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BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an
ultrasonic probe used in an ultrasonic diagnostic apparatus and the like. BACKGROUND OF THE
INVENTION Conventionally, a mixture of zircon and lead titanate (PZT) -based ceramics is often
used as a material for a piezoelectric vibrator in an ultrasonic probe. However, these piezoelectric
ceramics N) need to devise an acoustic matching layer etc. for diagnosis because the acoustic
impedance is extremely large compared to the human body, and (ii) have a curvature that
conforms to the shape of the human body because it is hard. It has a drawback, such as difficulty.
On the other hand, organic piezoelectric materials such as polyvinylidene fluoride (PVnF) have
recently been developed as materials having low acoustic impedance and high flexibility.
However, these have the disadvantage that the voltage acoustic conversion efficiency is
extremely low compared to piezoelectric ceramics. Therefore, in order to solve these problems,
so-called composite piezoelectric materials in which an organic substance and a piezoelectric
substance are combined are being studied. For example, as shown in FIG. 1, it is disclosed that a
composite piezoelectric material having a structure in which a large number of columnar
piezoelectric bodies 12 are embedded in a sheet-like organic substance 11 is useful as a material
for an ultrasonic probe. (JP 58-22046). Thin film electrodes are formed on these composite
piezoelectric materials by vapor deposition or the like in order to maintain flexibility. However, it
has been difficult to connect a lead wire for applying a signal to such an electrode, which has
been a problem when assembling an ultrasonic probe. OBJECTS OF THE INVENTION An object of
the present invention is to provide an ultrasonic probe and a method of manufacturing the same
in which these problems are solved. [Summary of the invention] In the ultrasonic probe
according to the present invention, the composite piezoelectric material used in the
electroacoustic transducer comprises a hard columnar piezoelectric material and a soft organic
material surrounding it, and the columnar piezoelectric material is on the surface Focusing on
the exposed point, it is characterized in that the lead wire is taken out using the portion of the
columnar piezoelectric body. That is, by selectively using the portion of the piezoelectric body in
the composite piezoelectric body covered with a thin film electrode or the like, bonding of lead
wires can be performed stably. Where is the lead wire thermo compression bonding, super? Bond
by f-wave bonding method. Further, another feature of the present invention is that the electrode
on the surface on the backing material side of the piezoelectric body is exposed to the side
surface of the probe by bending the piezoelectric body, and the exposed portion of the lead wire
and the electrode It is in the configuration to make a connection. [Examples of the Invention]
[Example 1] Using a PZT-based ceramic as the body and a polyurethane as the organic substance,
a rectangular sheet of a composite piezoelectric as shown in FIG. 1 was prepared.
A strip-like electrode array 2] was vapor-deposited on one side as shown in FIG. Chromium and
gold were used as electrode materials. Electrodes were deposited on the entire surface on the
other side. A flexible cable with an earth wire bonded to the entire electrode side and bonded to
the backing material 3] as shown in FIG. 3: and further with a bonding pad door L / A 32 at the
same pitch as the electrode array 33 was adhered to the edge of the backing material. Next, the
portion of the columnar piezoelectric body in each section of the composite piezoelectric body
covered with the strip-like electrode array and the bonding pad attached to the cable were joined
with a gold wire 34 by thermocompression bonding. Finally, a sound e matching layer was
formed to also serve as protection of the electrode joint, and an electronic scanning ultrasonic
probe was assembled. EXAMPLE 2 A composite piezoelectric rectangular sheet 1-42 with the
same electrodes as used in Example 1 is used as shown in FIG. 4 on a backing material 41 having
a recess along its longitudinal edge. The strip electrode array side was connected downward. At
this time, the electrode array 43 on the back surface of the edge of the composite piezoelectric
sheet was partially exposed. Further, a semi-cylindrical rod 44 made of the same material as that
of the backing material having a matching curvature was bonded to the recessed portion to make
the surface flat. In this embodiment, a flexible cable 45 with a body pad array is provided on the
side of the backing material. In this manner, the electrodes of each section of the exposed
electrode array and the bonding pads were joined by the gold wire 46 by ultrasonic bonding. As
in the case of the first embodiment, a ground wire is bonded to the surface, and finally the sound
w! A J matching layer was formed to assemble an ultrasound probe. Although only the electronic
scanning linear probe has been described in the present embodiment, a flexible piezoelectric
transducer can be used to construct a probe having an arbitrary curved surface. For example, a
convex probe in the long axis direction can be considered, but in this case as well, the lead wire
can be easily attached by fixing the piezoelectric vibrator by providing a recess at the edge along
the long axis direction of the backing material. It can be taken out. As described above, according
to the embodiment, it is possible to realize an ultrasonic probe capable of applying a voltage to
the electrode on the backing material side by using a flexible piezoelectric vibrator. Even in the
case of this embodiment, as shown in the figure, if the gold wire 46 is bonded to the portion of
the columnar piezoelectric body in the electrode 43 of each section, the connection portion of the
gold wire 46 is stable and has high reliability. Become. [Effects of the Invention] According to the
present invention, an ultrasonic probe having no problem in lead wire extraction using a
composite piezoelectric body having a structure in which a large number of columnar
piezoelectric bodies are vertically embedded in a sheet-like organic substance. A child can do it.
Furthermore, since the lead wire is taken out using only a minute portion of the composite
piezoelectric body, problems such as changes in piezoelectric characteristics due to bonding are
eliminated, and an ultrasonic probe with less variation can be obtained.
Brief description of the drawings
1 shows the structure of the composite piezoelectric material, FIG. 2 shows the method of
forming the electrode on the composite piezoelectric material, and FIGS. 3 and 4 show an
embodiment of the ultrasonic probe of the present invention Figure.
· · · · 1 organic material, 12 · · columnar piezoelectric body, 21 · · · strip-like thin film electrode
array, 31 · · · backing material, 32 · · · bond ink pad array, 33 · flexible cable, 34 · · · Gold wire, 41
... backing material having depressions at the edge, 42 composite piezoelectric sheet I · · · · 43
strip-like thin film electrode array, 44 ... semi-cylindrical shape made of the same material as the
backing material Frame, 45 · · · Flexible Figure 1 Figure 3 Figure 2 Top Figure
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description, jps61220595
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