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DESCRIPTION JPS61114178

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DESCRIPTION JPS61114178
[0001]
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an
ultrasonic imaging apparatus used, for example, in medical and other applications, and in
particular, the present invention relates to a matrix array type ultrasonic transducer incorporated
in this type of apparatus. <Summary of the invention> A matrix array type ultrasonic transducer
according to the present invention divides a plate-like piezoelectric material to form a
piezoelectric assembly in which elements are arranged in a matrix, and each row is formed on
one side of this piezoelectric assembly. The first electrode group is formed by providing the
number of electrodes in contact with the elements of the first row, and the second electrode
group is formed by providing the number of electrodes contacting the elements of each column
on the other surface side. As a result, the number of 111 J-wires required to operate each
element is reduced, and simplification of the configuration is realized. <Background of the
Invention> As shown in FIG. 3, in the conventional matrix array type ultrasonic transducer, the
upper surface side of a flat plate-like piezoelectric material is divided vertically and horizontally
by dicing or the like, and the elements 21 are arranged in a matrix. The piezoelectric assembly
22 is formed, and a large number of electrodes 23 are taken out corresponding to each element
on the upper surface side of the piezoelectric assembly 22, and a common electrode 24 is formed
on the lower surface side of the piezoelectric assembly 22. This is derived. However, in this type
of conventional ultrasonic transducer 20, for example, in the case of m rows and n columns of an
IJ array, (mX n) electrodes and further lead wires are required, and this lead wire Since the
number increases in proportion to the increase of the elements, it is difficult and complicated to
combine with the signal processing circuit, and there are problems such as <Object of the
Invention> The present invention is intended to eliminate the above-mentioned drawbacks, and
the number of electrodes and leads necessary to operate each element of the piezoelectric
assembly is reduced to simplify the connection with the signal processing circuit. It is an object
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of the present invention to provide a matrix array type ultrasonic transducer that can be
integrated. <Litching and Effect of the Invention> In order to achieve the above object, the 7) IJ
array ultrasonic transducer according to the present invention divides a plate-like piezoelectric
body into a plurality of rows and a plurality of columns so that the elements form a matrix. An
array of piezoelectric assemblies is formed, and electrodes corresponding in series corresponding
to the elements of each row are provided on one side of this piezoelectric assembly to form a first
electrode group, and a piezoelectric assembly The second electrode group is formed on the other
side by providing a number of electrodes in series corresponding to the elements in each row.
According to the present invention, for ultrasonic transducers having a matrix arrangement of m
rows and n columns, 1! The number of i poles is (m + n), so the number of rl leads required to
operate each element of the piezoelectric assembly can be reduced to (m + n), and compared with
the conventional example, It is possible to significantly reduce the number and simplify the
coupling with the signal processing circuit, etc., thereby achieving the remarkable effects of
achieving the objects of the invention.
DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a matrix array type ultrasonic
transducer according to an embodiment of the present invention. This ultrasonic transducer 1 is
formed by dicing the upper surface side of a flat plate-like piezoelectric material. A piezoelectric
assembly 3 in which elements 2 are arranged in a matrix by dividing into m rows and n columns
(m in the illustrated example, m = 5, n = 5) by a method or laser dicing method It is. On the lower
surface side of the piezoelectric assembly 3 are formed lower electrodes 4a to 4e in a series
corresponding to the elements 2 of each row by a mask vapor deposition method or a mask
sputtering method, etc. Form group 4 Further, on the upper surface side of the piezoelectric
assembly 3, there are provided upper portions 111 t poles 5 a to 5 e in the shape of a series in
contact with the elements 2 of each row in a direction perpendicular to the forming direction of
the lower electrodes 4 The second electrode group 5 is formed. The formation of the upper
electrodes 5a to 5e can be realized by a mask vapor deposition method or a max-battering
method when the pitch between the elements 2.2 is small. When the pitch is large, first,
electrodes are formed on the four elements 2 by vapor deposition or sputtering, and then the
conductive electrodes on the individual elements 2 are bonded and connected. Or connect using
wire bonding method. The backing material 6 is attached to the lower surface side of the
piezoelectric assembly 3 via the lower electrodes 4a to 4e. According to the matrix array type
ultrasonic transducer 1 of the illustrated example, the number of rl lead wires required to drive
each element 2 of the piezoelectric assembly 3 is 5 + 5 = 10, and in the conventional example In
contrast to requiring 5 × 5 = 25 tree leads, the number of leads can be significantly reduced,
and as a result, the coupling between the sensor unit and the signal processing circuit can be
simplified. The driving of the matrix array type ultrasonic transducer 1 is carried out using the
switching circuit 7 for switching the upper electrodes 5a to 5e and the switching circuit 8 for
switching the lower electrodes 43 to 4e as shown in FIG. For example, when the switch 9a in the
switching circuit 7 is turned on and the switch 10a in the switching circuit 8 is turned on, among
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the elements of the piezoelectric assembly 3, an element located at the intersection of the upper
electrode 5a and the lower electrode 4a Operate. By selectively operating any one of the upper
electrodes 5a to 5e and the lower electrodes 4a to 4e in this manner, it is possible to operate any
element of the piezoelectric assembly 3.
[0002]
Brief description of the drawings
[0003]
FIG. 1 is a perspective view of a 1 × array ultrasonic transducer according to an embodiment of
the present invention, FIG. 2 is a wiring diagram showing its drive circuit, and FIG. 3 is a
conventional matrix array ultrasonic transducer Of the
Reference Signs List 1 ultrasonic transducer 2 element 3 piezoelectric assembly 4 first electrode
group 4a to 4e electrode 5 second electrode group 53 to 5e. ·electrode
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