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DESCRIPTION JPS6351983

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DESCRIPTION JPS6351983
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the
equalization of the vibration distribution of a plate-like piezoelectric (electrostrictive) vibrator in
which the vibration in the thickness direction is utilized. (Prior art and its problems) As an
apparatus utilizing vibration in the thickness direction of a plate-like piezoelectric vibrator, there
is, for example, an ultrasonic cleaning apparatus. This device is, for example, a plate-like
piezoelectric vibrator (1) in which electrode metal (la) (lb) is provided on the entire surface as
shown in FIG. 1 (a) and (b). ), That is, a cleaning tank (2) having a width which is wider than the
thickness direction and at the same time the vibrator ill having a length sufficiently longer than
the resonant wavelength in the thickness direction is bonded to the tank bottom (2a); ) Is
connected to the excitation line (3a) (3b) from one end of the electrode metal film (la) (lb), and
the resonator (1) is connected to the resonance frequency (for example, I And an oscillator (4) for
supplying a high frequency power for excitation that coincides with Then, as is well known, the
vibration in the thickness direction of the vibrator (1) is transmitted to the cleaning water (5) in
the cleaning tank (2) to clean the parts and the like immersed in the tank. However, in such a
washing apparatus, the sound pressure partial pressure in the vibration spreading direction, that
is, in the length direction of the vibrator surface is generally apparent from the viewpoint of
[water wiping] in the washing tank. (La) The distance decreases from the connection of the
excitation lines (3a) and (3b) in the (lb) plane, and this tendency becomes stronger as the size of
the diaphragm increases as the size of the cleaning tank increases. Therefore, the occurrence of
uneven cleaning can not be avoided, which leads to a reduction in the performance of the
cleaning apparatus. Fig. 2 ta + is the result of an experiment conducted to specifically show the
above, and as shown in Fig. 2 (excitation is made at the central portion in the width direction of
one end of the electrode metal film (la) (lb) plane as in bl. A commonly used vibrator (1) with
lines (3a) and (3b), 136 dragons in length, 40 dragons in width and 2 mm in thickness, with its
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resonant frequency (I MHz) in the thickness direction The distribution of the vibration amplitude
(vibration displacement) in the thickness direction is measured using a laser vibration
distribution measuring device in the vibration spreading direction, that is, in the longitudinal
direction of the vibrator (11 length directions), by applying the matching high frequency power.
As this result shows, the vibration displacement is the largest near the connection of the excited
8 wires (3a, 3b), and becomes smaller as the distance from the connection becomes longer It was
confirmed that no change was found in the experiments on the adhered ones. Accordingly, in
order to improve the deterioration of the cleaning performance due to the uneven cleaning, it is
essential to make the distribution of the vibration amplitudes uniform.
(Object of the Invention) The present invention has been made for the purpose of correcting the
nonuniformity of the distribution of the vibration amplitude in the plate-like piezoelectric
vibrator as described above, and the details will be described next with reference to the drawings.
(Means for Solving the Problems) According to the present invention, as in the above-mentioned
conventional method, vibration can be compensated so that the reduced vibration amplitudes can
be mutually compensated without exciting only at one point of the electrode metal film surface. It
has been clarified as a result of experiments that the distribution of vibration amplitude can be
made substantially uniform by providing excitation lines at a plurality of points distributed in the
spreading direction and performing excitation, for example, as shown in FIG. It is implemented by
the structures described below by a) to (e +). Fig. 3 example of fatO is the charge t! ii metal il! The
excitation lines (3a) and (3b) are connected to the 2 (la) (lb) plane respectively, high frequency
power is given to them with the same polarity by the oscillator (4), and excitation is performed at
two points at both ends It is something like that. The same figure tbl shows excitation lines (3a)
and (3b) connected to N points including both ends, and a total of three places in the center
where the vibration amplitude is smaller than those at both ends in the figure respectively In the
example of (C) of the figure, one excitation line (3b) is connected to only one end in the figure (T),
and the excitation lines of the other plural tubes are used as a common excitation line. The
excitation is performed according to (3a), and this example is advantageous for a vibrator that is
used with one surface adhered to the bottom of a cleaning tank or the like. Further, in the figure
(dl is an example in which excitation is performed at one or a plurality of places (one point of the
middle point in the figure) of one end and the middle point. The same figure (elO example is
longer in the length direction of the vibrator (1), and furthermore, the connection portions (5a)
and (5b) with lower resistance than the electrode metal film (la) (lb) excite the excitation lines
(3a) (3b) ) Is connected to the face of the electrode metal membrane (la) (lb). Then, one set of
excitation lines (3a) and (3b) performs an action equivalent to excitation at a plurality of points,
and when the length in the vibration spreading direction, ie, the vibrator length is relatively short
If the structure of FIG. 3 (a) in which excitation is performed at two points at the left and right
ends is taken (as the length of the vibrator becomes longer, one or a plurality of cylinders of
excitation points are provided in the middle c) Take the structure of (dl (e). (Operation and Effect
of the Present Invention) As described above, for example, if excitation is performed at the left
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and right ends of the vibrator, the vibration in the thickness direction of the vibrator spreading in
the right direction by the excitation of the left end shown in FIG. The portion where the
amplitude of the vibration in the thickness direction generated by the simultaneous excitation at
the right end overlaps with the portion where the amplitude is reduced.
Therefore, the distribution of vibration displacement in the longitudinal direction of the vibrator
is greatly improved and almost uniform as compared with the conventional one in which
excitation is performed only at one end. Fig. 4 fa) fbl is the result of measurement of the
distribution of vibrational displacement in the thickness direction in the case of excitation at two
left and right points using the same vibrator as that used in the experiment of FIG. As apparent
from this, it is understood that the vibrator is substantially uniform over almost the entire length
of the vibrator, and from this it is understood that the washing unevenness is smaller than that in
the prior art. Further, as the length of the vibration in the vibration spreading direction becomes
longer, the vibration displacement of the central portion becomes smaller and the distribution of
the vibration displacement becomes uneven. In this case, the distribution of vibration
displacement can be made uniform, for example, by adopting a method of vibrating not only at
the left and right ends shown in FIG. 3 (bl but also at the central portion. Therefore, even if the
cleaning tank is large and the diaphragm is large, uneven cleaning can be reduced as compared
with the prior art. In the above, the present invention has been described for a rectangular platelike piezoelectric vibrator. However, even in the case of a disk-shaped piezoelectric vibrator using
vibration in the thickness direction, the distribution of vibration displacement in the direction of
vibration spread, ie, in the radial direction becomes uneven as the diameter thereof increases.
Therefore, for example, as shown in FIG. 5, the nonuniform distribution of vibration displacement
can be improved by exciting not only at the central portion but also at a plurality of points
around it, and the present invention applies various devices to which ultrasonic vibration is
applied: It can contribute to the performance improvement of 3.
[0002]
Brief description of the drawings
[0003]
1 (a) (bl is a cross-sectional side view and a bottom view of the ultrasonic cleaning apparatus, and
FIG. 2 fal is a distribution diagram of vibration displacement in a conventional vibrator and a
vibrator used for the measurement thereof Explanatory diagrams, FIGS. 3 (a) to 3 show an
embodiment of the present invention, FIG. 4 is a distribution diagram of vibration displacement
of the vibrator according to the present invention, and FIG. 5 is a disk-like piezoelectric vibrator
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according to the present invention. FIG.
(11 ... oscillator, (la) (lb) ... electrode metal film, (2) ... cleaning tank, (2a) ... tank bottom, (3a) (3b)
... excitation line (4) ... Oscillator, (5a) (5b) ... Connection part of excitation line.
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