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BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view of a conventional
ultrasonic ceramic microphone, FIG. 2 is a cross-sectional view showing one embodiment of the
ultrasonic ceramic microphone according to the present invention, and FIG. 6 is a cross-sectional
view showing an embodiment of the present invention. 7 · · · Piezoelectric ceramic vibrator, 8 · · · ·
· Metal diaphragm, 8a · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · · terminal plate, 15 · · · .... Conical
[Detailed description of the invention] The present invention relates to an ultrasonic transmitter /
receiver to be used outdoors, and provide a high-performance ultrasonic ceramic microphone in
a small and thin sealed structure? 7/7ブ2とするものである。 The first type of conventional
ultrasonic ceramic microphone / -7, Z, 1 'will be described. 1 is a VE electromagnetic device 75,
which is a moving element, which is bonded as a surface δ hole surface, and the other end
opening portion i (this terminal plate 3 is provided) It was a wolf. Reference numerals 4 and 5
denote terminals embedded in the terminal plate 3 and wire 6 and 6 '. Since it is necessary to
adjust the thickness of the lift and the vibrating part and the side part of the case 2 and make it
difficult for the imaging part of the vibrating part to be affected by the side part and to set a
structure that does not change the characteristics, Since the processing cost is high and the side
thickness of the case is set to be twice or more the thickness of the vibrating portion, the shape
becomes large and the assembly is difficult to be assembled. The present invention ameliorates
the disadvantages of the prior art and provides a compact and thin ultrasonic ceramic
microphone. One embodiment of the present invention will be described with reference to FIG. 7
is a piezoelectric ceramic vibrator, 8 is a cylindrical metal diaphragm having stepped side
portions 8a, and the piezoelectric ceramic vibrator 3 is bonded to the vibrating portion 8b of the
cylindrical diaphragm 8 to obtain a bimorph. It constitutes a vibrator. A terminal plate 9 is
attached to the inside of the opening of the stepped side portion 8a of the cylindrical diaphragm
8 to form a sealed structure. 10 is connected to the terminal 12 and the 1f electromagnetic
oscillator vibrator 7 which are implanted with the insulating adhesive 11 on the terminal plate 9,
or the 0 side electricity 13 is connected to the imaging plate 8 by the solder 14. It is a terminal of
a rose. As described above, according to this practical case, the shape of the cylindrical imaging
plate 8 constitutes the stepped side portion 8a separated on the portion to which the terminal
plate 9 is fixed and the portion to which the terminal plate 9 is not fixed. There is a difference in
mechanical impedance between the terminal plate fixing portion 8 and the vibrating portion 8b.
Further, the terminal plate 9 is fixed, and the side dimensions are adjusted to the imaging mode.
The mechanical impedance difference can be increased by setting the vibration damping to a
small size. Because of this when attaching to the set. Even if the − + 0 ′ side is supported and
fixed, the change in characteristics is small without affecting the imaging movement of the
vibrating portion 8 b. Furthermore, it is an advantage that the effects of the present invention
can be obtained also by using the vibrating portion 8b and the side portion 8a as the cylindrical
vibrating plate 8 having the same thickness and an integral structure. In addition, the side 8a of
the cylindrical diaphragm 8 can be configured to be relatively short, and at the same time, by
incorporating the terminal plate 9, the first step side 8a and the terminal plate 9 are less likely to
vibrate, and from the side 8d The directivity is stable because the radiation of
Further, by making the 911 part 8a shallower, bonding of the electromagnetic imaging lens
moving member 7 is facilitated and the incorporation into the shield is improved. In particular,
the 5th invention has a step-like 111 portion 8a and is separated from the imaging portion 8b in
a step-like manner, so that the mechanical influence on the vibrating portion 8b via the side
portion 8a can be reduced. Even if the side portion 8b is fixed, even if pressure is applied in the
direction of the stepped side portion 8a without any change in characteristics, the step-like effect
directly disperses the force applied to the vibrating portion 8b. Therefore, even if the component
has a shape change caused by a temperature change, the force is easily dispersed as described
above. FIG. 3 shows another embodiment of the present invention, which is to provide an
ultrasonic ceramic microphone having excellent temperature characteristics, wherein a cone of
resin is provided at the center of the outer surface of the vibration unit 8b. Resonator 16 is fixed.
Further, the shape of the surface of the terminal plate 9 'facing the vibrating portion 8b is an
integral multiple of λ / 4 that facilitates generation of foot standing waves in which ultrasonic
waves make the t method between the terminal plate 9' and the vibrating portion 8b. It can be
dimensioned and convex or biconical in cross-section to be more efficient in its reflection
efficiency. According to this embodiment, the transmission / reception sensitivity can be
enhanced by transmitting the vibration of the vibrating portion 8b to the conical resonator 15 to
improve the vibration amplitude. As described above, by setting the structure of the present
invention, it has a sealed structure, and can be used outdoors, and has a water-resistant and dustresistant 7 'structure. Furthermore, since the size and thickness can be reduced, the size and
installation of the set can be facilitated. And since it is a structure which makes the difference of
the mechanical impedance of a vibration part and an end) board fixing part large by the same
thickness of a cylindrical diaphragm, processing is easy and it is cheap. Furthermore, the
vibration efficiency is improved by fixing the portion where the cylindrical diaphragm is directly
connected to the vibrating portion as the stepped side portion 6 having the large diameter
portion as the fixed portion without fixing the portion, the vibration efficiency is improved, and
high sensitivity is achieved. It is possible to provide a sealed ultrasonic ceramic microphone.
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