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JPS5797295

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DESCRIPTION JPS5797295
Acoustic material phosphorus alone or a phosphorus compound as a main component of the
invention.
Claims
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to an acoustic
material suitable for use in an acoustic component such as a diaphragm of a speaker or a
microphone, and in particular to improve acoustic effect by utilizing the acoustic characteristics
of phosphorus. In general, as an acoustic material used for an acoustic component such as a
diaphragm of a single speaker or a microphone, a low density, a high sound velocity, and the like
are required. This is because if the density is small, the overall weight of the diaphragm or the
like is reduced, which is preferable in terms of the efficiency of acoustic conversion. In addition,
if the density is small, the thickness t of the diaphragm or the like can be increased while
maintaining relatively light weight, and the rigidity (determined by E when Young's modulus is E)
can be increased. As a result, faithful acoustic conversion is possible. It is. Also, if the speed of
sound is large, the divided resonance in the high region can be removed from the use frequency
band, and as a result, no awkward natural sound is generated. By the way, at present, in order to
obtain an acoustic material having excellent acoustic properties such as low density and high
sound velocity, a single metal such as titanium or beryllium, or a nonmetallic simple substance
such as boron, carbon or silicon, or carbides thereof Compounds such as nitrides, oxygenates and
borides are used. Then, specifically, a predetermined material layer, for example, a titanium layer
is deposited on the substrate by a vacuum evaporation method, a plating method, an alloy
method, a plasma chemical vapor deposition method, a sputtering method, an electron beam
evaporation method or the like. However, the acoustic properties of various materials currently
used are as shown in Table 1, and only beryllium is the one that sufficiently satisfies both the
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requirements for density and sound velocity. Other substances are somewhat inadequate. For
example, when titanium is compared with beryllium, the density is about 2.5 times that of dogs,
and the speed of sound is about 0.4 times that of them. EndPage: Table 1 (However, the specific
modulus is two! Therefore, development of an acoustic material having excellent acoustic
properties comparable to that of beryllium has recently been demanded. In addition, beryllium
has a strong influence because it has harmful effects on the human body and it is difficult to
manufacture. As a result of repeated research under such a request, the present inventor has
made the present invention with the insight that the density of phosphorus is as low as 1830 kt /
m and the speed of sound is as high as 9054 m / sec. The present invention has been made in
view of these points, and an object of the present invention is to provide an acoustic material
having an excellent acoustic effect by utilizing the excellent acoustic characteristics of
phosphorus. That is, in the present invention, a phosphorus simple substance or a phosphorus
compound is deposited on a predetermined substrate to obtain an acoustic material.
Hereinafter, the acoustic material of the present invention will be described in detail. In the
acoustic material of the present invention, for example, a phosphorus simple substance or a
phosphorus compound is deposited on a substrate in which a diaphragm of a microphone is
shaped. In this case, a substrate which can be removed by etching, for example, an aluminum
plate may be used to remove this aluminum plate by etching so that only the deposited layer may
be obtained. On the other hand, a laminated material of the deposited layer and the substrate As
the sound material. In the case of laminates, the acoustic properties of the substrate can be
added. When a single phosphorus is deposited on the substrate, a homonuclear polymer
represented by (P) n can be obtained. That is, it is known that elements enclosed by a solid line in
the periodic table shown in FIG. 1 constitute a homonuclear polymer, and phosphorus also
constitutes a homonuclear polymer. As a result, the strength of the deposited layer of
phosphorus can be made sufficiently large. As the / A1 phosphorus compound, BP, ARP, GaP,
TiP, ZrP or the like can be used. In this case, it is known that elements enclosed by a solid line in
the periodic table shown in FIG. 2 are alternately bonded to constitute a heteronuclear polymer,
and speaking of QyK Ly, (P-N-P) n, (PN) n, (BP) n. A heteronuclear polymer such as (AgP) n can
be constructed. As a result, the strength of the deposited layer of phosphorus compound can be
sufficiently increased. As an example, the Vickers hardness of (BP) n is 4000 Hv as shown in
Table 2, and it can be seen that it is harder than other compounds and the like. Next, a method of
producing an acoustic material will be described. First, an acoustic material can be obtained by
depositing a simple substance of phosphorus or a phosphorus compound on a substrate by
physical vapor deposition. FIG. 3 shows the case where the phosphorus compound BP is
deposited on the substrate (1) by electron beam evaporation. In this figure, a crucible (2) is
charged with a phosphorus material (phosphorus compound BP) (3) obtained by the in-phase
method, and a substrate (1) is placed above the crucible (2). Then, an electron beam is applied to
the crucible (the trend phosphorus material (3) to deposit the phosphorus compound BP layer (4)
on the substrate (1). Of course, a two-beam method may be adopted, in which the phosphorus is
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evaporated on the one hand and the boron is evaporated on the other hand, whereby the
phosphorus compound BP layer (4) is deposited on the substrate (1). Further, sputtering or
resistance heating evaporation may be employed instead of the child beam evaporation. Second,
an acoustic material can be obtained by depositing elemental phosphorus or a phosphorous
compound on a substrate by a chemical vapor deposition method. FIG. 4 shows the case where a
phosphorus compound BP layer is formed on a metal substrate (1a).
In this figure, a crucible (2) is charged with a phosphorus material (phosphorus compound) (5),
which is irradiated with an electron beam to evaporate it. At the same time, the reaction gas is
caused to flow into the activated region shown by a broken line in the figure via the gas injector
(6). In this case, for example, the following reaction is performed to deposit the phosphorus
compound BP layer on the substrate (1a). BBra + 3 / 2H2 → B-4-3HBrEndPage: 2B 十 PBr3 + 5 /
2H2 → BP + 5HBr Alternatively, when a deposited layer of TiP is formed on a titanium substrate
by chemical vapor deposition, a reduced solid diffusion method may be performed. In this case,
for example, the following reaction is performed. Ti 十 PCJls + 5 / 2H2 → TiP + 5) (cQ)
Furthermore, in the case of depositing IJ N alone, a reduction method may be employed. The
reaction in this case is, for example, as follows. According to the acoustic material manufactured
as PBrB + 3/282-P + 5 HBr or Cg 3 + 3/2 H 2 → P + 3 HCg or more, excellent acoustic effects
can be obtained. For example, when an acoustic material is made of phosphorus alone, its
acoustic characteristics are as shown in Table 3, and thus it is extremely excellent in terms of
density and sound velocity. That is, since the density is smaller than 1830 ky / m and beryllium
(1840 k) 7 m, and hence the efficiency of the acoustic conversion is high and the rigidity can be
large, the acoustic conversion can be faithfully performed. Furthermore, since the velocity of
sound is as large as 9054 m / IIC and approximately beryllium (12329 m / IIC) K, it is also
advantageous for removing the split resonance out of the use frequency band. As described
above in Table 3, according to the acoustic material of the present invention, by utilizing the
excellent acoustic characteristics of phosphorus, it is possible to improve the efficiency of
acoustic conversion and the fidelity of acoustic conversion, and furthermore, use the divided
resonance frequency Out of the band, excellent sound effects can be obtained. The present
invention is not limited to the six examples described above, and it goes without saying that
various configurations can be taken without departing from the scope of the invention.
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 and FIG. 2 are diagrams for describing the
acoustic material of the present invention, and FIGS. 3 and 4 are diagrams showing an example
of a method of manufacturing the acoustic material of the present invention. (1) is a substrate,
(2) is a crucible, (3) is a phosphorus material, and (4) a beam / compound BP layer. O ', "<" ("lintercept (-0,0' J 'Z" Z "' nephropathy. EndPage: 3
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