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DESCRIPTION JPH11299779

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DESCRIPTION JPH11299779
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an
ultrasonic probe used to examine a diagnostic site of a subject using ultrasonic waves, a method
of manufacturing the same, and ultrasonic diagnosis using the ultrasonic probe. In particular, an
ultrasonic probe capable of observing a tomographic image of the inside of a subject with high
resolution and enabling three-dimensional display of an arbitrary position by electronic scanning
with less occurrence of an artifact and a method of manufacturing the same The present
invention relates to an ultrasonic diagnostic apparatus using the ultrasonic probe.
[0002]
2. Description of the Related Art As shown in FIG. 8, in a conventional array type ultrasonic
probe, electrodes 2 and 3 are formed on the upper and lower surfaces of a vibrator 1 made of a
piezoelectric material. The electrodes 2 and 3 are divided into strips in the longitudinal direction
y-y 'so as to scan ultrasonic waves electronically and are arranged in a line. The electrode 2
located on the subject side is connected to the ground, and one or two acoustic matching layers 4
are provided on the upper surface thereof, and an acoustic attenuation layer 5 is provided on the
opposite electrode 3 There is. The patterns 8 of flexible printed boards 6, 7 are respectively
connected to the electrodes 2, 3 by soldering 9 or the like, and are connected to an ultrasonic
diagnostic apparatus as a main body through a connector (not shown). An acoustic lens 10 is
further fixed to the upper surface of the acoustic matching layer 4.
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[0003]
In the ultrasonic probe of the configuration of FIG. 8, when ultrasonic waves are electronically
scanned to obtain a tomographic image, focused ultrasonic waves are formed by a plurality of
elements of the vibrator 1 divided into the strip shape, and A tomographic image is obtained by
scanning while repeating transmission and reception with a beam. However, the focal length L
can be arbitrarily set from near to the vibrator 1 by selecting the number of elements used
appropriately in the long axis direction y-y 'in which a plurality of elements of the vibrator 1 are
arranged. The focal length L by the acoustic lens 10 is constant in the short axis direction x-x
'orthogonal to the above, and a clear tomographic image can be obtained in the range of L1
corresponding to the focal depth, but in other areas There was a problem that the image became
unclear.
[0004]
FIG. 9 is proposed to solve the above-mentioned problems, and in addition to dividing the
vibrator 1 in the major axis direction yy ′, in the minor axis direction xx ′ orthogonal thereto.
It is also divided into blocks in two dimensions in a plane. In this case, since the focal length L
can be arbitrarily set from near to the vibrator 1 in the short axis direction xx ′ without using
the above-mentioned acoustic lens 10, the depth of focus L2 is as shown in FIG. It is possible to
set L2 ≧ L1 with respect to the focal depth L1, and it is expected that a clear image can be
obtained for the entire tomogram. Such an ultrasound probe is published in "1996 IEEE
ULTRASONICS SYMPOSIUM, pp 1523-1526 (1996)".
[0005]
However, as shown in FIG. 9, when the vibrator 1 is divided in the minor axis direction x-x ', the
electrical impedance becomes high, and energy may not be efficiently supplied from the power
supply. FIG. 10 illustrates the situation, and is a graph qualitatively showing the relationship
between the division number n in the minor axis direction x-x 'of the vibrator 1 and the element
impedance Ω. Assuming that the element impedance before dividing the vibrator 1 in the minor
axis direction x−x ′ is Ω0, the element impedance Ω is found to be high in proportion to the
division number n. It is expected that the sensitivity will deteriorate.
[0006]
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Therefore, the single-layer vibrator 1 shown in FIG. 11A is driven by the power supply 11 so that
the element impedance Ω does not increase even if the vibrator 1 is divided in the minor axis
direction xx ′ as described above. For the case, as shown in FIG. 11 (b), it is considered that a
method of laminating the vibrator 1 in a plurality of layers is effective. That is, for example, a
plurality of internal electrodes 12 and 13 are alternately arranged on one side of the opposing
side surfaces at predetermined intervals within the thickness of the vibrator 1, and one electrode
2 and the internal electrode 13 are wired 14 When the other electrode 3 and the internal
electrode 12 are connected by wiring 15 and stacked in three layers, the element impedance Ω
is 1 in the case of the single-layer vibrator 1 shown in FIG. It can be reduced to / 9.
[0007]
FIG. 12 illustrates the situation, and is a graph qualitatively showing the relationship between the
number of element stacking N in which the vibrator 1 is stacked in a plurality of layers and the
element impedance Ω. Assuming that the element impedance of the single-layer vibrator 1 is
Ω1, Ω∝Ω1 / N2 is obtained, and the element impedance Ω is found to be inversely
proportional to the square of the number N of laminated layers. It is possible to suppress an
increase in impedance due to the division of 'by stacking the vibrator 1. Such an ultrasonic probe
is published in "ULTRASONIC IMAGING 17, pp 95-113 (1995)".
[0008]
FIG. 13 is a view showing a schematic structure of the ultrasonic probe proposed as described
above, (a) is a part of a plan view, and (b) is a front view. In FIG. 13 (b), one electrode 2 and the
internal electrode 13 are connected by the wiring 14 and the other electrode 3 and the internal
electrode 12 are connected by the wiring 15 in FIG. Similar to the case, as shown in FIG. 13 (a),
through holes 16 are formed at boundaries where the elements of the individual vibrators 1 are
divided, and the inside thereof is filled with a conductive material, as shown in FIG. 13 (b) As
shown in FIG. 2, the element adjacent to the through hole 16 is connected to the upper electrode
2, the internal electrode 13, the internal electrode 12 ′ and the lower electrode 3 ′ of the
element, and then the major axis is at the position of the through hole 16. It cut | disconnects
into each element by the cutting groove 18 of short-axis direction xx ', while cut | disconnecting
by the cutting groove 17 of direction yy'.
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[0009]
However, in the conventional ultrasonic probe constructed by arranging transducers in two
dimensions as shown in FIG. 13, the width W of each element is, for example, 3.45 mm, a
through hole The diameter D of 16 is 0.2 mm, the depth B is 0.37 mm, the height H is 0.66 mm,
for example, and the lateral width W of each element is relatively large, which is structurally
feasible. In order to obtain a high quality tomogram by making the focal position of the
ultrasonic beam variable from two directions of the direction y-y 'and the short axis direction x-x',
the width W is made as narrow as the depth B There is a need. When the lateral width W of each
element is thus narrowed, the lateral width W becomes substantially equal to the diameter D of
the through hole 16, and the area of the electrodes 2 and 3 is reduced to increase the element
impedance. It will be. Therefore, the sensitivity of the vibrator 1 may be degraded. In addition,
due to variations in the positioning of the internal electrodes 12 and 13 and the formation of the
through holes 16, the characteristics of each element may be uneven. From this, an artifact may
occur in the obtained ultrasonic tomogram.
[0010]
Therefore, the present invention addresses such problems, reduces the occurrence of artifacts,
observes a tomogram inside the subject with high resolution, and enables three-dimensional
display of an arbitrary location by electronic scanning. It is an object of the present invention to
provide an ultrasonic probe, a method of manufacturing the same, and an ultrasonic diagnostic
apparatus using the ultrasonic probe.
[0011]
In order to achieve the above object, in the ultrasonic probe according to the present invention,
external electrodes are provided on the upper and lower surfaces in the thickness direction of the
piezoelectric material, and a plurality of layers are formed at predetermined intervals within the
thickness. Two directions orthogonal to a plurality of vibrator elements having electrodes and
connecting the external electrodes on the upper surface or the lower surface and other internal
electrodes on two different side surfaces so as to form another system wiring Are arranged in a
two-dimensional array transducer, and ultrasonic waves are transmitted and received for each
transducer element.
[0012]
Further, on the lower surface side of the vibrator, an electrode plate having contacts at positions
corresponding to the two-dimensionally arranged vibrator elements is connected.
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[0013]
Further, an acoustic attenuation layer having anisotropic conductivity is fixed to the lower
surface side of the vibrator, and a position corresponding to the two-dimensionally arranged
individual transducer elements is fixed to the lower surface of the acoustic attenuation layer. An
electrode plate having a contact may be connected.
[0014]
Furthermore, an acoustic attenuation layer is fixed to the lower surface side of the vibrator, and
one external electrode and every other internal electrode are connected to one side surface of
each of the two-dimensionally arranged vibrator elements. An electrode plate on which a wire is
formed may be provided, and this electrode plate may be provided in parallel for each row in
which the above-mentioned transducer elements are arranged in one row.
[0015]
Further, according to the method of manufacturing an ultrasonic probe as described above,
external electrodes are disposed on upper and lower surfaces of a vibrator in which a plurality of
internal electrodes are arranged in a transverse manner at predetermined intervals within the
thickness of piezoelectric material. The laminated vibrator is provided to form a laminated
vibrator, and the laminated vibrator is cut into strips with a predetermined width to form a
cutting element, and the external electrodes on both the upper and lower sides are opposed on
the opposite side surfaces along the longitudinal direction of each cutting element And every
other internal electrode so as to form another system of wiring, after which the above-mentioned
cutting elements are aligned and fixed at a predetermined interval, and at a predetermined
interval in a direction orthogonal to the longitudinal direction of those cutting elements By
cutting, two-dimensionally arranged transducer element groups are formed in a plane.
[0016]
Further, an ultrasonic diagnostic apparatus as a related invention comprises a probe for
transmitting and receiving ultrasonic waves to and from an object, an ultrasonic wave of a
predetermined beam waveform transmitted from the probe, and a receiver received by the probe.
An ultrasonic circuit unit that forms a predetermined reception waveform from a wave signal and
further processes the reception signal, a control unit that controls the transmission timing of the
ultrasonic circuit unit and the display timing from the reception signal, an ultrasonic wave An
ultrasonic diagnostic apparatus having a display unit for displaying an image, wherein the
ultrasonic probe in each of the means is used as the probe.
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[0017]
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be
described in detail below with reference to the attached drawings.
FIG. 1 is a schematic configuration view showing an embodiment of an ultrasonic probe
according to the present invention.
This ultrasonic probe is an ultrasonic diagnostic apparatus that examines a diagnostic region of a
subject using ultrasonic waves and actually transmits ultrasonic waves into the subject and
receives reflected waves. , An acoustic matching layer 21 having conductivity, an insulating sheet
22 to which a conductive film is added, an acoustic attenuation layer 23 having conductivity, a
flexible printed board 24, and a base 25.
[0018]
The laminated vibrator 20 is a feature of the present invention, and as shown in FIG. 2, external
electrodes 27 and 28 are provided on upper and lower surfaces in the thickness direction of a
piezoelectric material 26 such as lead zirconate titanate ceramic (PZT). In the thickness of this
piezoelectric material 26, plural layers of internal electrodes 29, 30 are arranged transversely
from one side to the other side at predetermined intervals, for example, laminated in three layers,
and two different from each other The external electrodes 27 and 28 on the upper surface or the
lower surface and the internal electrodes 29 and 30 every other one on the side surface are
connected so as to form another system wiring.
Then, a plurality of laminated vibrators 20 are arrayed in two directions orthogonal to each other
to constitute a two-dimensional arrayed vibrator.
For example, the vibrator element group is two-dimensionally arranged in a plane including the
minor axis direction x-x 'and the major axis direction y-y' shown in FIG.
In FIG. 1, reference numeral 31 denotes a cutting groove in the long axis direction yy 'where the
piezoelectric material 26 is arranged in two dimensions to form a vibrator element group, and
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reference numeral 32 is a short axis direction xx' The cutting groove is shown.
[0019]
That is, in FIG. 2, the insulating film 33 is formed on the end face of one internal electrode 29
disposed within the thickness of the piezoelectric material 26, and the end face on the opposite
side of the other internal electrode 30. Also, an insulating film 34 is formed, and in this state, a
conductive film 35 is formed between the upper external electrode 27 and the end face portion
on one side of the other internal electrode 30, and one internal electrode with the lower external
electrode 28. A conductive film 36 is formed between the end face opposite to the end face 29.
Thus, the wiring of one system connecting the upper external electrode 27, the conductive film
35 and the other internal electrode 30, and the lower external electrode 28, the conductive film
36 and the one internal electrode 29 are connected. System wiring is configured.
As a result, between the upper external electrode 27 and the one internal electrode 29, between
the one internal electrode 29 and the other internal electrode 30, and between the other internal
electrode 30 and the lower external electrode 28, respectively. This is equivalent to the
arrangement of the external electrodes of different polarities, resulting in a laminated vibrator 20
laminated into three layers.
[0020]
According to such a configuration of the laminated vibrator 20, since the internal electrodes 29
and 30 are disposed transversely from one side surface to the other side surface, the dimension
of stopping at a predetermined length as in the prior art The accuracy does not have to be given.
Further, since the external electrodes 27 and 28 and the internal electrodes 29 and 30 are wired
by the insulating films 33 and 34 and the conductive films 35 and 36, no restriction is imposed
by the diameter of the through hole without using the through hole as in the prior art. I will not
receive it.
[0021]
The acoustic matching layer 21 shown in FIG. 1 is for matching the acoustic impedance of the
piezoelectric material 26 with the acoustic impedance of a living body as a subject, and in this
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embodiment, the conductive material is mixed to make it conductive. It is supposed to have.
[0022]
The insulating sheet 22 covers the entire top surface of each of the multilayer vibrators 20
configured as described above, and is made of, for example, polyimide, which has low acoustical
attenuation. In this embodiment, copper is used on the lower surface side. And the like are added.
As a result, the external electrode 27 on the top of each of the laminated vibrators 20 is
electrically connected to the conductive film 37 through the acoustic matching layer 21 having
conductivity, and is connected to the ground by the conductive film 37. There is. In FIG. 1,
reference numeral 38 denotes a resin filled in the cutting grooves 31 and 32. The laminated
vibrator 20 is bonded by the resin 38, and a signal cross between the elements is acoustically.
Talk is reduced.
[0023]
The sound attenuating layer 23 attenuates the ultrasonic waves so that the ultrasonic waves
emitted from the back surface of the respective laminated vibrators 20 do not return to the
laminated vibrators 20 again. In this embodiment, the conductive material is mixed. Thus, it is
considered to have conductivity.
[0024]
Further, the flexible printed board 24 becomes an electrode plate connected to the ultrasonic
diagnostic apparatus main body (not shown) on the lower surface side of each laminated vibrator
20 configured as described above, and is arranged in the above two dimensions For example, on
a multilayer printed circuit board having contacts 39 called BGA (Ball Grid Alley) at positions
corresponding to individual transducer elements, and a connector (not shown) for connecting to
the main body through a cable. It is formed.
As a result, the lower external electrode 28 of each of the laminated vibrators 20 is electrically
connected to the flexible printed board 24 through the acoustic attenuation layer 23 having
conductivity.
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[0025]
Further, the base 25 fixes the whole of each of the laminated vibrators 20 and attenuates the
ultrasonic waves so that the ultrasonic waves emitted from the back surface of the laminated
vibrators 20 do not return to the laminated vibrator 20 again. And is made of a material with
high attenuation of ultrasonic waves. In such a state, transmission and reception of ultrasonic
waves are performed by the laminated vibrator 20 for each of the arranged transducer elements.
Although the number of laminated layers of the laminated vibrator 20 is three in FIG. 1, the
present invention is not limited to this, and may be another laminated number as long as it is an
odd layer. Moreover, in the above, the said sound attenuation layer 23 is not necessarily
required, and can be omitted.
[0026]
In the above configuration, ultrasonic waves are generated from the laminated vibrator 20 by
driving the laminated vibrators 20 via the flexible printed board 24 in response to a signal from
the ultrasonic diagnostic apparatus main body (not shown) to be measured. For example,
ultrasonic waves reflected from the diagnosis site in the subject are received by the respective
laminated transducers 20, and the received signal is processed by the ultrasonic diagnostic
apparatus main body to display an ultrasonic image. At this time, as shown in FIG. 1, a large
number of laminated vibrators 20 having vibrator element groups arranged in a two-dimensional
manner in a plane as well as not only in the long axis direction y-y 'but also in the short axis
direction x-x' By driving while controlling in a predetermined relationship so that the focal range
becomes wide, it is possible to obtain a clear tomogram from the vicinity to the deep part of the
diagnostic site in the subject. In addition, a plurality of B-mode scans in an arbitrary direction are
performed by two-dimensionally electronically scanning the large number of laminated vibrators
20, or a focused beam is scanned in a full field of view or a partial field of view. It is possible to
obtain real-time three-dimensional images.
[0027]
FIG. 3 is a schematic configuration view showing a second embodiment of the ultrasound probe
according to the present invention. In this embodiment, the second acoustic attenuation layer 40
having anisotropic conductivity is fixed to the lower surface side of the acoustic attenuation layer
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23 provided on the lower surface side of each laminated vibrator 20 shown in FIG. The flexible
printed circuit 24 is connected to the lower surface of the damping layer 40. Similar to the sound
attenuation layer 23, the second sound attenuation layer 40 further attenuates the ultrasonic
waves so that the ultrasonic waves emitted from the back surface of the laminated vibrators 20
do not return to the laminated vibrator 20 again. And a material having electrical anisotropy
along with ultrasonic attenuation characteristics. As a result, it is possible to well attenuate the
returned ultrasonic waves between the respective laminated vibrators 20 and the flexible printed
board 24 and, from the ultrasonic diagnostic apparatus main body (not shown) through the
flexible printed board 24. Signals can be transmitted well to the respective laminated vibrators
20. Also in this embodiment, the sound attenuating layer 23 is not necessarily required, and may
be omitted.
[0028]
FIG. 4 is a schematic configuration view showing a third embodiment of the ultrasound probe
according to the present invention. In this embodiment, instead of providing the flexible printed
board 24 shown in FIG. 1, an acoustic attenuation layer 23 is fixed to the lower surface side of
each laminated vibrator 20, and one of the laminated vibrators 20 arranged in two dimensions is
For example, an electrode plate 41 provided with a wiring (conductive film 36) for connecting
the lower external electrode 28 and every other internal electrode 29 is provided on the side
surface, and this electrode plate 41 is used as the laminated vibrator 20 described above. It is
provided in parallel for each row arranged in one row. The electrode plate 41 is configured as a
flexible printed board connected to a conductive film 36 provided on one side surface of the
laminated vibrator 20 shown in FIG. Also in this embodiment, the sound attenuating layer 23 is
not necessarily required, and may be omitted.
[0029]
FIG. 5 is a process diagram for explaining a method of manufacturing the ultrasonic probe
configured as described above. First, as shown in FIG. 5 (a), the upper external electrode 27, the
first piezoelectric material 26a, one internal electrode 29, the second piezoelectric material 26b,
the other internal electrode 30, and the third piezoelectric material 26c And the lower external
electrode 28 are stacked in layers in the upper and lower layers, and in this state, the layers are
integrally sintered. This forms a laminate including three layers of piezoelectric material 26a,
26b, 26c having a certain extent.
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[0030]
Next, as shown in FIG. 5 (b), the material of the laminated vibrator integrally sintered as
described above is cut and separated at a predetermined width W in the minor axis direction xx
′ shown in FIG. A strip-shaped cutting element 42 is formed. Therefore, a plurality of strip-like
cutting elements 42 shown in FIG. 5 (b) are formed from the laminated and integrally sintered
material shown in FIG. 5 (a).
[0031]
Next, with respect to the strip-like cutting element 42 formed as described above, as shown in
FIG. 5C, one of the internal electrodes 29 of one of the opposing side surfaces in the longitudinal
direction of the cutting element 42 is An insulating film 33 having a predetermined width is
formed on the end surface on one side, and an insulating film 34 having a predetermined width
is formed on the end surface on the opposite side of the other internal electrode 30. Therefore,
the end face on one side of the one internal electrode 29 and the end face on the opposite side of
the other internal electrode 30 are respectively insulated.
[0032]
Next, with respect to the cutting element 42 'insulated as described above, as shown in FIG. 5 (d),
the external electrode 27 and the other internal electrodes on the upper side of the side surface
on which the insulating film 33 is formed A conductive film 35 is formed so as to connect the
end surface portion on one side of 30 and, on the side surface on which the other insulating film
34 is formed, the lower external electrode 28 and the opposite end surface portion of one
internal electrode 29 A conductive film 36 is formed to be connected. Thereby, the external
electrodes 27 and 28 on the upper and lower surfaces and the internal electrodes 29 and 30
every other internal electrode 29 and 30 are connected in different systems on opposite side
surfaces along the longitudinal direction of each cutting element 42 '. .
[0033]
Next, as shown in FIG. 5 (e), the cutting elements 42 ′ ′ wired as described above are aligned
at a predetermined interval S by a predetermined number, and the adhesive 43 is filled in the gap
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43 by the interval S. After fixing, the substrate is cut at a predetermined interval so as to have an
element width B in the direction orthogonal to the longitudinal direction of the cutting element
42 ′ ′. Then, after the cutting in the direction orthogonal to the longitudinal direction, the
adhesive 44 is filled and fixed in the same manner as described above in the gap 45 of that
portion. Thereby, as shown in FIG. 1, a vibrator element group in which the laminated vibrators
20 are two-dimensionally arranged in a plane including the minor axis direction x-x 'and the
major axis direction y-y' is formed.
[0034]
Thus, after manufacturing a vibrator element group in which the laminated vibrators 20 are twodimensionally arranged, the acoustic matching layer 21 having conductivity shown in FIG. 1, the
insulating sheet 22 to which the conductive film 37 is added, and the conductivity The process of
forming the sound attenuating layer 23, the flexible printed board 24, and the base 25 is
sequentially performed to finally manufacture an ultrasonic probe. Although the number of
laminated layers of the laminated vibrator 20 is three in FIG. 5, the present invention is not
limited to this, and may be another laminated number as long as it is an odd layer. In the above
description, only the vibrator portion is cut in the minor axis direction xx ′ and the major axis
direction yy ′. However, the acoustic matching layer 21 shown in FIG. Alternatively, the sound
attenuating layer 23 may be adhesively fixed and then cut and divided in two dimensions.
[0035]
FIG. 6 is a block diagram showing an ultrasonic diagnostic apparatus as a related invention of the
above-mentioned ultrasonic probe. The ultrasonic diagnostic apparatus obtains an ultrasonic
image of a diagnostic site in a subject using ultrasonic waves and uses the ultrasonic image for
diagnosis. A probe 50 for transmitting and receiving ultrasonic waves to the subject, and the
probe And an ultrasonic circuit 51 for forming a predetermined reception waveform from the
reception signal received by the probe 50 and further processing the reception signal. The
control unit 52 controls the transmission timing of the sound wave circuit unit 51 and the
display timing from the reception signal, and the display unit 53 displays an ultrasonic image.
The ultrasonic circuit unit 51 is configured to transmit the ultrasonic wave having a
predetermined beam waveform from the probe 50, and the wave receiving phasing unit 54, and
to receive a predetermined wave from the wave received by the probe 50. It comprises a wave
receiving phase adjusting section 55 which forms a waveform, and a signal processing section 56
which takes in the wave receiving signal from the wave receiving phase adjusting section 55 at a
high S / N. As the probe 50, an ultrasonic probe configured as shown in FIG. 1, FIG. 3 or FIG. 4
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described above is used.
[0036]
FIG. 7 is an explanatory view showing a state in which a three-dimensional image is obtained
using the ultrasound probe and the ultrasound diagnostic apparatus according to the present
invention. As shown in FIG. 7A, by selecting an arbitrary element from among the plurality of
laminated transducers 20 constituting the probe 50, a fan-shaped ultrasonic beam is made to the
diagnostic region 57 in the subject. As shown by reference numerals 58a and 58b, scanning is
performed so as to rotate around a certain axis, tomograms of plural directions of the diagnosis
region 57 are obtained, and from this, a three-dimensional image is constructed. Further, as
shown in FIG. 7B, by selecting an arbitrary element among the plurality of laminated vibrators
20, fan-shaped ultrasonic beams are indicated by reference numerals 59a and 59b with respect
to the diagnosis region 57 in the subject. , 59c so as to swing in a pendulum shape, tomograms in
a plurality of directions of the diagnostic region 57 are obtained, and from this, a threedimensional image is constructed.
[0037]
Since the present invention is configured as described above, according to the ultrasonic probe
according to the present invention, the dimensional accuracy of stopping a plurality of internal
electrodes at a predetermined length as in the prior art is high. It is not necessary. In addition,
since the conventional through holes are not used to connect the external electrodes on the
upper surface or the lower surface to the internal electrodes of every other line so as to form
another system wiring, the size restriction due to the diameter of the through holes I do not
receive Therefore, it is possible to eliminate characteristic variations among elements of a
plurality of transducer elements which are stacked in a plurality of layers and arranged in two
directions orthogonal to each other to configure a two-dimensional array transducer. From this, it
is possible to reduce the occurrence of an artifact, observe a tomogram inside the object with
high resolution, and enable three-dimensional display of an arbitrary place by electronic
scanning. Thereby, the quality of the diagnosis by the ultrasound image can be improved more
than before.
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