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The present invention relates to a diaphragm for a speaker and a method of manufacturing the
same, and a first object thereof is to realize a skin material and a core material made of a material
of low density and high modulus of boron or iron IJium. To provide a lightweight and highperformance speaker diaphragm. The second object of the present invention is a method of
manufacturing a speaker diaphragm which can be thermocompression-bonded with an adhesive
without breaking the skin material and core material made of low density and high elastic
modulus material of boron or indium IJium. It is to provide. In general, the speaker diaphragm
can follow the driving force provided by the electromagnetic conversion system within its
operating frequency band with sufficient locability and vibrate on the entire surface in the same
phase (piston vibration). It is considered an ideal. Also, from the viewpoint of the sound emission
characteristics, a so-called flat diaphragm is considered ideal, in which the radiation surface is
flat. In this flat diaphragm, in order to prevent split resonance and widen the piston vibration
area, the rigidity by the shape effect in the cone type or dome type is determined by the
thickness of the diaphragm, and as a result, the diaphragm weight increases and the efficiency of
the speaker The problem was that the As a method to remedy this defect, a diaphragm with a
side inch structure in which a skin material is adhered to the surface of a core material consisting
of a hollow core has been put to practical use, but even if such a sand inch structure is used, it is
sufficiently lightweight No effect was obtained. Therefore, attempts have been made to reduce
the weight and weight of the material that makes up the sandwich structure in order to further
increase the effect, but when the material is made thinner, the material strength decreases, and
during buckling and deformation during assembly There is a problem that the acoustic
characteristic is lowered due to the generation of partial resonance (surface noise phenomenon).
In order to improve the weight defect of such a plane diaphragm, a material having a low density
and a high modulus of elasticity is desired, and boron and beryllium are known as a material
satisfying this requirement. However, boron and beryllium have problems with poor
machinability such as rolling and forming, and their application range is limited even by using
vapor deposition and processing techniques such as hot pressing in an inert atmosphere. As a
general structural material for acoustic transducers, aluminum and titanium were at the center.
Further, in the diaphragm of the structure as described above, the balance of the physical
properties of the skin material and the core material is also important. For example, when the
aluminum core material is combined with a skin material such as beryllium or boron, the skin
material is aluminum or As compared with the case of using titanium, the contribution rate to the
characteristics by the material physical properties is low, and it is difficult to fully utilize the
physical properties of the skin material.
The present invention solves the above-mentioned conventional drawbacks, in which a surface of
a hollow core material made of boron or beryllium and having a three-dimensional arbitrary
shape is bonded to a skin material made of boron or beryllium. Then, in the process of forming a
film of boron or iron IJ IJ on the substrate by physical vapor deposition (hereinafter referred to
as PVD) using the ionized particles, the core material and the skin material are ions entering the
substrate It is produced by changing at least one of the number or kinetic energy of ions. In this
way, when the thin film layer is formed using the vapor phase growth method, it is possible to
remove the shape distortion caused by the internal stress remaining in the formed film, and to
obtain the core material and the skin material with less warpage due to the residual stress. This
has the advantage of being able to be bonded without breaking when the core material and the
skin material are thermocompression bonded with an adhesive. Here, although the shape of the
core material may be any three-dimensional shape, in the case of forming a single film of boron
or beryllium, a film of boron or beryllium is formed by PVD using ionized particles. In view of the
moldability of the substrate and the separability of the substrate, it is effective to use one having
ribs distributed radially from the center and having an isotropic distribution density. The
manufacturing method of the present invention will be described. In general, the surface tension
of the lattice defect 9 in the film formed by the PVD method. It is known that internal stress
remains in the produced film due to various factors such as phase dislocation, and this stress
causes warpage or distortion in the produced film. In particular, in the vapor phase growth
method with ion particles, the generation of stress is remarkable due to the impact embedding of
ions. In order to reduce such internal stress, a method of performing vapor phase growth while
heating the substrate is used, but many limitations are imposed to obtain a flat product film free
of warpage and distortion. For example, in the case of the formation of a boron film, according to
the inventors' experience, a film with a fairly good flatness can be obtained when the substrate is
formed while heating to a temperature of 500 ░ C. or more. In addition to heat distortion, the
substrate is deformed by heat, and degassing is severe due to the temperature rise from the
heating part, the substrate, and the wall of the apparatus, and the gas pressure atmosphere
condition during generation is limited. Cause a decrease in Further, when using a substrate drive
mechanism such as a planetary, there are problems in the design of the device such as the heat
resistance of the rotation mechanism and the capacity of the heating device (infrared heating
etc.), making stable operation difficult. On the other hand, since the production method according
to the present invention does not require the above-described substrate addition and heating
apparatus, the production apparatus can be simplified and a stable operation state can be
obtained, and low cost and excellent mass production It has the advantage of being able to
The mechanism by which the residual stress of the formed film is controlled by the present
invention is considered to be due to the following effects. One of them is the depth to which the
ions are embedded in the formed film and the damage given to the formed film with the film
thickness by the change of the kinetic energy of the ions incident on the formed film, and the
distribution is directional as the whole formed film Indicates Also, since most of the energy of ion
bombardment disappears as heat, considering the surface of the formed film microscopically, the
portion bombarded with ion bombardment will be subjected to thermal bombardment with a
very high energy density, so that a thin film Equivalent to annealing simultaneously during the
formation of And, by changing the amount of ions and kinetic energy, the annealing conditions
are considered to change, and the amount and directionality of residual stress are considered to
change. When controlling the warpage of the formed film according to the present invention, the
amount of energy of the ions becomes a problem, and generally the control effect changes
depending on the mass of the ions, the energy upon incidence to the substrate, the amount of
ions, etc. , Ionization method, generation condition, product substance, substrate material. The
effective condition range is limited by the shape and the like. Hereinafter, the present invention
will be described in detail by way of examples. Example 1 A radially corrugated substrate having
parallel ribs each 1 // 6 times was produced by pressure molding a 60 ?m thick titanium foil,
and the surface of this substrate was subjected to electron beam evaporation using a DC ion
plating apparatus. A 15 ?m thick boron layer is formed, and after the formation of the boron
layer, the titanium substrate is subjected to 0.6 to 1. It was dissolved and removed with a
hydrofluoric acid solution with a concentration of o% to prepare a boron core material having a
diameter of 2 a mm and a height of about 0.91 nm. On the other hand, in parallel with this core
material forming process, the substrate surface of a 30 ?m thick titanium flat plate is covered
with a mask material having a hole of 28 m + 1 in diameter, and is thickened on the substrate by
electron beam evaporation using a DC ion plating apparatus. After forming a 16 ?m boron layer,
the substrate is dissolved away by chemical etching and the diameter 2811. A 16 ?m thick
boron skin material was produced. Next, an adhesive is applied to one side of the skin material,
and then the skin material is thermocompression bonded to both sides of the core material at a
temperature of 2oo to 230 ░ C. 1 pressure 1 to 2 xy / c 4 tv conditions, diameter 287 ffll,
thickness A flat plate of about 1 inch was produced. As shown in FIG. 2, the DC ion plating
apparatus used in the core material and skin material formation process arranges the substrate 2
and the crucible 4 opposite to each other in the purger 1 having an exhaust system, and in the
vicinity of the crucible 4 The thermal electron acceleration electrode 3 and the electron beam
gun 5 are disposed, and the thermal electron acceleration power source 6 for the thermal
electron acceleration electrode 3 and an ion acceleration power source 7 as a power source for
the substrate 2 are provided.
Then, boron 8 as an evaporation source was placed in the crucible 4. At this time, the grating
conditions of the skin material and the core material are as follows. In FIG. 2, boron was
evaporated in an atmosphere of 1 to 3 x 10 'Torr by electron beam evaporation. At this time, 70
V was applied to the thermion accelerating electrode 3 to accelerate the thermions emitted from
the boron crucible 4 to collide with the evaporated particles of boron to ionize the boron.
Further, during the formation of the boron film, a voltage of 00.5 KV was applied to the substrate
2 for 2 minutes from the beginning of the formation, and thereafter, the voltage was lowered to
00.1 KV and pumping was performed for 20 minutes. Thus, as shown in FIG. 1, a speaker
diaphragm was constructed in which the skin material 12 was bonded to both sides of the radial
corrugated core 11 having parallel ribs every 1 // 6 times. In this diaphragm, the warp due to the
residual stress was small on both the skin material and the core material, and it was possible to
bond without breaking at the time of heat and pressure. The first resonance frequency was 23.9
KH2. Comparative Example 1 An isotropic density distribution type aluminum honeycomb core
having a cell thickness of 20 ?m and a cell height of 0.9 and having 80 cells was produced, and
15 ?m in thickness and diameter 281IIII + were produced in the same manner as in the
example. Of the boron skin material is thermocompression bonded at a temperature of 200 to
230 ░ C. 9 pressure of 1 to 2 Kl '/ ctM, and has a diameter of 28 mm and a thickness of about 1
m11! The flat diaphragm of was produced. The primary resonance frequency of this diaphragm
was 18.91 q (z. Comparative Example 2 An isotropic density distribution type aluminum
honeycomb core having a cell thickness of 20 ?m, a cell height of o, and 9 ? +80 cells was
prepared, and an aluminum skin material having a thickness of 20 ?m and a diameter of 28 ?m
was prepared on both sides thereof. Temperature 200-230 ░ C. Thermocompression bonding
under conditions of pressure 1 to 2 sand 44, diameter 28 mm. A flat diaphragm having a
thickness of about 1111 was produced. The primary resonance frequency of this diaphragm was
11.5 KH2. In the above description, both the core material and the skin material are formed of a
single film of boron, but it may be IJ IJium. Moreover, it goes without saying that the laminate
can be used as a skin material and a core material without separating the substrate. As described
above in detail, according to the present invention, it is possible to improve the resonance
frequency which was difficult in the conventional aluminum honeycomb core, and eliminate the
high-order distortion peak generated at the resonance point of the speaker outside the audible
band. The same effect can also be obtained. Furthermore, it has the advantage of being able to
simplify the manufacturing process of the honeycomb core, which conventionally required many
man-hours and equipment, and to improve the productivity.
Brief description of the drawings
FIG. 1 shows an embodiment of the speaker diaphragm according to the present invention, in
which M is a partially cutaway front view, B is a sectional view, and FIG. 2 is a DC ion sheet for
obtaining the skin material and core material of the same. It is a schematic block diagram of a
rating device.
1 ...... Peruja, 2 ...... substrate, 3 ...... thermal electron accelerator, 4 ...... Boronrutsubo, 6 ......
electron beam guns, 6 ииииии Thermal electron acceleration power source, 7 иии-Ion acceleration
power source Name of Agent Attorney Nakao Toshio 1 ??
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