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DESCRIPTION JPH05115474

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DESCRIPTION JPH05115474
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an
ultrasonic transducer and a method of manufacturing an ultrasonic transducer, and more
particularly to an ultrasonic transducer and a method of manufacturing an ultrasonic transducer
capable of improving the directivity of an ultrasonic beam. About.
[0002]
[Prior Art] In "The 57th Annual Meeting of the Japan Society of Ultrasonic Medicine P. 619-P.
620" and "The 58th Annual Meeting of the Japan Ultrasonic Medical Society P. 843-P. 844,"
ultrasonic waves In order to improve the directivity of the ultrasonic beam in the direction of the
short axis orthogonal to the scanning direction of the transducer, the polarization intensity of a
piezoelectric material such as PZT is changed and weighted as in the Gaussian function or step
function as shown in FIG. A method has been proposed.
[0003]
However, in the method of weighting as described above, a special technique is used to polarize
the piezoelectric material as shown in FIG. 6, and the operation is complicated.
[0004]
Therefore, a first object of the present invention is to provide an ultrasonic transducer in which
the directivity of the ultrasonic beam in the short axis direction can be improved with a simple
configuration.
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[0005]
A second object of the present invention is to provide a manufacturing method capable of easily
manufacturing an ultrasonic transducer capable of improving the directivity of the ultrasonic
beam in the short axis direction.
[0006]
The ultrasonic transducer according to the present invention is an ultrasonic transducer
comprising a piezoelectric material such as PZT, a matching layer, and, if necessary, an acoustic
lens fixed on a backing material. A configurational feature is that at least one of the layer and the
acoustic lens is provided with a plurality of acoustic non-propagating portions arranged at
predetermined intervals in the minor axis direction and along the scanning direction.
[0007]
According to the method of manufacturing an ultrasonic transducer of the present invention, a
piezoelectric material such as PZT and a first matching layer are fixed on a backing material, and
a groove is formed at a predetermined pitch in the scanning direction to form an element array A
second feature of the present invention is to fix a second matching layer on the element array
and to form grooves along the short axis direction at predetermined intervals in the minor axis
direction along the scanning direction.
[0008]
In the ultrasonic transducer according to the present invention, at least one of the matching layer
and the acoustic lens is provided with a plurality of acoustic non-propagating portions arranged
at predetermined intervals in the minor axis direction and along the scanning direction.
That is, the transmitted and received ultrasonic beams propagate in a plurality of propagation
units having a predetermined interval in the short axis direction separated by the plurality of
acoustic non-propagation units, and are weighted differently by each propagation unit. .
Therefore, the directivity of the ultrasonic beam in the short axis direction can be improved.
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Since the piezoelectric material is not processed, its vibration mode does not change.
[0009]
In the method of manufacturing an ultrasonic transducer according to the present invention,
grooving along the scanning direction is performed in the alignment layer of the element at a
predetermined interval in the minor axis direction.
Then, a plurality of grooves formed by the grooving become the acoustic non-propagating part.
Therefore, an ultrasonic transducer capable of improving the directivity of the ultrasonic beam in
the short axis direction only by adding a grooving operation similar to the grooving operation
when forming an element array in a conventional method of manufacturing an ultrasonic
transducer Can be easily manufactured.
[0010]
The present invention will be described in more detail based on the embodiments shown in the
drawings.
The present invention is not limited by this. FIG. 1 is an explanatory view of an ultrasonic
transducer 1 according to an embodiment of the present invention. The electrode of the PZT 2 is
formed of silver paste or the like on the surface thereof, and is fixed on the backing material 3.
[0011]
The back load member 3 is mainly composed of natural rubber or the like, and is mixed with
powder such as tungsten for adjusting acoustic impedance. An FPC (flexible printed circuit) 4 in
which a pattern is formed at a predetermined pitch is connected to one side surface of the PZT 2
in the scanning direction via a conductive adhesive 5. A copper plate 6 for GND is connected to
the other side surface in the scanning direction via a conductive adhesive 7.
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[0012]
A first matching layer 8 made of a glass-based material, a polymer material, or the like for
acoustic matching is fixed on the PZT 2. Grooves 9 for dividing each element are formed in
parallel with the short axis direction at a predetermined array pitch in the scanning direction at a
depth extending from the first matching layer 8 to the backing material 3.
[0013]
A second matching layer 10 is fixed on the first matching layer 8. The second matching layer 10
is provided with a plurality of grooves 11 arranged at predetermined intervals in the minor axis
direction and parallel to the scanning direction as acoustic non-propagating portions. An acoustic
lens (not shown) or the like is fixed on the second matching layer 10.
[0014]
FIG. 2 is an explanatory view of one element of the ultrasonic transducer 1. The second matching
layer 10 is divided into matching layer portions S1, S2, S3, S4, S5 by a groove 11 provided as an
acoustic non-propagating portion.
[0015]
The ultrasonic beam propagating in the second matching layer 10 is not propagated in the
groove 11, and propagates in the matching layer portions S1, S2, S3, S4, and S5. The area ratio of
the upper surfaces of the matching layer portions S1, S2, S3, S4, and S5 is defined by the
distance between the grooves 11, and is set based on, for example, a Gaussian function.
[0016]
In (a) and (b) of FIG. 3, the measured value of the reflected wave amplitude by the ultrasonic
probe using this ultrasonic transducer 1, the measurement of the reflected wave amplitude by
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the ultrasonic probe using the conventional ultrasonic transducer I will illustrate the value. The
horizontal axis is the deflection angle θ (deg), and the vertical axis is the amplitude. The
measured α is 20 mm, and β is 75 mm. As compared with (b) in both (a) and (b), the bent
portion by the side rope is improved and a smooth curve is obtained.
[0017]
Next, a method of manufacturing the ultrasonic transducer 1 will be described with reference to
FIGS. 4 and 5. First, PZT 2 on the surface of which an electrode is formed by silver paste or the
like is adhered to the backing material 3 with an epoxy-based adhesive.
[0018]
The FPC 4 is bonded with the conductive adhesive 5 to one side in the scanning direction of the
PZT 2 and the backing material 3 fixed by the adhesive, and the electrode of the PZT 2 and the
FPC 4 are connected. Further, the copper plate 6 for GND is adhered to the side surface in the
scanning direction opposite to the side surface in the scanning direction with the conductive
adhesive 7 to connect the electrode of the PZT 2 and the copper plate 6 for GND.
[0019]
Next, the first matching layer 8 is adhered onto the PZT 2 with an adhesive. After bonding the
first matching layer 8 on the PZT 2, a plurality of grooves 9 parallel to the short axis direction
are cut at a predetermined array pitch in the scanning direction using a dicing saw or the like to
form an element array. The groove 9 extends to the first matching layer 8, the PZT 2, and the
backing material 3.
[0020]
After the element array is formed, the second matching layer 10 is adhered onto the first
matching layer 8 with an adhesive as shown in FIG. Then, using a dicing saw or the like, a
plurality of grooves 11 arranged at predetermined intervals in the minor axis direction and
parallel to the scanning direction are formed in the second alignment layer 10. An acoustic lens
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or the like (not shown) is fixed on the second matching layer 10 to form the ultrasonic
transducer 1.
[0021]
As another embodiment of the present invention, one in which an acoustic non-propagating part
is formed by using a metal, a foam material or the like different in acoustic impedance from an
adjacent substance instead of the groove 11 can be mentioned.
[0022]
As another embodiment of the present invention, in place of the groove 11, a plurality of grooves
arranged at predetermined intervals in the minor axis direction and parallel to the scanning
direction may be provided on the matching layer side of the acoustic lens. .
[0023]
According to the ultrasonic transducer of the present invention, the directivity of the ultrasonic
beam in the short axis direction can be improved with a simple configuration.
[0024]
According to the method of manufacturing an ultrasonic transducer of the present invention, an
ultrasonic transducer capable of improving the directivity of an ultrasonic beam in the short axis
direction can be easily manufactured within the technical range of the conventional method of
manufacturing an ultrasonic transducer. You can do it.
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