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DESCRIPTION JPS51150991

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DESCRIPTION JPS51150991
April 19, 1959, Patent Office Secretary Saito Hajime I, title of invention '' 1 1 3 inventor, Tokyo
笹 hVEM 蚕 2-chome 23 i 17 4> Seki Jakken Ushi j nai Kanaishi Co., Ltd. In-house name and
name λ λ 4, Patent applicant address 23-23, Miyasaka 2-chome, Setagaya-ku, Tokyo [Phase]
Japan Patent Office ■ JP-A-51-150910 Published Japan. (1976) 12.24. Japanese Patent
Application No. fO,-';' t17 J '= f [phase] Application date Showa, (197t) l, / /' Examination request
(all six pages) Office internal serial number specification 1, Title of the Invention 1, Title of the
Invention Piezoelectric Vibration Device
Piezoelectric vibration device 2, the number of inventions recited in the claims----3
3. Detailed Description of the Invention The present invention relates to a piezoelectric vibration
device which transmits a longitudinal wave and can be used as an oscillation device, a resonator,
a filter, a delay line, etc. which is particularly suitable for high frequencies and bands. . Among
various devices that perform stable high frequency oscillation, a piezoelectric vibrator is
mentioned as a device that is particularly excellent in stability and convenient to use. When the
piezoelectric vibrator oscillates or resonates at a high frequency of the MHz band or more, socalled thickness vibration in which the frequency f is determined by the size of the thickness 1t
of the piezoelectric vibrator has been used conventionally. In this case, the frequency f is f = n(where t is the speed of wave propagation and n is a natural number), and the thickness t must
be reduced accordingly as the frequency becomes higher. If the limit of the thickness t of the
piezoelectric vibrator excited by this thickness vibration is expressed in frequency, the field of
fundamental wave vibration where the thickness t is a half wavelength, that is, n = 1 (2) EndPage:
1 frequency, the frequency is The limit is about 25 MHz, and so-called over tossic oscillation in
which a half wave number of waves are in the thickness direction is used at frequencies higher
than that, and in this case, the limit of about 9 as the value of n is used. If it is more than that, it
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becomes difficult to take a stand with the circuit side due to the problem of the capacity ratio
etc., and it becomes impossible to put it to practical use. As described above, since the thickness
vibration has a limit in the high frequency band, a surface acoustic wave has recently been
attracting attention as a device to break it. The surface acoustic wave is a piezoelectric vibration
device generated by disposing a so-called interdigital electrode on the surface of the piezoelectric
plate 1 as shown in FIG. 1 and applying an INf field, and its frequency f is Since the distance is
equal to the wavelength of the surface wave at 1, it is f-one, where V is the same as V described
above. Assuming that the gap between the adjacent electrodes is equal to the width of the
electrode, the radius of 壱 is l) = τ. In the case of a piezoelectric vibrator of quartz crystal or
lithium lithium 2-noate as a piezoelectric substance, the dimensions of the width are 8 to 97 at a
frequency of 100 MHz and 100100 O ′ ′ e 0.8 to 0.9 P, which is very small. At present, since
it is determined that manufacturing with mass + 'J) t) lid material technology is being carried out,
it is possible to manufacture a product of about 100100 O by inserting [. However, because of
the 1] -one relationship, as the frequency is increased, the processing technology does not
require a very high level. Further, since the N pole width and the electrode gap width directly
relate to the frequency, even when adjusting the frequency to a desired value, a more advanced
photoetching technology is required.
On the other hand, the longitudinal wave piezoelectric vibrator as shown in FIG. 2 causes
resonance in which even the long side of the piezoelectric plate is a half wavelength, and the limit
value of the frequency is several hundreds kH2 ′ ′: It has been known. Although this
longitudinal wave piezoelectric vibrator is noted to be suitable for high frequency vibration,
although it is elastic vibration and transmission is the longest wave with the highest speed, it is
still due to surface acoustic waves as described above. It is dangerous to reach the frequency
band (3). The inventor of the present invention, please use the surface acoustic wave as a result
of repeated research on the piezoelectric vibration device 1 used in the high frequency band to
determine the drawbacks of the prior art as described in (2) (477 Without using the longitudinal
wave with a large frequency constant, if we can extend the distance between the electrode and
the electrode: 5 'and the adjacent electrode to l' + 3 @ more than that at the surface electrode of
the surface acoustic wave, 1 , A high-frequency wave that can be used without using a single
processing technique, and using conventional surface acoustic wave piezoelectric vibrators, '1. It
has been found that it can be extended to the market frequency band above the band, and the
present invention has been made based on this finding. The present invention relates to a
longitudinal wave generating piezoelectric vibration device in which a pair of electrodes are
disposed opposite to both main surfaces of a piezoelectric plate, and at least one of the electrodes
is a split electrode in which longitudinal wave propagation is divided in a direction. When the
divided electrodes are viewed only on the divided electrodes facing the amphibian blood, the
effective opposing force (the width of the di and the gap between the momentary contact (the
gap between the negative electrodes? a piezoelectric vibration device, wherein the width and the
gap and the sum thereof are set to be substantially equal to an integral multiple of one
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wavelength; A piezoelectric vibration device characterized in that the shortest distance between
both electrodes in the direction and the end face of the piezoelectric plate is set approximately
equal to an integral multiple of a half wavelength, and a longitudinal wave transmitting portion
electrode and a longitudinal wave receiving! The present invention is applied to a piezoelectric
vibration device characterized in that it is configured on both main surfaces of a piezoelectric
body independently as an electrode. The piezoelectric plate used in the present invention is a socalled piezoelectric body such as quartz, lithium di-offate, lithium which is Tasital, lithium gallate,
and a piezoelectric t5 mix as a substance, and has a plate shape. Further, the two main surfaces
indicate the widest and opposite surfaces of the piezoelectric plate. Hereinafter, the present
invention will be described in detail with reference to the drawings. FIG. 3 shows an embodiment
of the present invention, showing only the main part of the invention. As shown in (a) and (b) of
the figure, a pair of comb-like divided electrodes 2.3 is formed opposite to both main surfaces of
the piezoelectric plate l. This divisional electrode 2.3 is formed in the same manner as in the
examples described later, but using, for example, a vacuum evaporation EndPage: 2 deposition
technique and the present disclosure technique.
If an alternating voltage is applied to each of the pair of divided electrodes 2.3, the effective
counter electrode width C and the gap d between adjacent same-polarity electrodes are set equal,
so the wavelength input of the aforementioned alternating voltage is 几 = 2c. When = c-)-d, the
fundamental longitudinal wave propagates as an elastic wave in the direction perpendicular to
the divided electrodes 2.3 as indicated by the arrows in FIG. (However, due to crystal and
anisotropy, if the energy of the phase and energy of the longitudinal wave shift with some angle
from the direction of the energy transfer in the phase, the arrow mentioned above is divided
electrode in such a case It is not necessarily perpendicular to 2.3. Figure (c) is a diagram showing
the operation of this longitudinal wave. In order to obtain the nth-order A ′ ′-Vaulti oscillation,
nl−c + d may be satisfied. Also, among the toothed split electrodes of the comb, each split
electrode is connected. Contributing base electrodes are not essential to the present invention,
and need only be electrically connected. The base electrodeposition may be opposed on the
upper and lower surfaces of the main surface, and the capacitive base electrodes may be shifted
so as not to be opposed to each other. The dimension of the effective counter electrode width C
of the divided electrodes of the piezoelectric vibration device configured in this way is correctly
doubled by the same resonance frequency f as in the case of the surface acoustic wave described
above. become. Although the number of teeth of the toothed split electrode 2.3 of the comb
shown in FIG. 3 is four, when the number of teeth is only one, as the resonance frequency
becomes higher, the effective counter electrode width C In order to eliminate such an adverse
effect, it is necessary to reduce the number of teeth of the split electrode in order to eliminate
such an adverse effect, because the in-the-resonance λ at resonance increases by reducing the
size of C and reducing the size of C. There should be provided as many as possible to keep it
below a certain impedance. Thus, the piezoelectric vibration device of the present invention
shown in the present embodiment is less in processing accuracy than the surface acoustic wave,
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and based on that, it is possible to use up to a higher frequency band (7). FIG. 4 shows another
embodiment of the present invention, which is a lateral cross-sectional view of a piezoelectric
vibration device shown in FIG. 3 in which the toothed split electrodes 3 of the comb of the
vibration device are changed to full surface electrodes 3 '. is there. In this case, the front
electrode 3 'applies only to the part facing from the split electrode 2 through the piezoelectric
plate 1 with respect to generation of longitudinal wave energy, ie, only to the effective counter
electrode width C, and the split electrode 2 is adjacent It does not contribute in the gap d
between the electrodes (in this case, naturally the same polarity). However, in the fabrication
process of the electrode, although the entire electrode is only on one side, it is made easier as
shown in FIG.
FIG. 5 shows another embodiment of the present invention, in which the same polarity between
the adjacent same-polarity electrodes d of the circular divided electrodes 2.3 of the comb of the
piezoelectric vibration device shown in FIG. FIG. 6 is a perspective view of a piezoelectric
vibration device in which a tooth-like divided electrode 2 'and 3' of a comb to which an
alternating voltage of 5 V is applied is formed. And (a) and (0) in the same figure are in relation
to each other (8). The characteristic of the present embodiment lies in that the vibration
coincidence can be increased as well as lowering the impedance at resonance. FIG. 6 shows
another embodiment of the present invention, in which a plurality of rectangular electrodes (27,
2: ', 2π,..., 2 islands and 31') are provided on both main surfaces of the piezoelectric plate l. 3:
shows a piezoelectric vibration device in which half of the electrode width of each of the three,
three, three, three, four, and so on is made to face each other continuously, and (a) of FIG. Is its
cross-sectional view. In this embodiment, when voltages + and-are applied to the electrodes 2: ′
′ and 3; respectively, so-called series electrodes (1J, “generally, the distance between the main
surfaces of the piezoelectric plate, That is, when the thickness of the piezoelectric plate is
reduced, the inductance tends to decrease. The crotch feature in this embodiment is useful for
preventing such a drop in incisus. FIG. 7 shows another embodiment of the present invention and
shows a piezoelectric vibration device which can be used for a resonator, wherein (a) EndPage: 3
of the llij diagram is a perspective view, and (b) is a cross sectional view thereof. is there. In the
figure, the toothed split electrodes 246 and 3 of the comb 4 formed on the piezoelectric plate are
the same as in the case of the piezoelectric vibration device shown in FIG. Since the shortest
distance g to the end face of the piezoelectric plate 1 is set equal to the j number of half-wave
length of the wavelength entry half (7), the transmitted longitudinal wave is shown by (0) in the
figure. As described above, the light is reflected at the end faces 4 and 5 of the piezoelectric plate
l, and then forms a resonant system as a whole. Therefore, the piezoelectric vibration device of
the embodiment of the present invention can be a resonator. FIGS. 8.9, 046 and 11 show still
another embodiment of the present invention, showing a piezoelectric vibration device which can
be used as a delay line, a filter and an oscillation device for receiving an electrode and a
longitudinal wave Although both of the electrodes can be used as the piezoelectric vibration
device shown in FIGS. 3.4.5 and 6 as an embodiment of the present invention, the piezoelectric
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vibration device shown in FIG. 3 as a representative can be used. It is illustrated. For example,
when used as a late death line, as shown in FIG. 9, the distance l1il! The propagation of the wave
that L propagates in the direction indicated by the arrow corresponds to the distance, and in the
case of delay n'sCD is the end face of the piezoelectric plate in order to obtain both
characteristics of the delay line For example, spurious signals due to reflections at 4 and 5 must
be suppressed.
The slurry signal is formed by providing an absorption control on both end surfaces of the
piezoelectric plate, or forming a non-reflection end by tilting the end surfaces 4 and 5 as shown
in FIG. I will come. Note that the transmission path is a straight line (not j, for example, as shown
in FIG. 10, a desired number of reflections may be made to make the delay time longer. When it
is used as a filter or an oscillation device, there is a need to reduce the energy loss as much as
possible if the longitudinal wave is transmitted. For example, as shown in FIG. Longitudinal wave
(11) transmission reduces energy loss by 6 dB by providing output signals from two receiving
electrodes R / l / l disposed on both sides of. As described above, the piezoelectric vibration
device 11 using the longitudinal wave high frequency excitation method according to the present
invention can be handled on the one hand in the same manner as the one by the surface acoustic
wave, and on the other hand There is no need to place them in alternation, and further,
considering that the velocity of the longitudinal wave is twice that of the surface wave, the
electrode width is expanded three times at the same frequency as compared with that by the
surface wave. Since it is possible to break down 100100O, which was the limit of the high
frequency band of rice, if the processing technology of the electrode does not require so high
degree of processing or if it is performed with processing accuracy in the surface wave
piezoelectric vibration device, It is huge in value industrially.
4. Brief description of the drawings Fig. 11 is a piezoelectric vibration device using a surface
acoustic wave according to the prior art, Fig. 2 is a longitudinal wave excitation piezoelectric
vibration device according to the prior art, Fig. 3.4.5.6.7.8 FIGS. 9.10 and 11 show an
embodiment of the piezoelectric vibration device of the present invention. (12)09100.
-Piezoelectric plates 2.2 ", 27, Z ':,--2: 2: and 3.3", 31 ", 3;" ... 3; "-...-Split electrodes c----One
effective opposite -Width of electrode (1- ...-distance between adjacent adjacent same polarity
electrodes @----... Longitudinal wave method electrode section-one----Longitudinal wave receiving
electrode (14) EndPage: 4 Eighth IOR Figure 9 Figure 10 DR Figure 11 EndPage: 6 Warning:
Page Discontinuity
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