
arranged.
[0033]
In FIG. 1, each unit probe has a width of 6 mm and a length of 4 mm. Thus, the overall size has a
shape of 6 mm × 128 mm. Then, on the upper surface of the matching layer 27 whose lower
surface is in contact with the subject 3, one common electrode plate 26 is attached by using, for
example, an epoxy adhesive. One vibrator plate 25 is attached to the upper side of the common
electrode plate 26 so as to cover the common electrode plate 26. The vibrator plate 25 is formed
of, for example, a piezoelectric polymer material represented by P (VDF-TrFE) or the like.
[0034]
Then, 32 electrode plates 24 corresponding to each unit probe are attached, for example, with an
epoxy adhesive, on the upper surface of the vibrator plate 25 with a minute interval in a straight
line. Each electrode plate 24 is formed of a copper plate and has a shape of 6 mm in width and 4
mm in length. A back layer 23 is attached so as to cover the upper surfaces of the 32 electrode
plates 24 in common. The back surface layer 23 is formed of, for example, bakelite, and the
thickness thereof is 1⁄4 of the wavelength λ of the ultrasonic wave used in the linear array
probe 22.
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[0035]
FIG. 2 shows an electronic scanning ultrasonic inspection in the case of detecting a defect
present in the object 3 such as a steel plate using the linear array ultrasonic probe 22 and the
electronic scanning ultrasonic inspection apparatus 28. FIG. 7 is a block diagram showing a
schematic configuration of a device 28.
[0036]
In the electronic scanning type ultrasonic inspection apparatus 28, 32 pulse generators 29, 32
amplifiers 30 as a receiving circuit and 32 detectors 31 are incorporated.
The first to thirty-second channels are individually connected to the unit probes 32 of the linear
array ultrasonic probe 22 of FIG. 1. The scan channel controller 33 selects a plurality of channels
to be excited simultaneously, and sends drive signals to the corresponding selected pulse
generators 29 via the pulse generator control circuit 34. Each selected pulse generator 29
outputs a pulse signal based on the drive signal.
[0037]
The pulse signal output from the pulse generator 29 is applied between the electrode plate 24
and the common electrode plate 26 in the unit probe 32 of the corresponding channel of the
linear array ultrasonic probe 22. As a result, the portion of the transducer plate 25 held between
the corresponding electrode plate 24 and the common electrode plate 26 vibrates to generate
pulsed ultrasonic waves, which are incident on the subject 3 through the matching layer 27. Ru.
The pulsed ultrasonic wave incident into the subject 3 is reflected by a defect existing inside or
on the surface, is received as an echo by the transducer plate 25 as an echo, and is converted
into an electric signal, and the electronic scanning ultrasonic inspection apparatus 28 Are input
to the amplifiers 30 of the corresponding channels.
[0038]
The received signal amplified by the amplifier 30 is subjected to envelope detection by the next
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detector 31. The envelope detection signal is input to the reception wave synthesizer 35. The
reception wave synthesizer 35 synthesizes each detection waveform of the envelope detection
signal output from the detector 31 of each channel designated from the scanning channel control
unit 33 previously, that is, each echo waveform corresponding to the defect. It is sent to the
reception wave display unit 36. For example, the reception wave display 36 composed of a CRT
display or the like displays each echo waveform resulting from the inputted defect. Next, a
control procedure of the scanning channel control unit 33 will be described by taking an example
in which three unit probes 32 are simultaneously excited and simultaneously received.
[0039]
First, three pulse generators 29 from No. 1 to No. 3 are selected, and the first unit probe 32 to
the third unit probe 32 of the linear array ultrasonic probe 22 are selected. Pulsed ultrasonic
waves are output from the three unit probes 32 up to the same timing. The received wave
combiner 35 combines the echoes output from the three detectors 31 from the first detector 31
to the third detector 31 and displays the combined echo on the received wave display unit 36.
The above is the first ultrasonic wave transmission / reception process.
[0040]
Next, three pulse generators 29 of No. 2 to No. 4 are selected, and the second unit probe 32 to
the fourth unit probe 32 of the linear array ultrasonic probe 22 are selected. Pulsed ultrasonic
waves are output from the three unit probes 33 up to the same timing. Then, the received wave
combiner 35 combines the echoes output from the three detectors 31 from the second detector
31 to the fourth detector 31 and displays the combined echo on the received wave display unit
36. The above is the second ultrasonic wave transmission / reception process.
[0041]
As described above, while using three channels simultaneously, the channels are selected by
shifting one channel at a time. As a result, the output of 30 scanning lines in total is displayed on
the received wave display section 36 using 32 channels.
[0042]
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Here, the reason for simultaneously exciting and simultaneously receiving the three unit probes
32 will be described. That is, since the ultrasonic beam transmitted by one unit probe 32 is thin,
the defect detection sensitivity at the position between the ultrasonic beams is lowered, and the
defect may be missed. In addition, when several unit probes 32 are excited simultaneously, the
vibration area for forming an ultrasonic beam is increased, so that the detection accuracy of
defect occurrence position is reduced, and an ultrasonic beam suitable for flaw detection is
formed. Can not.
[0043]
If the distance between the unit probes is shortened, an appropriate ultrasonic beam can be
formed even when several or more unit probes 32 are excited simultaneously, but the total
number of unit probes is If is equal, the entire width of the linear array ultrasonic probe 22
becomes narrow, so it is not possible to detect a large area at one time. Therefore, the optimum
number of the unit probes 32 for simultaneous excitation and simultaneous reception to form
one ultrasonic beam is two to four.
[0044]
In FIG. 3 (a), the ultrasonic refraction angle is 45 as shown in FIG. The linear array ultrasonic
probe 22 is attached to the outer peripheral surface through an acoustic weir 38 formed of a
polymeric material such as acrylic so as to be an angle of FIG. The angle θ of the acoustic wedge
38 can be obtained from Snell's law by the following equation.
[0045]
θ = sin−1 (sin 45 ° / 3230 × 2730) (wherein, 3230 is the transverse acoustic velocity in the
steel pipe, and 2730 is the longitudinal acoustic velocity in the acrylic). Unit: m / s) The switching
time of the scanning line is set to 250 μsec. Therefore, the time required for the measurement
process for all 30 scan lines is 7.5 msec. Then, a through hole with an outer diameter of 3.2 mm
is intentionally formed in the steel pipe 37, and this through hole is detected using the linear
array ultrasonic probe 22 and the electronic scanning ultrasonic inspection apparatus 28 of the
embodiment. The results are shown in FIG.
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[0046]
FIG. 4 is a diagram in which the detection sensitivity of each scanning line is measured by
moving the linear array probe 22 in the axial direction of the tube. The overall detection
sensitivity of the linear array ultrasonic probe 22 is the envelope characteristic of each of the
unit probes 32 from the first to the thirty-second which constitute the linear array ultrasonic
probe 22. The difference between the maximum value and the minimum value in this envelope
characteristic is 3 dB at the maximum. Since this 3 dB difference is almost negligible when
compared to the overall detection sensitivity, a range of 128 mm in the axial direction of the
steel pipe 37 can be obtained by using the linear array ultrasonic probe 22 of the embodiment.
The flaw can be detected at a high speed of 5 msec. FIG. 5 is a perspective view showing a linear
array ultrasonic probe according to another embodiment of the present invention.
[0047]
The linear array ultrasonic probe 40 of this embodiment is composed of a total of 32 unit probes
41 arranged linearly in two rows. Each unit probe 41 has a size of 10 mm × 10 mm, and 16 unit
probes 41 are arranged in one row, so the width of the entire linear array ultrasonic probe 40 is
Is 160 mm. And, as illustrated, each unit unit probe 41 of the second row from the 17th to the
32nd is a unit compared with each unit probe 41 from the 1st row from the 1st to the 16th. They
are arranged at intervals of 5 mm, which is a half of the distance between the probes.
[0048]
Then, the lower surface of the transducer plate 42 formed of the aforementioned P (VDF-TrFE)
piezoelectric polymer material having the same shape as the entire shape of the linear array
ultrasonic probe 40 is the same. One common electrode plate 43 having a shape is attached.
Furthermore, a matching layer 44 having the same shape is attached to the lower surface of the
common electrode plate 43. On the other hand, 32 electrode plates 45 corresponding to each
unit probe 41 are attached to the upper surface of the diaphragm 42. A back layer 46 made of
bakelite is attached to the upper surface of each electrode plate 45.
[0049]
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In the manufacturing process, first, each electrode plate 45 and each back layer 46 are formed
into one plate. Next, the electrode plate 45 is divided into 32 sheets by forming the cuts 47 in the
electrode plate 45 by etching, and then the lower surface of the electrode plate 45 and the upper
surface of the vibrator plate 42 are bonded together, Each unit probe 41 is formed.
[0050]
When flaw detection is performed on a subject using such a linear array ultrasound probe 40, an
ultrasound beam is formed by one unit probe 41. That is, the ultrasound beam is equal to the
ultrasound beam transmitted from a 10 mm × 10 mm single type ultrasound probe. Electronic
scanning is performed while electrically switching the probes to be transmitted and received one
by one. First, flaw detection is performed by performing transmission and reception of ultrasonic
waves using the first unit probe 41 of FIG. 5.
[0051]
Next, the unit probes 41 for transmitting and receiving the ultrasonic waves are switched in
order and flaw detection is performed on the 2nd, 3rd,..., 16th, 17th,. Therefore, the total number
of ultrasonic beams is 32. Since the scan line switching time is set to 250 μs, the time required
for the measurement process using all 32 unit probes 41 is about 8 ms.
[0052]
FIG. 6 shows the linear array ultrasonic probe 40 when the steel plate 48 as a subject with a
thickness of 25 mm is vertically flawed using the linear array ultrasonic probe 40 shown in FIG.
It is a figure which shows the relationship between the arrangement | positioning direction
(electronic scanning direction), and a machine scanning direction.
[0053]
In general, in such an arrangement, for example, when flaw detection is performed only with
each unit probe 41 in the first row, a portion of the adjacent unit probes 41 located between the
ultrasonic beams may be detected. The flaw detection sensitivity is lowered, and a defect may not
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be found.
Therefore, as in the linear array ultrasonic probe of the embodiment, the unit probes 41 are
arranged in two rows with their positions shifted by half the width of the unit probes, so that the
measurement is missed in the first row measurement. Defects can be reliably detected in the
second row of measurements.
[0054]
As described above, in the linear array ultrasonic probe 40 shown in FIG. 5, even if an ultrasonic
beam is formed by one unit probe 41, it is possible to reliably detect a defect without missing any
defects. . Therefore, a wide range can be detected with a small number of channels.
[0055]
As described above, in the linear array ultrasonic probes 22 and 40 according to the present
invention, piezoelectric transducers having the same shape as the matching layers 27 and 44 as
the respective transducers of the unit probes 32 and 41 are used. One vibrator plate 25, 42
made of a molecular material is used. As described above, since the piezoelectric polymer
material has a smaller elastic coefficient than conventional piezoelectric ceramics, unnecessary
vibration such as lateral vibration or sliding vibration hardly occurs. Therefore, since it is not
necessary to have a large number of incisions as shown in FIG. 8 (b), it is possible to set each unit
probe 32, 41 to an arbitrary shape. Therefore, the linear array ultrasound probes 22 and 40
having a wide examination area can be easily realized. In particular, the linear array ultrasound
probe 40 having a somewhat complicated two-row configuration as shown in FIG. 5 can be easily
manufactured.
[0056]
Furthermore, since the transducer plates 25 and 42, the common electrode plates 26 and 43,
and the matching layers 27 and 44 are each formed of a single plate or layer, the manufacturing
process is simplified, as shown in FIGS. Compared to the conventional linear array ultrasonic
probes 1, 12, 19 shown in FIG. 8, the manufacturing cost can be significantly reduced.
[0057]
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Also, the acoustic impedance of the piezoelectric polymer material is interposed between each of
the electrode plates 24 and 45 and the back layers 23 and 46 and between the common
electrode plates 26 and 43 and the matching layers 27 and 44. It is not so far apart from the
acoustic impedance of epoxy adhesive.
Therefore, even if the thickness of the adhesive layer of the epoxy adhesive varies somewhat
between the unit probes 32, 41, the influence exerted on the unit probes 32, 41 is substantially
the same. That is, it is possible to absorb the fluctuation of the working accuracy between the
unit probes 32 and 41 due to the bonding process when manufacturing the linear array
ultrasonic probes 22 and 40. Therefore, the manufacturing operation efficiency can be improved.
[0058]
The present invention is not limited to the embodiments described above. In the embodiment, the
piezoelectric polymer material of P (VDF-TrFE) is used as the vibrator of the unit probe 32, but
other types of piezoelectric polymer materials may be used.
[0059]
In the embodiment, as a method of dividing into each unit probe 32, although the electrode plate
24 adhered on the back layer 23 is divided into 32 sheets, for example, as shown in FIG. The
individual unit probes 32 are sequentially laminated from the bottom with a matching layer, a
second electrode plate, a vibrator plate made of a piezoelectric polymer material, a first electrode,
and a back layer, and they are independent of one another. It may be manufactured and arranged
later in a straight line. Further, the number of arrangement of each unit probe 41 in the linear
array ultrasonic probe 40 of FIG. 5 is not limited to two, and may be three or more.
[0060]
As described above, according to the present invention, the vibrator constituting each unit probe
is made of the piezoelectric polymer material. Since this piezoelectric polymer material hardly
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generates lateral vibration or sliding vibration, the length of each unit probe can be set long, and
the inspection area of the entire linear array ultrasonic probe can be set widely. . As a result, by
combining with the electronic scanning ultrasonic inspection apparatus, it is possible to inspect a
wide range of the object at high speed even with a small number of channels, and it is possible to
greatly improve the test operation efficiency.
[0061]
Further, even if the thickness of the adhesive existing between each electrode plate and the
matching layer and the matching layer varies among the unit probes, the detection sensitivity
among the unit probes is almost constant. Can be controlled. Therefore, the detection accuracy of
the entire linear array ultrasonic probe can be improved.
[0062]
Furthermore, even if an acoustic weir made of a polymer material is attached to the matching
layer, the ultrasonic wave is not reflected or attenuated at the interface between the acoustic weir
and the matching layer, and the waveform is not deformed easily. An ultrasound probe can be
configured.
[0063]
Brief description of the drawings
[0064]
1 is a schematic configuration diagram of a linear array ultrasonic probe according to an
embodiment of the present invention,
[0065]
Fig. 2 A block diagram showing a schematic configuration of an electronic scanning type
ultrasonic inspection apparatus using an ultrasonic probe, Fig. 3 an ultrasonic probe in the case
where a steel pipe is flawed using the ultrasonic probe FIG. 4 is a diagram showing the
attachment state of the probe, FIG. 4 a sensitivity characteristic diagram when the same steel
pipe is flawed, FIG. 5 a schematic configuration diagram of a linear array ultrasonic probe
according to another embodiment of the present invention.
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[0066]
Fig. 6 is a view showing an attachment state of the ultrasonic probe in the case where a steel
plate is flawed using the ultrasonic probe in the same embodiment, Fig. 7 a schematic
configuration view of a conventional linear array ultrasonic probe,
[0067]
FIG. 8 is a schematic configuration view of another conventional linear array ultrasonic probe.
[0068]
Explanation of sign
[0069]
3 object: 22, 40 linear array ultrasound probe 23, 46 back layer 24, 45 electrode plate 25, 42
transducer plate 26, 43 common electrode 27, 44 Matching layer, 28: electronic scanning type
ultrasonic inspection device, 29: pulse generator, 30: amplifier, 31: detector, 32, 41: unit probe,
33: scanning channel control unit, 37: steel pipe, 38: ... Acoustic wave, 48 ... steel plate.
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