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DESCRIPTION JPS564291

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DESCRIPTION JPS564291
Specification 1, Name of the Invention Composite Piezoelectric Film and Method for Producing
the Same 1) Composite Piezoelectric Film Body of Polymer Material Dispersed in a Two-Chain
Machine Ferroelectric Powder Dispersed in the Body of a Composite Piezoelectric Powder A
composite piezoelectric film characterized by continuously changing in a thickness direction. 2) A
step of forming a mixed solution comprising a polymer material in which an inorganic
ferroelectric powder is dispersed by centrifugal force, and the inorganic ferroelectric powder
concentration is continuous with respect to the film thickness direction C by the centrifugal
force. And a step of solidifying and forming when a change occurs.
2, the scope of claims
3. Detailed Description of the Invention The present invention relates to a composite piezoelectric
film comprising a polymer material and an inorganic ferroelectric powder and a method of
manufacturing the same, and in particular, it is rich in flexibility, has a large piezoelectric effect,
and has a composite piezoelectric The present invention relates to a film (=, in the thickness
direction of the concentration of the inorganic ferroelectric powder (a composite piezoelectric
film which is continuously changed with respect to two, and a method of manufacturing the
same). Inorganic crystals such as quartz crystal, Rochelle salt, and ceramics such as lead titanate
and titanium zirconate are well known as substances having a piezoelectric effect. Since these
piezoelectric materials are both hard and brittle and difficult to process because they hold large
piezoelectric effects, it is extremely difficult to cover thin-film, large-area piezoelectric materials
or flexible piezoelectric materials. It had been. Furthermore, in the case of an ultrasonic probe for
a living body using a piezoelectric inorganic crystal or ceramic, an impedance-matching layer
formed by compounding an inorganic material fine powder in a polymer matrix, with a large
difference in nursery impedance with the living body. The piezoelectric element and the bonding
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etc. had to be integrated from C2. On the other hand, although uniaxial stretching of amino acid
polymers such as polybenzyl glutamate and organic materials C such as polyvinyl chloride and
polyamide have also been confirmed to retain piezoelectricity, they all have small piezoelectric
effects and most piezoelectric effects. The impedance matching with the living body as an
ultrasonic probe for the living body is good even in EndPage: 1 side, even in the large β-type 9vinyl dianhydride, which is considered to be large, and the elongation piezoelectric constant (ds
+) is 2.5 × 1 o = 9 . The piezoelectric constant (du) of thickness vibration was not less than 3.1
× 10 ′ ′ ′ / N (two). It has also been tried to use a composite piezoelectric film in which
inorganic ferroelectric powder is dispersed as uniformly as possible in a polymer material as a
piezoelectric element for a keyboard, but in particular, pressure is applied by striking! In the case
of Eve, it is necessary to perform complicated processes such as providing a protective layer
separately on the surface of the piezoelectric element (: separately. SUMMARY OF THE
INVENTION In view of the above-mentioned drawbacks, the present invention is easy to form
into a thin film, has a large piezoelectric effect, is flexible enough to have little time-dependent
change, and is an impedance probe with a living body as an ultrasonic probe for living body.
Composite piezoelectric film having good dengue, or piezoelectric device for keyboard (two
composite films having a protective layer integrally formed thereon, ie, the concentration
direction of the inorganic ferroelectric powder) It is an object of the present invention to provide
a composite piezoelectric film and a method of manufacturing the same. Hereinafter, the
composite piezoelectric film of the present invention will be described in detail with reference to
the drawings. FIG. 1 is a cross-sectional view of a composite piezoelectric film according to the
present invention, ↓ '5 JP-A-56-4291 (2) showing a plan view of the composite piezoelectric film
(1) (inorganic ferroelectric powder (2) Is distributed.
FIG. 2 shows the sound pressure impedance in the film thickness direction of the composite
piezoelectric film according to the present invention. In the first embodiment, the inorganic
ferroelectric powder (2) has a film thickness direction Acoustic impedance is also continuous
(divided into two). Therefore, by arranging the tiled molecular material layer (3) side on the living
body side as an ultrasonic probe for living body in FIG. 1, it is possible to form an excellent
piezoelectric element for ultrasonic probe for living body by H. Can. When the polymer material
(3) side is used as a protective layer when it is used for a keyboard (the piezoelectric portion and
the protective layer are integrally formed from two, one can be obtained. When used as a
keyboard, it is preferable to use one having a more rapid change in concentration of the
inorganic ferroelectric powder relative to one in the film thickness direction (that is, one to which
a sufficient centrifugal force is applied). It is needless to say that the degree of change of the
temperature of the inorganic ferroelectric powder can be appropriately adjusted by selecting the
particles of the inorganic ferroelectric powder, the specific gravity, the specific gravity viscosity
of the polymer material, the centrifugal force and the like. Next, the method of the present
invention will be described with reference to FIG. 3 showing an example of a specific apparatus.
One end of the third factor (secondary cylinder 4) is connected to the rotating portion (5). The
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inner surface of the cylinder is sufficient and smooth, and according to the present invention, the
inner surface of the cylinder (4) (two polymer material inorganic ferroelectric mixed solution (6)
is applied to the applicator (7) and coated by centrifugal force It is That is, according to the
method of the present invention, inorganic ferroelectric powders such as PbTi0J and PZT, etc.,
such as polyvinylidene fluoride (hereinafter referred to as PVDF ') and polyvinylidene fluorideethylene trifluoride (hereinafter referred to as PVDF-TrFB), etc. C is dispersed in the polymer
material solution, and this mixed solution is coated in a film-like form by centrifugal force C 2 (':
coating, and the inorganic ferroelectric powder If continuously changes in the film thickness
direction by the centrifugal force. When forming a composite piezoelectric film as shown in FIG.
1 = cross-sectional view from FIG. Next, electrodes are applied to both sides of the film, and
between these front and back electrodes (a high voltage is applied to perform polarization
processing as appropriate). According to the present invention No.-based composite piezoelectric
film and the method for producing the same (for example, specifically, inorganic ferroelectric
powder having a particle diameter of 1.0 μ to 10 μ, sintered at 1150 ° C. and crushed) C
mixed metal dispersed in polymer material dissolved in organic solvent, this mixed solution is
applied on the substrate by centrifugal force 6 (two coated, dried and then detached from the
substrate, then electrodes such as Ag are vacuum-deposited, etc. If both surfaces C; set and apply
a DC electric field of about 100 × v at a temperature below the melting point, a composite
piezoelectric film is formed in which the concentration of the inorganic ferroelectric powder
changes continuously in the film thickness direction. be able to.
Therefore, the mechanical strength of the film can be greatly improved (double improvement can
be achieved by removing the coated film from the substrate before drying and subjecting it to
stretching treatment). Not only that, when using a polar material as the polymer material, the
piezoelectric effect can also be improved. The inorganic ferroelectric powder used in the present
invention may be represented by the general formula (A ′ ′ +) l? ”OB、A’”B”OB、
tB”OB)T! Perovskite-type structures shown can be mentioned, and the amount thereof
can be practically 20 to 90 by weight. EndPage: 2 According to the present invention as
described above, the piezoelectric effect is large, the flexibility is rich, the change with time C is
excellent, and the film thickness direction (: against the concentration of the inorganic
ferroelectric powder is continuously changed C2 composite piezoelectric A membrane body can
be obtained. Therefore, it should be noted that the impedance matching with the living body is
excellent also as an ultrasonic probe for the living body, and adhesion etc. (therefore, it is not
necessary to provide the matching layer). In addition, when used as a piezoelectric element for a
keyboard, the protective film can be formed integrally with C 2, and it can be said that it has
great utility value in practical use. Hereinafter, the present invention will be described in more
detail by way of examples. Example 1 First, 500 g of spherical PZT powder having an average
particle diameter of 5 μm was mixed and dispersed in an amount of 20 wt% of a PVDFdimederforlaamide solution IQ as an inorganic ferroelectric fine powder by means of a hole mill.
This mixed solution is placed on the inner surface of the cylinder fixed to the rotary shaft (=
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arranged, and the rotational speed is gradually changed to C near 5 to 420 rpm, film thickness
direction 1: centrifugal force and specific gravity difference: inorganic ferroelectric powder
Concentration is continuous t! J <= formed a changing composite piezoelectric film. The film was
separated from the inward direction of the film cylinder with a slight amount of
dimethylformamide remaining in the film, biaxially stretched 1.5 times, and then dried under
reduced pressure. Then, after providing an Ag electrode in a vacuum of 3.5 XIO′′torr or less
on both sides of this film, in a thermostat at 120 ° C. for 1.5 hours, 20 (X, 1! A direct current
electric field was applied for 2 hours, the voltage was applied, and the solution was cooled to
room temperature to complete the polarization operation to obtain a composite piezoelectric
film. When the piezoelectric characteristics were measured by two film marks, the piezoelectric
constant dll of elongation was 5, 3 × 10 → + and the piezoelectric constant aSS of thickness
vibration was 8.9 × 10− (IC, c). In the composite piezoelectric film based on the present
embodiment, the film body is sequentially lapped whether the concentration of the C direction
two-axis machine ferroelectric powder in the thickness direction C changes continuously or not,
the film thickness at the time of lapping It was confirmed by measuring the piezoelectricity of the
film body.
Next, as a result of measuring an ultrasonic characteristic (The ultrasonic wave is emitted into
water and the reflection from the 9 acrylic plate in water is observed) using this composite
piezoelectric film, the impedance matching becomes good, and the high sensitivity characteristic
is obtained. An ultrasonic probe having the is obtained. In addition, when used as a piezoelectric
device for a keyboard of a type that applies pressure by impact, C2 also exhibits good
characteristics.
4. Brief description of the drawings FIG. 1 is a cross-sectional view of a composite piezoelectric
film according to the present invention. 1 · · · composite piezoelectric film 2 · · · inorganic
ferroelectric powder 3 · · · polymer material 's 2 Figure of the present invention (the film
thickness direction of the composite piezoelectric film according to the second (curve diagram
showing the acoustic impedance of the two pairs) 6 FIG. 3 is a partially cutaway perspective view
showing an example of an apparatus using the method of the present invention. Attorney Patent
Attorney General Noriyuki Kinki (1 other) Acoustic Ehida '' s EndPage: 3
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