close

Вход

Забыли?

вход по аккаунту

?

JPS5773592

код для вставкиСкачать
Patent Translate
Powered by EPO and Google
Notice
This translation is machine-generated. It cannot be guaranteed that it is intelligible, accurate,
complete, reliable or fit for specific purposes. Critical decisions, such as commercially relevant or
financial decisions, should not be based on machine-translation output.
DESCRIPTION JPS5773592
Description ? 1, Name of Invention
Ultrasonic probe and method of manufacturing the same
3. Detailed Description of the Invention The present invention is in line with the structure of a
pressure-formed ultrasonic probe and its manufacturing method. In a piezoelectric transducer
with thickness imaging used conventionally for underwater ultrasonic radiation or ultra-back
wave diagnosis, the thickness of the piezoelectric plate is y quarter of the wavelength of the
ultrasonic wave, and The back of the body is each glued to the back support via a so-called
quarter wave plate for acoustic impedance matching. FIG. 1 is a perspective view showing the
structure of a conventional ultrasonic transducer. Referring to FIG. 1, assuming that the thickness
of the piezoelectric plate (1) is ? of the wavelength of the ultrasonic wave, the thickness of the
piezoelectric plate is 1/4. (3) is provided in advance. Piezoelectric plate (1) S edge EndPage: 1
through the electrode (3) thickness of the ultrasonic wave wavelength is quarter-quarter-halfoddling or an odd multiple thereof, and piezoelectric plate and back support ( The intermediate J
@ (5) of the material higher than the intrinsic acoustic impedance of 4) is adhered to form a
transducer. The power received from the electrical terminal (6) of the transducer is divided in the
direction of the front and back sides of the piezoelectric plate (1), ie in the direction of the
propagation medium (force and back support (4) but back support (4) A part of ultrasonic power
is lost due to the adhesive layer (8) existing between the electrode (3) on the side of the
piezoelectric body and the intermediate layer (5), and it is reflected by the quarter wave plate
The ultrasonic power traveling toward the propagation medium (7) also decreases. Furthermore,
it has the disadvantage that the phase is also shifted by the thickness of the adhesive layer (8).
On the other hand, the input power from the transformer air gap (6) is from the surface to the
liquid or living body where the acoustic impedance of the propagation medium (7) is extremely
04-05-2019
1
low compared to the acoustic impedance of the piezoelectric plate itself. We have the
disadvantage that the acoustic power radiated to the propagation medium is reduced by the prior
art impedance mismatching. The present invention has been made to eliminate these drawbacks,
and the thickness of the back of the piezoelectric plate is the wavelength of the ultrasonic wave
of y-quarters, and the material is higher than the specific acoustic impedance of the rolled body
and the back support. By directly providing the intermediate layer of the back layer without
adhesion, that is, the back support side electrode on the indented body for polarization, the
thickness of the electrode of the ultrasonic wave is only y quarters of the wavelength of the
ultrasonic wave. By making the intrinsic acoustic impedance higher than the intrinsic acoustic
impedance of the piezoelectric plate and the back support, the low acoustic impedance
propagation medium such as liquid or living body or the sound can be efficiently without loss of
the power input. The load can be radiated.
Ultrasonic probe and method of manufacturing the same
Hereinafter, the present invention will be described in detail with reference to the drawings. FIG.
2 is a perspective view showing one embodiment of the present invention. Piezoelectric plate (9),
intermediate layer I, back support ? ?. An electrode Q1 is provided, and a transformer is
configured. The power is transferred from the back and forth direction of the piezoelectric plate
(9), that is, the body U * body (1412 and back support ? direction), but back support Since the
thickness of the intermediate layer Q1) is directly reflected by the electrode on the rolled sheet of
?-sea, ie, directly reflected by the intermediate layer ? with the thickness of the quarter
wavelength, the pressure it (9) The phase of the acoustic power directed directly to the
propagation medium I coincides with the phase of the acoustic power that is reflected from the
piezoelectric plate (9) to the intermediate layer U? and reflected by the intermediate layer to the
propagation medium ?, 2 The two waves are superimposed, and ultrasonic power can be
efficiently transmitted to the propagation medium 0 ?. Furthermore, the acoustic impedance of
the back support side is increased by tilting the acoustic impedance of the piezoelectric plate (9),
and the acoustic impedance is continuously decreased toward the object side, preferably the
object The acoustic impedance of the piezoelectric body (9) on the side is equal to the acoustic
impedance of the object, that is, the propagation medium, thereby efficiently transmitting the
acoustic power to the propagation medium having a small acoustic impedance such as a living
body. Can. FIG. 3 is a cross-sectional view showing a part of the principle of the present
invention, that is, a piezoelectric sheet in which acoustic impedance changes continuously in the
thickness direction. A piezoelectric plate consisting of a composite is sanded by -C with an
intermediate layer source of a quarter wave thickness and a cathode uI and an electrode ?D. The
proportion of the inorganic ferroelectric powder 111G is increased toward the intermediate layer
a frame side, and the ratio of the inorganic ferroelectric powder al19 is slightly increased as the
density of the inorganic ferroelectric powder al19 increases toward the ? pole t17). As
04-05-2019
2
described above, in the non-invention, one surface of the piezoelectric plate is bonded to the back
support through the radiation surface of the ultrasonic wave and the intermediate layer whose
surface direction is the thickness of the quarter wavelength, and one high frequency field is In an
ultrasonic probe which applies piezoelectric momentary mechanical vibration in thickness mode
and radiates or detects ultrasonic waves from a radiation surface, the intermediate layer is one of
piezoelectric temporary pole and one polarization electrode. In addition, by changing the acoustic
impedance of the piezoelectric plate continuously on the back support side in the thickness
direction of the four pressure plates and on the back medium side continuously, highly efficient
and highly reliable ultrasonic transducer can be obtained. You can get it. Hereinafter, the probe #
of the present invention will be described using a specific example.
(Example) EndPage: Cobalt tungstate titanium zircon lead fine powder 300pr with 2 average
particle diameter 2?, zinc oxide 1fir as a vulcanizing agent, n-butyl acrylate 37r, NBR latex
20171, 0.1 mol / l sulfite water A dispersion suspension of 480 m / 0.1 N aqueous hydrochloric
acid solution 10 mJ in 520 ml of ion-exchanged water is placed in a ball mill, stirred and mixed
at 30 ░ C. for 2 hours for graft polymerization, and then washed with water and dried. Obtain a
graft polymer composite containing 6.7 parts by weight. The graft polymer composite thus
obtained was used as a raw material, and stretched by 8 times by roll mixed wire calendaring to
obtain a sheet-like composite piezoelectric material 125 microns thick. The acoustic impedance
of the sheet-like composite piezoelectric material is 5. Place it on an inorganic thin plate
(tungsten plate) with a thickness of quarter wave with ox 10'q / m "seconds or more, and press
forming at the temperature near the melting point of the sheet-like composite piezoelectric
material The intermediate layer having a thickness of a quarter wavelength is
thermocompression bonded. Next, a silver electrode with a thickness of 2 microns is provided by
vacuum evaporation in the crucible where the electrode of the composite piezoelectric material is
not provided, and then 200 KV / (: ML DC electric field is applied for 2 hours in silicone oil at
130 ░ C. After applying a DC voltage, the silicone oil was cooled to room temperature and
polarization was completed. The piezoelectric constant in the thickness direction (d3i) of this
sheet-like composite piezoelectric material was measured to be 4,4 О 10 ? ? ? C / N. On the
other hand, thermocompression bonding of a quarter wavelength thick electrode / intermediate
layer is cut from the surface where the electrode is not provided to measure the velocity of sound
and density, and the acoustic impedance is inclined in the thickness direction of the sheet. I
confirmed that. A composite piezoelectric material tungsten electrode on one side with a silver
electrode on one side and a quarter wavelength thick tungsten electrode on the other side was
bonded with an epoxy adhesive to a ferrite rubber plate as a back support. Further, an insulating
film was provided on the silver electrode of the composite piezoelectric material by plasma
polymerization of Teflon, to prepare an ultrasonic transducer. Next, as a comparative example, a
silver electrode of 2 microns in thickness is provided by vacuum evaporation on both sides of a
125 ckron composite piezoelectric material obtained in the same manner as the present
invention, and then 200 / cIL in 130 ░ C. silicone oil. A direct current electric field was applied
04-05-2019
3
for 2 hours, and then the silicone oil was cooled to room temperature while applying a direct
current division metal, and polarization was performed. One side was room temperature cured
with a linear epoxy adhesive, and a tungsten plate having a thickness of -V length was bonded to
a ferrite rubber plate with an epoxy adhesive.
Furthermore, a plasma-polymerized insulating film of Teflon was provided as in the present
invention. The ultrasonic transducers (both of which have a resonance point at 5.2 MHz)
prepared according to the present invention and the comparative example. Apply one sine wave
to each ultrasonic transducer created using a pulser for 5.2 rAHz, receive the reflection from the
acrylic plate placed on the water IQ + Jl with the same ultrasonic transducer, The voltage
sensitivity was compared. As a result, the ultrasonic transducer created according to the present
invention is 16 V, while the 9 ultrasonic transducer created based on the comparative example is
3 v, and the voltage sensitivity is about 5 @, the present invention The one based on was
excellent. This means that the ultrasonic transducer according to the present invention has no
loss on the back support 4 + side as compared with the comparative example. Then, matching of
the echo impedance with water as the propagation medium can be taken, and the ultrasonic
power can be efficiently transmitted to the water, and the reflected wave reflected from the
acrylic plate to the weir can be efficiently transmitted to the transducer. It is believed that there
is.
4. Brief description of the drawings FIG. 1 is a view showing a prior art example, FIG. 2 is a view
showing an embodiment of an ultrasonic probe according to the present invention, and FIG. 3 is
an explanatory view of a part of FIG. is there. 9 и и и pressure a temporary, 10 и и 1 pole. 11 ? ?
? intermediate layer, 12 ? ? ? back support. 13: Electric shoulder, 14: Transmission medium.
15: Resin matrix, 16: Inorganic triggered wax main powder. 17 иии Electrode, 18 иии No
intermediate. Attorney Patent Attorney General Noriyuki Koki et al. 1 person EndPage: ?
04-05-2019
4
Документ
Категория
Без категории
Просмотров
0
Размер файла
13 Кб
Теги
jps5773592
1/--страниц
Пожаловаться на содержимое документа