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DESCRIPTION JPS57125599

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DESCRIPTION JPS57125599
Description 1, the title of the invention
Ultrasonic transducer
6. Detailed Description of the Invention The present invention relates to an ultrasonic
transmitting and receiving element that utilizes the stretching pressure 'lli' of the Vi ^ molecular
piezoelectric sheet. For example, a polymer piezoelectric / electrically conductive sheet obtained
by polymerizing a copolymer containing a polar compound such as vinyl fluoride, fluorinated
vinylitole, trifluoroethylene or the like as a main component, transmission / reception of ultrahigh frequency waves It is used conventionally as an element. When such a sheet is used in
ultrasonic imaging devices such as skin diagnosis, ultrasonic flaw detection, ultrasonic ?
microscopes and the like for ultrasonic sound, pulse oscillation using resonance determined by
the thickness of the pressure sheet is used for 1 history Ru. Therefore, in this case (the pressure
applied to the piezoelectric sheet used is over thickness) the thickness pressure is one. Therefore,
if the wavelength of the assimilated wave that can be used for one history is determined, the
thickness of the rollable sheet that can be matched at that wavelength is necessarily determined.
For example, the thickness of the molecular piezoelectric sheet at the peripheral e number of
500K] -12 ? -n10M14Z most frequently used in the history of Mi thermal wave diagnosis and
ultra wave wave detection 1 is about 2000 ? to 100 ?. In addition, since the molecular
piezoelectric sheet has a low Young's modulus, the secondary vibration is small at the time of
pulse oscillation, and the sound impedance is closer to water compared to one ceramic yarn ball
'1' such as earthy PZ 'It'. Alternatively, it has an Ori point with little loss of ?W in transmission /
reception 1K of sound waves with the human body. However, since the electric impedance is high
and the piezoelectric constant d is low, there is a drawback that a high frequency power supply
of extremely high voltage is required to obtain a high output by a thick cylindrical molecular
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pressure vL sheet. The present inventors have examined the function of an ultrasonic
transmitter-receiver using expansion and contraction piezoelectric vibration of a polymeric
piezoelectric sheet, and in particular, the conventional [1] of the piezoelectric working portion of
a cylindrical molecular pressure sheet '715 is close to the thickness of the ultrasonic wave
generation surface using piezoelectric of thickness, and it is assumed that this rollable sheet may
be oscillated at t, I * constant ultrasonic wavelength in the piezoelectric operation part. As a
result of conducting experiments under the above, it proved that this idea was correct, and
reached the present invention. That is, the present invention provides ultrasonic transmission
and reception in which a narrow piezoelectric actuation portion is provided near one curved edge
of a polymer sheet which is pressure-resistant or polarized piezoelectric injection. It relates to
equipment. In the present invention, a sheet having a narrow piezoelectric actuation part is, for
example, its multiple no, when laminated so that the side lines close to the sheet end + III of the
piezoelectric actuation part are respectively in the same plane. The lamination of the cross
section of the piezoelectric working part passing through the IH is not effective for transmitting
ultrasonic waves, and the thickness of the unit sheet layer to be laminated is reduced, so that the
high frequency wave for transmission applied to each sheet layer High output can be obtained
even if the low pressure is low.
Therefore, the present invention also includes an ultrasonic transmitting and receiving element in
which a plurality of polymer pressure-acid sheets having such a narrow working electrode folded
are laminated such that the accumulation of the cross section of the piezoelectric working part
constitutes one surface. EndPage: 2 In the present invention, the piezoelectric actuator must have
the following conditions a) and b). That is, a) at least a portion of the polymer sheet has
piezoelectricity from polarized light, b) an electrode is formed on the screen of at least the
portion in a direction lJ, c) thus the piezoelectric When an electric field is applied to the
electrodes of the operation mJ, only that portion will be piezoelectrically stretched. That is, parts
such as d) and e) below are not eight as the activation operating city. d) Even if the sheet has 1
min. of rollability, the surface of either side j or both sets of U ? has a portion without
electrodes, and e) both sides have polarization. Even if the portion between the sheets is
substantially non-piezoelectric, the portion does not undergo piezoelectric expansion and
contraction, and such a portion is included in the piezoelectric non-operating portion in the
present invention. Also, the piezoelectric actuator needs to provide one side edge of the sheet at
the position of the corner. By way of example, ultrasonic waves -811 emitted in both directions
from the pressure '4 actuating part to its 11' direction result in noise waves reflecting at the
sheet edge in each direction. If the distance between the end face and the end face of the
piezoelectric actuator is 11, the reduction of the neck wave propagating in the sheet does not
differ greatly in either direction. Wave noise is disadvantageous because the S / N ratio is small.
However, if the piezo-actuator is very close to one side edge of the sheet, the back wave will
reach the near side edge without any significant loss but the other side line In the rabbit, the
piezoelectric non-operating part on the way is greatly reduced, and the wave reflected from this
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side edge is greatly reduced again in history, so the S / N ratio between the radiated ultrasonic
wave and the noise wave becomes large. . Therefore, in terms of S / N ratio t ", it is most
preferable that the piezoelectric actuating portion stoops at 11III edge g, but a piezoelectric nonactuating portion is also provided between adjacent side edges as an electrode margin etc. It is
also possible. Examples of the polymer sheet capable of imparting rollability by polarization
include vinyl fluoride, vinylidene fluoride, trifluoroethane, fluorochlorovinyl lyso /,
monochlorolodi fluoroethane, vinyl chloride, vinyli chloride /, acrylonitrile and the like. In
addition to a polymer or copolymer containing a large polar monomer as one component, it is
molded from a composition obtained by mixing these main unit or copolymer with pZ'r, other
non-pressure-bearing powder, etc. Sheets, and among them, sheets of M-copolymers or
copolymers having vinylidene fluoride in excess of 40% are most preferable because they have
extremely high piezoelectric properties (fiJ.
For example, aluminum, gold, copper, nickel, copper or any other optional ductile gold m may be
deposited, sputtered, plated, coated, coated, printed or any other method on the film surface. It
may be The invention will now be described by way of illustrated example. First, referring to the
first embodiment, in FIG. 1A and FIG. 1B, (1) indicates that the pressure is imparted by, for
example, polarization such as uniaxially stretched polyfluorinated vinylitenofilm. In the obtained
sheet, on both sides of the side edge in the direction perpendicular to the drawing axis A (21 (2+
'is applied, and' one pole (2+ (2+ 'upper side line is sheet (1) It corresponds to the edge of the
upper end face of. The width of a portion of the electrode 21 (21 'which can actually act as a
counter electrode in which the electrodes on the front face overlap) is determined such that the
width at which the portion resonates with the used ultrasonic wave. In this sheet (work), both ?
may be put on the polarization electrode in advance to make the whole piezoelectric, but in this
way, 'polarity (2+ (2)' is phred and tc depends on tc It is also possible to polarize the poles (2)
and (21 ') as both poles, and to impart piezoelectricity only to the sheet of the portion where the
pair of electrodes (2) and (2f) are left. One-pole (21 (2 fO month +) &, it is similar to the thickness
mi of the polyfluorinated vinylidedenosis -1 и which resonates by the thickness L-E ? turtle with
the same frequency, or slightly different from the case of the thickness piezo). That is, in FIG. 1A,
13 the presence of the electrode (21 (2 '/ 2') is not due to the presence of a wide piezoelectric
non-stretchable part (pressure '+ 4f' fluorine operating part) (4) connected to The resonance
frequency of the part 31 changes somewhat, and the speed of sound of the polyfluorinated
vinylitine sheet differs in the surface direction and in the thickness direction, so the sheet
thickness of the thickness expansion and the sheet thickness resonating at the same frequency
are formed in this embodiment. The working 'electrode (2+ (2 any 1)' does not necessarily
coincide. However, the required width of the rolling operation part (3) is easily determined by M:
empirically, and if the width of the piezoelectric operating part is fixed, the electrical resonance
circuit is adjusted to the resonance wavelength. The EndPage: 3 configuration is good. (5) (5) 'is
an a-pole connection, which is connected to the mutually different 1 + 111 ends of the elongated
actuation 11L poles (2) and (2)'. Therefore, since the pair of connection parts (5) and (5) 'do not
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have a cutting surface on each side, an electrode can be present on the other side even if "the
whole" (1) is imparted with piezoelectricity. C) The part to which the connection get (5) (5) 'of (1)
is attached is e-ratio "?" non-operating part.
Such a cord ? (1 is connected to the high-frequency transmitting circuit (connected to the
receiving circuit (8) by the force and H r hope, for example, using the wiring U (6) ? from the
connection portion (5), (5) ? There is. Incidentally, +91 (9J 'is a circuit switch, not shown, but it
is also possible to switch alternately from the end of the timer. In the element (10) of this
embodiment, when applying a single pulse signal or a continuous wave signal with a resonance
frequency of the piezoelectric operating portion (3) to the polarization (21 (2) 'of the
piezoelectric operating portion (3). , And oscillation at the resonance frequency is performed. The
resonance frequency is mainly determined by the width of the piezoelectric working part (3), and
generally it is considered that the contribution of the thickness of the sheet (1) is extremely small
(the thickness of the sheet (1) is of the piezoelectric working part (3) If the width is close, the
influence may be considered), even if the pulse voltage is low by reducing the sheet thickness,
pressure '1! The 61 field strength applied to Jtl I 81 I can be added and the piezoelectric output
can be applied. -In the thickness vibration, the thickness of the relatively low frequency
oscillation fi-core O of 1MIIZ or less is l + tai-hi or more, the excavator with super-super power is
inconvenient, and it is difficult to obtain. By configuring as above, the oscillation of the frequency
of 1 ▒; It should be noted that the high frequency of this oscillation is a quasi-pulse generation
(not limited to one in the case of a cage, using a high frequency single pulse, oscillation due to
fc'j% control vibration, or in the case of i It is. Further, as shown in FIG. 1A, if, for example, the
axial direction A of the polyvinylidene fluoride sheet (1) off the single axis, and the extension
direction of the piezoelectric operating portion (3) are orthogonal to each other, This ladder OQ
is pressure relief in the extension axis direction ij! The stretching vibration direction due to ids +
is 7 'used for resonance in the direction of the piezoelectric actuator t310) rt]. However, the
polymer sheet (1) capable of imparting piezoelectricity, which is used in the present embodiment,
is not limited [email protected] poly (fluorinated vinyl fluoride) 7 sheet. For example, in the case
where high piezoelectricity can be obtained even if the unstretched sheet is polarized like any
basic combination such as vinylidene fluoride and trifluoroethyleneno, tetrafluoroethylene or
trifluorochloro ene / n. The sheet may be an unstretched sheet, and also 2 @ stretched or even
multiaxially oriented sheet may be cast for one history. The 11 + 11 of the more specific
constitution of this embodiment is indicated by an arrow, and the uniaxially expanded
polyvinylidene fluoride pressure 1 film 300 with a thickness of 300 ?m (1) (d3. = 2 О 10 ? ?
? C / N) ? << 1 trnx1 on, and sputtering the nickel negative pole pair (2) (2) ? of Ill 400 pm
onto the six layers I + 1 + l ? of v [] <one end of FIG. 1A1 B It formed.
In order to measure the ultrasonic wave output by the expansion and contraction piezoelectric
effect of the IQI, sound absorbing rubbers were provided on both sides of the sample so that only
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the end face of the sample was exposed. Then, using a high frequency oscillator (MA'rEC, Model
6600), a tone burst signal from this oscillator was applied between the electrodes (2) f21 'of the
sample ?Q, and the ultrasonic output was measured by a hydrophone while changing the
frequency. The result is as shown in FIG. 9, and a resonance point was observed around a
frequency of 1.7 MHz. In addition, the prayer velocity in the expansion direction of this
vinylidene fluoride sheet (1) is about 150 Qrn, and the sound velocity and the width of 1 pole (2)
(2) 'at resonance points V and 1.9 MiJz The measured value should be around 61 true 'iIL. Next,
the transmission / reception element 14 of the second central m13'U of the present invention
will be described with reference to FIGS. 2A and 2H, where 'is the pole (2) (2)' from the top of the
sheet (1) At least the part to which polarization (2) (2+ ') is attached is a pressure' 1 actuating
part (3) to which an indentation is applied. Then, the upper and lower sides (the reference end
portions are opposite to each other) are pressure 'non-operating portions (4a2) and (4a +). In this
case, the width of the non-operating part (4a2) of the upper 11111 is much smaller than the
width of the lower non-operating part (4al) (each in the same direction as the width of the
compressor operating part). The width of (4a2) is less than one tenth of the width of (4a1). FIGS.
6A and 6B show a sixth embodiment of the present invention, in which this U-shaped element
has substantially the entire surface of a polymer sheet (1) which can be provided with
piezoelectricity [poles (2a) and (2a). ) Is provided, but this sea 1- (11 is piezoelectric operated
with piezoelectricity, in which only the part of the side edge is polarized before applying the
'polarization (2a) (2a)' Part (3) and End Page: 4 are included, and the other parts are part # of
interrogation # (4). That is, for example, after polarization of only the side edge (6a) is performed
locally, the polarization electrode of the upper side of the upper side of the /-) (1) The product is
completely removed (eg, A11 is completely removed with NaOH solution). Next, the electrodes
(2a) and (2a) 'must be worn on the substantially entire surface of the surface layer of the sheet
(1). Fig. 4t shows a fourth embodiment of the present invention in which the end of the sheet (1)
is formed in an open pole shape, and in this case, the rolling operation part 3) is a curved object
equidistantly spaced along the end face It is configured to have the shape of [1). FIGS. 5A and 5B
show the fifth application 1j of the present invention, wherein the level elements as shown in FIG.
1 (1 (a plurality of I are stacked to form a composite element 0?, wide end face thereof The
oscillating face (13 is formed.
In this case, for example, as shown in FIG. 5B, the polarities of the opposing surfaces of the level
elements QO1'l 1 adjacent to each other are made to coincide (the direction of the arrow is taken
as the positive electrode. For example, the positive electrode (2 mice) of the element (10) is the
positive electrode (2 L) of the adjacent element (Ion-h) and 100 million (2 n) of the negative
electrode of the element (10 mice). ') Means that every other positive electrode obtained by
making the pupil (K ?) look like this, with the negative electrode (2 ?) on the negative electrode
side of another adjacent element (10 n ++) The I'4 L pole and the negative pole electrode are
connected in parallel to the oscillation circuit (or the receiver circuit). Incidentally, in this
embodiment, the valley unit element 4 is not used and the IWI is used, and although it is not
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shown, such a weir is not shown, for example, two pressing plates on both sides j Put together,
press and thin the holding plates with bolts and condense. Alternatively, it is possible to put an
entire structure in the case with the person 712, strongly pressing from both sides, and coating
the whole in the history, or any other structure. In some cases, it is also possible to connect ?Q
between 1 valley / posterior element using a junction IJ or by 10 junction thermal bonding, in
the case of a junction wholesale j1 history, piezoelectric by the junction 7MMIJ Although the
efficiency is somewhat reduced, it is easy to manufacture. When the opposing 'wL pole (2) of the
adjacent unit elements is insulated by the adhesive layer, it goes without saying that the
opposing electrodes (2) do not necessarily have the same polarity. Although there is a
disadvantage in the number of wires, it is sufficient to couple 'At poles of the same polarity to the
same pole of the respective generators. FIG. 6 shows a sixth embodiment of the present
invention, which is shown in FIG. Similar to i-relief, it is an attached-cordon ? ? with no unit
system ?Q, but each level element uO) il-L should be slightly OtN shifted, its super-backwave
oscillation surface ( 12 + forms a linear curved surface (concave surface in the figure). In FIG. 6,
the surface is stepped, but when the thickness of the sheet is thin, the step is not so easy 9 that
the step has% v ? or less. If the thickness of the sheet is taken, the influence of this step can be
ignored. Also, if this embodiment is applied to the fourth application U and the unit element C)
(1) as shown in FIG. 4 is shifted in the same manner as in FIG. It will also be readily understood
that a deformation fil can be obtained which has a surface ''. FIGS. 7A, 7B, and 7C show a seventh
embodiment of the present invention, and as shown in FIG. 7B, a piezoelectric actuator (6b) at
the center of a polymer sheet capable of exerting piezoelectricity or crushability. The sheet (10a)
is folded in two, and the piezoelectric actuator 1 (3b) comes to the end of the name single layer,
as shown in FIG.
In this way, in the case of two folds, the pressure working core 1 which becomes the standard of
resonance! Is substantially% of lJ of the piezoelectric actuator (6b) attached to the original sheet.
To be precise, if you have to think about the thickness of the note, y, ?, 1. 1. Also, if the sheet 1
(10a) is folded in two (in this case, the length of the piezoelectric actuator (6b) resonating at the
frequency of I??lr foot is more than the thickness of the sheet (10a)) Make it bigger. That is,
seer (10a) 47r! It is preferable to use a thin sort so that the # ? of the bent part when bent is
small. If the thickness of the sheet (iob) is less than the thickness of the sheet and the influence
of the FTb bending ib can not be avoided, as shown in FIG. (5b2), it can be divided into two and
laminated. Thus, when the piezoelectric non-operating portion (4b2) is provided at the ninth fold,
the ultrasonic radiation surface of the laminate naturally becomes the lower side of J- formed
from the piezoelectric non-operating portion (4b2). However, as in the case of the unit sheet, the
piezoelectric non-operating part (4b2) on the surface is formed under the piezoelectric operating
part (3bl) (3b, :) EndPage: 5 compared to the thickness of the non-operating part layer (4bi) If it
is smaller than nine minutes (less than one-tenth) 6i there is no hindrance. Also, the sheet (10a)
or (10b) is not limited to two sheets, but can be folded for any number of times and folded to
form a single sheet or a single sheet. In the structure of FIG. 7A, since 11 pairs of electrodes
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necessary for the surface of the adjacent confectionery can have the same polarity, the number
of electrodes on the surface will be reduced to one. Incidentally, in the case of FIG. 7C, if the
electrodes & (2b,) and (2b2) on the surface are respectively connected at one end, the wiring can
be similarly suppressed. FIG. 8 shows an eighth embodiment of the present invention, in which,
for example, one of two sheets (10a) or (10b) of two sheets as shown in FIG. 13 or C is wound
into a roll. . When winding in this way, instead of using one folded sheet, use an elongated sheet
with a piezoelectric part at the side edge, and pair the two sheets so that the polarity of the front
and back of the rolling part is opposite to each other. The product may be rolled into a roll. In
addition, it is possible to roll (rubbing) one sheet having the piezoelectric operating portion
without folding it in two. In this case, another insulating 7-toe is inserted between the sheets so
that the '1 pole of the sheet of the sheet to be rolled does not come in contact, or by an insulating
1-layer adhesive!
l1 It is necessary to prevent the contact of the front and back electrodes. In this way, when
winding in the p-like shape, the middle ID part is made to extend from the outer circumference
part 9, or it is protruded to make the ? j surface concave or convex and make the super back
radiation direction a curved surface. You can also In the b-th to eighth embodiments, the
transmission / reception elements are formed by laminating unit elements. In the case of a
composite element in which unit elements are stacked in this way, there are the following
orientation points in addition to the effectiveness of the unit elements described above. That is, in
a sheet using conventional thickness piezoelectric resonance, strict uniformity of sheet stiffness
is required. Furthermore, for example, when a hemispherical concave sheet is required, if the
concave surface is to be formed, the thickness of the sheet I и changes so that it is difficult to
obtain a sheet having a secondary curved surface of uniform thickness. The resonant frequency
may be different at the peripheral portion. On the other hand, in the composite element
according to the above-mentioned embodiment of the present invention, it is sufficient to align
[1] of the pressure element of the unit element. Even in the case of a no joint which is
accompanied by a semi-spherical surface, a unit element as shown in FIG. 4 is used for the one
having a nest of curvature, and this is based on the lamination method shown in FIG. J-doing
(here, a spherical concave surface is easily obtained, and the roll-like lamination in FIG. 8 ll'j: a
curved surface can be obtained more easily. Although the present invention has been described
with reference to the embodiments, since 7L according to the present invention uses the
stretching piezoelectric vibration of a polymer rolled sheet, a high output can be obtained even
with a low manual screw pressure, and the conversion efficiency can be improved. It is possible
to provide a vague ultrasound transmitter-receiver. Further, according to the present invention,
the piezoelectric non-moving portion is provided with the piezoelectric operating portion near
one side edge portion 9 of the polymer sheet, and the section of the piezoelectric non-moving
portion follows the 11Ill line on the side edge portion side of the piezoelectric operating portion
Since it is a surface, it is possible to obtain a transmission / reception 1 g element with an even 8
/ N ratio.
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4. Brief description of the drawings. FIG. 1A1B is a front view and a side view of the ultra bamboo
wave transmitting and receiving element according to the first embodiment of the present
invention, and FIG. 2B is a second embodiment of the present invention. Front view and 11111
view of the transmitting and receiving element, FIGS. 6A and 6B are front view and front view of
the transmitting and receiving cake of the sixth embodiment of the present invention, and FIG. 4
is the fourth embodiment of the present invention. Fig. 5 A, Fig. 5 is a side view of the laminated
state of the transmission / reception 1 g element of the fifth embodiment of Fig. 5 A, Fig. 5 is a
side view showing the state of assembly, Fig. 6 The figure is a curved view of the transmitting /
receiving 16 element of the sixth embodiment of the present invention, FIGS. 7A, 7B, 7C are the
0111 plane view of the transmitting / receiving element of the seventh embodiment of the
present invention. FIG. 8 shows a curved surface view and a side view of the modified example,
and FIG. 8 is an external perspective view of an eighth transceiving U transmission / reception
element of the present invention, and FIG. It is a graph which shows the resonance characteristic
of the transmission-and-reception element of the Example of 5. FIG. In the reference numerals
used in the drawings, (1) иииииииииииииииииииииииииииииииииииииииииииииииииииии Electrode (3) иии ... - is ........ rolling operation
unit (4) .............. piezoelectric inactive part. Agent Tatsuya Katsu EndPage: 6 Figure 6 Figure 8 ? 1
Figure 7 ABC Figure 9 ABC ? M) lx. EndPage: 8 Warning: Page Discontinuity
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