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DESCRIPTION JPS625175

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DESCRIPTION JPS625175
[0001]
Production JL 4 = example "years of groups! The present invention relates to an ultrasonic
transmitting and receiving element used in, for example, an ultrasonic microscope, an ultrasonic
diagnostic apparatus, and the like. Conventionally, an ultrasonic transducer used for an
ultrasonic microscope or the like is an ultrasonic transmitting and receiving element at one end
of an ultrasonic wave propagation medium having a concave or spherical lens portion formed at
the other end so that the ultrasonic wave is focused Is provided. Here, when a sample to be
viewed or an ultrasonic wave propagation medium is scanned lengthwise and crosswise, the
ultrasonic wave generated from the ultrasonic wave transmitting / receiving element is surface
scanned at the focal position of the concave or spherical lens portion of the ultrasonic wave
propagation medium. The acoustic wave at each point is detected by receiving the reflected wave
from the ultrasonic wave by the ultrasonic wave transmitting / receiving element, and displayed
on a screen such as a CRT. An ultrasonic transducer used in an ultrasonic diagnostic apparatus is
an elongated ultrathin (several tens of microns) piezoelectric element which is cut at a width of
several tens of microns in a direction perpendicular to the longitudinal direction to align a large
number of elements In this structure, an electric concave transducer is formed, ultrasonic beams
are focused, and transmission and reception are performed by connecting delay circuits to each
electrode and selecting a delay time in contact with a plurality of electrodes. An ultrasonic
tomographic image is displayed on the CRT screen by sequentially performing electrical scanning
in the longitudinal direction of the element at this transmission / reception stage. However, the
ultrasonic transmitting and receiving element of the conventional ultrasonic microscope
configured in this way requires an ultrasonic wave propagation medium or a mechanical
scanning device for scanning the sample longitudinally and transversely, and the ultrasonic
transmitting and receiving of the ultrasonic diagnostic apparatus In the device, a delay circuit has
to be connected to the electrode, which has a disadvantage that the structure becomes
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complicated. Therefore, the ultrasonic transmitting and receiving element of the conventional
ultrasonic microscope requires an ultrasonic wave propagation medium or a mechanical
scanning device for scanning the sample longitudinally and transversely, and the ultrasonic
diagnostic apparatus In the ultrasonic transmitting and receiving element, since it is necessary to
connect a delay circuit to the electrode, there is a disadvantage that the configuration becomes
complicated. In order to solve the above-mentioned problems, the present invention has drawn
out a plurality of square or rectangular electrodes arranged lengthwise and crosswise on one
surface of the piezoelectric substrate and the square or rectangular electrodes respectively. The
square or rectangular electrode is sequentially operated as a U-shaped electrode on the
transmission side and the reception side, a comb-like electrode, or an arc-shaped electrode. The
present invention uses square or rectangular electrodes in a predetermined shape by combining
terminals drawn from a plurality of square or rectangular electrodes formed on one side or both
sides of a piezoelectric substrate, and transmits an electrical signal to the transmitting side. Gives
a compression wave focused at a given angle.
When the sample is irradiated with this compression wave, it is sequentially reflected at a
predetermined angle, so that the reflection signal is sequentially detected by the receiving
electrode disposed on one side or the other side of the piezoelectric substrate, The acoustic
characteristics of each part of the sample can be detected without moving the piezoelectric
substrate, and even without connecting the delay circuit, electrical scanning is sequentially
performed in the longitudinal direction of the element on the screen of the CRT. Ultrasonic
tomograms can be displayed. 1 is a view for explaining the present invention in detail. The rodlike electrodes 2a, 2b, 2c, 2d,... Are arranged in parallel on the piezoelectric substrate 1, and the
rod-like electrodes 2a, 2b are provided. , 2c, 2d,... Are connected to terminals 3a, 3b, 3c, 3d,.
Further, the electrodes 4a, 4b, 4c, 4d, ... are disposed between the rod-like electrodes 2a, 2b, 2c,
2d, ..., and one end of the electrodes 4a, 4b, 4c, 4d, ... The common electrode 5 is connected, and
the common electrode 5 is grounded. Then, when an electric signal of a predetermined frequency
is supplied from the terminals Ta and Tb in which the terminals 3a and 3b and 3c and 3d are
paired, sound waves are generated from the surface along the boundary between liquid and solid
as shown in FIG. . The angle ? is given by ? = 5 in 1 Vc / df = sin?? + / d. Where d is the
distance between the electrodes 4a, 4b, 4c, 4d,..., Vc is the propagation velocity of the sound
wave in the liquid, and ? is the wavelength of the sound wave at the frequency f. Therefore, the
sound wave generated at a certain combination electrode part on the transmission side is
reflected by the sample, and the reflection wave drives the combination electrode part on the
reception side separated by a predetermined distance determined by the angle ? from the
combination electrode part on the transmission side. For example, signals corresponding to the
state of the sample can be sequentially detected from the output terminal only by sequentially
inputting the electric signals to the input terminals Ta, Tb,. In FIG. 2, the use of the "Lum wave" is
effective below 100 MHz, and the use of the "Rayleigh wave" is effective at higher frequencies. In
the case of this Lamb wave, as shown in FIG. 3 (a), it comprises a common electrode in which
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rod-like electrodes 2a, 2b, 2c,..., Electrodes 4a, 4b,. It can generate | occur | produce by the
structure which arrange | positions a comb-type electrode and provided the dielectric material
protective film 7 in the part which contacts the liquid 6. FIG. In the case of Rayleigh waves, as
shown in FIG. 3 (b), common electrodes in which rod-like electrodes 2a, 2b, 2c,... And electrodes
4a, 4b, 4c,. It can generate by the composition which provided the dielectric material protective
film 7 in the part which contacts the liquid 6, arranges the interdigital electrode which consists of
these, and provides the glass substrate 8 on the opposite side.
As the substrate, ZnO2 or polymeric piezoelectric film is used. FIG. 4 is a perspective view of the
ultrasonic transmitting and receiving element according to the embodiment of the present
invention. A large number of square electrodes 9 ? 0.912.9 ? 1.9 are vertically and horizontally
arranged on one surface of the piezoelectric substrate 1. ? 9 ... 9 ? 2.92 3.9 ? 4 ... 9. ?, 93 ?,
933.934,... Are provided, these square electrodes 9 ?, 9 ?, 2.913.914, ..., 920.9 ?, 2.9 ?,
1.924, ..., 93 Terminal 10 ? lO ? 2.10. ??????????????????
????????? ??????????????????????? ... are connected and
drawn out. Further, these square electrodes 911, 912.191.91, ..., 9 ? 4.9.2, 923.9 ?, ...,
910.932.913.9 ?, ... As shown in FIG. 5 (a), it is formed on one side of the piezoelectric substrate
1, or as shown in FIG. 5 (b), it is provided on both sides of the piezoelectric substrate 1. A
dielectric protection film 11 is provided on these square electrodes, and a glass substrate 12 is
provided under the piezoelectric substrate 1 or the square electrodes of the piezoelectric
substrate 1. For example, as shown in FIG. 6 (a), the ultrasonic transmitting and receiving
element of this embodiment configured as described above uses the electrode 13 with the right
hatching of the square electrode as a rod-like electrode and the electrode 14 with the left
hatching. When sequentially operated as a comb electrode, the structure shown in FIG. 1 is
obtained. Further, as shown in FIG. 6 (b), the electrode 13 'between the electrodes 13 and 13 in
the right diagonal line of the square electrode may be operated as a U-shaped electrode, or the
sixth electrode may be used. As shown in FIG. 6C, an arc-shaped electrode is constituted by the
electrode 15 in which the square electrode is hatched to the right, and the arc-shaped comb
electrode by the electrode 16 which is hatched to the left is the transmitting side. As indicated by
the dotted line, the right-hatched electrode 17 of the square electrode formed on the other
surface of the piezoelectric substrate 1 constitutes an arc-shaped electrode in the opposite
direction to the transmitting side, By forming an arc-shaped comb-shaped electrode in the
opposite direction to the transmitting side by the applied electrode 18 and setting it as the
receiving side, a sound wave narrowed from the transmitting side is generated from the
piezoelectric substrate 1 at the above angle ?. When this sound wave is sent to the sample, the
reflected wave of the sound wave returns to the piezoelectric substrate 1 and can be detected by
the reception side electrode facing the transmission side electrode. Although the electrodes
formed on the piezoelectric substrate are square in the above embodiment, they may be
rectangular.
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As apparent from the above description, the present invention combines a large number of
square or rectangular electrodes arranged longitudinally and laterally on a piezoelectric
substrate into a desired shape to form a rod-shaped electrode, a U-shaped electrode and a combshaped electrode. A sound wave can be generated by a simple mechanism in which the
transmission side electrode and the reception side are disposed on a piezoelectric substrate as an
arc electrode, or a sound wave generated from a transmission side electrode portion without
providing a delay circuit Can be sequentially received by the receiving electrode.
[0002]
Brief description of the drawings
[0003]
1 is a block diagram for explaining the present invention in detail, FIG. 2 is an explanatory view
for generating an acoustic wave according to the configuration of FIG. 1, FIG. 3 is a block
diagram for generating a Rayleigh wave, FIG. 4 is a plan view of the ultrasonic transmitting and
receiving element of the first embodiment of the present invention, FIG. 5 is a perspective view of
the ultrasonic transmitting and receiving element of FIG. 4 of the present invention, and FIG. 6 is
an operation explanatory view of FIG. is there.
1 иии Piezoelectric substrate, 9 ? 9 ? 2.9 ? 1, 9 ?, ..., 9 ? 9 ? 2.9 21. 924 ..., 931.93 ?, 9,
3.934 и и Square electrodes, 102 1 101 10, 4 ..., 1021. 1022. 100. 102. ..., 10 ? 1.101 ?, 1013,
1014 ... terminals. Patent applicant Honda Electronics Co., Ltd. Koji Toda Fig. 1 1
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