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DESCRIPTION JPS56161799

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DESCRIPTION JPS56161799
Description 1, title of the invention
Ultrasound probe
3. Detailed Description of the Invention The present invention relates to an ultrasonic probe for
use in an ultrasonic diagnostic apparatus, which enables strip-like micro-oscillators to be
arranged on a curved or curved surface with high performance and ease. The purpose is to In
recent years, along with the widespread use of ultrasonic diagnostic apparatuses, the usage
thereof is also diversified, and based on the results of clinical experiments thereof, ultrasonic
waves b1 ml.11 by a new ultrasonic beam scanning method. j'Jfl! 1-Ll-AV-e * JM- ? in 1?4 4 End
Page 1 As a result, a strip-like micro-oscillator as in the conventional structure of an ultrasonic
probe which controls transmission and reception of sound waves (A ultrasonic diagnostic
apparatus using these ultrasonic probes includes a linear electronic scanning ultrasonic
diagnostic apparatus, a fan-shaped electronic scanning ultrasonic diagnostic apparatus, etc.) It
has also appeared that these micro-oscillators are arranged on a curve or a curved surface and
used. Conventionally, in the case where micro-oscillators are arranged on such a curve or curved
surface, a structure as shown in FIG. 1 is employed. In the figure, the piezoelectric body is
polished to a predetermined curvature, or if the piezoelectric body is a piezoelectric ceramic, it is
deformed to a predetermined curvature and sintered to form one or several rectangular
piezoelectric plates 100, this piezoelectric material As shown in the drawing, a plurality of striplike electrodes 1o1 are deposited or coated on the upper surface of the plate 100, and lead wires
102 for receiving electric signals are attached to the electrodes 101, respectively. . On the other
hand, an electrode 103 is attached to the entire surface of the lower surface of the piezoelectric
plate 1oo. This electrode 103 is made of silicone rubber or the like for all purposes of protecting
the piezoelectric body and electrically insulating between the piezoelectric body and the acoustic
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wave receiver. The protective film 104 as the material is adhered with a predetermined curvature
and thickness. Although not shown in the drawings, in the case of the above-described structure,
in general, the vibration is quickly converged to the surface from which the lead wire 102 is
taken out (and the mechanical strength of the piezoelectric plate is increased). For the purpose, a
damper made of a material obtained by mixing tungsten powder with ferrite rubber or epoxy
resin is adhered. The probe having the above-described structure has the following
disadvantages. That is, (1) In order to give a curvature to a piezoelectric plate, it is necessary to
use special jigs and tools that increase the number of manufacturing processes compared to the
case of a flat piezoelectric plate, such as grinding or deforming to a curved surface and sintering.
Problems such as reduction of stress occur, resulting in an increase in cost ? (The method of
forming the small vibrators is called so-called electrode division type in which only the electrodes
are cut to form a plurality of vibrators 0) Method, acoustic leaks occur between the transducers,
anomalous side ropes are generated in the emitted sound beam, and the theory of ultrasonic vino
such as electron focusing and deflection can be performed according to theory. It causes harmful
effects such as
(3) The vibration mode of the vibrator is the thickness longitudinal vibration, and the
electromechanical coupling coefficient kl is usually less than about 0.6 and never large. As a
result, the most important sensitivity and frequency band in the performance of the probe The
characteristics are degraded. However, as described above, when the damper is attached to the
upper surface electrode, the frequency band characteristic is improved but the sensitivity is
extremely reduced. The second and third terms among the above mentioned intermittence points
are not directly related to whether the shape of the array type ultrasound probe is a flat surface
or a curved surface, and are generated by the so-called transducer structure itself Problem. As a
method of solving the problems of the second and third terms, there is a structure shown in FIG.
This forgery is the one previously proposed by the present applicants (Japanese Patent
Application No. 61-128472), and its feature is that the piezoelectric plate is composed of: c = /
7% rWihr) erAk5 (Wl ^ l-kW / By cutting it into an independent vibrator 200 by cutting it into a
?6 О 4 ml, it is possible to vibrate in a vibration mode related to a predetermined W / T. When
a lead titanate-lead zirconate binary ceramic such as pz'r (registered trademark) or a lead
titanate-lead zirconate-magnesium lead niobate ceramic such as PCM (registered trademark) is
used as a piezoelectric plate When W / T is 06, the electromechanical coupling coefficient ? is o,
65 to 0.7, which is extremely high compared to kt ? ? :: 0.5 in FIG. 1 described above.
Electrodes 201 and lead wires 203 are attached to the upper surface of the vibrator 200, and a
common electrode 202 is attached to the lower surface. Further, the single-layer or two-layer
acoustic matching layer 204 is added to the common electrode 202, and the acoustic matching
layer 204 is provided for the purpose of efficiently transmitting the acoustic wave to the acoustic
wave receiver. Specifically, various methods have already been proposed with regard to the
acoustic impedance of the piezoelectric vibrator 200 and the acoustic impedance of the acoustic
wave irradiated body 1-Lf of the acoustic wave irradiated object-the Veterinary Prisoner Oz Sada
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with regard to the Sue-wave matching layer material and EndPage: For example, E, K, a paper by
Sittig IEEE Tran '5 actionson' 5onicsand ULtrasonicgvol, 14A4L! 167 (1967) for various
piezoelectric materials and matching layer materials: A method of evaluating the performance as
a probe using G, abbreviated) and differential phase (abbreviated as D, P), and determining a
combination of a desirable piezoelectric material and a matching layer material is shown. In this
case, 1. Q is a measure of the electro-mechanical conversion efficiency, the larger the value, the
better the efficiency or sensitivity.
Also, P is a number relating to the distortion of the signal converted by the probe, and the
smaller the change in the value of nP with respect to the frequency change, the smaller the
distortion of the signal. As a result of investigating the combination of various materials
according to the method proposed by 5ittia, in the case of a matching layer and a piezoelectric
material, in the case of a two-layer matching layer structure, a piezoelectric material: a twocomponent piezoelectric ceramic such as PZT. Flat second matching layer using a material of 2.6
░ to 9.5 times the acoustic impedance of a ternary piezoelectric ceramic side body such as PCM:
The acoustic impedance is 1.6 of the sound 4 impedance of the acoustic wave receiver. It is
considered that a flat plate using a material which is ~ 2.7 times is preferable, and as a specific
example, in the case of water or an equivalent substance such as a living body as a sound wave
receiving body, a piezoelectric body: PCM-6 ceramic plate first M composite The combination of
layer; fused quartz plate second matching layer: epoxy plate-is shown. Of course, other
combinations are also shown. For example, similar results can be obtained even if other kinds of
piezoelectric ceramics other than PZT, PCM and 1J are used as the piezoelectric material, and
fused silica as the matching layer material, Other than the combination of epoxy board,
combination of heavy flint glass, 7 lint glass, crown glass, arsenic sulfur glass, etc. as the first
matching layer, and epoxy, acrylic, polystyrene or other synthetic resin as the second gloss layer.
Is shown to be good. In the case of the structure of FIG. 2 based on Japanese Patent Application
No. 61-128472, a generally used damper is not used. As described above, in the probe structure
shown in FIG. 2, the height of the probe is high due to the fact that 4 is very large, the sound
wave matching layer is provided, and the damper is not used. The sensitivity and the bandwidth
are improved, and the third term of the above-mentioned problems is improved. Further, by
completely cutting the piezoelectric body, the second term is also improved. When applying the
probe having the above-mentioned structure to an arrayed ultrasonic probe having a curved
surface shape, various glasses are used for the first matching layer as shown in the specific
example ifC. Therefore, the curved surface processing of this matching layer requires the same
consideration as that of the piezoelectric body, and there is also a problem in the manufacturing
method that the piezoelectric of the curved surface and the first matching layer of the curved
surface have to be adhered. The problems of the first term become more complicated. The
present invention pays attention to the fact that synthetic resins such as epoxy and acrylic which
are said to be suitable for the material of the second matching layer shown in the abovementioned specific example are flexible, and the structure of FIG. A cutting depth as a vibrator
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based on forming an acoustic matching layer, without a damper, and shaping the ratio W / T of
the piezoelectric body to the maximum or near the maximum electromechanical coupling
coefficient. These hard materials are cut up to the piezoelectric body and the first matching layer,
and the above-described flexible second matching layer material has a structure in which the
respective piezoelectric vibrators and the first matching layer are connected. .
As a result, it has become possible to attach the arrayed ultrasound probe along the curved
surface. The probe structure of the present invention will be described in more detail below. FIG.
3 shows the structure of an embodiment of the present invention, and FIG. 3 (8) is a crosssectional view in the transducer arrangement direction, and FIG. 3) is a cross section in the
direction orthogonal to the transducer arrangement direction. FIG. 3 (C) shows the element
support when the micro-oscillators are arranged in a curved shape. The micro piezoelectric
vibrator 301 uses a three-component system EndPage: 3 ceramic such as PCM, the electrodes
302 are provided on the upper and lower surfaces of the vibrator 301, and 24 acoustic matching
layers 303. Glue 304. As the first matching layer 303, quartz, a melting plan, etc. are used, and as
the second matching layer 394, a synthetic resin having a predetermined thickness, for example,
an epoxy resin is used, among which the piezoelectric vibrator 301: Th and the first matching
layer 303 is completely cut off. The micro-piezoelectric vibrator 301 is formed in a ratio of width
to thickness (M // T) according to a single vibration mode of width and vibration of the vibration
mode, and as a result, an electromechanical coupling coefficient according to this vibration mode
In the case of 0, when PCM is used, = 0.68, which is significantly larger than the
electromechanical coupling coefficient kl: 0.6 relating to thickness-longitudinal vibration, which
can contribute to high sensitivity and wide band. Further, in the case of the above-described
probe structure, the arrayed ultrasonic probe can be attached along one curved surface since it is
connected only by the flexible second matching layer such as an epoxy plate. Furthermore, even
in the manufacturing process up to the structure shown in FIG. 3, since the piezoelectric plate
and the acoustic matching layer can be handled in a flat state as in the conventional planar
arrayed ultrasonic probe, The first term can also be solved. FIG. 3 (g) specifically shows how the
arrayed ultrasonic probe of the above structure is attached to the element support along the
curved surface. Conductivity of the arrayed probe having the structure of FIG. 4 has a
predetermined curvature as shown in FIG. 3? and a central portion is an inner wall so that the
arrayed ultrasonic probe can be inserted It is attached along the elastic element carrier 306 and
connected to the electrode on the lower surface by a conductive adhesive 307, which is made a
common electrode. On the other hand, an electrode on the upper surface is connected to an
electrode 309 provided corresponding to each vibrator on the insulating layer 308 by a lead wire
310 using a wire bonder or the like. Although the structure and manufacturing method of the
one-curved array type ultrasonic probe have been described above, the structure according to the
present invention, that is, the piezoelectric transducer 301 and the first matching layer 303 are
acoustically isolated As compared with the case where only the piezoelectric vibrator as shown in
FIG. 2 is acoustically isolated, the performance as the arrayed probe is more excellent because
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there is no acoustic leak through the first matching layer 303. Improve further.
From this point of view, it is better to place acoustic insulators, that is, notches, in the range in
which the second matching layer also satisfies the mechanical strength as a probe. As mentioned
above, air seems to be most suitable as the acoustic insulator, but from the balance with the
mechanical strength of the probe, it does not affect the vibration mode as an acoustic insulator,
and acoustic leak It is also considered appropriate to use an epoxy resin or the like, which does
not increase significantly. The arrayed probe structure according to the present invention can be
functionally applied not only to a curved arrayed probe but also to a planar arrayed ultrasonic
probe. As apparent from the above detailed description, in the ultrasonic probe having two layers
of acoustic matching layers, the present invention defines the thickness and width of each
piezoelectric vibrator so as to be excited in the vibration mode related to the width vibration.
And, the depth of cutting as a vibrator is a pressure up to the body and the first matching layer,
and the effects of such a probe structure according to the present invention are listed as follows.
(1) The manufacturing process of the probe is almost the same as that of the planar probe, and
the curved array probe can be manufactured by a simple process. (The width-to-thickness ratio
(W / T) of the piezoelectric body that can be vibrated in the vibration mode related to the width
spread vibration, while forming the piezoelectric body, adding a two-layer O sound leakage
matching layer and excluding the damper As a result, good sensitivity and band characteristics
are obtained. (The acoustic leak is further reduced by cutting not only to the barrel piezoelectric
body but also to the 1st v joint layer, and a high performance arrayed probe can be made.
4. Brief Description of the Drawings FIG. 1 is a perspective view showing the structure of a
conventional arrayed ultrasound probe having a curved shape, and FIG. 2 is a two-layer matching
layer structure described in Japanese Patent Application No. 61-128472. 3A) and 3B) are partial
sectional views of the arrayed ultrasonic probe according to an embodiment of the present
invention, and FIG. 3Q is a perspective view of the same part. It is. 301 ...... micro piezoelectric
vibrator, 302 ...... electrode, 303 ...... first matching layer, 304 ...... second matching layer,
EndPage: 4305 и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и
ииииииииииииииииииииииииииииииииииииииииииииииииииииииииииииииииииииииииииииииииииииииии
и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и. иииLead. Name of agent Attorney Nakao
Toshio and others 1 person Figure 1 Figure 2 Figure 20! i?6 3rd Building nf Recruitment side
procedure correction a; JP ++ 66: 1: l) J811 Patent Office Director General Representation of the
Case 1 Patent No. 64789 No. 2 Invention Title 2 Invention Name Ultrasonic Search Those who
make corrections to the illustrator 3 'mouth 6 co-patent applicants Osaka Prefecture Kadoma city
Ogata Kadoma 1006 address name 13 и (5 B 2) Matsushita Electric Industrial Co., Ltd. t' Jg
formula L representative K Toshihiko Kashishita 4 agent 571
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Ultrasound probe
Address Osaka Prefecture Kadoma City Oji Kamon 100 Address Matsushita Electric Industrial
Co., Ltd. 6 correction target object Akira AIF of the detailed description of the invention of aIF-1-.
? ░ / EndPage: 56, Content of correction (1) ?Increase in the number of production
processes? on page 4 line 16 of the description will be corrected as ?Increment in production
process?. (2) We will correct ?Necessary? on page 16 on page 4 to ?Also needed?. (3)
?Control wholesale? will be corrected to ?J? on page 6, line 3 on page 6. (4) [ULtragonics J
in the fourth line on page 7 of the same page "corrects 1trasontcs Jyc. (6) Connect with lead wire
310 on page 12, line 14 of FIG. Are connected by lead wires 310. Although FIG. 3 shows the
probe shape bent upward, it is of course possible to make the probe shape bent downward as
opposed to FIG. 3 . We will correct it to ???????? ?
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