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DESCRIPTION JPH06178393

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DESCRIPTION JPH06178393
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an
ultrasonic transducer arranged in an ultrasonic probe for transmitting and receiving ultrasonic
waves and a method of manufacturing the same.
[0002]
An ultrasonic diagnostic apparatus is known which transmits and receives ultrasonic waves to
the inside of a living body and displays a tomographic image etc. inside the living body. In recent
years, a catheter-like ultrasonic probe is inserted into a body cavity or a blood vessel of a living
body to display a tomographic image of the inside of the living body or to perform ultrasonic
diagnostic that displays the velocity of a moving reflector (for example, blood flow) Is also widely
practiced.
[0003]
Transmission and reception of ultrasonic waves are performed by an ultrasonic transducer, but
in the above-mentioned intracavity injection type ultrasonic probe, a fairly small ultrasonic
transducer is necessarily used because of size restrictions. Be
[0004]
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FIG. 12 shows an example of a conventional ultrasonic transducer provided in the abovementioned body cavity insertion type ultrasonic probe.
The upper surface side electrode 12 is provided on the upper surface of the piezoelectric
material 10, and the lower surface side electrode 14 is provided on the lower surface. Ultrasonic
waves are generated by applying a high frequency voltage between these electrodes 12 and 14.
In order to transmit the generated ultrasonic waves into the living body without attenuating as
much as possible, a sheet-like matching layer 16 consisting of a single layer or a plurality of
layers is formed on the upper surface of the electrode 12. The matching layer 16 is generally
made of a material having an intermediate acoustic impedance of both impedances in order to
match the acoustic impedance of a substance (for example, ceramic) constituting the
piezoelectric material 10 with the acoustic impedance of a living body. Ru. In addition, on the
lower surface side of the electrode 14, a backing layer 18 having a certain thickness for
absorbing the ultrasonic wave radiated backward is provided. Here, this ultrasonic transducer
has a size of approximately 1.2 mm in length × 1.2 mm in width × 0.5 mm in height.
[0005]
The ultrasonic transducer configured as described above is housed and arranged in the insertion
tube distal end portion of the ultrasonic probe of the body cavity insertion type.
[0006]
At that time, one end of the lead wire is connected to the electrodes 12 and 14, but the
connection is made to the side exposed on the side of the electrodes 12 and 14.
That is, the tips of the lead wires are brought close to the side edges 12a and 14a, and the side
edges and the lead wires are electrically connected by soldering or a method according thereto.
Then, the other end of the lead wire is connected to the signal line, whereby a high frequency
signal is supplied to both electrodes.
[0007]
However, such work has a problem that the work is very difficult because the ultrasonic
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transducer itself is extremely small. That is, although lead positioning and soldering must be
performed on extremely thin sides while avoiding a short circuit with the other electrode, the
work is complicated and time-consuming. The In order to increase the exposed area of the
electrode due to the demand for improvement in the connection workability of the lead wire, it
may be considered that a part of the matching layer or the backing layer is artificially cut off. An
adverse effect such as distortion occurs on the structure of the vibrator.
[0008]
The present invention has been made in view of the above-described conventional problems, and
an object thereof is to provide an ultrasonic transducer capable of reliably connecting signal lines
and reducing labor required for manufacturing operations, and a method of manufacturing the
same. It is in.
[0009]
In order to achieve the above object, an ultrasonic transducer according to the present invention
comprises a piezoelectric material, an upper surface electrode formed on the upper surface of the
piezoelectric material, and a lower surface of the piezoelectric material. A lower surface electrode
to be formed, a matching layer formed on the upper surface of the upper surface electrode, and a
backing layer formed on the lower surface of the lower surface electrode, along one side of the
upper surface electrode and in the vicinity of one side thereof The upper surface separation
groove electrically separating both sides is formed, the lower surface separation groove
electrically separating both sides is formed in the vicinity of the other side along the other side of
the lower surface electrode, and the upper surface exposed to the outside It is characterized in
that the other side of the electrode and one side of the lower surface electrode are used as
terminals for applying a signal.
[0010]
In the method of manufacturing an ultrasonic vibrator according to the present invention, an
electrode forming step of forming an upper surface electrode on the upper surface of a plate-like
piezoelectric material and forming a lower surface electrode on the lower surface of the
piezoelectric material; A plurality of upper surface separation grooves are formed equidistantly
along the predetermined direction, and a plurality of the lower surface electrodes are arranged
equidistantly from the respective upper surface separation grooves along the predetermined
direction. A separation groove forming step of forming a lower surface separation groove, a
matching layer formation step of forming a matching layer on the upper surface of the upper
surface electrode on which the upper surface separation groove is formed, and A backing layer
forming step of forming a backing layer, and cutting the laminated body on which the matching
layer and the backing layer are formed in the vertical direction between the upper surface
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separating groove and the lower surface separating groove, and The predetermined direction and
the predetermined direction at predetermined intervals Cut in the vertical direction along the
direction orthogonal, characterized in that it comprises a separation step of separating the
laminate into a plurality of ultrasonic transducers.
[0011]
According to the ultrasonic transducer in accordance with the present invention, the upper
surface electrode is formed on the upper surface of the piezoelectric material, and the lower
surface electrode is formed on the lower surface.
Furthermore, a matching layer is formed on the upper surface of the upper surface electrode, and
a backing layer is formed on the lower surface of the lower surface electrode.
Then, since the upper surface separation groove is formed in the upper surface electrode and the
lower surface separation groove is formed in the lower surface electrode, introduction of a
conductive adhesive or the like to the side surface of one side of the ultrasonic transducer makes
two electrodes Electrical connection can be made only to one of the electrodes, and if the same
conductive adhesive is introduced to the other side, electrical connection can be made only to the
other electrode. It becomes.
Therefore, the entire side surface of the ultrasonic transducer can be made to be a target such as
soldering without targeting the side of the extremely thin electrode, so that the work labor can be
reduced and the signal line can be surely connected. Become.
[0012]
Further, according to the method of manufacturing an ultrasonic transducer in accordance with
the present invention, in the electrode forming step, upper and lower electrodes are first formed
on the upper and lower surfaces of the plate-like piezoelectric material. Next, in the separation
groove forming step, the upper surface separation groove is formed in the upper surface
electrode, and the lower surface separation groove is formed in the lower surface electrode.
Thereafter, the matching layer and the backing layer are formed, and in the separation step, the
laminate on which each layer is formed is cut in the longitudinal and lateral directions, and a
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plurality of ultrasonic transducers are manufactured.
[0013]
Only one electrode is electrically exposed on the surface on one side of each of the manufactured
ultrasonic transducers, and only the other electrode is electrically exposed on the surface on the
other side.
[0014]
Moreover, according to the above manufacturing method, it becomes possible to manufacture a
plurality of ultrasonic transducers simultaneously, and it is also possible to achieve cost
reduction.
[0015]
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of the
present invention will now be described with reference to the drawings.
[0016]
First, each process of the manufacturing method of the ultrasonic transducer concerning the
present invention is explained.
[0017]
An electrode formation process is shown in FIG.
In this process, the upper surface electrode 12 is formed on the upper surface of the plate-like
piezoelectric material 10 as in the prior art, and the lower surface electrode 14 is formed on the
lower surface of the piezoelectric material 10.
[0018]
FIG. 2 shows the separation groove forming process.
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In this process, the separation groove 20 on the upper surface is provided in the piezoelectric
material 10 in which the electrodes 12 and 14 are formed, and the lower surface separation
groove 22 is provided.
On both the upper surface side and the lower surface side, a plurality of separation grooves 20
and 22 are provided at equal intervals, and the upper surface side separation groove 20 and the
lower surface separation groove 22 are formed to be slightly deviated in the left-right direction.
This is because the cutting of the ultrasonic transducer is performed later between the upper
surface separation groove 20 and the lower surface separation groove 22. Therefore, W shown in
FIG. 2 is an effective surface of the ultrasonic transducer.
[0019]
Here, it is desirable in terms of the structure of the piezoelectric material 10 that the depths of
the separation grooves 20 and 22 be such that the respective electrodes can be reliably
separated electrically and that they be as shallow as possible. That is, if the depth of the groove is
made too deep, the piezoelectric material 10 is structurally weakened.
[0020]
The matching layer forming process and the backing layer forming process are shown in FIG. A
matching layer 16 is provided on the upper surface of the upper surface electrode 12. In the
present embodiment, the sheet-like member is attached to the top electrode 12 with an adhesive,
but the matching layer 16 may be formed, for example, by coating.
[0021]
On the other hand, although the backing layer 18 is also attached to the lower surface electrode
14 using an adhesive in the present embodiment, it may of course be formed using a coating or
the like.
[0022]
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It is preferable to introduce an adhesive or the like into the inside of the separation grooves 20
and 22 in order to improve the mechanical strength.
[0023]
As described above, as shown in FIG. 4, the block-shaped stacked body 30 in which a plurality of
ultrasonic transducers are coupled is manufactured through the respective steps.
[0024]
Then, the separation step is performed.
In this separation step, as shown in FIG. 4, the stack 30 is cut longitudinally and horizontally
along the cut lines 32 and 34.
As described above, the longitudinal cut line 32 is set between the upper surface separation
groove 20 and the lower surface separation groove 22.
[0025]
One ultrasonic transducer 36 cut by the above separation process is shown in FIG.
As shown in the drawing, one side 12 a of the upper surface electrode 12 and one side 14 a of
the lower surface electrode 14 are exposed on the side surface on the A side of the ultrasonic
transducer 36. However, since the upper surface separation groove 20 is provided, the side 12 a
is electrically insulated from the main body of the upper surface electrode 12.
[0026]
Similarly, although the other side 12b of the upper surface electrode 12 and the other side 14b
of the lower surface electrode 14 are exposed also on the side surface on the B side, the other
side 14b is the main body of the lower surface electrode 14 due to the lower surface separation
groove 22. It is electrically isolated.
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[0027]
Therefore, if silver paste as a thermosetting conductive adhesive is introduced to the entire side
surface on the A side, electrical connection can be made only to the electrode 14, and similarly,
When silver paste is introduced to the entire side surface on the B side, electrical connection is
achieved only to the top electrode 12.
Therefore, the labor for connecting the lead wire to the extremely thin side as in the prior art is
eliminated.
[0028]
FIG. 6 shows a first embodiment in which the ultrasonic transducer 36 is disposed in the
ultrasonic probe. The ultrasonic probe shown in FIG. 6 is a body cavity insertion type ultrasonic
probe to be inserted into a blood vessel, and a storage portion 40 is formed at the tip end portion
38 thereof. A groove 42 having a semicircular cross section is formed on the lower surface side
of the storage portion 40, and the signal line 44 passes around the groove 42 to the tip end side
of the tip portion 38. On the other hand, the shield wire 46 is led to the side surface of the
ultrasonic transducer 36 on the B side.
[0029]
FIG. 7 shows a cross section of the tip portion 38 of the ultrasonic probe shown in FIG. In the
state where the ultrasonic transducer 36 is accommodated and disposed in the insulating portion
40, the signal line 44 is led to the right side in the figure and the shield line 46 is led to the left
side in the figure . In this state, when the silver paste 48 is introduced to both sides of the
ultrasonic transducer 36, the silver paste 48 adheres to both sides of the ultrasonic transducer
36. However, since only one of the two electrodes is electrically exposed to the outside by the
two separation grooves described above, the signal line 44 is electrically connected only to the
lower surface electrode 14, and the upper surface electrode 12 is the shield wire 46. Will only be
connected electrically. Therefore, the operation of soldering the both ends of the lead wire to the
electrode and the signal wire as in the prior art is eliminated, and the workability is remarkably
improved. That is, fine positioning of lead wires and the like is unnecessary without using lead
wires.
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[0030]
A second example of the ultrasound probe is shown in FIGS.
[0031]
In FIG. 8, the wiring pattern 52 is formed on the upper surface of the flexible substrate 50 so as
to extend in the lateral direction in the drawing.
An insulating sheet 54 is pasted on the wiring pattern 52 leaving both end portions thereof.
[0032]
In this state, as shown in FIG. 9, the ultrasonic transducer 36 is bonded and arranged on the
flexible substrate 50 by an adhesive or the like. In this case, the signal line 44 is led to the front
side surface of the ultrasonic transducer 36, while the shield line 46 is led to the front side end of
the wiring pattern 52 described above.
[0033]
Then, silver paste is introduced to the side surface of the ultrasonic transducer 36 on the signal
line 44 side in this state, and silver paste is also introduced to the tip of the shield line 46. Of
course, each connection of the signal line 44 and the shield line 46 may be made in advance in
this manner, and the flexible substrate 50 on which the ultrasonic transducer 36 is joined and
disposed as described below is stored in the ultrasonic probe. You may go after arranging.
[0034]
FIG. 10 shows the distal end portion 38 of the ultrasonic probe for body cavity insertion, and the
housing portion 40 is formed as in the first embodiment shown in FIG. In the second
embodiment, the groove 42 for passing the above-described signal line 44 is not provided in the
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storage portion 40, and a flat mounting surface 56 is formed. Then, the flexible substrate 50 on
which the ultrasonic transducer 36 is mounted is bonded to the mounting surface 56 by an
adhesive or the like.
[0035]
Thereafter, as shown in FIG. 11, silver pastes 48a, 48b and 48c are introduced. The silver paste
48 a electrically connects the shield wire 46 and the wiring pattern 52. The shield wire 46 is
electrically connected to the upper surface electrode 12 through the wiring pattern 52 by the
silver paste 48 c.
[0036]
On the other hand, the signal line 44 and the lower surface electrode 14 are electrically
connected by the silver paste 48 b.
[0037]
In this case, both side surfaces of the ultrasonic transducer 36 are electrically insulated by the
insulating sheet 54.
[0038]
According to the second embodiment, it is not necessary to lead the signal line 44 to the opposite
side of the ultrasonic transducer 36, and there is an effect that the manufacture becomes easier.
In addition, in order to apply a high frequency voltage to the lower surface electrode 14 and set
the upper surface electrode 12 as a ground, the first embodiment shown in FIG. 6 and FIG. There
is.
[0039]
In addition, according to the ultrasonic transducer | vibrator 36 shown in FIG. 5, the
accommodation arrangement method to various ultrasonic probes can be considered, and
various accommodation arrangement methods can be employ | adopted besides each Example
mentioned above.
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[0040]
As described above, according to the present invention, it is possible to reliably connect each
signal line to the ultrasonic transducer, and the labor required for manufacturing the ultrasonic
transducer is significantly increased. Has the effect of being able to
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