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This translation is machine-generated. It cannot be guaranteed that it is intelligible, accurate,
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The present invention relates to the improvement of a / f immorph piezoelectric device having a
distributor. The luer piezoelectric element is formed by laminating and joining a pair of
piezoelectric shell elements, and it is known that a deflection voltage is applied to each of the
piezoelectric seran elements and the element is bent in the longitudinal direction. Piezoelectric
ceramic, element element wire made of polycrystalline material with high dielectric constant, it is
said that the above-mentioned material having zero polarization that exhibits polarized
piezoelectric characteristics) by the characteristics of applied voltage is said to have a
polarization direction, For example, when a thin and long piezoelectric ceramic element that
exhibits unique mechanical characteristics when it is applied is bonded to a substrate such as
metal and a voltage in the same direction as the polarization direction is applied to the
piezoelectric ceramic element, the piezoelectric ceramic The element will shrink in the
longitudinal direction. At this time, since the substrate changes in any way, the bonded
piezoelectric ceramic element eventually bends with the substrate. The method of increasing the
effect of this curve is to connect two piezoelectric ceramic elements or elements and apply a
voltage to each element, and this voltage becomes the polarization direction of one element and
the polarization direction of the other element. The reverse is to be done. A so-called gus, chi, and
gull effect is achieved in which a pair of elements coupled in this way, ie, a bimorph piezoelectric
element, is bent as much as a single piezoelectric ceramic element. The above-mentioned curve
can be inverted by inverting the polarity of the applied voltage. Applications of such bimorph
pressure devices include those requiring large bi-directional deflection, such as a saddle-tailed
recorder (VTR). In the VTR, the information on the video tube is contained in the track of the
tube, and for the best reproduction of the information contained in that track, the video is
centered on the track being read out and displayed. The bimorph piezoelectric element is used
for positioning, that is, alignment of the video head and the tube tiger. FIG. 1 is a perspective
view showing a schematic configuration of a conventional Baymorph piezoelectric element used
for such an application. A piezoelectric ceramic element a formed by attaching electrodes 1.2 to
both raw surfaces, and an amphibian element. A piezoelectric two-mic device having electrodes 4
° 1 attached to its surface is laminated via an adhesive. The piezoelectric ceramic element,
element element 0 #, is coupled with their polarization directions aligned, that is, in parallel. The
bimorph piezoelectric element wire thus coupled is fixed at one end thereof to the lower right
side of the electrode 5 in the scanning drum of the VTR. In addition, the other end of the abovementioned bimorph piezoelectric element of the video head company is fixed to the left side of
the upper surface of the electrode 1 or the left side of the lower surface of the electrode 5.
Then, the electrodes 1.5 and the electrodes 2 and 4 have the same polarity, respectively, and a
power supply line is connected to each of the electrodes 1, 2 and 4.5, and a predetermined
deflection is applied to the piezoelectric ceramic elements 3 and 6 By applying a voltage, the
video head will be properly positioned relative to the tiger. In any case, as the deflection voltage,
a triangular wave, a square wave, a sawtooth wave or the like which is an AC signal of a
frequency over a wide band is used. When such a deflection voltage is applied to the bimorph
pressure element, the element responds to the deflection voltage and at the same time causes
deflection different from the deflection voltage to generate unnecessary vibration. For example,
when a sawtooth wave as shown in FIG. 2 (a) is applied to the 4 emorph piezoelectric element,
this element is deflected according to the sawtooth wave as shown in FIG. 2 (b) and generates
unnecessary vibration. Do. In addition, in the case of a bimorph piezoelectric element having a
length of 24 [■], a width of 7 [kaku] and a thickness of 0.2 (0) and a bimorph piezoelectric
element in which two elements are combined, the frequency of this unnecessary vibration is
About 400 (us) ・ It is preferable to remove or damp such unnecessary vibration as much as
possible. As a method of removing or attenuating unnecessary vibration of the above-mentioned
bisulf piezoelectric device, a chimorph rubber device is used as a chit rubber・ / F It is tried to
limit cine oscillation by holding dead. However, when held by the dead rubber pad in this
manner, the range in which the bimorph piezoelectric element can be deflected is limited, and the
dynamic deflection range by the bimorph piezoelectric element is limited, although the deflection
voltage is limited. By eliminating and damping the vibration of the Baymorph piezoelectric
element itself corresponding to the above, by limiting the range of deflection, it was made
difficult to be a faithful response tube. On the other hand, as a method of removing unnecessary
vibration without limiting the deflection range of the bimorph piezoelectric element, it is known
to use an anti-oscillator by adding an auxiliary vibrator to a vibrating object. This means that if
the weight of the sub-oscillator is the ml spring constant if the object M vibrates unnecessarily at
a frequency of W (by the spring constant K of the structure supporting it), the sub-oscillator
satisfies the relationship of Wo 111 115 Is added, the unnecessary vibration of the object M is
eliminated. In the past, in order to add the above-mentioned damper (sub-oscillator) to a bimorph
piezoelectric element, an adhesive was used to directly attach the piezoelectric ceramic (to be
attached directly to the electrode of the sensor). There has been a problem that the damper falls
off due to the peeling off of the adhesive due to the weight or vibration of the body or the peeling
off of the piezoelectric ceramic element from the electrode.
The present invention has been made in consideration of the above circumstances, and its
purpose is to make it possible to eliminate or reduce unnecessary vibration without limiting the
range that can be deflected, and to use a special circuit for its drive circuit. It is an object of the
present invention to provide an inexpensive and responsive / 櫂 -immorph piezoelectric element
without the need for Another object of the present invention is to provide a bimorph piezoelectric
element which can strengthen the junction between the allocation vibrator and the body of the
Baymorph piezoelectric element and improve the mechanical strength. In the present invention,
which will be described in detail according to the present invention, a plurality of piezoelectric
ceramic elements in which an allocation plate for suppressing unnecessary vibration of a
bimorph piezoelectric element is formed of a single elastic plate and its fixing portion is the
above element main body. It is intended to be held in Therefore, needless to say, unnecessary
vibration can be eliminated or reduced without limitation to the deflection Ht, and the following
effects can be obtained. That is, since the fixing portion of the elastic plate is held by a plurality
of piezoelectric ceramic elements and elements, the elastic plate and the bimorph piezoelectric
element main body can be firmly connected, and the elastic plate is / (imolar piezoelectric
Problems such as detachment from the element body can be avoided. Furthermore, the
mechanical strength can be increased from the above configuration. Hereinafter, details 1m1 'of
the present invention will be described with reference to the illustrated embodiment. FIG. 3 is a
perspective view showing a schematic configuration of a bimorph piezoelectric element
according to an embodiment of the present invention, FIG. 4 is a perspective view showing an
expanded element of the above embodiment, and FIG. 40 are piezoelectric ceramic elements in
which electrodes go and tto are respectively deposited on both raw surfaces. A distributor 10
consisting of a single elastic plate is inserted between the piezoelectric ceramic and the element
10.40, and a part of the damper 7o is clamped and bonded by the piezoelectric ceramic elements
10.40. It has become. By the way, the piezoelectric ceramic element 1o is made of PZT-based
piezoelectric seran material and has a length of 23 [謔], a width of 7 [鰭], and a thickness of 0.2
[厚 み]. . The piezoelectric ceramic element 40 is made of a PZT-based piezoelectric ceramic
material, like the element 10, and has a length of 29 [29], a width of 7 [關], and a thickness of 0.2
[■]. ing. The distributor 10 is formed of a resilient plate, for example, a bronze plate of 0.1 (fi)
thickness. Specifically, as shown in a developed view in FIG. 5, the plate-like fixing portion 11 is
formed of an elastic spring 72 for obtaining a desired spring constant and a tip mass 13 of the
spring 12.
The shape of the fixed portion 11 is length 24 [■], width 7 [■], shape of the spring 72 is length
10 (W), width 3 (fly, shape of the tip mass 13 is length 5 Each of [形成] and width 20 [そ れ ぞ れ
] is formed. In the thus configured nine pi-rua piezoelectric element, unnecessary vibration
generated when a desired deflection voltage is applied to the element is caused by the action of
the elastic body spring r2 and the tip mass 11 of the damper 10) Because unnecessary vibration
is extremely small and good response characteristics can be obtained. 0 For example, a sawtooth
wave (frequency 60 Hi) as shown in FIG. 6 (&) is applied as a deflection voltage 9 places,
bimorph piezoelectric cable The child O response characteristics were substantially similar to the
sawtooth wave as shown in FIG. As apparent from this result, it can be seen that unnecessary
vibration is significantly reduced by using the allocation rOt. There has been no inconvenience
such as the limitation of the deflection range as in the case of using the conventional de, de lover
/ 譬, and ト. Thus, according to the present invention, unnecessary vibration can be eliminated or
reduced without limiting the deflection range, and the response characteristics to deflection
voltage can be greatly improved. Moreover, since the fixing portion 11, the elastic body spring
12 and the tip mass r3 forming the damper 10 are integrally formed, and the fixing portion 71 is
held by the piezoelectric ceramic element Jt 1.40, the vibration control is performed. There is no
inconvenience such as detachment of the vessel 10 from the bimorph piezoelectric element main
body, and further, there is an effect that the mechanical strength can be increased from the
above configuration. Since unnecessary vibration can be eliminated or reduced only by using the
damper 10 consisting of a single elastic plate, there is no need to add a special circuit to the
deflection drive circuit, and the configuration is simplified and cost is reduced. You can get rid of
it. In addition, the PI (a luer piezoelectric element configured as described above also has an
advantage of being able to reduce the hysteresis in an ultra low frequency region and one drive
response characteristic generated at the time of DC driving). In the embodiment described above,
a phosphor bronze plate is used as the elastic plate forming the damper 10, but the elastic spring
12 of the damper r0, the tip mass 1j, etc. In the embodiment, the cantilever support system is
considered as the one for the VTR in accordance with the specification. However, it is a matter of
course that the invention is not limited to the cantilever support system. Furthermore, not only
the VTR but also the use as a deflection element of an apparatus to which an optical system such
as a video disk is applied is possible. In addition, various modifications can be made without
departing from the scope of the present invention.
Brief description of the drawings
FIG. 1 is a perspective view showing a schematic configuration of a conventional bimorph
piezoelectric element, FIGS. 2 (a) and 2 (b) are figures of rounding explaining the operation of the
element, and FIG. 3 relates to an embodiment of the present invention. FIG. 4 is a perspective
view showing a schematic configuration of a bimorph piezoelectric element, FIG. 4 is an exploded
perspective view showing the element of the above-mentioned embodiment, and FIG. 5 is a
crushed view showing the operation of the above-mentioned embodiment.
10.40 · · · Piezoelectric ceramic element, 20 ° 36, 50, 66-· · · · · · · · · · · · · · · · · · · · · · fixed part, 12 ·
· · elastic body spring · r · · · Tip mass. Applicant agent Patent attorney Suzue Takehiko Figure 1
Figure 2
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description, jps5815283
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