close

Вход

Забыли?

вход по аккаунту

?

DESCRIPTION JPS62189900

код для вставкиСкачать
Patent Translate
Powered by EPO and Google
Notice
This translation is machine-generated. It cannot be guaranteed that it is intelligible, accurate,
complete, reliable or fit for specific purposes. Critical decisions, such as commercially relevant or
financial decisions, should not be based on machine-translation output.
DESCRIPTION JPS62189900
[0001]
[General Description A method of manufacturing a co-array type ultrasonic transducer, which
uses an optical curing resin and an optical mask compatible with the array shape, seals an
acoustic insulating material in the dividing grooves of the array type transducer, An acoustic
insulation layer is formed between them to suppress acoustic coupling. FIELD OF THE
INVENTION The present invention relates to a method of manufacturing an ultrasonic transducer
for use in an ultrasonic diagnostic apparatus. The ultrasonic transducer used in the ultrasonic
diagnostic apparatus functions to convert electrical energy to ultrasonic energy by the
piezoelectric effect and emit it, and convert the reflected wave from the object again to an
electric signal to detect it. It is also called an ultrasound probe. In an ultrasonic diagnostic
apparatus, as an ultrasonic transducer for electronically scanning the inside of an object in a
linear or sector shape, a large number of piezoelectric elements are arrayed and integrated. The
present invention relates to a method of manufacturing an array type ultrasonic transducer, and
more particularly to the formation of an acoustic insulating layer on an array dividing groove.
[Background Art] FIG. 4 is a cross-sectional view showing the structure of an array type
ultrasonic transducer. In FIG. 4, ■ is banking (rear absorption layer), ■ is a piezoelectric
element, ■ is a matching layer of 1⁄4 wavelength, ■ is an acoustic lens, and those shown by ■
are divisions. It is a ditch. In FIG. 4, (a) is one in which the matching layer is composed, and (b) is
one in which the matching layer is divided for each piezoelectric element. In the configuration of
(a), since the acoustic coupling between the piezoelectric elements occurs through the matching
layer, the configuration of (b) has recently increased. In the array type ultrasonic transducer, it is
desirable to be acoustically isolated in order to eliminate acoustic coupling between the
piezoelectric elements. Conventionally, the sound attenuating material is enclosed in the array
division groove, but the groove width is very small, and the effect as the insulating layer is hardly
present. Recently, we proposed sealing the acoustic insulator of hollow glass or the like called
13-04-2019
1
micro balloon to the dividing groove, and obtained the expected effect. However, the sound In
edge material, such as a microballoon, is a powder, and a means for fixing in the groove is
required. When a sealing method is adopted by bonding with an acoustic lens or a matching
layer using an adhesive, the adhesive flows into the dividing groove and impairs the acoustic
insulation of the dividing groove. SUMMARY OF THE INVENTION The present invention seeks to
provide a novel method of manufacturing an ultrasonic transducer that solves the problems of
the prior art as described above.
[Means for Solving the Problems] FIG. 1 is a process block diagram showing the principle of the
method of manufacturing an ultrasonic transducer according to the present invention. In FIG. 1,
1 is a process of burying an acoustic insulator in a dividing groove to form a flat surface, and
applying a photo-curing resin thereon. In the step 2, a surface coated with a photocurable resin is
exposed by applying an optical mask similar to the array. Thereby, the division grooves of the
photocurable resin are cured. 3 is a step of cleaning and removing the unexposed uncured
portion. 4 is a step of forming a matching layer or an acoustic lens on the array. [Operation] As
described above, by applying a photo-curing resin and exposing with a mask similar to the array
shape, the acoustic insulating material is divided into grooves without flowing into the dividing
grooves as in the prior art. It can be stably sealed inside to form an acoustic insulation layer. The
present invention will be described more specifically by the embodiments shown in FIG. 2 and
FIG. FIG. 2 is a view showing the structure of an example product to which the present invention
is applied. In FIG. 2, the same reference numerals as in FIG. 4 indicate the same objects, and (a)
and (b) in FIG. 2 are the same as in FIG. Show. 1 indicates a dividing groove, 1 indicates an
acoustic insulating material consisting of microballoons embedded in the dividing groove 2 and 3
indicates a photocurable resin for sealing and is in a cured state. FIG. 3 is a diagram showing the
process of the embodiment of the present invention. In the first step, an acoustic insulating
material such as a microballoon is embedded in the processed dividing groove to be flush with
the array surface. The array surface at this time is a piezoelectric element in the case of the
integrated matching layer in (a) of FIG. 4 and is a matching layer in the case of the divided
matching layer in (b). A photocurable resin is applied to the array surface to form a thin film. The
second step is a step in which an optical mask having a shape similar to the array shape is
applied to the array surface coated with the light curing agent, and light is irradiated. By this, the
dividing groove portion of the light curing resin is cured to make a noise and seal the insulating
material. The mask may be a direct method or an optical imaging method. The third step is a step
of removing the unexposed uncured portion by washing. The matching layer has a thickness of
1⁄4 wavelength of the emission frequency and selectively emits this frequency, but the presence
of another layer on top of this interferes with the alignment and needs to be removed. The fourth
step is a step of forming a matching layer or an acoustic lens on the array surface after the above
step.
13-04-2019
2
That is, in the case of the integral matching layer of FIG. 4 (a), the matching layer is formed and
the acoustic lens is formed thereon, and in the case of the split type matching layer of (b), the
acoustic lens is formed. It is. After completing the above steps, the transducer is housed in a case,
and leads are connected to form a finished product. As described above, according to the present
invention, the acoustic insulating material can be stably sealed only in the dividing grooves to
suppress acoustic coupling between adjacent piezoelectric elements. The effect is huge.
[0002]
Brief description of the drawings
[0003]
1 is a process block diagram showing the principle of the present invention, FIG. 2 is a diagram
showing the structure of an example product to which the present invention is applied, and FIG.
3 is a diagram showing the process of the embodiment of the present invention. FIG. 1 is a crosssectional view showing the structure of an array type ultrasonic transducer.
In the drawing, 1 is a photo-curing resin coating step, 2 is an exposure step, 3 is an unexposed
portion removal step, 4 is an acoustic lens or matching layer forming step, ■ is a back
absorption layer, ■ is a piezoelectric element, ■ is a matching layer, 1 indicates an acoustic lens,
1 indicates a dividing groove, 1 indicates an acoustic insulating material, and 1 indicates a light
curing resin for sealing. Process block diagram showing the principle of the present invention
FIG. 1
13-04-2019
3
Документ
Категория
Без категории
Просмотров
0
Размер файла
11 Кб
Теги
description, jps62189900
1/--страниц
Пожаловаться на содержимое документа