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JPS52102022

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DESCRIPTION JPS52102022
Description 1 Title of the invention
Method of creating vibrator for acoustic converter
5 Detailed Description of the Invention The present invention relates to a vibration body for an
acoustic transducer such as a speaker, a diaphragm for a microphone, or a cantilever for a record
player cartridge 9, a base constituting a main structure of the vibration body, and a base The
present invention relates to a method of manufacturing a high-performance vibrator for an
acoustic transducer, in which materials having different properties are permeated and diffused to
increase the ratio of Young's modulus E1 or Young's modulus E of the oscillator material to
density ρ. Conventionally, light-weight and easy-rolling aluminum, titanium, etc. were often used
as materials used for the vibrator as described above, but in the case where the vibrator is a
diaphragm, a diaphragm made of such a material is used. In the case of a cantilever, a large
portion of the effective mass of the vibration system is occupied, in the case of a cantilever, in
which a specific vibration mode is generated overall and a large peak is generated in the high
frequency characteristics and a sound quality is impaired. It has been very difficult to reduce the
effective mass of the vibration system required to improve the performance of the cartridge. That
is, when the wall thickness and diameter of the pipe are reduced in order to quantify the
cantilever, the rigidity is reduced and the characteristics are suddenly killed. In order to improve
the above characteristics, the ratio E / of the Young's modulus E to the density ρ (hereinafter
referred to as the ratio stiffness) can be performed by using a material having a large ratio. Boron
is a material with a large relative stiffness E / ρ. Although there are beryllium etc., boron is
difficult to obtain and has good quality for c *), and the beryllium l'i manufacturing process
EndPage: 2 requires a large cost for pollution prevention equipment in EndPage: 2. In addition,
boron and beryllium are difficult to be processed by rolling, pressing and the like, and forming
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them into a predetermined shape requires a large amount of cost, and the shapes thereof are also
greatly limited. Therefore, materials such as aluminum and titanium that are easy to form and
process are formed into a predetermined shape, and boron, beryllium, etc. are coated by physical
vapor deposition or chemical means using the formed product as a substrate, diaphragm,
cantilever It is conceivable to obtain etc. By the way, when a coating layer is formed on a
substrate by physical vapor deposition or chemical means, it is desirable to heat the substrate to
150 ° C. or higher in order to improve the properties of the vapor deposited film, in which case
the substrate and the coating layer The coefficient of thermal expansion of the material is so
different that mechanical strain may occur after cooling, and the coating layer may be cracked to
be unusable. It has also been proposed to provide a coating layer of beryllium or boron or the
like on a substrate by vapor deposition etc. and peel off only this coating layer from the substrate
to produce a vibrating body of 171Jum or boron. The coating layer of beryllium or boron
produced by such means has low mechanical strength and has the drawback of being easily
broken.
Also, in order to form a coating layer on a substrate by means such as vapor deposition, an
evaporation apparatus such as electron beam heating is required, which requires a large expense
for the equipment, requires a long manufacturing time, and is extremely expensive. Become.
Therefore, a coating layer of an axial element is formed on a substrate to be a vibrator for an
acoustic transducer, and the substrate is heat-treated to diffuse a boron in the substrate.
However, the vibrator for an acoustic transducer according to this proposal has the feature of
forming a diffusion layer on the substrate, but in forming the diffusion layer, the substrate is
formed using physical vapor deposition or chemical means. In order to form a coating layer of
the diffusion material that forms the diffusion layer, the manufacturing process requires a large
amount of equipment, and when the coating layer is a very difficult-to-process material such as aa, the coating layer formation time It also has a drawback that it is long and expensive to
manufacture, and therefore the product cost of the obtained acoustic transducer vibrator is very
high. The present invention has been made in view of the point of view, and the seventh object of
the present invention is to provide an effective means for permeating and diffusing a material
different from the% substrate to the substrate to be a vibrator, and cheap and with uneven
characteristics. To obtain a high-performance vibrator for acoustic transducers. Next, the method
of manufacturing the vibrator for acoustic converter according to the present invention will be
described in detail with reference to the drawings. The present invention manufactures the
vibrator for acoustic converter having the diffusion region of the diffusion material in the
substrate to be the vibrator for acoustic converter. The first feature is that the powder is used as
a diffusion material to be coated on a substrate in the process of forming, and the powdery
diffusion material is added to the liquid in a well using the powder as a diffusion material. The
second feature is to form a suspension and coat this suspension on a substrate or to coat the
powder with an electrostatic suction force to apply coat EndPage: 3 ink. Therefore, the present
invention is concerned. The basic technical concept of a method of manufacturing a vibrator for
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an acoustic transducer having the first feature and a method of manufacturing a vibrator for an
acoustic transducer having the second feature will be described with reference to FIGS. 1 and 2.
FIG. In the figure, (1) is a substrate to be a vibrator for a p1 sound 5 饗 converter from an
inorganic solid material, and (2) is a coating layer of a substance to be permeated and diffused
into the substrate (1). The powdery diffusion material is composed of an inorganic solid material
having properties different from the above. Here, as will be described in detail later, a substrate fl
serving as a vibrator for an acoustic transducer, in which a diffusion region forming the coating
layer (2) is penetrated and diffused to form a diffusion region in the substrate (1) Since it is
desirable that the ratio of Young's modulus E to density ρ is high, titanium (Ti) and carbon (0)
are preferable, and diffusion material I / which is diffused into the substrate (1). im element (B)
and silicon (S1) are preferable p, and further, in relation to the substrate (1) and the diffusion
material, titanium (T □) and boron CB), carbon (0) and boron (9) respectively. And carbon (Ca +
and silicon (Sl)) combinations are most preferred in the ratio E / ρ of Young's modulus E to
density ρ.
The material of the diffusion material or I'i substrate (1) showed only a single element as
described above, but the property desired as a vibrator for an acoustic transducer has a large
Young's modulus E or a Young's modulus and a density From the viewpoint that it is preferable
that the ratio of よ い stop be large, the compound of this extra-single element, its alloy, etc. may
be used as long as it is an inclusion of the inorganic solid substance having the required single
element. Then, the method of forming the coating layer (2) of the diffusion material on the
substrate (1) will be described. First, as a first method, a direct current 1! With the field applied,
the powdery diffusion material is dispersed toward the surface of the substrate (1) by the action
of compressed air or electrostatic voltage, and the action of the charge given to the diffusion
material causes the p diffusion material to become the substrate ( 1) What is adsorbed and
formed as a coating layer (2), and as a second method, a powdery diffusion material is added to
the solution to make a suspension liquid, and this suspension is used as a substrate (11 In some
cases, the diffusion material is formed as a coating layer (2) on the substrate (11) by applying by
means such as coating or spraying, and then evaporating the solution of the suspension. The
evaporation of the solution does not require any special means for evaporation if the thermal
energy to be heated is used to diffuse the diffusion material into the substrate (1). Here, in the
above first method, this method is similar to the technique called electrostatic coating method
which is one of the methods of coating spread, but the coating layer of the diffusion material (2)
is applied to the substrate (1) After the adsorption formation, the coating layer (2) is adsorbed to
the substrate (1) as long as no external pressure is applied even if the DC electric field applied to
the substrate (11 is removed). keeping. In the second method, the solution constituting the
suspension is a liquid which does not cause a chemical or physical reaction with the diffusing
substance and which evaporates without leaving a substance which interferes with the diffusion
after application. Although it is desirable, the most easy to handle is water (I (20)) or a suitable
one when the substrate (1) is slightly soiled, such as EndPage: 4 trichlorne, acetone, etc. Highly
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volatile organic solutions are desired. Furthermore, in any of the above methods, the smaller the
diameter particle of the powdery diffusion material, the larger the contact area with the substrate
fil and the more effective it can be used. However, the diameter particles of the diffusion material
according to the present invention May be 50 μ or less, preferably 10 or less. Thus, after the
coating layer (2) composed of the powdery diffusion material is attached to the substrate (1) to
be the vibrator for the acoustic transducer, the diffusion material constituting the coating layer
(2) is The substrate (1) is heated by an appropriate means to the extent that it is introduced
(penetrated and diffused) into the substrate (1), and the diffusion material is permeated and
diffused into the substrate (1) to diffuse the diffusion region At into the substrate (1). -Form.
FIG. 2 shows a cross-sectional view of the substrate (1) thus obtained. The cross-sectional view of
the substrate (1) shown in FIG. 2 shows that all of the coating layer (2) of the diffusion material is
diffused with respect to a part in the thickness direction of the substrate (1). However, this can
be achieved by controlling the thickness of the coating layer (2) formed on the substrate +11
taking into account the thickness of the diffusion zone (3) desired relative to the thickness of the
substrate (1) it can. Of course, the diffusion region (3) to the substrate (1) may be made over the
entire surface in the thickness direction of the substrate (1) according to the desired purpose, or
the diffusion region (3 formed in the substrate (11 If the coating layer (2) is left on the surface of
(3), it may be removed by external pressure. A diffusion region (3) is formed in the substrate +11.
As a means for heating the substrate (1), an appropriate method may be used depending on the
heating temperature, and generally, an induction heating furnace and an electric furnace are
used, but by electron impact using heat of electron beam irradiation. It is also good. As described
above, when the diffusion region (3) is formed on the substrate (1) by the method of the present
invention, the coating layer (2) made of the powdery diffusion material is in close contact with
the substrate fl). The diffusion material penetrates and diffuses to the substrate (1), and a large
amount of products can be obtained without variation with a simple device and with few steps. In
particular, in the case of boron (a material such as Bl), one of the diffusion materials could not be
easily formed as a coating layer by physical vapor deposition or chemical means. Hereinafter,
specific embodiments of the present invention will be described with reference to the drawings.
EXAMPLE 1 In FIGS. 3A to 3C, a 25 μm titanium (T1) thin plate substrate (1) is formed into the
desired shape of a diaphragm for a dome-shaped acoustic transducer, and the particle diameter is
0. Spraying boron powder in the range of 5μ to 5μ with an electrostatic spray gun forms a
silicon coating layer (2) (2 '). Then, the substrate fil having the boron coating layers (2) and (2 ')
formed on both sides is set in the electric furnace a11, and the air in the electric furnace + Ill is
exhausted from the discharge port α2 to about 10-' [Torr] After the pressure is reduced to
0.degree., Hydrogen gas is introduced from the inlet 0 to fill the inside of the electric furnace al.
After that, it is passed through a heater a4I wound around the outer peripheral surface of the
electric furnace αυ to raise the temperature in the electric furnace to 1000 ° C. and keep the
same temperature for 1 hour, and the substrate (1) K heat treatment EndPage: 5 given.
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Example 2 A 100 .mu.m thick carbon (03 molded product is used as a base (11, heat treatment is
carried out at a temperature of 1500.degree. C. for 3 hours under the same heat treatment
conditions as in Example 1). EXAMPLE 6 As shown in FIG. 4, a titanium thin plate [T1] plate base
+1+ of [, 50μ is formed into a desired shape of a diaphragm for a dome-shaped acoustic
transducer. On the other hand, a suspension is prepared by adding water (H 2 O) K to boron
powder having a particle diameter in the range of 1 μ to 8 μ, and this suspension is applied to a
substrate (1) by a spray gun to form a coating layer (2). After formation, the base (1) coated with
the suspension is mounted on an upper mold all having a shape substantially the same as the
outer shape of the base (1) and the lower mold ((), and the upper mold CIl! The lower mold (33)
holds the substrate (1) in a state of holding it by means of a molding screw. Thereafter, the
substrate (1) is heat-treated at a temperature of 1200 ° C. for 2 hours by a heating means not
shown. The mold shown in this example prevents deformation caused by heating beyond the
transition point of the substrate (1) and deformation caused by the difference in thermal
expansion coefficient between the substrate (1) and the coating layer (2). It is for. EXAMPLE 4 A
titanium pipe substrate (11 having a thickness of 10 μm, having a desired shape to be a
cantilever, is obtained by drawing, and the outer surface thereof is coated with a suspension of
boron powder and trichrene by a spray can. The substrate (1) K coating layer is provided.
Thereafter, in the same manner as in Example 2, the substrate (1) is held by the mold Gil + and
the mandrel + 4Z and heat treated.
The simple illustrations of the four drawings are all related to the present invention, and FIG. 1 is
a principle view of the present invention showing a manufacturing method for obtaining an
acoustic vibrator having a diffusion region, wherein a substrate and a coating are provided. FIG. 2
is a cross-sectional view of a layer, FIG. 2 is a cross-sectional view of a base body to be a vibrating
body for an acoustic transducer having a diffusion region, and FIGS. 3A to 3C show Embodiment
1 of the present invention. 4 and 5 are a second embodiment and a third embodiment of the
present invention, respectively, illustrating the method of manufacturing the dome-shaped
diaphragm of the speaker and the cantilever of the pickup cartridge. FIG. (7) ...... substrate (2) (2 ')
----- coating layer (3) ...... diffusion region applicant Pioneer Attorney Takino Hideo EndPage: 6
No. 3A Figure EndPage: 7
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