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JPS5188184

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DESCRIPTION JPS5188184
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 and FIG. 2 are perspective views of a
conventional surface acoustic wave device, FIG. 3 is a back view of the surface acoustic wave
device shown in FIG. 2, and FIG. FIG. 5 is a perspective view of a surface acoustic wave device,
FIGS. 5 and 6 are a back view and a sectional view of the surface acoustic wave device shown in
FIG. 4, respectively, and FIG. 7 is another surface acoustic wave device according to the present
invention. Fig. 8 is a back view of the embodiment, Fig. 8 is an explanatory view showing the
condition of the volume wave on the bonding surface of the substrate and the strip, and Fig. 9 is
a chart showing the relationship between the elastic wave velocity ratio and the reflectivity of the
volume wave. . E и Transmitting wave converter и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и
и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и и One transmitted volume wave. Clear 1 figure Z
figure-179-real opening 51-88184 (2) = + '3 figure 4 mouth-+ 7 figure-A-8 mouth q ro-180-
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a surface acoustic
wave device, and more particularly to a surface acoustic wave device whose influence on the
electrical characteristics of the volume wave generated in the device is suppressed. Surface
acoustic wave devices are devices of various electronic devices. Recently, it has come to be in the
limelight suddenly in and out, the conventional surface acoustic wave device is shown in Figure
1. It had a structure as shown in Section 2. First of all. The structure of the surface acoustic wave
device and its operation, according to the 4 "%" diagram. General explanation, 11th base 7 и 1 и и и.
In FIG. 1, the comb-teeth-shaped transmission transducer 5 and the reception transducer 4 are
mounted on the surface of the piezoelectric substrate, and when the transmission transducer 5 is
driven by the power supply 7, it is on the substrate surface. Generates a surface wave 6 which is
propagated along the propagation surface of the substrate. The surface wave 6 is converted
again into an electrical signal by the wave receiving converter 4. This surface acoustic wave
element can obtain various electrical characteristics by setting in advance the arrangement
method of the transmission converter 6 and the reception converter 4, the material and shape of
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the substrate, etc. It has the feature that it can be used for (7. Generally, in a surface acoustic
wave element, when a transmission converter is driven by a power supply to generate a surface
wave, a volume wave is generated which propagates through the substrate in addition to the one
surface wave. In FIG. 1 described above, the three volume waves 5 propagate through the
substrate 15 at 15 and are reflected at the back surface 9 of the substrate, and when they reach
the receiving transducer 4, the electrical characteristics of the surface acoustic wave device are
as follows. Adversely affect That is, in the case of a filter to which, for example, a surface acoustic
wave element is applied, the characteristic of the filter is significantly impaired since the volume
wave response appears in the vicinity of the frequency 207 c. . Moreover, this volume wave
response is difficult to predict and its amplitude is large, so it is necessary to remove it.
Therefore, as shown in FIGS. 2 and 5, in order to eliminate the adverse effect of such volume
waves, the surface opposite to the surface on which the surface waves of the substrate propagate.
That is, a diamond cutter or the like is used for the back surface 9. In the prior art, a structure
has been used in which a plurality of grooves 8 having the same depth as the wavelength are
formed at the same interval as the wavelength, and thereby the volume wave 5 is scattered 7n. In
this structure, reducing the body and semen reaching from the transmission converter to the
reception converter and disturbing the phase thereof reduces the influence of the abovementioned volume wave, and is practically sufficient. The effect was raised. However, this
conventional structure 15 uses a diamond cutter etc. for the substrate.
Since the grooves having a depth of about wavelength are made at the intervals of the
wavelength of the target frequency, it takes a long time for the process and the work ability. The
yield of the surface acoustic wave device is poor because the rate is too low and the substrate is
often damaged 7 "in this process. As a result, the surface acoustic wave device becomes
expensive. Therefore, it is an object of the present invention to eliminate the above-mentioned
disadvantages of the prior art in a surface acoustic wave element, and to scatter the volume wave
generated when the transmission transducer is driven, to thereby obtain the electrical
characteristics of the volume wave element. Provided is a surface acoustic wave element capable
of suppressing an influence exerted thereon and capable of being manufactured at a low yield
with a good yield. ????? In order to achieve this purpose according to the present invention.
In this case, the elastic cloth is a surface acoustic wave element in which a plurality of strips
made of solid material are bonded to the back surface of the substrate on the opposite side to the
surface that constitutes the passage for propagation of one surface wave. A surface wave element
is provided. In the surface acoustic wave device according to the present invention, the die is on
the back surface of the substrate with the conventional device. Instead of grooves made using
Yamondo Canota etc., a strip as shown in the above 15 is provided, and this strip has the same
function as the conventional groove to scatter one volume wave and make the element Since it is
possible to suppress the adverse effect on the electrical characteristics, and since this strip is
attached to the substrate by bonding, the fabrication time is short, and the conventional 20'-11.4-. Such damage to the substrate is eliminated and the yield is improved, so that it can be
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manufactured inexpensively. Next, one embodiment of the surface acoustic wave device
according to the present invention will be described with reference to FIG. FIG. 4 is a perspective
view thereof. FIG. 5 is a back view, and FIG. 6 is a cross-sectional view showing an X-Y cross
section of FIG. In the figure, on the back surface 9 of the piezoelectric substrate y, a plurality of
small pieces 2 made of the same piezoelectric material as that on the substrate is adhered by an
adhesion means. ?? The front side of the substrate 1 has the same configuration as that of
FIGS. 1 and 2 described above. In this surface acoustic wave element, when the transmission
wave 10 converter 6 is driven by the power supply 7 to generate the surface wave 6, in addition
to the one surface wave 6, the volume wave 5 propagating inside the substrate 1 is
simultaneously generated. FIG. 8 is an explanatory view showing the condition of the volume
wave и 5 on the bonding surface of the back surface 9 and the strip 2 on the substrate. As shown
in the figure, the volume wave 5 propagated inside the base plate 15 is divided into a reflected
volume wave 51 reflected at the bonding surface and a transmitted volume wave 52 transmitted
through the bonding surface and scattered at the strip 2. . ??????? On the other hand,
if a method such as vapor deposition is used as the above-mentioned bonding means, the
thickness of the bonding layer can be reduced to about 06 ? or 2 ░ 1 ииииии, but the thickness of
the bonding layer is about this The purpose of scattering two volume waves can be achieved
because the reflection of the volume waves by the adhesive layer is slight and negligible.
In the embodiment, the strip 2 is described as being made of the same piezoelectric material as
the substrate ?, but the strip 2 may be made of another material different from the piezoelectric
material used for the substrate ?You can also. That is, in FIG. 9, two materials having different
elastic wave velocities are in contact. It is a chart showing the relationship between the elastic
wave velocity ratio 10 of these two materials and the reflectivity of the volume wave, when you
are doing so. As is apparent from this figure, if it is decided how much the volume wave 51 to be
reflected to one volume wave 5 is to be suppressed according to the purpose of use of the
element, the strip 2 of FIG. When a material 1 such as a glass plate having an elastic wave
velocity 15 different from that of the substrate material is used as the material,. In the present
embodiment, among the volume waves 5 generated in the transmission converter 3, the
transmission volume wave 52 transmitted through the strip 2 is scattered in the strip 2 and
disturbed in phase and phase. 1. For example, when used for a filter 201--6- 1. I substantially
eliminate the influence on the electrical characteristics of a surface acoustic wave element such
that a volume wave response appears at about 15 times the operating frequency. be able to. In
the embodiment described above with reference to FIGS. 4 to 6, the strips 2 having a
quadrilateral cross section made of the same material as that of the substrate 1 are used, and are
regularly arranged as shown in FIG. Although it is bonded, one invention is not limited to this. ?
????? The shape of the strip may be of, for example, a triangular cross section, some 10 or
more complex shapes. In addition, according to the purpose of use, according to the purpose of
use, it is possible to select and use an appropriate material according to FIG. 9 according to the
purpose of use. In addition, the arrangement of strips 2 is as shown in FIG. It is good even if it is
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a random arrangement. The arrangement of the strips 2 is most effective when it is performed at
an interval of 5 wavelengths, but if it is an interval close to the wavelength, almost equivalent
effects can be obtained. Furthermore, in the previous embodiment, The strips 2 are glued over
the entire back 9 of the substrate! However, sufficient effect can be obtained even if the strip 2 is
bonded only to the back surface 2 и 1 иииии 1 side between the transmission wave converter 6 and
the reception wave converter 4. As described above, according to the present invention, in one
surface acoustic wave element, in order to suppress a volume wave generated when driving a
transmission converter, an elastic wave of the same material as that of the substrate or the same
degree is applied Since a structure in which a plurality of strips made of a material having a
speed are adhered is used, "the time required for fabrication is shortened compared with the
conventional method of forming a groove on the back surface [2 is also a conventional structure].
Since the substrate is not damaged and the yield of the substrate becomes good 10, the surface
acoustic wave device can be manufactured at low cost.
It has a remarkable effect.
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