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JPS6083495

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DESCRIPTION JPS6083495
[0001]
The present invention relates to an improvement for an electroacoustic transducer diaphragm, in
particular, a metal-based composite diaphragm, and a method of manufacturing the same. In
general, a diaphragm for audio equipment uses a material having a small density が and a large
Young's modulus as a material for the purpose of broadening the reproduction frequency band
and preventing division and preventing “perturbation” to improve the frequency
characteristics. It is a matter of well-known thing to pay attention to the vibration of the
diaphragm. However, with a single monthly plate, the rigidity is limited and A: l-I can not get the
performance that should be sufficient, so I combined the two or more types of Ishida and
reduced the apparent density of cattle # As for the appearance, there is a diaphragm with a high
Young's modulus of Si and Sandeji. There is a diaphragm of a configuration in which a highrigidity ceramic material is attached to the surface of a low density metal on one of the
diaphragms of such a composite structure. This fine moving plate has a large and low density
Young's modulus E and has a very large specific strength F / ρ very large characteristics.
However, the difference in the number of thermal expansion yarns between the base metal and
the ceramic etc. The layer was cranked or peeled off, and its performance could not be
sufficiently exhibited and could not be put to practical use. The present invention relates to a
lively plate for electric reverberation equipment and a method of manufacturing the same,
wherein the defect found in the prior art is eliminated by improving the composite 1114
structure utilizing the characteristics of the composite diaphragm. In the method of
manufacturing a J sliding plate according to the present invention, (1) a step of forming a metal
to be a base 1 of a vibrating plate into a vibrating plate shape. (2) Step of Forming Composition
Transition Layer (2) Composed of Compound of Oxide Yarn Ceramic and Base Metal by Physical
Vapor Deposition Method (pvD Method) on the Substrate 1 (3) The Composition Transition Layer
2 The reaction is carried out by the process of forming a highly rigid upper ramic layer (3) by the
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PVD method. That is, in FIG. 1, 4 is a diaphragm base, 5 is a target, 6 is a vacuum vessel, 7 is a
high frequency power source, 8.8 'is a refuse supply (掠, 9 is a vacuum pump). J (The core plate
obtained by Jt-like is made of metal as shown in FIG. 2) 1 (1 on the surface of body 1) IJ
composition transition layer 2 I 'f, "1 rigid ceramic Since the layer 3 is formed, the density ρ is
almost the same as the metal of the substrate, and the Young's modulus E is about the same size
as the ceramic, and (Y 1% plus a large specific strength F / ρ It becomes a diaphragm. In the
history, the composition transition layer (2) is a compound of the base metal and the surface
metal E7, and it is bonded to each layer together with '& J X contact, and the material is
continuous from metal to ceraminic. As a result, the cracking and peeling of the ceramic layer
seen in the conventional example are completely eliminated.
Base metal AA '! A may be a light metal such as aluminum, magnesium or titanium, or other
corrosion resistant stainless steel. Oxide yarns, nitride yarns, or carbide yarns have good results
as the size of ceramic yarns. Next, the production method and the results are further described
by 8T according to an example. EXAMPLE In FIG. 1, an IV 4g alloy foil having a thickness of 100
.mu.m is formed into a diaphragm shape to form a diaphragm base 4 and S! 02 is used as a
taggera 1-5 in a vacuum vessel 6 . Next, the inside of the vacuum vessel 6 is baked at a degree of
vacuum of 1 O-7 Torr and a temperature of 300 ° C., and then Ar gas flows from the gas supply
line 8.8 ′... Power 01m1! Flow into the vacuum chamber at a rate of 1 / min and adjust the
pressure to 1.5 x 10 -2 Torr. Then, apply a power of 600 W between the fine plate substrate and
the 5102 tarp node for 20 minutes. An intermediate transition layer (15 .mu.m) having a
composition of Mg.sub.25104 is formed on the Mg alloy follower plate base by conducting an
annealing process. Next, 02 gas in the container is discharged to introduce only Ar gas, and
pressure J is 1. By performing snokknolink between OX 10-2 Torr and wr about 600 W under
conditions of about ll, a slam layer (Sing 10 μ) consisting of Sing is formed on it and vibration 4
or force is completed; Do. The thickness of the composition bath transfer layer 2 was changed in
FIG. 3 to show the shear stress J (a value serving as a measure of the adhesion of the two layers)
between the metal substrate 1 and the ceramic layer 3. In the case where the thickness of the JI I
& transition layer 2 is 0, this is a conventional example, and it is a state in which a) direct
contact, 1) direct, 1) direct to the body 2), 2) direct bond, 1) AA1 1: j. In this embodiment, the
force is about three times that of the conventional example, and 'dJ' 44 of composition transition
j 'is recognized. Unlike the composite 4 'fI' discharge diaphragm in which the conventional
ceramic material coated with the conventional ceramic material is obtained by the method of the
present invention as described above, the four peristaltic plate is between the base metal and the
surface ceramic 4J material layer. Composition 3. Since the layer intervenes, the adhesion
between the base and the surface layer is strong and it is possible to obtain a speaker with
excellent system characteristics by fully utilizing the advantages of the diaphragm of the
composite structure.
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[0002]
Brief description of the drawings
[0003]
1 is a block diagram of a reactive sputtering apparatus, FIG. 2 is a partially enlarged crosssectional view of a perturbation plate of the present invention, and FIG. 3 is a shear stress
characteristic diagram.
The stiffness 1 is a substrate, 2 is a compositional transition layer, and 3 is a high ginseng
ceramic layer. E) 1) Figure 5 pairs Ii & l close transfer 1 · 訃; 匁 l-1 temple 3) "0 (μ)
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