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JPS5635598

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DESCRIPTION JPS5635598
Description 賽 1, Name of Invention
Method of manufacturing speaker diaphragm
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a loudspeaker
diaphragm, and in particular to a method of manufacturing a dome-shaped diaphragm. It is well
known that a material having a large Young's weight and a small density 、, in other words, a
material having a large / ρ is preferable as a diaphragm material for a speaker. Beryllium and
boron are the ones with a large E / が, but these materials may be used to form thin plates by
rolling like aluminum, titanium, etc. which have been conventionally used as diaphragm
materials, or diaphragms by pressing. It was difficult to use it as a diaphragm material because it
could not be processed into the shape of 0. Therefore, in recent years, the diaphragm substrate
made of aluminum, titanium, etc. is made of beryllium, boron, etc. A multi-layered diaphragm has
been developed in which a coating layer is formed by attaching a large material of ρ by
appropriate means such as vacuum evaporation, snothing, Io EndPage: 1 and plating, vapor
phase growth, etc. It is applied by the person as Japanese Patent Application No. 49-27263 and
Japanese Patent Application No. 49-137760. Since this diaphragm has a large / 大 き い as a
whole, it has been possible to produce a speaker with good characteristics. However, in the case
of the above-mentioned diaphragm, a diaphragm substrate of aluminum, titanium, etc. only
increases the mass of the diaphragm and is completely unnecessary, but at present, there is no
method tJ for effectively removing this diaphragm substrate. The The present invention has been
made in view of the point of view, and an object thereof is a method of manufacturing a
diaphragm for a speaker, wherein the diaphragm substrate and the J-thick coating layer having a
large Young's modulus and density are peeled off by a simple means. Oh? Fence 13B56-35598
(2). Next, an embodiment of the present invention will be described with reference to the
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drawings. 1 is a diaphragm substrate formed by dome-shaped metal such as glass, quartz, silicon,
ceramic or tungsten, molybdenum, tantalum, etc. No-face Nibe IJIJium, boron, etc. Large king
ratio and density A small material is deposited by appropriate means such as vacuum
evaporation, sputtering, ion plating, or vapor deposition to form the coating layer 2. Among the
methods for forming the coating layer 2 above, the vapor deposition means is superior in the
efficiency of the coating. And as a heating method at the time of vapor deposition, a method by
an electron beam is most suitable. Also, in order to improve the properties of the coating layer 2,
particularly the coating layer of boron, it is necessary to heat the diaphragm substrate 1. By the
way, when the temperature of the substrate 1 of metal such as tungsten, molybdenum or
tantalum is 300 to 650 ° C., a film having an amorphous structure is obtained, and in this range,
the characteristics of the deposited film, in particular the Young's modulus, does not increase
very much.
If the temperature is raised to around 650 to 700 ° C, small crystal grains may appear and the
characteristics may improve. However, in order to obtain near-bulk characteristics, the substrate
1 must be heated to nearly 1000 ° C. However, in consideration of problems such as mass
production, heating at about 700 to 800 ° C. is appropriate. The heating of the substrate 1 is
also required except for the vapor deposition means. The diaphragm substrate 1 on which the
coating layer 2 is formed by the above means is immersed in an etching solution such as
hydrofluoric acid. As a result, when the substrate 1 is made of glass, quartz, silicon or ceramic,
the periphery of the coating layer 20 is corroded, and when the substrate 1 is tungsten,
molybdenum or tantalum, the periphery of both the substrate 1 and the coating layer 20 The
part is corroded. In addition, etching may be performed thinly over the entire surface. Next, the
material etched by the above etching solution is immersed in water, and after the water 3 is
caused to enter the etching portion, the water 3 is frozen in liquid nitrogen. Next, the substrate 1
is heated to 500 ° C. to 600 ° C., but the substrate 1 and the coating layer 2 are separated
because the thermal expansion coefficients of the substrate 1 and the coating layer 2 are
different by this heating, and thus both are peeled off. Further, by repeating the operations of
freezing and heating of water in the above, good separation can be achieved. EndPage: 2 In the
case where the thermal expansion coefficients of the substrate 1 and the coating layer 2 are
largely different, for example, when using tungsten or molybdenum for the substrate 1 and using
boron for the coating layer 2, peeling is more reliably performed. Can. Diaphragm by coating
layer 2 manufactured above. In particular, in the case of a porous coating layer, the mechanical
properties of the boron are so brittle that it is necessary to have toughness. For this purpose,
heat treatment may be performed after forming the coating layer 2 of boron on the substrate 1,
or zirconium, titanium, aluminum or the like may be added to the boron. When the heat
treatment was performed at 1300 ° C. for about 5 hours, a very large effect was obtained. In
addition, when adding the above soft material, the toughness was large & good at about 5 to
10%. If the addition amount is 30% or more, the characteristics of boron are considerably
weakened and the characteristics of the diaphragm are deteriorated. In the above embodiment,
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the coating layer 2 is formed only on one side of the diaphragm substrate 1 and is shown to be
etched and expanded by freezing. However, the coating layer 2 is formed on both sides of the
substrate 1 and then If the same work is done, two diaphragms can be obtained at one time.
In addition, when ultrasonic wave is added to the etching liquid when etching is performed,
etching can be performed quickly 〇 As described above, the diaphragm substrate is coated with
a material having a large Young's modulus and a small density, as described above. Then, it is
immersed in water to allow water to enter between the substrate and the coating layer, and this
water is freeze-puffed and heated at the next mark to make the coating layer different by the
difference in the thermal expansion coefficient of the two. Since it peels from a base, it has an
effect that the diaphragm of only a coating layer can be manufactured easily and rapidly.
4. Brief description of the drawings is a diagram showing the steps in the method for
manufacturing a speaker diaphragm according to the present invention, FIG. 1 is a crosssectional view of forming a coating layer on the diaphragm substrate, FIG. FIG. 3 is a crosssectional view of the coating layer after it is peeled from the above, with water being allowed to
enter between the coating layers. 1 · · · Diaphragm base 2 · · · · · Coating layer 3 · · · · · · · Water 1
Fig. 2 D っ EndPage: 3
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