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DESCRIPTION JPS4840393

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DESCRIPTION JPS4840393
Patent application CB) Showa q 6 years 9 days or one day i Executive director Iku Takehisado 11
persons 3 patent applicants Hiromu attached documents list (1) Specification 1 //, name of
invention Powerful piezoelectric Position the electrodes so that the induced charge is added in
the part where the diameter of the electrode of the pressure piezoelectric element having the
electrode subjected to polarization processing to the no imorph oscillator metal diaphragm is
near the nodal circle of the piezoelectric bimorph oscillator A strong piezoelectric bimorph
oscillator characterized in that ?
~ J claims
3. Detailed Description of the Invention The present invention relates to a so-called piezoelectric
bimorph vibrator of a type in which a piezoelectric element is adhered to a metal diaphragm used
as an ultrasonic oscillation element, when vibrating the piezoelectric bimorph vibrator using a
high-order mode The present invention relates to an improved structure of a piezoelectric
bimorph oscillator intended to obtain a strong excitation strength. (1) Ferrite vibrators and
piezoelectric Langevin vibrators have been used as conventional ultrasonic oscillation elements,
but these vibrators use stretching vibration in the length direction, and ultrasonic oscillation with
a relatively large size in structure It tends to be used as an element. On the other hand, a
piezoelectric bimorph oscillator formed by bonding a piezoelectric element to a metal diaphragm
has the advantage of using bending vibration wJ and has the advantage of being small and
lightweight, so it is used as an ultrasonic cleaner, a piezoelectric buzzer, etc. It has been done. In
general, the piezoelectric bimorph oscillator has the highest excitation strength when excited in
the fundamental mode (-order vibration), and the larger the diameter of the piezoelectric
element, the stronger the excitation strength can be obtained, and the resonance frequency is It
is known that y is proportional to the thickness of the oscillator and inversely proportional to the
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square of the diameter. Because of this piezoelectric bimorph oscillator / if KHZ. When used as a
high-power ultrasonic transducer like the above frequency, using the fundamental mode has the
disadvantage that the diameter of the transducer becomes too small to obtain a strong ultrasonic
force. It is desirable to use the higher order mode of the bimorph oscillator and to make the
diameter of the transducer as large as possible EndPage: 1, but unlike the case of exciting in the
fundamental mode, if the diameter of the transducer is simply increased, When attached, there is
a drawback that a strong excitation strength can not be obtained and the number of subresonances increases, so that a stable operation can not be obtained. □ In the present invention,
the polarization direction of the type element to obtain the resonance frequency of 15 KH2 or
more by utilizing the higher order mode of the piezoelectric bimorph oscillator is all different
directions in the polarization direction, or the wire connection is changed. The electrodes are
arranged so that the induced charges of the piezoelectric element are added, thereby obtaining a
strong excitation strength and an ultrasonic component when incorporated in the ultrasonic
oscillation device, and The easy to improve p bimorph oscillator and structure are to be
presented. The present invention will be clarified by the following examples. Embodiment (FIG. 1
shows a metal diaphragm (2) having a thickness T1 and a concentric diameter with a metal plate
(1) having an outer diameter Do thickness Ta and a piezoelectric element having an outer
diameter D2 and a thickness T2 (3) is a concentrically mounted so-called peripheral-supported
piezoelectric bimorph oscillator in which the periphery of the chassis is supported by the support
part (II), but the iron circle of Do = / 501111, To- / 21111 as metal plate f /) A plate made of
metal plate f /) metal plate D + // 00101% T + = 6 jiff of metal diaphragm (1) formed by cutting
through a support 211 having a width 2 IEI and a thickness 2111 In the piezoelectric element
(3), a piezoelectric element (3) is bonded to a lead zirconate titanate-based piezoelectric ceramic
bonded with silver electrodes on both sides to form a vibrator. Varying and exciting with the
second order monid of higher order modes When measuring the diameter of the nodal circle, the
dynamical admittance diameter representing the excitation strength and the resonance
frequency.
The results are shown in Table 1. Table 3S, l, tt, J6s: ,,. 60’ttUIO’1. S6’、
/7+1’y3//、an! ;lA、/2’、ll:Ogoj/、
7<txo7tt31/77;〃:27°II’6.7J’17ターj371’bt。 l/、
3’グ2S! Among the results shown in Table 7, FIG. 2 shows the diameter (horizontal axis) of
the piezoelectric element 'f- and the diameter of the moving admittance when the piezoelectric
element (3) having a thickness of 2.71111 is used. The vertical axis of the chart shows the
relationship between the dynamic admittance and the larger the excitation strength. However, in
the actual example shown in (S) in the figure, there is only one point in the figure ((6) in the
figure). The curve is the case in Example 1) and will be described later. The diameter of the
piezoelectric element is the largest in the vicinity of the SOW where the diameter of the
piezoelectric element is larger than the diameter of the joint circle of the vibrator and the ring
about 2ff, and decreases when it becomes larger than the SOW. Dynamic 'admittance diameter
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decreases as the thickness of the piezoelectric element increases. On the other hand, the
maximum output of the piezoelectric bimorph oscillator is known to be proportional to the
volume of the piezoelectric element, and increases as the diameter of the piezoelectric element
increases, which is contrary to the ease of driving. However, in the case of the example, it is clear
that the excitation strength decreases as the diameter of the piezoelectric element increases, and
contradictory to the experimental results in Table 1, this is because the piezoelectric bimorph
oscillator uses the secondary mode In the case of excitation, as shown in FIG. 3, it exhibits the
vibration variation 4 (7) and Q of the viscous oscillator diameter where the vibration node (31 (i)
is present, which produces a node circle at 72 Since the sign of the induced charge is reversed
with this node circle as a boundary, when the diameter of the piezoelectric element exceeds the
node diameter, the induced charge is offset and the force coefficient is reduced. Therefore, when
exciting the piezoelectric bimorph oscillator EndPage: 2 by using the high-order mode, in order
to improve the dynamic admittance diameter, polarization in the thickness direction of the
piezoelectric element in the vicinity of the nodal circle of the piezoelectric bimorph vibrationmotion phase is It may be different directions. That is, in FIG. 4 (I), the metal diaphragm (: l) is an
electrode +? )f? By bonding a piezoelectric element (3) made of a piezoelectric ceramic
having + (ri a) (9a ′) and exciting a lead wire (a piezoelectric bimorph vibrator having a lead
wire / 4), vibration generated by vibration displacement (7) Section (&) (&) Table (9a ') is divided
and provided, and polarization in the thickness direction is near the nodal circle 1 // so that
induced charges are added. It is sufficient to set the directions different from each other as the
boundary and the arrow direction.
Fig. 7 (a) shows the vicinity of the nodal circle of the electrode double-sided co-resonator (divided
at / hv'h, but Fig. 4) has only one side of the electrode and a back mover provided in the
thickness direction The polarization is in the direction of the arrow, as shown in FIG. 1 (c), where
the induced charges are added. ! i'P (J) tl "l '1a Ht;-7-(Ja) and uF 1 fiaf E (3b) and no element
arranged concentrically around the nodal circle (//) (/ δ as a boundary The polarization in the
thickness direction of the disk-like piezoelectric element (3a) and the polarization in the
thickness direction of the annular piezoelectric element (3b) are in the arrow direction, and the
induced charges are added, as shown in FIG. (A), (B) and (B) both have the same effect. Using the
metal diaphragm (2) used in the “Inugai” embodiment (1), the nodal circle of the piezoelectric
bimorph oscillator, that is, the position at which the diameter of this oscillator is 0.412 (in this
case, the position of 1121 n 4) in which the polarization of the thickness direction is different
from that in FIG. 4 (a), the diameter of the electrode ry) +4) is g2 ml, and the diameter of the
piezoelectric element and The thickness of the nodal circle, the dynamic admittance, and the
resonance frequency when excited by using the second mode were measured by changing Da
and T in FIG. 1). The results are shown in Table 2. λ λ surface λ 7 〃 l 10. The curve (6) in the
second flash of '031/761 (the curve (S) is the case in the example above) is the piezoelectric
element when the piezoelectric element having a thickness of 27 QMO is used from the results
shown in Table 2 Is a chart showing the relationship between the diameter of the (horizontal
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axis) and the diameter of the moving admittance (longitudinal axis), and it is apparent from the
figure that the moving admittance Do. This is a result shown in FIG. 2 as a result in the case of
the embodiment (1) (the sum 1〆zfA is clear compared to the 31 and the induced charges are
added in the near sleeve of the nodal circle of the oscillator This is due to the arrangement of the
electrodes, and the division of the electrodes in this way provides an effect of facilitating
excitation. The above-mentioned embodiment (1) is an example in the case of using the
secondary mode, and the same applies to higher modes as well, for example, a peripherally
supported piezoelectric bimorph oscillator having a structure shown in FIG. Is excited using the
third-order mode, and is represented by node (ff) (8) (fa) (za / a) of the vibration generated in the
vibrator by the vibratory displacement (7) shown in FIGS. 5 (a) and (b). (//) (/ δ (ti'b) ("lb") in the
vicinity of the nodal circle (electrode + 9) (9) (ri a) (9 b) is divided and provided, polarization in
the thickness direction is added by induced charge By setting the direction of the arrows as
described above, the same effect as in the case of excitation in the second mode can be obtained.
Here, when the peripherally supported piezoelectric bimorph oscillator is excited using the third
mode, according to the experimental results, the position at which the nodal circle appears is 0. It
is J0 times and 06S times. Fig. 6 shows a peripheral fixed type piezoelectric bimorph oscillator
consisting of a totally bending S motion plate ': l) and a piezoelectric element (3), and the seventh
and VI indicate metal fine plates [uni 1 and The piezoelectric element (3) and 1 (/ ('1' part / 2)
peripheral free type piezoelectric bimorph vibration to the device, the motion r-. These vibrators
are also shown in FIG. Similar results are obtained with blade-supported piezoelectric bimorph
oscillators. In FIG. 6 (peripherally fixed type shown in FIG. 6), it was about 0.2 A-fold and about o,
sg-fold when it was done. In the peripheral free type shown in FIG. 7, it is about 0.39 times and
about 0 g1 times when using the second order mode, and about 026 times when using the third
order mode, twice as O5 times and O times, In the portion near the diameter of the joint circle, as
in FIG. 1 or S, arranging the electrodes so that the induced charges are added results in the same
effect as that of the embodiment (1) from K. . Fig. 5 shows the electrode i? )I? The figure
shows a piezoelectric element (3) made of a piezoelectric ceramic having C9aH9a ′ ′), but even
when the polarization direction in the thickness direction of the piezoelectric element is a fixed
direction, the electrodes · 9) f 9) (9a, 9 () a ()) By changing the connection of the lead wire (71 (7)
taken out, the electrode should be added so that one induced charge is added in the vicinity of
711 (/ δ (// a) (// a, ')) of the nodal circle of vibration. It is self-evident to arrange. As described
above, according to the present invention, when exciting a piezoelectric bimorph oscillator using
a high-order mode, the diameter of the electrode of the piezoelectric element is divided at a
portion near the nodal circle of the bimorph oscillator, and the thickness direction of the
piezoelectric element By arranging the electrodes so that induced charges are added to the
polarization of the electrode or the direction of taking out lead wires from the electrodes, the
diameter of the piezoelectric bimorph oscillator can be made large, and the excitation strength
becomes strong and excitation is easy. That is, it can be used as an ultrasonic oscillation element
7 without losing the characteristics of the piezoelectric bimorph oscillator, and is useful as an
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ultrasonic oscillation element such as an ultrasonic cleaning device.
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a longitudinal sectional view showing the
structure of a peripherally supported piezoelectric bimorph oscillator, and FIG. 2 is a chart
showing the relationship between the diameter of a piezoelectric element and the dynamic
admittance for explaining the present invention. Fig. 3 is a table showing vibration displacement
in the case of exciting a peripherally supported piezoelectric bimorph stationary member in a
high-order mode, and Fig. 4 shows a peripherally supported piezoelectric bimorph vibrator
according to the present invention using a secondary mode FIG. 5 shows three examples in a
longitudinal sectional view showing a structure in the case of exciting, and FIG. 5 is a longitudinal
sectional view showing a structure in the case of exciting a peripherally supported piezoelectric
bimorph oscillator according to the present invention using a third mode. Fig. 7 and Fig. 7 are
longitudinal sectional views showing the structures of the peripheral fixed type 1zt electric
bimorph oscillator and the peripheral free type piezoelectric bimorph oscillator, and Fig. 7 and
Fig. In the case of the polarization taking direction in the thickness direction, Is a longitudinal
sectional view showing an application example of the present invention to change the connection
of the lead wire. Applicant: Sumitomo Specialty Metals Co., Ltd. 13-II 1 Figure 4 End Page: 4
Figure 7 Spontaneous Procedure Correction Written application of wheat Showa 1972 patent
application No. 1491! S No. 4 of the subject specification of the correction of the present
specification cnsi description-column 4 correction content of the present specification) in the
present specification the third purchase line 1 to line 8 "but the piezoelectric pie 4 rutz
oscillator," To correct, however, "Peripheral support part set 9 fuser oscillator wire,". Ha 1
EndPage: 5
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