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DESCRIPTION JPS5741100

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DESCRIPTION JPS5741100
Description 1, title of the invention
Ultrasound probe
3. Detailed Description of the Invention The present invention relates in particular to an
ultrasonic probe using a polymeric piezoelectric sheet. In recent years, diagnostic devices using
the ultrasonic pulse reflection method are rapidly spreading. Although a probe composed of a
piezoelectric element is used in this ultrasonic diagnostic apparatus, there are a mechanical type
and an electronic type as a scanning method of the probe, and in recent years, the development
of the electronic scanning method is particularly remarkable. It is well known that, as a probe
used in the electronic scanning method, a play in which ceramic piezoelectric elements such as
lead titanate and lead titanium zirconate are multi-divided is conventionally used. This is because,
as shown in FIG. 2, a small piece of piezoelectric element divided into-(5a), (5b), (5c). It has a
configuration arranged at intervals. Another way to configure such an array is #! As shown in Fig.
1, a method of dividing only at least one electrode of the piezoelectric element into multiple parts
can be considered, which is simpler in the process, but in the case of the ceramic piezoelectric
element, the attenuation of ultrasonic waves in the element is small. For example, when the
element MtS corresponding to the electrode (6b) is excited, its vibration propagates to the
adjacent element V1B to cause so-called crosstalk. Generally, when the piezoelectric element is
electrically driven, not only vibration in the thickness direction but also vibration in the lateral
direction are generated, so when the piezoelectric element is integrated as shown in FIG. Since
the element parts are coupled to each other by lateral vibration, the required thickness variation
EndPage: 1 motion mode is significantly disturbed. In order to prevent these adverse effects, it is
necessary to completely divide the piezoelectric element as shown in FIG. 2, but this processing
requires a high fllll && and is extremely time-consuming. The noise is reflected on the side wall
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of the element to generate noise sound waves. A polymeric piezoelectric film represented by
polyvinylidene fluoride has recently attracted attention as a device for a medical probe because
its acoustic impedance is close to that of a living body. The present inventor noted that the
attenuation of ultrasonic waves in a polymeric piezoelectric film is much greater than that in a
ceramic piezoelectric element, and that the piezoelectricity in the surface direction can be made
different depending on the direction. In the case of a molecular piezoelectric film, the present
invention was achieved as a result of conducting an experiment under the assumption that the
elements do not necessarily have to be divided as shown in FIG. In the present invention, an array
which is less likely to generate crosstalk and a reflection liquid is formed using a uniaxially
stretched polymer piezoelectric material.
Since the piezoelectricity of the ceramic piezoelectric body such as PZT is substantially uniform
in the piezoelectric direction in the plane direction, the vibration wave generated at one point is
uniformly transmitted, but is obtained from the polymer film pressed by = 1411 The
piezoelectric constant d514-a = in the stretching direction has a size ten to several tens times
larger than the piezoelectric constant d32 in the perpendicular direction, and the piezoelectric
constant in the thickness direction is dAM is a value close to half of d31 to 51. Therefore, if the
transverse vibration of each element constituting the play is a vibration wave based on d31, it
has a strength similar to the thickness vibration wave based on d33, and the effect is extremely
large, but the vibration wave based on d52 Since the strength of is extremely small compared to
the thickness vibration wave, it is preferable that the transverse vibration of each element is as
small as possible affected by d51 and is mainly generated by d52. Therefore, it is preferable that
the dividing direction of the one-dimensional array is perpendicular to the extending direction of
the uniaxially stretched polymer piezoelectric material, but it is preferable that the dividing line is
always required if the surface of the arrayed probe is a curved surface or the like. It is not
parallel at all, nor is the division direction uniquely defined. However, even in these cases, it is
necessary that all of the dividing directions intersect the stretching direction at an angle of 45 ░
or more and 135 ░ or less. The invention will now be illustrated with reference to the drawings.
In FIG. 1, (1) is a backing material of metal to rubber or plastic, and a uniaxially stretched
polymeric piezoelectric sheet (2) is adhered thereon by an adhesive or the like. At least one of the
electrodes ffl (3) of the polymer piezoelectric film is in the direction perpendicular to the film
stretching direction (arrow) as shown by (3a) (3b) (3C). Are divided in a direction that matches
the direction of the arrow) to form an array. (4) is a common counter electrode, which need not
be divided. As a method of forming the divided electrodes, vapor deposition or sputtering is
performed using a mask plate having a predetermined pattern, or the electrodes are provided
once on the entire surface and then the predetermined pattern is formed by etching or cutting.
Furthermore, there is a method of printing the coating 1 in a predetermined pattern, and the like.
FIG. 2 shows a weir in which a uniaxially stretched piezoelectric polymer sheet element (5)
having double-sided Kw and poles (3, 3) (4) is applied onto a backing material (1), such as a
cutter The cutting tool is used to divide the element in the direction perpendicular to the drawn
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l1dl (arrow) (the cutting rod is divided into two in the direction of the arrow), and the small
element (5a) (5b) (5C). и и и Composed etc.
In this figure, small pieces of stacked piezoelectric elements (5a, 5b, 5C)... Etc. are just completely
divided, but this division is such The division may not be complete, for example, each unit
element may be divided only at the upper part, the lower part may be continuous, or the parting
line may be embedded in the backing material. The ultrasonic probe of the present invention
exemplified above has a portion where each unit water particle (in FIG. 1, each divided electrode
(5a) (: b)... The unit element) is extremely less affected by the adjacent elements, so that a single
wave with less noise is emitted, so that an ultrasonic image with a very high resolution can be
obtained.
4. Brief Description of the Drawings Figures 1 and 2 are perspective views showing an example
of the probe of the present invention. In the reference numerals used in the drawings, ('l')
ииииииииииииииииииииииииииииииииииииииииииииии Piezoelectric body (3) 0... Electrode ? EndPage: 2 (4) иииииииииии Electrode (5)
ииииииииииии A piezoelectric element. Associate Agent Katsuya Hiroshi Tsukaki Matsumoto Osamu 71
Fig. 1 Fig. 2 End Page: ?
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