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DESCRIPTION JPH08340598

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DESCRIPTION JPH08340598
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an
ultrasonic transducer, and more particularly to an ultrasonic transducer which is used for an
ultrasonic sensor or the like and can receive or oscillate ultrasonic waves.
[0002]
2. Description of the Related Art An example of a conventional ultrasonic transducer is shown in
FIG. The ultrasonic vibrator is separated between a diaphragm 1 and a case 1 having a
diaphragm 2 integrally formed on the upper surface, a piezoelectric element 8 bonded to the
inner surface of the diaphragm 2, and the diaphragm 2. And a main anti-vibration material 4
inserted into the case 1. Then, an ultrasonic wave can be oscillated by such an ultrasonic
transducer, and the object can be detected by receiving the reflection of the ultrasonic wave
striking the object.
[0003]
In the ultrasonic transducer, the thickness of the side wall 3 is substantially the same as that of
the diaphragm 2 that receives or oscillates the ultrasonic wave, and the side wall 3 also vibrates
with the vibration of the diaphragm 2. And since the main anti-vibration material 4 is in contact
with the side wall 3, the vibration of the diaphragm 2 can be damped quickly.
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[0004]
Therefore, this ultrasonic transducer has a low reverberation type in which the vibration at the
time of transmission does not become noise at the time of reception because the vibration of the
diaphragm 4 is rapidly attenuated when the oscillation of the ultrasonic wave is stopped. It has
become
[0005]
However, such an ultrasonic transducer is used by being supported by holding the side wall 3 in
a support or the like, and this supporting state greatly affects the vibration characteristics of the
diaphragm 2, There are problems with stability and reliability in this respect.
[0006]
As an example of the ultrasonic transducer which solved such a problem, as shown in FIG. 8, the
thickness of the side wall 3 is made thicker than that of the diaphragm 2, and the rigidity of the
side wall 3 is increased to influence the support condition. Some are less susceptible, more stable
and more reliable.
[0007]
However, in the conventional example shown in FIG. 8 described above, since the side wall 3 is
thick, the rigidity is high and the side wall 3 is difficult to vibrate. Even when 4 is in contact, its
vibration damping effect is small, and it is difficult to shorten the reverberation at the time of
transmission.
[0008]
The present invention has been made to solve the above problems, and its object is to suppress
the vibration of the diaphragm so that the reverberation time is sufficiently short, and further, to
support the side wall, It is an object of the present invention to provide an ultrasonic transducer
that can maintain long-term stability and reliability without changing the vibration state of the
diaphragm even if the support condition changes.
[0009]
In order to solve the above-mentioned problems, the invention according to claim 1 is
characterized in that the case 1 having a substantially conical shape integrally having the
diaphragm 2 on the upper surface and the piezoelectric bonded to the inner surface of the
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diaphragm 2 In the ultrasonic transducer comprising the element 8 and the main vibration
damping material 4 inserted in the case 1 in a state of being separated between the diaphragm 2,
the side wall 3 of the case 1 is made more rigid than the diaphragm 2 At the same time, the
auxiliary vibration isolation material 9 is interposed between the main vibration isolation
material 4 and the diaphragm 2.
[0010]
The side wall 3 of the case 1 can be made more rigid than the diaphragm 2 by using a material of
high rigidity or by forming a thick material.
[0011]
According to the second aspect of the present invention, in the first aspect, the auxiliary vibration
isolation member 9 is integrally interposed on the diaphragm 2 side of the main vibration
isolation member 4, and the auxiliary vibration isolation member 9 is piezoelectrically coupled to
the diaphragm 2. It is characterized in that it is in contact with the outer peripheral portion 5 of
the element 8.
[0012]
The invention according to claim 3 is characterized in that, in the invention according to claim 2,
a slit 6 is provided in the outer peripheral portion 5 of the diaphragm 2, and the auxiliary
vibration insulating material 9 is inserted in the slit 6. ing.
[0013]
In the invention according to claim 4, in the invention according to claim 1, the side wall 3 of the
case 1 is formed in a double structure of an outer wall 3a having a thick outer side and an inner
wall 3b having a thin inner side. It is characterized in that the auxiliary vibration isolation
material 9 is inserted.
[0014]
In the invention according to claim 5, in the invention according to claim 1, the side wall 3 of the
case 1 at the position between the diaphragm 2 and the main vibration damping member 4 is
provided with a cut 7 in the thickness direction. It is characterized in that the auxiliary vibration
isolation material 9 is inserted.
[0015]
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According to the first aspect of the present invention for solving the above problems, since the
rigidity of the side wall 3 is high and the strength is large, the supported state of the side wall 3
does not affect the vibration of the diaphragm 2.
Therefore, this support condition does not adversely affect the vibration performance.
[0016]
In addition, since the auxiliary vibration control member 9 intervenes between the main vibration
control member 4 and the diaphragm 2, the vibration of the vibration plate 2 is well transmitted
to the auxiliary vibration control member 9, so this vibration is used as an auxiliary vibration
control The material 9 and the main vibration-damping material 4 dampen it reliably.
Moreover, since the main vibration-proof material 4 does not directly absorb the vibration of the
diaphragm 2, the vibration absorption does not become excessive.
Therefore, the vibration of the diaphragm 2 is attenuated without adversely affecting the
transmission characteristics and the sensitivity is not impaired, and a short reverberation time is
realized.
[0017]
The side wall 3 of the case 1 has a thin truncated cone shape on the diaphragm 2 side, and the
rigidity of the side wall 3 on the diaphragm 2 side is low.
Then, since the auxiliary vibration isolation member 9 intervenes at least in a portion where the
rigidity is low, the vibration of the diaphragm 2 is easily transmitted to the auxiliary vibration
isolation member 9 and easily damped, so that low reverberation characteristics are easily
realized. ing.
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[0018]
In the second aspect of the invention, since the auxiliary vibration isolation member 9 is in
contact with the diaphragm 2 at the outer peripheral portion 5 of the piezoelectric element 8, the
vibration of the diaphragm 2 is directly transmitted to the auxiliary vibration isolation member 9,
The vibration of the diaphragm 2 can be attenuated by the auxiliary vibration isolation member 9
and the main vibration isolation member 4 integrated.
[0019]
In the third aspect of the present invention, the auxiliary vibration-proof material 9 is inserted
into the slit 6 and directly contacts the diaphragm 2 so that the contact with the diaphragm 2 is
ensured.
For this reason, the vibration of the diaphragm 2 is well transmitted to the auxiliary vibration
isolation member 9, and the vibration of the diaphragm 2 can be attenuated by the main
vibration isolation member 4 integral with the auxiliary vibration isolation member 9.
Further, the diaphragm 2 is easily vibrated by the slits 6.
[0020]
In the invention according to the fourth aspect, since the outer wall 3a is thick and has high
rigidity, the support state of the side wall 3 and the like do not affect the vibration of the
diaphragm 2.
Further, the inner wall 3b is thin and vibrates well with the vibration of the diaphragm 2, and is
transmitted to the auxiliary anti-vibration member 9 and the main anti-vibration member 4 in
direct contact with the inner wall 3b to damp the vibration of the diaphragm 2. Can.
[0021]
In addition, since the main anti-vibration material 4 and the auxiliary anti-vibration material 9 are
not in direct contact with the diaphragm 2, the change in the vibration characteristics of the
diaphragm 2 due to the main anti-vibration material 4 and the auxiliary anti-vibration material 9
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becomes small. There is.
[0022]
In the invention according to claim 5, since the cut 7 in the thickness direction is provided on the
side wall 3 of the case 1 at the position between the diaphragm 2 and the main vibration
damping member 4, the rigidity of this portion is low. The vibration is well damped with the
vibration of the plate 2 and the vibration can be damped by the auxiliary vibration-proof material
9 inserted in the notch 7 and the main vibration-proof material 4.
[0023]
In addition, since the main anti-vibration material 4 and the auxiliary anti-vibration material 9 are
not in direct contact with the diaphragm 2, the change in the vibration characteristics of the
diaphragm 2 due to the main anti-vibration material 4 and the auxiliary anti-vibration material 9
becomes small. There is.
[0024]
Embodiments of the ultrasonic transducer according to the present invention will be specifically
described below with reference to the attached drawings.
[0025]
The ultrasonic transducer according to each of the embodiments described below includes a case
1 having a substantially truncated cone shape integrally having a diaphragm 2 on the upper
surface, a piezoelectric element 8 bonded to the inner surface of the diaphragm 2, and the
diaphragm 2. The main vibration-proof material 4 is inserted into the case 1 in a state of being
separated therebetween.
In particular, the side wall 3 of the case 1 is formed to be more rigid than the diaphragm 2, and
the auxiliary vibration isolator 9 is interposed between the main vibration isolator 4 and the
diaphragm 2.
[0026]
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Further, the side wall 3 of the case 1 of each embodiment has a thin truncated cone shape on the
side of the diaphragm 2, and the rigidity of the side of the side wall 3 on the diaphragm 2 side is
low.
Then, the auxiliary vibration isolation material 9 is interposed at least in the low rigidity portion.
For this reason, the vibration of the diaphragm 2 is easily transmitted to the auxiliary vibration
isolation member 9 and is easily attenuated, so that the low reverberation characteristic is easily
realized.
[0027]
Hereinafter, each example will be described more specifically.
FIG. 1 is a cross-sectional view showing an ultrasonic transducer according to a first embodiment.
[0028]
The side wall 3 of the case 1 is thicker in cross section and higher in rigidity than the diaphragm
2.
A main anti-vibration material 4 is inserted and filled in the case 1 and is in contact with the side
wall 3 and the outer peripheral portion 5 of the diaphragm 2.
In addition, the auxiliary vibration isolation material 9 is integrally formed with the main
vibration isolation material 4, and is brought into contact with the diaphragm 2 at the outer
peripheral portion 5 of the piezoelectric element 8.
[0029]
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When the diaphragm 2 vibrates, the side wall 3 hardly vibrates, so that the main anti-vibration
material 4 can not exhibit a damping effect depending on the contact with the side wall 3.
However, since the auxiliary vibration isolation member 9 is in contact with the outer peripheral
portion 5 of the vibrating plate 2 directly vibrating, a great damping effect can be obtained.
[0030]
However, since the vibration characteristics of the diaphragm 2 largely change due to the rigidity
of the integral main vibration isolator 4 and the auxiliary vibration isolation member 9, the
integral main vibration isolator 4 and the auxiliary vibration isolation are provided so as not to
deteriorate the sensitivity characteristic. The rigidity and shape of the material 9 are set to
conform to the case 1.
[0031]
FIG. 2 is a cross-sectional view showing an ultrasonic transducer according to a second
embodiment.
The cross section of the side wall 3 of the case 1 is thicker than the diaphragm 2 and has high
rigidity.
Further, an auxiliary diaphragm 2a continuous with the inclination of the outer surface of the
side wall 3 is extended on the outer periphery of the diaphragm 2, and the auxiliary diaphragm
2a is formed to be similar to or thinner than the diaphragm 2.
Inside the case 1 is inserted and filled with a main anti-vibration material 4. Further, the auxiliary
vibration-proof material 9 is integrally formed with the main vibration-proof material 4 and is in
contact with the auxiliary diaphragm 2a.
[0032]
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When the diaphragm 2 vibrates, the side wall 3 a hardly vibrates because the rigidity is high, but
the auxiliary diaphragm 2 a vibrates together with the diaphragm 2. Therefore, the auxiliary
vibration-proof material 9 vibrates at the contact portion with the auxiliary diaphragm 2a, and
the vibration of the diaphragm 2 is damped to obtain a great damping effect.
[0033]
3 to 4 are cross-sectional views and a top view showing an ultrasonic transducer according to a
third embodiment, respectively.
[0034]
The side wall 3 of the case 1 is thicker in cross section than the diaphragm 2 and sufficiently
high in rigidity.
A slit 6 is opened in the outer peripheral portion of the diaphragm 2. A main anti-vibration
material 4 is inserted and filled in the case 1. An auxiliary vibration-proof material 9 integrally
formed with the main vibration-proof material 4 is inserted into the slit 6.
[0035]
When the diaphragm 2 vibrates, the side wall 3 hardly vibrates. However, since the auxiliary
vibration-proofing material 9 is inserted into the slit 6 of the diaphragm 2, the vibration of the
diaphragm 2 can be greatly attenuated. The diaphragm 2 is easily vibrated because the slit 6 is
opened, and can vibrate in response to the drive of the piezoelectric element 8. Therefore, the
ultrasonic transducer is high in sensitivity, large in vibration damping effect, and good in
reverberation characteristics.
[0036]
FIG. 5 is a cross-sectional view showing an ultrasonic transducer according to a fourth
embodiment. The side wall 3 of the case 1 has a double structure of an outer wall 3a and an
inner wall 3b by scraping from the bottom side. The outer wall 3a is thicker in cross section than
the diaphragm 2 and the rigidity is higher, and the inner wall 3b is formed to a thickness equal to
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or smaller than that of the diaphragm 2 and the rigidity is smaller. Further, the gap between the
outer wall 3 a and the inner wall 3 b is tapered to a position almost in contact with the
diaphragm 2.
[0037]
The main anti-vibration material 4 is inserted into the inside of the case 1, and the auxiliary antivibration material 9 is inserted and filled into the gap between the outer wall 3a and the inner
wall 3b. The main anti-vibration material 4 is in contact with the inner wall 3b, and the auxiliary
anti-vibration material 9 is in contact with the outer wall 3a and the inner wall 3b.
[0038]
Even if the diaphragm 2 vibrates, the outer wall 3a has high rigidity and hardly vibrates, but the
inner wall 3b vibrates together with the diaphragm 2 because the rigidity is low. Since the main
anti-vibration material 4 and the auxiliary anti-vibration material 9 sandwich the inner wall 3b,
the inner wall 3b vibrates together with the diaphragm 2 to produce a large vibration damping
effect.
[0039]
FIG. 6 is a cross-sectional view showing an ultrasonic transducer according to the fifth
embodiment. A notch 7 in the thickness direction is provided in the side wall 3 of the case 1 at a
position between the diaphragm 2 and the main vibration-damping material 4, and the auxiliary
vibration-proof material 9 is inserted into the notch 7.
[0040]
A notch 7 is provided on the side wall 3 of the case 1 at a position near the diaphragm 2 and
between the diaphragm 2 and the main vibration damping member 4. The main anti-vibration
material 4 is inserted into the inside of the case 1 and the auxiliary anti-vibration material 9 is
inserted and filled into the notch 7.
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[0041]
When the diaphragm 2 vibrates, the side wall 3 hardly vibrates because the rigidity is high, but
the portion provided with the cut 7 has weak rigidity by the cut 7 and vibrates well with the
diaphragm 2. The presence of the auxiliary vibration isolation member 9 at this position where it
vibrates well causes the vibration of the diaphragm 2 to be well transmitted to the auxiliary
vibration isolation member 9 and generates a large damping effect together with the main
vibration isolation member 4.
[0042]
According to the first aspect of the present invention, since the side wall has high rigidity, even if
the supporting condition on the side wall changes, the vibration state of the diaphragm is less
affected. . Therefore, this ultrasonic transducer can always obtain stable transmission
performance regardless of its supporting condition.
[0043]
In addition, by interposing the auxiliary vibration isolation material with the internal main
vibration isolation material, it is possible to quickly damp the vibration of the diaphragm when
transmission is stopped, resulting in an ultrasonic transducer with low reverberation. ing.
Moreover, since the auxiliary vibration isolation material is interposed, the vibration absorption
is excessive and the transmission characteristics are not adversely affected.
[0044]
According to the second aspect of the present invention, the auxiliary vibration damping material
is brought into direct contact with the diaphragm to increase the damping effect, whereby an
ultrasonic transducer with high stability and low reverberation is obtained.
[0045]
According to the third aspect of the present invention, by providing the slit in the diaphragm, the
diaphragm is easily vibrated to compensate for the decrease in the vibration sensitivity due to the
main vibration isolation material, whereby an ultrasonic transducer with high sensitivity is
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obtained.
[0046]
In the invention according to claim 4, low reverberation performance is obtained by dividing the
side wall into a rigid outer wall and a low rigid inner wall, securing vibration stability at the outer
wall, and acting the main anti-vibration material on the inner wall. It is done.
[0047]
In addition, since the main vibration damping material is not in direct contact with the
diaphragm, the change in the vibration characteristics of the diaphragm due to the main
vibration damping material is small, and the design of the ultrasonic transducer with high
sensitivity is easy.
[0048]
In the invention according to claim 5, a notch is made in the side wall to make it easy to vibrate
only the diaphragm vicinity of the side wall, and the portion is brought into contact with the main
anti-vibration material inserted in the notch, a good low reverberation performance Is realized.
[0049]
Further, since the main vibration proofing material and the auxiliary vibration proofing material
are not in direct contact with the diaphragm, the change in the vibration characteristics of the
diaphragm is small, and the design of the ultrasonic transducer with high sensitivity is easy.
[0050]
Brief description of the drawings
[0051]
1 is a cross-sectional view showing a first embodiment of the present invention.
[0052]
2 is a cross-sectional view showing a second embodiment of the same.
[0053]
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3 is a cross-sectional view showing a third embodiment of the same.
[0054]
4 is a top view of the same embodiment.
[0055]
5 is a cross-sectional view showing a fourth embodiment of the same.
[0056]
6 is a cross-sectional view showing a fifth embodiment of the same.
[0057]
7 is a cross-sectional view showing a conventional example.
[0058]
8 is a cross-sectional view showing a conventional example.
[0059]
Explanation of sign
[0060]
1 case 2 diaphragm 3 side wall 4 main anti-vibration material 5 outer peripheral portion 6 slit 7
cut 8 piezoelectric element 9 auxiliary anti-vibration material
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