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DESCRIPTION JPS5685997

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DESCRIPTION JPS5685997
Description 1 Title of Invention
1 Sonic wave probe
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an
ultrasonic probe, and more particularly to an ultrasonic probe suitable for use in ultrasonic flaw
detection, ultrasonic diagnostic equipment and the like, which can reduce unnecessary lateral
motion components. The ultrasonic probe is provided with @ and 悸 on both sides of a
piezoelectric vibrator such as PZT. By applying an electric signal to this electrode, an ultrasonic
wave is generated from the piezoelectric vibrator and emitted to the inspection section 1. Then,
the pressure reflected by the test medium is received by the pressure sensor 1, and this is
converted into an electric signal, for example, for inspection and diagnosis in the human body.
Similarly, when inspecting a medium with a large surface area, a plurality of piezoelectric
vibrators having electrodes formed on both sides are arranged on a strip on a so-called base such
as a damper (retainer), etc. An array type super-tracking probe formed by forming a coating layer
is used. FIG. 1 is an explanatory view of the array type ultrasonic probe, wherein FIG. 1 (a) is a
perspective view and FIG. 1 is a perspective view of each piezoelectric transducer. Reference
numeral 1 denotes a damper (or holding stand) for damping free vibration, and a plurality of
piezoelectric vibrators 2 having electrodes 5a and 5b formed on both sides are formed in a strip
shape on the holding stand. A coating 1 has a function of integrally coating the piezoelectric
vibrator 2 and the base 1 with an adhesive such as epoxy resin and firmly fixing each
piezoelectric vibration EndPage: 1 child to the base. Such an array-type ultrasound probe
electronically switches each piezoelectric imaging element to scan the examination medium to
obtain a secondary image of the examination medium. By the way, in the array type ultrasonic
probe, each pressure transducer vibrates in the thickness direction in the direction of thickness t
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and also vibrates laterally in the direction of width W. And although this thickness vibration is
utilized as an ultrasonic probe, when the ratio of W and t approaches 1, the vibration frequency
of an unnecessary horizontal direction will point to the vibration frequency of the thickness
direction. This situation is shown by the admittance characteristic as shown in FIG. In FIG. 2, the
vertical axis represents the admittance IYIX horizontal @ frequency, and fr and fa are resonances
of @ motion in the thickness direction, antiresonance frequency fr /, and resonance of lateral
force direction vibration and antiresonance frequency, respectively. is there. In such an arraytype ultrasound probe, when one of the piezoelectric imaging transducers is electrically excited,
the above-mentioned two vertical and horizontal vibrations are generated, and an unnecessary
transverse vibration component is an epoxy resin. Or the like, or propagates on the surface of the
coating layer 4 and is transmitted to the adjacent piezoelectric vibrator. For this reason, the
adjacent piezoelectric vibrator which is not electrically excited will vibrate.
As a result, the ultrasonic waves are not emitted even from the piezoelectric vibrator which
should not be excited, in other words, the sound field of the ultrasonic waves is significantly
disturbed, which is a great obstacle in ultrasonic diagnosis and the like. Accordingly, an object of
the present invention is to provide an ultrasonic probe suitable for use in ultrasonic flaw
detection, ultrasonic diagnosis and the like by reducing unnecessary transverse vibration
components. Hereinafter, the present invention will be described in detail with reference to the
drawings. As described above, the transverse vibration component is propagated to the adjacent
piezoelectric vibrator in the coating layer or via the surface thereof to significantly disturb the
sound field. Therefore, if the coating layer is formed of a material having a large attenuation of
<11 in the propagation of the transverse vibration component, the influence of the transverse
vibration component can be reduced or eliminated. Materials having large attenuation of the
above-mentioned transverse vibration component include granular tungsten, aluminum, copper,
lead, tin and other metals, or granular oxides of these metals, or porcelain, as an adhesive
material to be a cover material such as epoxy resin. Carbon, cork and other nonmetallic particles
at least 1. Materials made by mixing FIi @ are effective. Then, if this material is integrally
attached to the upper surface of each piezoelectric vibrator and base as shown in FIG. 1, the
attenuation effect of the ultrasonic wave which is a lateral imaging motion component is
generated, and adjacent due to unnecessary lateral vibration Unwanted dynamics of the oscillator
are significantly reduced. Further, as a method of forming this coating layer, as shown in FIG. 3,
the above-mentioned material is uniformly filled so that no air gap remains between the
piezoelectric vibrators. In FIG. 2, 11 is a damper, 12 is a piezoelectric imaging element, 13a and
15b are electrodes, and 14 is a coating layer. As described above, if the filler is uniformly filled so
that the void does not remain, it is possible to compensate for the decrease in the adhesive force
due to mixing the above-mentioned substance into the cover material such as the epoxy resin.
Can be firmly fixed to the damper. Father, it is possible to adjust the amount of attenuation by
adjusting the particle size (size of particles) of the substance mixed in the cover material
according to the frequency component of the lateral vibration. As described above, according to
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the present invention, materials such as metals, nonmetals, and whole area oxides are mixed into
the adhesive material which is the cover material to reduce the transverse vibration component,
so that it is suitable for ultrasonic flaw detection and ultrasonic diagnosis with high accuracy.
Can provide a suitable ultrasonic probe. In addition, the decrease in # adhesion of a single
material caused by mixing the above-mentioned substances can be compensated by the fact that
the cover material is applied so that no air gap is left between the pressure transducer elements.
The valley pressure slider can be firmly fixed to the surface. Furthermore, by adjusting the
particle size of the material, the amount of damping of the 'b + * vibration can be adjusted.
4. Brief description of the drawings Fig. 1 is an explanatory view 'of the ultrasonic probe, and Fig.
1 (()) shows 1.11 · · · · · · · (damper (holding portion), 2.12 · · · · · · piezoelectric vibrator , 3a, 3b,
13a, 13b... Electrode, 4.14 nearing layer EndPage: 2C 6-9n Kawanami-EndPage:3
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