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JPS58204697

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DESCRIPTION JPS58204697
[0001]
The present invention relates to an acoustic diaphragm that is particularly suitable for middle to
high sound, which is made of beryllium and beryllium alloy containing beryllium as a main
component. It is known that a material having a large Young's modulus E and a small density ?,
that is, a material having a large 9-is optimal as the acoustic diaphragm material. However,
beryllium alloys containing beryllium and beryllium as their main components are brittle and
their malleability and workability are poor, so rolling and press forming at room temperature are
almost impossible. Therefore, as a method of manufacturing this type of diaphragm, means such
as hot rolling, hot press forming and vacuum deposition were used. Among them, in the case of
the hot rolling / press forming method, as shown in FIG. 1, first, beryllium ingot A is finely
chipped B in the first step, and the chipped in this way is crushed c in the second step. Sieve it as
a powder of 200 mesosieges or less, and set it as about 31 ░ C.-lilium powder. As described
above, a beryllium powder is made into a hot press block F of beryllium by a vacuum press E as a
41st J. After this hot press block F is welded with a plate of stainless steel or the like and welded
at its periphery, hot rolling G is repeated as the fifth step, and after finishing to a desired
thickness, the desired thickness is obtained by hot pressing. It was finished in the diaphragm
shape. The diaphragm thus obtained has a high content of impurities such as beryllium oxide.
Further, beryllium tends to exhibit a crystal structure in which the (0002) plane is mainly parallel
to the surface of the diaphragm because the (IOTO) plane and the (0002) plane are slip planes.
The diaphragm obtained by the vacuum deposition method differs depending on the deposition
conditions such as the substrate material, substrate temperature, evaporation rate, degree of
vacuum, and the crystal structure is such that the (0002) plane is parallel to the diaphragm
surface or (10rl), The faces of (10jo), (1013), (1012) etc. were different. The diaphragm obtained
by the conventional method as described above has sufficient physical values, such as density ?
and Young's modulus E, for acoustic applications, but it is satisfactory but not enough in terms of
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mechanical strength. The present invention was made in order to eliminate the above-mentioned
conventional drawbacks, and the object of the present invention is to provide an acoustic
diaphragm which does not damage physical property values (and has excellent mechanical
strength). Hereinafter, a method of manufacturing the diaphragm of the present invention will be
described together with an apparatus shown in FIG. 1 is a vacuum vessel, and the vacuum vessel
1 has a purity of 99.5% al (') helicopter "" 1.
The landing source 211 is a substrate which is molded in a diaphragm shape of a material such
as Cu, Affi, etc. and is mounted in the rotating planetary jig 4 and set in the vacuum vessel 1. A
heating heater 5 heats the temperature in the vacuum vessel 1 to 400 to 600 ░ C. by the
heating heater 5 to evaporate beryllium from the evaporation source 2 by means of electron
beam heating or the like, i : 1 note! It is for forming a beryllium film on Fi3. First, in order to
manufacture a beryllium diaphragm, first, as a first step, the substrate 3 molded into a
diaphragm shape with a material such as Cu, Af, etc. is attached to the rotary planetary jig 4 and
set, and then the vacuum vessel 1 The inside is evacuated to 10 ? ? ? to 10 ? (Torr). As a
second step, the inside of the vacuum vessel 1 is heated by the heater 5 to heat the surface
temperature of the substrate 3 to 400 to 600 ░ C., and beryllium is evaporated from the
evaporation source 2 using a means such as electron beam. , Forming a thin beryllium 11I 6 on
the substrate 3; What is important in this process is the deposition rate of beryllium soot to be
about 1 ?m. If the deposition rate is 1 ?m / sin or more, the direction of the crystal 111 will be
random. In order to obtain a crystal structure in which the (11?0) plane is in parallel with the
surface of the diaphragm, the initial evaporation rate needs to be 5000 / llln or less. When a
steel substrate is used, the temperature at the start of vapor deposition in the furnace is
400.degree. C., and the temperature is gradually raised by the melted metal and becomes
approximately 500.degree. C. at the end of vapor deposition. At this time, it is necessary to set
the temperature rise to about 5 to b and the temperature in the furnace in consideration of the
heat resistance of the jig. FIGS. 3 and 4 show Xljl diffraction charts of the beryllium i film 6 when
the initial deposition rate was deposited at 2 to 3 ?m / win and 2000 to 3000 persons / win,
respectively. ? indicates. Of these, in FIG. 3, the (10 TI) plane shows the highest strength, and
each of the (0002), (11 '20), and (1010) planes has considerable strength, and it can be seen that
the crystal structure is random. Also in Fig. 4 (11! 0) It can be seen that the planes are arranged
parallel to the crystal surface at a considerable rate. Then, in the third step, the substrate 3 on
which beryllium is vapor-deposited is taken out from the vacuum chamber it, and then the
substrate 3 is removed using means such as etching to obtain a diaphragm of beryllium. In this
case, when the substrate 3 is formed of copper, nitric acid is used as the etching solution, and
when the substrate 3 is formed of aluminum, the acid or hydroxide (such as lithium) is used as
the etching solution. An alkaline solution is used.
The beryllium diaphragm manufactured in this manner has a Young's modulus of 2.0 to 2.8 О
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101?N / cm and no change from the conventional ? и lithium, but the tensile strength of the
conventionally deposited beryllium is 20 Although it was -30 kg / mnf, it was significantly
improved as 30 иии G O kg / m rd. Also in the case of producing a beryllium alloy thin plate, it is
produced through the respective steps similar to the above-mentioned embodiment. In this case,
aluminum, copper, zinc, titanium, silver and the like are used as helirium alloys as the other
elements to be added to beryllium to be vacuum-deposited on the group l1ii3, and the addition
amount thereof also varies depending on the density of each element However, for example,
within 15 wt% is desirable. In each of the above-described embodiments, although the acoustic
diaphragm has been described, the strength is improved, so that it can be applied to the other
parts of the cuff, three, and eight cows. X 1 wire f), also suitable for 1 easy 1 'tube to
manufacture windows. 1 'no 1-v), 2 double bright (' + 7 'i' ii! 'For Jilk! ?? JJh :, L, i ?, intertamp kneading,)), 1) I ? 's -1 stage 4I from the diaphragm which is oxidized и Lily J ? (1; (! O)
Including impurities of impurities such as 4 и Mu, also U +? O) Because it is formed in parallel to
the surface or 1 'plate parallel to the surface of 1 plate, Young's modulus IF, etc. + h, l) Physically
is I! LT J score 1, not two mechanical strength (K1 or anything ()).
[0002]
Brief description of the drawings
[0003]
Fig. 1 is an example of manufacturing an iL end \ Lilium diaphragm, Fig. 1 is a diagram showing
an example of I <-1 ~-, and Fig. 2 is an embodiment of an 11 + kIJ + plate for acoustic rattan of
the present invention. Fig. 31At and Fig. 4 are the same. The initial deposition rate is 2 to 3 pm,
'min, to a place deposited at 2000 to 3000 person / min. Line diffraction char 1 to 1 to 7 small
squares (Ha 6).
I: vacuum vessel, 2: vapor deposition source, 3: substrate, 4: puno, f-ta ', 1? : I Equipment, 5 и и и и и
и и и и и и thin film of lirium (I) (II) procedure amendment (! 1 shot) 25 November 1945, Secretary
General of Patent Office Kazuo Sugi, Hall 1, Indication of case Showa in 1959 Patent Application
No. 87214 No. 2, name of invention o y, w9 ++, vy 1 Wapa. Diaphant diaphragm 3, relationship
with person making correction Patent applicant address Meguro-ku, Meguro-ku, Tokyo Meguro
4-1 name (5?1)-? ? ? ???? ? ? ????-?? 1-4-4, agent 5 Date of correction
instruction a? phase Year month and day 6, Number of inventions to be increased by correction
2) Figure 8 Contents of correction Circle center of correction as described on a separate sheet
(Notes 5l-81214) 1. Mon-J ,, '; -4 page 1r te ".... And the plurality of openings are formed in
predetermined positions so as to expose the inside IJf 'of the substrate 3. As shown in FIG. Also,
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the jig 4 is moved as the wedge ? and the shaft 8 fc and the heart, respectively. Make
corrections. Form a thin film 6 of IJ IJium on the substrate 3 at 2 ░ [email protected], ? 4, page 15, line 2
and line 16 That there is described as "", - forming a & same lA surface 1 This Beri IJ thin film 6
of the presence of the substrate 3. "?? Correct. [lambda] a #, page 5, line 2 [The steel J is
described is [? J VC corrected. 4. Akira, ai, page 5 line 3, "Ome a ?" is described as "Each barley
? J K corrected. 5. ?-?, page 5 line 8 "must. "Himman, he has a hunter who has a word below.
Jiji, "7:11" 7 gobillium inside substrate 3 inside bacteria (concave in) i (deposition in, external
measurement) (convex ff1) iv steaming f just one bra failure , Attach right plate 3r to the right
tool 4 6 6 2nd district, 3 figures of the temple, and 4th district is corrected like another busy.
Special public outlier Pioneer Corporation Figure 3 (I) (II)
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