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BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an
ultrasonic probe used in an ultrasonic diagnostic apparatus and the like. (Prior Art)
Conventionally, an ultrasonic diagnostic apparatus using a linear array ultrasonic probe is well
known. Furthermore, although the resolution in the play direction (longitudinal direction of the
vibrator) is improved over a wide range in the depth direction by the practical use of the dynamic
focus method, the resolution in the slice direction (direction orthogonal to the longitudinal
direction) is Only in a relatively narrow range is good. This is because focusing in the helical
direction is performed by a fixed acoustic lens. Therefore, to improve the resolution, it is most
effective to perform dynamic focus in the slice direction as well as in the play direction. A singledimensional squeegee chip is used to form a two-dimensional array transducer, the common
electrode 2 is joined to the surface side, and the electrode leads 3 are individually taken out from
the back surface side, each transducer Can be driven separately. At this time, the unnecessary
perturbation modes and the acoustic crosstalk other than the original thickness direction become
problems. Since this unnecessary vibration mode can not be removed when the width of the
cutting of the piezoelectric vibrator 1 approaches the thickness l, the piezoelectric vibrator l is
cut finely enough to suppress the unnecessary vibration mode in the boundary linear array
vibrator. Commonly used means of connection are taken. If this method is to be realized by a
two-dimensional array, it is necessary to cut very finely in the array direction A and the slice
direction S, and the number of the respective transducers of the two-dimensional array vibrator
inscribed in the eyebrows becomes enormous. If you try to pull out the lead wires 3 so that they
can be driven, the number of lead wires 3 will be huge, and considering the variation between
elements and the yield, it requires time and advanced technology in manufacturing, and it is very
expensive. There is a problem that becomes a thing. (Problems to be Solved by the Invention)
There is a possibility that there is a risk that the production becomes difficult and expensive if
the material is finely cut in the array direction and the slice direction in order to suppress the
unnecessary vibration mode. The present invention has been made to solve such problems, and it
is possible to suppress unnecessary vibration modes and acoustic crosstalk to a practically
acceptable level, simplify the configuration, and easily search for ultrasonic waves. The purpose
is to provide a feeler. [Configuration of the Invention] (Means for Solving the Problems and
Actions) The ultrasonic probe of the present invention is characterized by a plurality of linear
shapes of a predetermined depth on the surface in the thickness direction of the piezoelectric
vibrator. It is assumed that the piezoelectric vibrator in the linear groove is divided into a
plurality of unit vibrators to suppress mainly the acoustic crosstalk, and the other grooves
formed in the unit vibrator are unnecessary. Generation of vibration mode can be suppressed.
An embodiment of the present invention will be described below with reference to the drawings.
In FIG. 1, reference numeral 11 denotes a rectangular piezoelectric vibrator made of, for
example, PZT, and a common electrode 12 is formed by printing or evaporation on the surface in
the thickness direction, and a plurality of predetermined depths are formed on the other surface.
The linear grooves 13 and 14 are formed. The linear grooves 13 are provided so as to intersect
the array direction A (longitudinal direction) and the slice direction S (direction orthogonal to the
longitudinal direction) I of the piezoelectric vibrators 11, and the piezoelectric vibrators 11 are
divided into a plurality of unit vibrators. It is divided into fifteen. These linear grooves 13 have a
predetermined depth so that the width in the array direction and slice direction of the unit
vibrators 15 is sufficiently smaller than the thickness of the piezoelectric vibrator 11 in
consideration of acoustic cross-cuts. It is formed of A plurality of linear grooves 14 are provided
in parallel in the array direction A and the slice direction S of the piezoelectric vibrators 11 in the
unit vibrator 15 in order to calm down the generation of the unnecessary mode, that is, a
plurality of linear grooves. A rectangular signal electrode 16 is formed by printing, vapor
deposition, or the like so as to cover the range of the unit vibrator 15 and to be formed at a
depth. Since the two-dimensional array probe configured as described above is cut sufficiently
finely by the iil and M-shaped concave grooves of the piezoelectric vibrator 11 in the array
direction A and the slice direction S #, thickness vibration of unit vibration +15 is It does not
propagate to other adjacent unit oscillators 15. Accordingly, acoustic crosstalk can be suppressed
sufficiently low. Furthermore, a plurality of linear grooves 14 are formed in the array direction
and the slice direction in each unit vibrator 15 so that generation of unnecessary vibration
modes can be prevented, and common electrodes 12 and signal electrodes 16 are formed by
printing or evaporation. The unnecessary vibration mode can be suppressed sufficiently low in
combination with the thinness. In this ultrasonic probe, the array direction A and the slice width
of the signal electrodes 16 are such that the quantization side lobes generated by each unit
oscillator 15 having a finite width do not occur. Since the piezoelectric vibrator 11 can be made
wider than the width finely cut by the linear concave groove 13.14, the number of the signal
electrodes 16 is also relatively small. Therefore, since the number of lead wires drawn therefrom
can be reduced and the configuration can be simplified, there is an advantage that manufacturing
of the two-dimensional array probe can be facilitated. In the embodiment of FIG. 1, the linear
grooves 13 and 14 are formed in the array direction and the slice direction, but in the
embodiment of FIG. t.
This embodiment has the advantage that the time required to cut the pressure W rod can be
reduced to V2, but the effect of acoustic crosstalk may occur in the non-cutting direction. There
is one shown in FIG. 3 as one that prevents this with a relatively simple configuration. In this
embodiment, the linear grooves 17 are formed to be inclined with respect to the array direction
? ? ? ? slicing direction 18 of the piezoelectric vibrator 11 and then the signal electrode 16
having a size corresponding to that of the unit vibrator 15) is formed. It is provided. By so doing,
it is possible to suppress the influence of the illusion of crosstalk due to the array direction or
slice direction from winding, and it is possible to easily obtain a two-dimensional array probe
without anisotropy. . The present invention is not limited to the above-described embodiments,
and various modifications can be made without departing from the scope of the invention. For
example, although the so-called semi-cutting in which linear grooves are formed to a
predetermined depth is performed in the above embodiment, in some cases this may be
completely cut, and individual portions may be common i! It is also possible to adopt a
configuration in which the pole and the signal 11L pole are held. In the above embodiment, the
linear grooves are provided only on the surface of one side of the piezoelectric vibrator.
However, the grooves may be appropriately dispersed on the surfaces of both sides. According to
the present invention, the unnecessary vibration mode and the acoustic stroke can be suppressed
to a practically acceptable level, and the structure can be simplified to provide an ultrasonic
probe which is easy to manufacture. .
Brief description of the drawings
FIG. 1 is a perspective view showing the appearance of an embodiment of the present invention,
FIGS. 2 and 3 are perspective views showing the appearance of a different embodiment of the
present invention, and FIG. It is the perspective view seen from the signal electrode side for
demonstrating a child.
DESCRIPTION OF SYMBOLS 1 ... Piezoelectric vibrator 2 ... Common electrode 3 ... Electrode lead
11 ... Piezoelectric vibrator 12 ... Common electrode 13, 14. 17 ... Straight concave groove 15 ...
Unit vibration Child 16 иии signal electrode Fig. 1 Fig. 2 Fig. 3 Fig. 4
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description, jps63209634
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